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71. 发明授权

US5963327A Total internal reflection electromagnetic radiation beam entry to, and exit from, ellipsometer, polarimeter, reflectometer and the like systems 失效
标题翻译：全内反射电磁辐射束进入和离开椭偏仪，偏振计，反射计等系统
公开(公告)号：US5963327A
公开(公告)日：1999-10-05
申请号：US33694
申请日：1998-03-03
申请人： Ping He , Blaine D. Johs , Craig M. Herzinger
发明人： Ping He , Blaine D. Johs , Craig M. Herzinger
IPC分类号： G01J3/14 , G01J3/447 , G01J4/00
CPC分类号： G01J3/447 , G01J3/14
摘要： Disclosed are laterally compact ellipsometer, polarimeter, reflectometer and the like material system investigating systems, and methods for their use. Input and output optical elements effect changes in orientation, (propagation direction), of a beam of electromagnetic radiation caused to pass therethrough by an essentially total internal reflection therein. In addition, a propagation direction diverted beam of electromagnetic radiation can be simultaneously, optionally, caused to have a phase retardation entered between orthogonal polarization components thereof by at least one of the input and output optical elements. The present invention enables relatively simple investigation of a sample system with a polarized beam of electromagnetic radiation which impinges thereupon at a less than Brewster Angle, small "spot" size effecting angle-of-incidence, with respect to a normal to a surface of an investigated material system.
摘要翻译：公开了横向紧凑型椭圆计，偏振计，反射计等物质系统调查系统及其使用方法。输入和输出光学元件通过其中基本上全内反射而影响通过其中的电磁辐射束的方向（传播方向）的变化。此外，电磁辐射的传播方向转向光束可以同时被选择性地由输入和输出光学元件中的至少一个在其正交偏振分量之间输入相位延迟。本发明使得能够相对简单地研究具有电磁辐射的偏振光束的样品系统，该偏振光束照射在小于布鲁斯特角度的小的“斑点”尺寸上，影响入射角小于相对于调查材料系统。

72. 发明授权

US07362435B1 Method of determining initial thickness value for sample surface layer, and use of splines for fitting ellipsometric data 有权
标题翻译：确定样品表面层初始厚度值的方法，以及使用花键拟合椭偏数据
公开(公告)号：US07362435B1
公开(公告)日：2008-04-22
申请号：US11326060
申请日：2006-01-05
申请人： Blaine D. Johs , Jeffrey S. Hale
发明人： Blaine D. Johs , Jeffrey S. Hale
IPC分类号： G01J4/00
CPC分类号： G01N21/211 , G01B11/0641 , G01N2021/213 , G01N2021/8438 , H01L22/12
摘要： A method of determining a starting value for thickness of the most influential layer in a mathematical model of a sample for use in a data fitting routine, supplemented by the use of ordinary or B-spline polynomials to represent at least one of the real and imaginary parts of optical constants in the mathematical model.
摘要翻译：一种用于在数据拟合程序中使用的样本的数学模型中确定最有影响层的厚度的起始值的方法，其补充在于使用普通或B样条多项式来表示实部和虚部中的至少一个数学模型中光学常数的一部分。

73. 发明授权

US06268917B1 Combined polychromatic electromagnetic beam source system with application to ellipsometers, spectrophotometers and polarimeters 有权
标题翻译：组合多色电磁束源系统应用于椭偏仪，分光光度计和偏光仪
公开(公告)号：US06268917B1
公开(公告)日：2001-07-31
申请号：US09479091
申请日：2000-01-07
申请人： Blaine D. Johs
发明人： Blaine D. Johs
IPC分类号： G01J400
CPC分类号： G01J3/447 , G01J4/00 , G01J2003/2866 , G01N21/211
摘要： Disclosed is a source of polychromatic electromagnetic radiation which, utilizing a beam combiner system, combines beams of polychromatic electromagnetic radiation from a plurality of sources to provide a relatively broad and flattened intensity characteristic vs. wavelength output spectrum, and its application in material system investigation systems, such as ellipsometers, spectrophotometers and polarimeters which comprise a polychromatic source of electromagnetic radiation.
摘要翻译：公开了多色的电磁辐射的源，其中，利用光束组合系统，结合了多色电磁辐射束从多个源，以提供相对宽广的和扁平强度特性与波长的输出频谱，其在材料体系调查系统中的应用，例如包括电磁辐射的多色源的椭圆计，分光光度计和偏振计。

74. 发明授权

US6141102A Single trianglular shaped optical retarder element for use in spectroscopic ellipsometer and polarimeter systems 有权
标题翻译：用于光谱椭偏仪和偏光计系统的单三角形光学延迟器元件
公开(公告)号：US6141102A
公开(公告)日：2000-10-31
申请号：US232257
申请日：1999-01-19
申请人： Blaine D. Johs , Craig M. Herzinger , Steven E. Green
发明人： Blaine D. Johs , Craig M. Herzinger , Steven E. Green
IPC分类号： G01J3/28 , G01J4/00
CPC分类号： G01J4/00 , G01J2003/2866
摘要： Disclosed is a triangular shaped retarder system, for entering retardation between orthogonal components of an electromagnetic beam of radiation. The triangular shaped element, as viewed in side elevation, has first and second sides which project to the left and right and downward from an upper point. A third side is oriented essentially horizontally and is continuous with, and present below, the first and second sides. During use in a spectroscopic ellipsometer/polarimeter system, an entered beam of electromagnetic radiation exits in a propagation direction which is essentially undeviated and undisplaced from the direction of its incidence, even when the retarder system is caused to rotate about the locus of the beam of electromagnetic radiation.
摘要翻译：公开了一种用于在电磁辐射束的正交分量之间输入延迟的三角形延迟器系统。从侧视图看，三角形元件具有从上部向左和向右突出的第一和第二侧面。第三面基本上水平地定向并且与第一和第二面连续并存在于第一和第二面之下。在分光椭偏仪/偏振计系统中使用时，输入的电磁辐射束在传播方向上离开，即传播方向基本上未发生变化，并且从其入射方向未脱离，即使延迟器系统围绕光束电磁辐射。

75. 发明授权

US6084675A Adjustable beam alignment compensator/retarder with application in spectroscopic ellipsometer and polarimeter systems 有权
标题翻译：可调光束对准补偿器/延迟器，适用于分光椭偏仪和偏光计系统
公开(公告)号：US6084675A
公开(公告)日：2000-07-04
申请号：US246888
申请日：1999-02-08
申请人： Craig M. Herzinger , Blaine D. Johs
发明人： Craig M. Herzinger , Blaine D. Johs
IPC分类号： G01J3/28 , G01J4/00 , G01N21/21
CPC分类号： G01J3/447 , G01J4/00 , G01N21/211 , G01J2003/2866
摘要： Disclosed is a compensator/retarder system which allows adjustment to eliminate introduction of significant deviation and/or displacement into the propagation direction of a beam of electromagnetic radiation caused to interact therewith, even when the present invention retarder system is caused to continuously rotate in a rotating compensator ellipsometer system. Also disclosed is a method of calibration of an ellipsometer/polarimeter system which includes a present invention compensator/retarder system.
摘要翻译：公开了一种补偿器/延迟器系统，其允许调节以消除引起与其相互作用的电磁辐射束的传播方向上的显着偏差和/或位移，即使本发明的延迟器系统在旋转中连续旋转补偿椭圆仪系统。还公开了一种校准椭偏仪/偏振计系统的方法，其包括本发明的补偿器/延迟器系统。

76. 发明授权

US6034777A Methods for uncorrelated evaluation of parameters in parameterized mathematical model equations for window retardence, in ellipsometer and polarimeter systems 有权
标题翻译：用于窗延迟的参数化数学模型方程中参数的不相关评估方法，椭偏仪和偏振计系统
公开(公告)号：US6034777A
公开(公告)日：2000-03-07
申请号：US162217
申请日：1998-09-29
申请人： Blaine D. Johs , Craig M. Herzinger
发明人： Blaine D. Johs , Craig M. Herzinger
IPC分类号： G01N21/21
CPC分类号： G01N21/211
摘要： Disclosed is a method for evaluating parameters in parameterized equations for independently calculating retardence entered to orthogonal components in a beam of electromagnetic radiation which is caused to pass through spatially separated input and output windows, by each of said input and output windows. The present invention finds application in ellipsometric investigation of sample systems present in vacuum chambers, wherein a beam of electromagnetic radiation is caused to pass through an input window, interact with a sample system, and exit through an output window, and where it is necessary to separate out the effects of said input and output windows to arrive at sample system characterizing results.
摘要翻译：公开了一种用于评估参数化方程式中的参数的方法，用于通过所述输入和输出窗口中的每一个独立地计算输入到通过空间分离的输入和输出窗口的电磁辐射束中的正交分量的延迟。本发明应用于存在于真空室中的样品系统的椭圆测量研究中，其中使电磁辐射束通过输入窗口，与样品系统相互作用并通过输出窗口离开，并且其中必须分离所述输入和输出窗口的影响以得到样品系统特征结果。

77. 发明授权

US08064055B2 System and method of aligning a sample 有权
标题翻译：校准样品的系统和方法
公开(公告)号：US08064055B2
公开(公告)日：2011-11-22
申请号：US12378400
申请日：2009-02-13
申请人： Martin H. Liphardt , Blaine D. Johs
发明人： Martin H. Liphardt , Blaine D. Johs
IPC分类号： G01J4/00
CPC分类号： G01B11/272 , G01J4/00 , G01N21/211
摘要： A system and method of use thereof that enables determining and setting sample alignment based on the location of, and geometric attributes of a monitored image formed by reflection of an electromagnetic beam from a sample and into an image monitor, which beam is directed to be incident onto the sample along a locus which is substantially normal to the surface of the sample.
摘要翻译：一种其使用的系统及其使用方法，其能够基于由来自样本的电磁波的反射形成的监视图像的位置以及图像监视器的图像监视器的位置以及几何属性来确定和设置样本对准，该波束被定向为入射沿着基本上垂直于样品表面的轨迹到样品上。

78. 发明授权

US07483148B1 Ellipsometric investigation of very thin films 有权
标题翻译：非常薄膜的椭圆测量研究
公开(公告)号：US07483148B1
公开(公告)日：2009-01-27
申请号：US11724849
申请日：2007-03-16
申请人： Blaine D. Johs
发明人： Blaine D. Johs
IPC分类号： G01B11/02 , G01J4/00
CPC分类号： G01N21/211 , G01N2021/213
摘要： Use of spectroscopic data obtained by investigation of a witness sample having a relatively thick dielectric on a surface thereof during deposition of a thin film onto the witness sample and onto a process sample having no, or a relatively thin dielectric on its surface, in characterizing thin film deposited onto the process sample.
摘要翻译：在将薄膜沉积到可见样品上并在其表面上没有或相对薄的电介质的工艺样品上，在表面上利用通过研究具有相对厚的电介质的见证样品获得的光谱数据，薄膜沉积在工艺样品上。

79. 发明授权

US07450231B2 Deviation angle self compensating substantially achromatic retarder 有权
标题翻译：偏差角自补偿基本上消色差延迟器
公开(公告)号：US07450231B2
公开(公告)日：2008-11-11
申请号：US11633138
申请日：2006-12-04
申请人： Blaine D. Johs , Steven E. Green , Craig M. Herzinger , Duane E. Meyer
发明人： Blaine D. Johs , Steven E. Green , Craig M. Herzinger , Duane E. Meyer
IPC分类号： G01J4/00 , G02B5/30
CPC分类号： G02B5/3083 , G01J1/0407 , G01N21/211 , G01N2021/213 , G02B26/06
摘要： A substantially achromatic multiple element compensator system for use in wide spectral range (for example, 190-1700 nm) rotating compensator spectroscopic ellipsometer and/or polarimeter systems. Multiple total internal reflections enter retardance into an entered beam of electromagnetic radiation, and the elements are oriented to minimize changes in the net retardance vs. the input beam angle resulting from changes in the position and/or rotation of the system of elements.
摘要翻译：用于宽光谱范围（例如，190-1700nm）旋转补偿光谱椭偏仪和/或偏振计系统的基本上无色多元素补偿器系统。多个全内反射进入进入的电磁辐射束的延迟，并且这些元件被定向成使得由延迟元件的位置和/或旋转的变化而导致的净延迟与输入光束角的变化最小化。

80. 发明授权

US07167241B1 Dielectric function of thin metal films determined by combined transmission spectroscopic ellipsometry and intensity measurements 有权
标题翻译：通过组合透射光谱椭偏仪和强度测量法确定薄金属膜的介电函数
公开(公告)号：US07167241B1
公开(公告)日：2007-01-23
申请号：US10884718
申请日：2004-07-04
申请人： Blaine D. Johs , Gregory K. Pribil
发明人： Blaine D. Johs , Gregory K. Pribil
IPC分类号： G01J4/00 , G01B11/06
CPC分类号： G01B11/0641 , G01N21/211
摘要： Determination of thin metal film dielectric function and layer thicknesses using simultaneous transmission spectroscopic ellipsometric (SE) and transmission intensity (T) measurements obtained in-situ to break correlation between thickness and optical constants of very thin absorbing films, preferably using only A.C. Components of ellipsometric and intensity characterizing electromagnetic radiation which transmits through said substrate and enters a detector.
摘要翻译：使用现场获得的同时透射光谱椭偏（SE）和透射强度（T）测量来确定薄金属膜介电函数和层厚度，以破坏非常薄的吸收膜的厚度和光学常数之间的相关性，优选仅使用椭圆的交流分量以及表征通过所述衬底并进入检测器的电磁辐射的强度。

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