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1. 发明授权

US11852590B1 Systems and methods for metrology with layer-specific illumination spectra 有权
公开(公告)号：US11852590B1
公开(公告)日：2023-12-26
申请号：US16552107
申请日：2019-08-27
申请人： KLA-Tencor Corporation
发明人： Amnon Manassen , Daria Negri , Andrew V. Hill , Ohad Bachar , Vladimir Levinski , Yuri Paskover
IPC分类号： G01N21/88 , G01B11/27 , G01N21/33 , G01N21/3563 , G01N21/84 , G01N21/95
CPC分类号： G01N21/8806 , G01B11/272 , G01N21/33 , G01N21/3563 , G01N21/8422 , G01N21/9505 , G01B2210/56 , G01N2021/8438 , G01N2201/06113
摘要： A metrology system may include an imaging sub-system including one or more lenses and a detector to image a sample, where the sample includes metrology target elements on two or more sample layers. The metrology system may further include a controller to determine layer-specific imaging configurations of the imaging sub-system to image the metrology target elements on the two or more sample layers within a selected image quality tolerance, where each layer-specific imaging configuration includes a selected configuration of one or more components of the imaging sub-system. The controller may further receive, from the imaging sub-system, one or more images of the metrology target elements on the two or more sample layers generated using the layer-specific imaging configurations. The controller may further provide a metrology measurement based on the one or more images of the metrology target elements on the two or more sample layers.

2. 发明公开

US20230366829A1 METHOD FOR EVALUATING ADHESION RELIABILITY AND HEAT RADIATION PERFORMANCE OF COMPOSITE, AND COMPOSITE 审中-公开
公开(公告)号：US20230366829A1
公开(公告)日：2023-11-16
申请号：US18246096
申请日：2021-09-28
申请人： Denka Company Limited
发明人： Yusuke WAKUDA , Yoshitaka MINAKATA , Shinya SAKAGUCHI , Tomoya YAMAGUCHI , Koki IKARASHI , Koji NISHIMURA
IPC分类号： G01N21/84 , G01N21/64
CPC分类号： G01N21/8422 , G01N21/64 , G01N2021/8411 , G01N2021/8438
摘要： One aspect of the present disclosure is a method for evaluating adhesiveness performance and heat radiation performance of a composite including a porous sintered ceramic component and a semi-cured product of a resin filled into pores of the sintered ceramic component, including a step of emitting ultraviolet rays to the surface of the semi-cured product of the composite; a step of measuring an emission intensity of fluorescence generated from the semi-cured product; and a step of evaluating adhesiveness performance and heat radiation performance of the composite using the value of the emission intensity.

3. 发明授权

US11740185B2 Method for detecting defects in thin film layers 有权
公开(公告)号：US11740185B2
公开(公告)日：2023-08-29
申请号：US17274302
申请日：2019-08-29
申请人： MEMSSTAR LIMITED
发明人： Anthony O'Hara , Daniel Drysdale
IPC分类号： G01N21/84 , G01N21/88 , H01L21/3213 , H01L21/66
CPC分类号： G01N21/8422 , G01N21/8851 , G01N2021/8427 , G01N2021/8438 , H01L21/32135 , H01L22/24
摘要： A method of detecting defects in a structure sample comprising a thin film layer and a sacrificial later is disclosed. The method comprises exposing the thin film layer to a vapour phase etchant, obtaining an image of the thin film layer and analysing the image. The vapour phase etchant enhances any defects present in the thin film layer by passing through the defect and etching a cavity within the sacrificial layer. The cavity undercuts the thin film layer resulting in a stress region surrounding the defect. Defects which were not originally detectable may be made detectable after exposure to the vapour phase etchant. A vapour phase etchant has the advantage of being highly mobile such that it can access defects that a liquid phase etchant might not. Furthermore, unlike a liquid phase etchant, a vapour phase etchant can be used to test a sample non-destructively.

4. 发明申请

US20170212056A1 ARRANGEMENT FOR DETERMINING PROPERTIES AND/OR PARAMETERS OF A SAMPLE AND/OR OF AT LEAST ONE FILM FORMED ON THE SURFACE OF A SAMPLE 审中-公开
公开(公告)号：US20170212056A1
公开(公告)日：2017-07-27
申请号：US15321465
申请日：2015-06-22
申请人： FRAUNHOFER-GESELLSCHAFT ZUR FOERDERUNG ANGEWANDTEN FORSCHUNG E.V.
发明人： Wulf GRAEHLERT , Philipp WOLLMANN , Florian GRUBER
IPC分类号： G01N21/84 , G01N21/31 , G01B11/06 , G01N21/21
CPC分类号： G01N21/8422 , G01B11/0625 , G01N21/21 , G01N21/31 , G01N2021/8438
摘要： The invention relates to an arrangement for determining properties and/or parameters of a sample and/or of at least one film formed on a surface of a sample. In this respect, a plurality of detectors are arranged in a row arrangement or in a row and column arrangement and are configured for the spatially resolved spectral analysis of electromagnetic radiation within a wavelength interval. The detectors are connected to an electronic evaluation unit and are arranged such that electromagnetic radiation emitted by a broadband radiation source is incident onto the detectors either after a reflection at the surface of the sample or at a film formed on the sample or at the surface of a film within the sample and/or after passing through a sample transparent to the electromagnetic radiation. The irradiation takes place such that a homogenous intensity of the electromagnetic radiation is observed on a surface from which the electromagnetic radiation is reflected or is transmitted by the surface. The electronic evaluation unit is configured such that the measured signals of the detectors detected with spatial and wavelength resolution within a wavelength interval are compared with a theoretical, wavelength-dependent curve of the respective radiation intensities obtained by simulation or with a curve obtained by a calibration at at least one known sample to obtain a statement for determining at least one property or at least one parameter of the sample or at least one film formed on or at the sample for the detected measurement positions and thus to obtain the spatially resolved distribution of at least one property or of at least one parameter of the sample or of at least one film formed on or at the sample.

5. 发明申请

US20170205377A1 APPARATUS AND METHODS FOR PROBING A MATERIAL AS A FUNCTION OF DEPTH USING DEPTH-DEPENDENT SECOND HARMONIC GENERATION 审中-公开
公开(公告)号：US20170205377A1
公开(公告)日：2017-07-20
申请号：US15324100
申请日：2015-07-13
申请人： Vanderbilt University
发明人： Joy Garnett , Halina Krzyzanowska , Norman H. Tolk
IPC分类号： G01N29/24 , G01N29/44 , G01N29/04
CPC分类号： G01N29/2418 , G01N21/636 , G01N21/8422 , G01N21/9505 , G01N29/043 , G01N29/4454 , G01N2021/8438 , G01N2021/8477
摘要： A method for non-invasively probing at least one physics property of a solid material. In one embodiment, the method has the steps of splitting a photon beam into a first photon beam and a second photon beam, exposing the solid material to the first photon beam to generate a coherent acoustic phonon wave in the solid material at time t, and exposing the solid material to the second photon beam at a time t+Δt, where t+Δt≧t, to generate corresponding second harmonic generation signals, where from the corresponding second harmonic generation signals, the at least one physics property of the solid material is determinable.

6. 发明授权

US09595096B2 Composite inspection and structural check of multiple layers 有权
标题翻译：复合检查和多层结构检查
公开(公告)号：US09595096B2
公开(公告)日：2017-03-14
申请号：US14202376
申请日：2014-03-10
申请人： The Boeing Company
发明人： Steven A. Dorris , Arun Ayyagari , Jonathan Blake Vance , David E. Corman , James W. Fonda , Roger W. Engelbart , Philip L. Freeman
IPC分类号： G06K9/00 , G06T7/00 , G01N21/84 , G01N21/95 , B29C70/38
CPC分类号： G06T7/0006 , B29C70/38 , G01N21/8422 , G01N21/95 , G01N2021/8438 , G01N2021/8472 , G06T7/0008 , G06T2207/30124 , G06T2207/30136
摘要： Provided are methods, systems, and computer program products for inspecting composite items. Specifically, a method involves analyzing an image of or, more generally, data characterizing condition of a top layer, which is disposed over a bottom layer. The method also involves performing a structural integrity check based on any anomalies detected in the top layer during this analysis as well as based on any anomalies previously detected in the bottom layer. As such, this structural integrity check accounts for characteristics of multiple layers, in some embodiments, all layers applied up to point of this inspection. In addition to the detected anomalies, the structural integrity check may account for previously performed repairs. The structural integrity check may be performed on individual portions of a composite item while, for example, other portions continue receiving a new composite layer, which may be referred to as an inline inspection.
摘要翻译：提供了用于检查复合材料的方法，系统和计算机程序产品。具体来说，一种方法包括分析设置在底层上的顶层的图像或更一般的数据表征状态。该方法还涉及基于在该分析期间在顶层中检测到的任何异常以及基于先前在底层中检测到的任何异常来执行结构完整性检查。因此，这种结构完整性检查考虑了多层的特征，在一些实施例中，所有层应用到该检查的点。除了检测到的异常之外，结构完整性检查可能会考虑以前执行的维修。可以在复合物品的各个部分上执行结构完整性检查，而例如其他部分继续接收新的复合层，其可以被称为在线检查。

7. 发明申请

US20160282509A1 MANUFACTURING PROCESS FOR INTEGRATED COMPUTATIONAL ELEMENTS 审中-公开
标题翻译：集成计算元素的制造过程
公开(公告)号：US20160282509A1
公开(公告)日：2016-09-29
申请号：US14414456
申请日：2014-03-21
申请人： HALLIBURTON ENERTY SERVICES, INC.
发明人： David L. Perkins , Michael T. Pelletier , James M. Price
IPC分类号： G01V8/10 , C23C16/455 , E21B49/08
CPC分类号： B05D7/50 , B32B38/0004 , C23C16/45525 , C23C18/165 , E21B49/08 , G01J2003/1213 , G01J2003/1282 , G01N21/274 , G01N21/31 , G01N21/3577 , G01N21/3581 , G01N21/359 , G01N21/645 , G01N21/65 , G01N21/85 , G01N2021/3129 , G01N2021/3133 , G01N2021/317 , G01N2021/3177 , G01N2021/8438 , G01V8/10 , G02B27/0012
摘要： Disclosed are methods of fabricating an integrated computational element for use in an optical computing device. One method includes providing a substrate that has a first surface and a second surface substantially opposite the first surface, depositing multiple optical thin films on the first and second surfaces of the substrate via a thin film deposition process, and thereby generating a multilayer film stack device, cleaving the substrate to produce at least two optical thin film stacks, and securing one or more of the at least two optical thin film stacks to a secondary optical element for use as an integrated computational element (ICE).
摘要翻译：公开了制造用于光学计算设备的集成计算元件的方法。一种方法包括提供具有第一表面和与第一表面基本相对的第二表面的基板，通过薄膜沉积工艺在基板的第一和第二表面上沉积多个光学薄膜，从而产生多层膜堆叠装置，切割所述衬底以产生至少两个光学薄膜叠层，以及将所述至少两个光学薄膜叠层中的一个或多个固定到用于集成计算元件（ICE）的次级光学元件。

8. 发明申请

US20160230270A1 TEMPERATURE-DEPENDENT FABRICATION OF INTEGRATED COMPUTATIONAL ELEMENTS 审中-公开
标题翻译：一体化计算元素的温度依赖性制造
公开(公告)号：US20160230270A1
公开(公告)日：2016-08-11
申请号：US14390646
申请日：2013-12-30
申请人： Halliburton Energy Services, Inc.
发明人： David L. PERKINS , Robert Paul FREESE , Christopher Michael JONES , Richard Neal GARDNER
IPC分类号： C23C14/54 , G01N21/84 , G01N21/31 , G01N21/33 , E21B49/08 , C23C14/50 , G01N33/28
CPC分类号： C23C14/547 , C23C14/50 , C23C14/541 , C23C14/545 , E21B49/08 , G01N21/31 , G01N21/33 , G01N21/84 , G01N21/8422 , G01N33/2823 , G01N2021/8411 , G01N2021/8438
摘要： Technologies are described for controlling temperature of ICEs during ICE fabrication. In one aspect, a method includes receiving a design of an integrated computational element (ICE), the ICE design including specification of a substrate and a plurality of layers, their respective target thicknesses and complex refractive indices, where complex refractive indices of adjacent layers are different from each other, and where a notional ICE fabricated in accordance with the ICE design is related to a characteristic of a sample; forming at least some of the plurality of layers of an ICE in accordance with the ICE design; and controlling, during the forming, a temperature of the formed layers of the ICE such that the ICE, when completed, relates to the characteristic of the sample.
摘要翻译：描述了在ICE制造期间控制ICE温度的技术。一方面，一种方法包括接收集成计算元件（ICE）的设计，所述ICE设计包括基板和多个层的规格，它们各自的目标厚度和复折射率，其中相邻层的复折射率为根据ICE设计制造的名义ICE与样品的特性有关; 根据ICE设计形成ICE的多个层中的至少一些层; 并且在形成期间控制ICE的成形层的温度，使得ICE在完成时与样品的特性相关。

9. 发明授权

US09409278B2 Method and system for the ply-by-ply machining of a component made of composite material, by applying energy 有权
标题翻译：通过施加能量对由复合材料制成的部件进行层间加工的方法和系统
公开(公告)号：US09409278B2
公开(公告)日：2016-08-09
申请号：US14394775
申请日：2013-04-12
申请人： JEDO TECHNOLOGIES
发明人： Michel Deleris , François Cenac
IPC分类号： B24C1/04 , B29C73/26 , B29C73/10 , G01N21/88 , G01N21/84
CPC分类号： B24C1/04 , B29C73/10 , B29C73/26 , B29C2073/264 , G01N21/8806 , G01N2021/8438 , G01N2021/8472
摘要： The invention relates to machine a component made of composite material in order to eliminate singularities, defects or damage to the component using a method that is repeatable and adaptable. To do this, it is proposed that the defects and their type be identified by image processing of the surface of the component and that the local machining rates at which the plies are machined be regulated at the function of this identification. According to one embodiment, a system (10) for the ply-by-ply machining of defects of a component made of composite material includes a numerical data processing unit (1) combined with a sweep control (2) that commands the sweep of a high-pressure water jet machine (20), and an image formation assembly (3) including an image capturing device (30, 31) connected with the numerical processing unit (1). The processing unit (1) includes regulating devices (11, 13) indexing local sweep rates, by convergence of brightness levels (NB) from the successive sweeps, these being formed by the image capturing assembly (3) toward making the brightness uniform according to a model (Mr) correlating brightness to ply state typology identification (BT) that can be supplied by a library (4). The correlation data (BT) and brightness levels (NB) are stored in memory modules (12, 14) of the processing unit (1).
摘要翻译：本发明涉及机器由复合材料制成的部件，以便使用可重复和可适应的方法消除零件的奇异性，缺陷或损坏。为此，提出了通过对部件表面的图像处理来识别缺陷及其类型，并且根据该识别功能来调节层加工的局部加工速率。根据一个实施例，用于对由复合材料制成的部件的缺陷进行层间加工的系统（10）包括数字数据处理单元（1），其与扫描控制（2）组合，所述扫描控制（2）命令扫描高压喷水机（20）和包括与数字处理单元（1）连接的图像捕获装置（30,31）的图像形成组件（3）。处理单元（1）包括调节装置（11,13），其通过从相继的扫描中收集亮度水平（NB）来调整局部扫描速率，这些扫描由图像捕获组件（3）形成，以根据图书馆提供的模型（Mr）相关亮度与层状态类型学识别（BT）可以提供（4）。相关数据（BT）和亮度级（NB）被存储在处理单元（1）的存储器模块（12,14）中。

10. 发明申请

US20160102973A1 METHOD AND SYSTEM FOR DETERMINING AND VERIFYING PLY ORIENTATION OF A COMPOSITE LAMINATE 有权
标题翻译：用于确定复合层压板的方位和方法的方法和系统
公开(公告)号：US20160102973A1
公开(公告)日：2016-04-14
申请号：US14158762
申请日：2014-01-17
申请人： The Boeing Company
发明人： Thomas J. Gonze , James R. Kendall , David C. Jackson
IPC分类号： G01B11/27
CPC分类号： G01B11/272 , B29C70/30 , B29C70/54 , G01N21/898 , G01N2021/8438 , G01N2021/8472
摘要： A method for determining and verifying ply orientation of composite laminates includes performing a first scan of a prepared edge of a composite laminate using an off-axis inclined light source directing light at a first acute angle to a first area on the prepared edge to produce a first scanned image; rotating an orientation of the off-axis inclined light source relative to the prepared edge, such that the off-axis inclined light source directs light at a second acute angle symmetrically opposite the first acute angle; and performing a second scan of the prepared edge using the off-axis inclined light source directing light at the second acute angle to the first area on the prepared edge to produce a second scanned image. The method includes comparing the first and second scanned images to determine a ply orientation of each ply, and verifying the ply orientation against a baseline ply orientation.
摘要翻译：用于确定和验证复合层压板的层取向的方法包括使用偏光倾斜光源对复合层压板的预制边缘进行第一次扫描，所述偏轴倾斜光源将光以与所述准备好的边缘上的第一区域成一个第一锐角第一扫描图像; 旋转所述离轴倾斜光源相对于所述准备好的边缘的取向，使得所述离轴倾斜光源以与第一锐角对称的第二锐角引导光; 以及使用所述离轴倾斜光源对所述准备好的边缘进行第二扫描，所述离轴倾斜光源将所述第二锐角处的光指向所述准备好的边缘上的所述第一区域，以产生第二扫描图像。该方法包括比较第一扫描图像和第二扫描图像以确定每一层的层取向，以及基于基线层取向验证层取向。

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