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    • 73. 发明授权
    • Power semiconductor device
    • 功率半导体器件
    • US5554862A
    • 1996-09-10
    • US183364
    • 1994-01-19
    • Ichiro OmuraMitsuhiko KitagawaKazuya NakayamaMasakazu Yamaguchi
    • Ichiro OmuraMitsuhiko KitagawaKazuya NakayamaMasakazu Yamaguchi
    • H01L29/745H01L29/749H01L29/74H01L31/111
    • H01L29/7455H01L29/749
    • In a power semiconductor device, an n-base is formed on a p-emitter layer. On the n-base layer, a p-base layer, an n-emitter layer, and a high-concentration p-layer are formed laterally. In the p-base layer, an n-source layer is formed a specified distance apart from the n-emitter layer. In the n-emitter layer, a p-source layer is formed a specified distance apart from the high-concentration p-layer. A first gate electrode is formed via a first gate insulating film on the region sandwiched by the n-source layer and the n-emitter layer. A second gate electrode is formed via a second gate insulating film on the region sandwiched by the high-concentration p-layer and the p-source layer. On the p-emitter layer, a first main electrode is formed. A second main electrode is formed so as to be in contact with the p-base layer, the n-source layer, and the p-source layer.
    • 在功率半导体器件中,在p发射极层上形成n基极。 在n基层上,横向形成p基层,n发射极层和高浓度p层。 在p基层中,n型源层与n型发射极层隔开规定的距离。 在n-发射极层中,与高浓度p层隔开规定的距离形成p源层。 在由n源层和n发射极层夹在的区域上经由第一栅极绝缘膜形成第一栅电极。 在由高浓度p层和p源层夹着的区域上经由第二栅极绝缘膜形成第二栅电极。 在p发射极层上形成第一主电极。 第二主电极形成为与p基层,n源层和p源层接触。
    • 74. 发明授权
    • Semiconductor device
    • 半导体器件
    • US07915617B2
    • 2011-03-29
    • US11478623
    • 2006-07-03
    • Tsuneo OguraIchiro Omura
    • Tsuneo OguraIchiro Omura
    • H01L31/0312
    • H01L29/7802H01L21/26586H01L29/0619H01L29/0696H01L29/086H01L29/0869H01L29/0878H01L29/1033H01L29/1045H01L29/105H01L29/1095H01L29/1608H01L29/41766H01L29/42368H01L29/66068H01L29/7397H01L29/7813H01L29/7828
    • A semiconductor device comprises: a first semiconductor layer of silicon carbide of a first conductivity type; a second semiconductor layer of silicon carbide of a second conductivity type selectively provided on the first semiconductor layer; a main electrode layer of silicon carbide of the first conductivity type selectively provided on the second semiconductor layer; a gate insulating film provided on the second semiconductor layer; a gate electrode formed on the gate insulating film; and a third semiconductor layer of the first conductivity type intervening a current path which is formed between the main electrode layer and the first semiconductor layer when an ON voltage is applied to the gate electrode. The third semiconductor layer is selectively provided on the first semiconductor layer and is adjacent to the second semiconductor layer. A doping density of the third semiconductor layer is higher than a doping density of the first semiconductor layer.
    • 半导体器件包括:第一导电类型的碳化硅的第一半导体层; 选择性地设置在所述第一半导体层上的第二导电类型的碳化硅的第二半导体层; 选择性地设置在第二半导体层上的第一导电类型的碳化硅主电极层; 设置在所述第二半导体层上的栅极绝缘膜; 形成在栅极绝缘膜上的栅电极; 以及第一导电类型的第三半导体层,当在栅电极施加导通电压时,插入形成在主电极层和第一半导体层之间的电流路径。 第三半导体层选择性地设置在第一半导体层上并与第二半导体层相邻。 第三半导体层的掺杂浓度高于第一半导体层的掺杂密度。
    • 78. 发明申请
    • VERTICAL SEMICONDUCTOR DEVICE
    • 垂直半导体器件
    • US20090095977A1
    • 2009-04-16
    • US12209690
    • 2008-09-12
    • Masanori TSUKUDAIchiro Omura
    • Masanori TSUKUDAIchiro Omura
    • H01L29/739
    • H01L29/7397H01L29/0619
    • In a vertical semiconductor device including a first base layer of a first conductivity type, second base layers of a second conductivity type, emitter layer of the first conductive type and gate electrodes which are formed at one main surface of the first base layer and including a buffer layer of the first conductivity type, a collector layer of the second conductivity type and a collector electrode which are formed at the other main surface of the first base layer, an electric field relaxing structure selectively formed outside from the second base layers and the collector layer is formed expect the region below the electric field relaxing structure.
    • 在包括第一导电类型的第一基底层,第二导电类型的第二基底层,第一导电类型的发射极层和形成在第一基底层的一个主表面处的栅电极的垂直半导体器件中, 第一导电类型的缓冲层,第二导电类型的集电极层和形成在第一基极层的另一个主表面上的集电极,选择性地从第二基极层和集电体形成的电场缓和结构 形成层希望低于电场松弛结构的区域。
    • 80. 发明授权
    • Semiconductor device and method of fabricating the same
    • 半导体装置及其制造方法
    • US07462909B2
    • 2008-12-09
    • US11453997
    • 2006-06-16
    • Wataru SaitoIchiro Omura
    • Wataru SaitoIchiro Omura
    • H01L29/76
    • H01L29/7802H01L29/0634H01L29/1095H01L29/66712
    • First semiconductor pillar layers of a first conduction type and second semiconductor pillar layers of a second conduction type are arranged on a first semiconductor layer of the first conduction type laterally, periodically and alternately at a first period to form a first pillar layer. Third semiconductor pillar layers of the first conduction type and fourth semiconductor pillar layers of the second conduction type are arranged on the first pillar layer laterally, periodically and alternately at a second period smaller than the first period to form a second pillar layer. A semiconductor base layer of the second conduction type is formed on a surface of the fourth semiconductor pillar layer. A semiconductor diffused layer of the first conduction type is formed on a surface of the semiconductor base layer.
    • 第一导电类型的第一半导体柱层和第二导电类型的第二半导体柱层被布置在第一导电类型的第一半导体层上,在第一周期上周期性地和周期性地交替地形成第一柱层。 第二导电类型的第一导电类型的第三半导体柱层和第二导电类型的第四半导体柱层在第一柱层上以比第一周期小的周期性地交替布置在第一柱层上,以形成第二柱层。 在第四半导体柱层的表面上形成第二导电类型的半导体基底层。 在半导体基底层的表面上形成第一导电类型的半导体扩散层。