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    • 72. 发明申请
    • SHEET FOR MOUNTING POLISHING WORKPIECE AND METHOD FOR MAKING THE SAME
    • 安装抛光工具的表格及其制作方法
    • US20090252876A1
    • 2009-10-08
    • US12482330
    • 2009-06-10
    • Chung-Chih FengI-Peng YaoChen-Hsiang Chao
    • Chung-Chih FengI-Peng YaoChen-Hsiang Chao
    • B05D5/02
    • B24B37/30B24B41/068
    • The present invention relates to a sheet for mounting a polishing workpiece. The sheet comprises a substrate and a surface layer. The substrate has a surface. The surface layer is located on the surface of the substrate, with no hole structure existing in the interior thereof, and has a surface and a slightly rough layer. The slightly rough layer is located on the surface of the surface layer to carry and mount the polishing workpiece, with no hole structure existing in the interior thereof. Accordingly, when the polishing workpiece contacts the slightly rough layer, the air therebetween is easily vented out via the slightly rough layer, without the phenomenon of air wrapping, which increases the adsorption force between the polishing workpiece and the sheet.
    • 本发明涉及一种用于安装抛光工件的片材。 片材包括基底和表面层。 基板具有表面。 表面层位于基板的表面上,其内部没有孔结构,并且具有表面和稍微粗糙的层。 稍微粗糙的层位于表层的表面上,以承载和安装抛光工件,其内部没有孔结构。 因此,当研磨工件接触稍微粗糙的层时,它们之间的空气容易通过稍微粗糙的层排出,而没有空气缠绕现象,这增加了研磨工件和片材之间的吸附力。
    • 73. 发明申请
    • POLISHING PAD HAVING SURFACE TEXTURE
    • 具有表面纹理的抛光垫
    • US20080220702A1
    • 2008-09-11
    • US12124594
    • 2008-05-21
    • Chung-Chih FENGI-Peng YAOChen-Hsiang CHAOKun-Cheng SUNG
    • Chung-Chih FENGI-Peng YAOChen-Hsiang CHAOKun-Cheng SUNG
    • B24D11/00
    • B24B37/26
    • The present invention relates to a polishing pad having a surface texture. The surface texture is disposed on the polishing surface of the polishing pad. The surface texture comprises at least one first groove, at least one second groove, and a plurality of holes. The second groove extends from a central portion of the polishing pad to the edge of the polishing pad, and the first groove(s) is intersected with the second groove(s) to form a plurality of intersection points. The holes are disposed at the intersection points, and the depth of the holes is larger than that of the first groove. Thus, the second groove(s) enables impurities suspended in the polishing slurry to be quickly removed from the polishing pad, and the holes can store the polishing slurry to delay the polishing particles in the polishing slurry from departing from the polishing pad.
    • 本发明涉及具有表面纹理的抛光垫。 表面纹理设置在抛光垫的抛光表面上。 表面纹理包括至少一个第一凹槽,至少一个第二凹槽和多个孔。 第二凹槽从抛光垫的中心部分延伸到抛光垫的边缘,并且第一凹槽与第二凹槽相交以形成多个交点。 孔设置在交点处,孔的深度大于第一槽的深度。 因此,第二凹槽使得悬浮在抛光浆料中的杂质能够快速地从抛光垫移除,并且孔可以存储抛光浆料以延迟抛光浆料中的抛光颗粒从抛光垫离开。