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    • 72. 发明授权
    • Gas flow division in a wafer processing system having multiple chambers
    • 具有多个腔室的晶片处理系统中的气体分流
    • US06913652B2
    • 2005-07-05
    • US10174243
    • 2002-06-17
    • Hongqing Shan
    • Hongqing Shan
    • C23C16/455C23C16/52C23C16/54C23C16/00C23F1/00H01L21/306
    • C23C16/45561C23C16/455C23C16/52C23C16/54
    • A system for processing substrates includes a first process chamber configured to perform a given process on a first substrate. A second process chamber is configured to perform the same process as the first chamber on a second substrate. A gas source system is configured to output a process gas. A gas flow system includes a flow channel coupled to the gas source system and the first and second process chambers to provide the process gas into the first and second process chambers. The gas source system further includes a gas flow controller to regulate flow rates of the process gas provided into the first and second chambers in order to provide the first and second substrates with substantially uniform process results.
    • 用于处理基板的系统包括:第一处理室,被配置为在第一基板上执行给定的处理。 第二处理室被配置为执行与第二基板上的第一室相同的处理。 气源系统被配置为输出处理气体。 气流系统包括耦合到气体源系统和第一和第二处理室的流动通道,以将处理气体提供到第一和第二处理室中。 气体源系统还包括气体流量控制器,用于调节设置到第一和第二室中的处理气体的流速,以便为第一和第二基板提供基本均匀的处理结果。
    • 79. 发明授权
    • Carotid artery filter system for single view dental panoramic radiographs
    • 颈动脉过滤系统用于单视野全景X光片
    • US06859522B2
    • 2005-02-22
    • US10244103
    • 2002-09-13
    • Dov M. Almog
    • Dov M. Almog
    • A61B6/14G21K3/00
    • A61B6/4035A61B6/14
    • A method and a suite of filters for detecting carotid artery calcification in a panoramic dental radiograph, including imposing a filter between an x-ray radiation beam source and an imaging medium, wherein the imposing attenuates the effect of the incident x-ray in the region of the carotid artery; obtaining a panoramic dental radiograph while imposing the filter, wherein the imposing enhances the contrast of the radiograph in the region of carotid artery; and detecting a calcification region in the area of the radiograph wherein the x-ray image's contrast has been enhanced by using the filter, and which area corresponds with the location of the carotid artery. The suite of filters include a patient format, a cassette format, an x-ray unit format and a software-based format.
    • 一种用于在全景牙科X射线照片中检测颈动脉钙化的方法和一套过滤器,包括在X射线辐射束源和成像介质之间施加过滤器,其中强制性衰减入射X射线在该区域中的影响 的颈动脉; 在施加过滤器的同时获得全景牙科X射线照片,其中强化提高了颈动脉区域中的放射照片的对比度; 并且通过使用所述滤波器,检测X射线图像的对比度增强的X射线照片区域中的钙化区域,以及哪个区域对应于颈动脉的位置。 一套过滤器包括病人格式,磁带格式,X光单元格式和基于软件的格式。