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    • 77. 发明授权
    • Darkfield inspection system having photodetector array
    • 具有光电检测器阵列的暗场检查系统
    • US07061598B1
    • 2006-06-13
    • US10315340
    • 2002-12-09
    • Christopher F. BevisDavid W. Shortt
    • Christopher F. BevisDavid W. Shortt
    • G01N21/00
    • G01N21/47G01N21/9501G01N2021/8822
    • A darkfield surface inspection tool of the invention includes an illumination source for illuminating a workpiece and generating a light scattering pattern. The light scattering pattern being configured such that the positions of the light beams of the scattering pattern are uniquely related to the scattering angles of the light beams as they are scattered from the workpiece. The tool also includes a photodetector array positioned at a detector surface to detect the light scattering pattern as it reaches the detector surface. The photodetector array produces an electrical signal that is received by signal processing electronics of the tool and can be used to characterize defects on the workpiece. The invention also includes darkfield surface inspection methods.
    • 本发明的暗视场表面检查工具包括用于照亮工件并产生光散射图案的照明源。 光散射图案被配置为使得散射图案的光束的位置与从工件散射的光束的散射角唯一相关。 该工具还包括位于检测器表面处的光电检测器阵列,以便在其到达检测器表面时检测光散射图案。 光电检测器阵列产生由工具的信号处理电路接收的电信号,并且可用于表征工件上的缺陷。 本发明还包括暗场表面检查方法。