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71. 发明授权

US08264237B2 Application of wideband sampling for arc detection with a probabilistic model for quantitatively measuring arc events 有权
公开(公告)号：US08264237B2
公开(公告)日：2012-09-11
申请号：US12031171
申请日：2008-02-14
申请人： David J. Coumou
发明人： David J. Coumou
IPC分类号： H01H9/50
CPC分类号： H01J37/32174 , H01J37/32935
摘要： An arc detection system for a plasma generation system includes a radio frequency (RF) sensor that generates first and second signals based on a respective electrical properties of (RF) power that is in communication with a plasma chamber. A correlation module generates an arc detect signal based on the first and second signals. The arc detect signal indicates whether an arc is occurring in the plasma chamber and is employed to vary an aspect of the RF power to extinguish the arc.

72. 发明申请

US20120216888A1 System for and Method of Fast Pulse Gas Delivery 审中-公开
标题翻译：快速脉冲气体输送系统及方法
公开(公告)号：US20120216888A1
公开(公告)日：2012-08-30
申请号：US13344387
申请日：2012-01-05
申请人： Junhua Ding , Michael L'Bassi , Tseng-Chung Lee
发明人： Junhua Ding , Michael L'Bassi , Tseng-Chung Lee
IPC分类号： G05D16/00
CPC分类号： G05D7/0635 , C23C16/45523 , C23C16/45557 , G01F1/72 , Y10T137/8593
摘要： A system for delivering pulses of a desired mass of gas to a tool, comprising: a mass flow controller including flow sensor, a control valve and a dedicated controller configured and arranged to receive a recipe of a sequence of steps for opening and closing the control valve so as to deliver as sequence of gas pulses as a function of the recipe. The mass flow controller is configured and arranged so as to operate in either one of at least two modes: as a traditional mass flow controller (MFC) mode or in a pulse gas delivery (PGD) mode. Further, the dedicated controller is configured and arranged to delivery pulses of gas in accordance with anyone of three different types of pulse gas delivery processes: a time based pulse delivery process, a mole based pulse delivery process and a profile based pulse delivery process.
摘要翻译：一种用于将期望质量的气体脉冲输送到工具的系统，包括：质量流量控制器，包括流量传感器，控制阀和专用控制器，其被配置和布置成接收用于打开和关闭控制的一系列步骤的配方阀门，以作为配方的函数输送气体脉冲序列。质量流量控制器被配置和布置成以至少两种模式中的任一种操作：作为传统质量流量控制器（MFC）模式或脉冲气体输送（PGD）模式。此外，专用控制器被配置和布置成根据三种不同类型的脉冲气体输送过程中的任何一种输送气体脉冲：基于时间的脉冲输送过程，基于摩尔的脉冲输送过程和基于分布的脉冲输送过程。

73. 发明申请

US20120174992A1 Apparatus and Method for Pressure Fluctuation Insensitive Mass Flow Control 有权
标题翻译：压力波动不敏感质量流量控制的装置和方法
公开(公告)号：US20120174992A1
公开(公告)日：2012-07-12
申请号：US13425784
申请日：2012-03-21
申请人： Ali Shajii , Nicholas Kottenstette , Jesse Ambrosina
发明人： Ali Shajii , Nicholas Kottenstette , Jesse Ambrosina
IPC分类号： F16K31/12
CPC分类号： G05D7/0635 , Y10T137/0396 , Y10T137/7759 , Y10T137/776
摘要： A mass flow controller includes a thermal mass flow sensor in combination with a pressure sensor to provide a mass flow controller that is relatively insensitive to fluctuations in input pressure. The pressure sensor and thermal sensor respectively provide signals to an electronic controller indicating the measured inlet flow rate and the pressure within the dead volume. The electronic controller employs the measured pressure to compensate the measured inlet flow rate and to thereby produce a compensated measure of the outlet flow rate, which may be used to operate a mass flow controller control valve.
摘要翻译：质量流量控制器包括与压力传感器组合的热质量流量传感器，以提供对输入压力波动相对不敏感的质量流量控制器。压力传感器和热传感器分别向电子控制器提供指示测量的入口流量和死体积内的压力的信号。电子控制器采用所测量的压力来补偿所测量的入口流量，从而产生可用于操作质量流量控制器控制阀的出口流量的补偿测量。

74. 发明申请

US20120171092A1 HIGH-EFFICIENCY, HOT TRAP APPARATUS AND METHOD 有权
标题翻译：高效率，热捕捉设备和方法
公开(公告)号：US20120171092A1
公开(公告)日：2012-07-05
申请号：US12983162
申请日：2010-12-31
申请人： Jeffrey D. Kiernan , Matthew C. Grout , Kevin Grout
发明人： Jeffrey D. Kiernan , Matthew C. Grout , Kevin Grout
IPC分类号： B01D53/64 , B01D53/34
CPC分类号： B01D53/64 , B01D53/005 , B01D2251/10 , B01D2251/202 , B01D2257/60 , B01D2258/0216
摘要： A hot trap for removing a reactive constituent gas from a gas stream via chemical reaction and/or thermal disassociation includes a trap chamber with a heater assembly and a trap medium in its core inner portion and annular pre-heating and counterflow heating ducts in its outer and intermediate portions surrounding the core inner portion for heating an inflowing gas stream and conservation of heat energy in the trap as well as to maintain lower temperatures on external surfaces.
摘要翻译：用于通过化学反应和/或热解离从气流中去除反应性组分气体的热阱包括：捕集室，其中具有加热器组件和其核心内部部分中的捕集介质，以及在其外部的环形预热和逆流加热管道以及围绕芯部内部的中间部分，用于加热流入的气体流并且在阱中保持热能，并且在外部表面上保持较低的温度。

75. 发明申请

US20120153193A1 TWO-STAGE, SLOW-START VALVE APPARATUS AND METHOD 有权
标题翻译：两级，慢启动阀装置和方法
公开(公告)号：US20120153193A1
公开(公告)日：2012-06-21
申请号：US12968551
申请日：2010-12-15
申请人： Youfan Gu , David Neumeister , Kevin Grout
发明人： Youfan Gu , David Neumeister , Kevin Grout
IPC分类号： F16K31/12
CPC分类号： F16K1/52 , F16K31/1225 , F16K31/1226 , F16K39/024 , F16K51/02 , H01L21/67017 , Y10T137/0318 , Y10T137/86944
摘要： A two-stage, slow-start valve includes a minor valve assembly inside a major valve closure member of a major valve closure assembly so that fluid can flow through the valve at a higher rate by opening the major valve assembly or at a lower rate by opening the minor valve assembly while the major valve closure assembly is closed in order to allow fluid to flow in an alternate flow path through the major valve closure member. The example minor valve closure assembly has a minor valve closure member that is actuated to open by a minor valve piston on which minor valve actuating fluid is applied to the minor piston via a diaphragm seal positioned between the minor piston and the minor valve actuating fluid. Both the major valve closure assembly and the minor valve closure assembly can be pneumatically actuated to open.
摘要翻译：两级缓慢启动阀包括在主阀闭合组件的主阀闭合构件内部的次阀组件，使得流体可以通过打开主阀组件或以较低的速率以较高的速率流过阀，打开小阀组件，同时关闭主阀闭合组件，以允许流体在通过主阀闭合构件的交替流动路径中流动。示例性小阀闭合组件具有次阀闭合构件，其被致动以由次阀活塞打开，小次阀致动流体通过位于次活塞和次阀致动流体之间的隔膜密封件施加到次活塞。主阀闭合组件和次阀闭合组件都可气动致动以打开。

76. 发明申请

US20120150508A1 Methods and Apparatus for Automated Predictive Design Space Estimation 有权
标题翻译：自动预测设计空间估计的方法与装置
公开(公告)号：US20120150508A1
公开(公告)日：2012-06-14
申请号：US13336623
申请日：2011-12-23
申请人： Ernst Conny Wikström , Hans Georg Joakim Sundström , Tord Åke Börje Nordahl
发明人： Ernst Conny Wikström , Hans Georg Joakim Sundström , Tord Åke Börje Nordahl
IPC分类号： G06F17/10
CPC分类号： G06F17/50
摘要： Described are computer-based methods and apparatuses, including computer program products, for automated predictive design space estimation. A design space of input factors and output responses is estimated for a physical process. Data is received for one or more input factors for a physical process, one or more output responses for the process, and criteria. For each of the one or more input factors, a calculated range of input values within the corresponding experimented range of input values is calculated. A modified range of input values is calculated for each of the one or more input factors. A design space estimate is predicted based at least on the modified ranges of input values, wherein the modified ranges of input values each comprise a largest region of variability for one or more of the input factors where the criteria are fulfilled.
摘要翻译：描述了基于计算机的方法和设备，包括用于自动预测设计空间估计的计算机程序产品。对物理过程估计输入因子和输出响应的设计空间。接收到用于物理过程的一个或多个输入因子的数据，用于该过程的一个或多个输出响应以及标准。对于一个或多个输入因子中的每一个，计算输入值的相应实验范围内的输入值的计算范围。对于一个或多个输入因子中的每一个计算输入值的修改范围。至少基于输入值的修改范围来预测设计空间估计，其中输入值的修改范围各自包括满足标准的一个或多个输入因子的最大变异区域。

77. 发明授权

US08102954B2 Frequency interference detection and correction 有权
标题翻译：频率干扰检测和校正
公开(公告)号：US08102954B2
公开(公告)日：2012-01-24
申请号：US11115063
申请日：2005-04-26
申请人： David J. Coumou
发明人： David J. Coumou
IPC分类号： H03D1/04
CPC分类号： H04B1/10 , H03M1/0836 , H03M1/1215
摘要： A system for detecting and correcting for spurious frequencies that may coincide in a bandwidth of interest in an RF metrology system. The system can (1) utilize a deterministic scheme to detect an interference by a spurious frequency and correct the distortion effect or (2) utilize a mixed signal processing architecture to avoid the occurrence of spurious frequency contamination. A detection scheme identifies the event of distortion and triggers either (a) a shift in the analog to digital convert sample rate or (b) a mathematical vector manipulation. The shift of the analog to digital convert sample rate moves an aliased image of the spurious frequency outside of the frequency of interest. The mathematical vector correction removes the distortion and restores the signal of interest.
摘要翻译：用于检测和校正可在RF测量系统中感兴趣的带宽中重合的寄生频率的系统。系统可以（1）利用确定性方案来检测杂散频率的干扰并纠正失真效应，或者（2）利用混合信号处理架构来避免杂散频率污染的发生。检测方案识别失真的事件，并触发（a）模拟数字转换采样率的移位或（b）数学向量操纵。模拟到数字转换采样率的移动将杂散频率的混叠图像移动到感兴趣的频率之外。数学向量校正消除了失真并恢复了感兴趣的信号。

78. 发明授权

US08089026B2 Methods for control of plasma transitions in sputter processing systems using a resonant circuit 有权
标题翻译：使用谐振电路的溅射处理系统中等离子体转换的控制方法
公开(公告)号：US08089026B2
公开(公告)日：2012-01-03
申请号：US11216424
申请日：2005-08-30
申请人： Jeff C Sellers
发明人： Jeff C Sellers
IPC分类号： B23K10/00
CPC分类号： B23K10/00 , H01J37/32082 , H01J37/32935 , H01J2237/0206
摘要： Methods and apparatus for controlling a plasma used for materials processing feature cooperative action of a resonant circuit and a switch unit coupled to a plasma vessel and a power supply. A sensor for acquiring a signal associated with a state of a plasma in the plasma vessel supports closed-loop control of the switch unit. Undesirable plasma states detected by the sensor can be eliminated by closing the switch unit to shunt the resonant circuit.
摘要翻译：用于控制用于材料处理的等离子体的方法和装置具有谐振电路和耦合到等离子体容器和电源的开关单元的协同作用。用于获取与等离子体容器中的等离子体的状态相关联的信号的传感器支持开关单元的闭环控制。可以通过关闭开关单元来分流谐振电路来消除由传感器检测到的不期望的等离子体状态。

79. 发明授权

US08085401B2 Ozone concentration sensor 有权
标题翻译：臭氧浓度传感器
公开(公告)号：US08085401B2
公开(公告)日：2011-12-27
申请号：US12397155
申请日：2009-03-03
申请人： Stephan Levine , Johannes Seiwert , Joachim Lohr , Ulrich Brammer , Jens Fittkau
发明人： Stephan Levine , Johannes Seiwert , Joachim Lohr , Ulrich Brammer , Jens Fittkau
IPC分类号： G01N21/00
CPC分类号： G01N21/3151 , G01N2021/3181
摘要： An apparatus and method provide measurement of a constituent of a fluid, such as ozone in ozonated water. The apparatus includes a vessel to contain the fluid, a light source configured to direct a first band of light and a second band of light along a substantially shared path though the fluid, and a photosensor that senses the first band of light and the second band of light. The constituent has a greater absorption associated with the first band of light than with the second band of light. The method includes modification of a measured attribute of the component in response to the sensed second band of light to improve the accuracy of the measured attribute.
摘要翻译：一种装置和方法提供了在臭氧水中测量诸如臭氧的流体的成分。该装置包括容纳流体的容器，配置成沿着基本上共享的路径引导第一光带和第二光带的光源，其通过流体;以及光电传感器，其感测第一光带和第二带的光。与第二光带相比，该成分具有与第一光带相关的更大的吸收。该方法包括响应于感测的第二光带来修改组件的测量属性，以提高测量属性的准确性。

80. 发明授权

US08079383B2 Controller gain scheduling for mass flow controllers 有权
标题翻译：质量流量控制器的控制器增益调度
公开(公告)号：US08079383B2
公开(公告)日：2011-12-20
申请号：US11635726
申请日：2006-12-07
申请人： Junhua Ding
发明人： Junhua Ding
IPC分类号： G05D7/06
CPC分类号： G01F1/68 , G01F15/005 , G01F25/0007 , G05B13/042 , G05D7/0635 , Y10T137/7759 , Y10T137/7761
摘要： A mass flow controller having a feedback controller gain, comprises: a sensor configured so as to sense the flow of fluid through controller; a valve arranged so as to adjust the flow of fluid through the controller; and a processor configured so as to control the valve as a function of the flow of fluid sensed by the sensor. The sensor and valve are arranged within a feedback system, and the processor updates the feedback controller gain in real time based on the ratio of at least one calibration gas parameter to at least one operating gas parameter, such that the closed loop transfer function of the feedback system remains substantially constant regardless of operating conditions so as to have a consistent control performance at different operation conditions from the calibration condition.
摘要翻译：具有反馈控制器增益的质量流量控制器包括：被配置为感测通过控制器的流体流动的传感器; 阀，其布置成调节流过所述控制器的流体; 以及处理器，其被配置为根据由所述传感器感测的流体的流量来控制所述阀。传感器和阀被布置在反馈系统内，并且处理器基于至少一个校准气体参数与至少一个操作气体参数的比率来实时更新反馈控制器增益，使得闭环传递函数无论操作条件如何，反馈系统保持基本恒定，以便在与校准条件不同的操作条件下具有一致的控制性能。

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