专利快速检索-快速检索全球专利，免费商用专利数据库-IPRDB

61. 发明授权

US08502328B2 Micro electronic mechanical system structure 有权
标题翻译：微电子机械系统结构
公开(公告)号：US08502328B2
公开(公告)日：2013-08-06
申请号：US13409020
申请日：2012-02-29
申请人： Tsai-Chiang Nieh , Tung-Ming Lai , Feng-Tsai Tsai
发明人： Tsai-Chiang Nieh , Tung-Ming Lai , Feng-Tsai Tsai
IPC分类号： H01L29/84
CPC分类号： B81C1/00944 , B81B3/0008 , B81C2203/0742
摘要： A micro electronic mechanical system structure and a manufacturing method thereof are provided. A substrate has a plurality of conductive regions is provided. A dielectric layer is formed on the substrate. A plurality of openings and recesses are formed in the dielectric layer, wherein the openings expose the conductive regions. The recesses are located between the openings. A conductive layer is formed on the dielectric layer and the openings and the recesses are filled with the conductive layer. The conductive layer is patterned to form a plurality of strips of the first conductive patterns on the dielectric layer and a second conductive pattern on the sidewall and the bottom of each recess, wherein the first conductive patterns are connected with each other through the second conductive patterns. The dielectric layer is removed. The second conductive patterns between the first conductive patterns are removed.
摘要翻译：提供微电子机械系统结构及其制造方法。衬底具有多个导电区域。在基板上形成电介质层。在电介质层中形成多个开口和凹槽，其中开口暴露导电区域。凹槽位于开口之间。在电介质层上形成导电层，并且用导电层填充开口和凹部。导电层被图案化以在电介质层上形成多个第一导电图案的条带，并且在每个凹部的侧壁和底部上形成第二导电图案，其中第一导电图案通过第二导电图案彼此连接。去除电介质层。去除第一导电图案之间的第二导电图案。

62. 发明授权

US08312770B2 Capacitive acceleration sensor 有权
标题翻译：电容式加速度传感器
公开(公告)号：US08312770B2
公开(公告)日：2012-11-20
申请号：US12119057
申请日：2008-05-12
申请人： Teruya Fukaura
发明人： Teruya Fukaura
IPC分类号： G01P15/125
CPC分类号： G01P1/023 , B81B3/0008 , B81B2201/0235 , B81C2203/0118 , B81C2203/031 , G01P15/0802 , G01P15/125 , G01P2015/0814
摘要： A capacitive acceleration sensor that prevents sticking of a mass body, made of silicon, to a first sealing substrate or a second sealing substrate, made of glass. The capacitive acceleration sensor includes a first sealing substrate and a second sealing substrate each made of glass. The mass body is suspended between the first and second sealing substrates by a beam attached to a substrate, and one or both of the sealing substrates is processed such that the mass body only contacts with a subsection of the substrate surface.
摘要翻译：一种电容加速度传感器，其防止由硅制成的质量体粘附到由玻璃制成的第一密封基板或第二密封基板。电容加速度传感器包括由玻璃制成的第一密封基板和第二密封基板。质量体通过附接到基板的梁悬挂在第一和第二密封基板之间，并且一个或两个密封基板被加工成使得质量体仅与基板表面的子部分接触。

63. 发明授权

US08240205B2 Mechanical quantity sensor and method of manufacturing the same 有权
标题翻译：机械量传感器及其制造方法
公开(公告)号：US08240205B2
公开(公告)日：2012-08-14
申请号：US12527554
申请日：2008-06-24
申请人： Akio Morii
发明人： Akio Morii
IPC分类号： G01C19/00
CPC分类号： G01P15/125 , B81B3/0008 , B81B2201/0242 , B81C2203/031 , G01C19/56 , G01C25/00 , G01P15/0802 , G01P15/18 , G01P2015/084 , G01P2015/0842
摘要： A mechanical quantity sensor includes a first structure having a fixed portion with an opening, a displaceable portion arranged in the opening and displaceable relative to the fixed portion, and a connection portion connecting the fixed portion and the displaceable portion, a second structure having a weight portion joined to the displaceable portion and a pedestal joined to the fixed portion, and arranged and stacked on the first structure, and a base having a driving electrode and a detection electrode arranged on a face facing the weight portion, connected to the pedestal, and arranged and stacked on the second structure. The second structure has a projection arranged in an area on a face of the weight portion facing the base, the area corresponding to an area where the driving electrode and the detection electrode are not arranged, the projection having a thickness larger than thicknesses of the driving electrode and the detection electrode.
摘要翻译：机械量传感器包括具有开口的固定部分的第一结构，布置在开口中并相对于固定部分移位的位移部分和连接固定部分和可移位部分的连接部分，具有重量的第二结构接合到可位移部分的部分和接合到固定部分的基座，并且布置和堆叠在第一结构上，以及基座，其具有布置在与基座相连的面对重物部分的面上的驱动电极和检测电极，以及布置并堆叠在第二结构上。第二结构具有布置在面对基部的配重部分的面上的区域中的突出部分，该区域对应于未布置驱动电极和检测电极的区域，突出部的厚度大于驱动电极和检测电极。

64. 发明申请

US20120153469A1 MICRO ELECTRONIC MECHANICAL SYSTEM STRUCTURE 有权
标题翻译：微电子机械系统结构
公开(公告)号：US20120153469A1
公开(公告)日：2012-06-21
申请号：US13409020
申请日：2012-02-29
申请人： Tsai-Chiang Nieh , Tung-Ming Lai , Feng-Tsai Tsai
发明人： Tsai-Chiang Nieh , Tung-Ming Lai , Feng-Tsai Tsai
IPC分类号： H01L23/498
CPC分类号： B81C1/00944 , B81B3/0008 , B81C2203/0742
摘要： A micro electronic mechanical system structure and a manufacturing method thereof are provided. A substrate has a plurality of conductive regions is provided. A dielectric layer is formed on the substrate. A plurality of openings and recesses are formed in the dielectric layer, wherein the openings expose the conductive regions. The recesses are located between the openings. A conductive layer is formed on the dielectric layer and the openings and the recesses are filled with the conductive layer. The conductive layer is patterned to form a plurality of strips of the first conductive patterns on the dielectric layer and a second conductive pattern on the sidewall and the bottom of each recess, wherein the first conductive patterns are connected with each other through the second conductive patterns. The dielectric layer is removed. The second conductive patterns between the first conductive patterns are removed.
摘要翻译：提供微电子机械系统结构及其制造方法。衬底具有多个导电区域。在基板上形成电介质层。在电介质层中形成多个开口和凹槽，其中开口暴露导电区域。凹槽位于开口之间。在电介质层上形成导电层，并且用导电层填充开口和凹部。导电层被图案化以在电介质层上形成多个第一导电图案的条带，并且在每个凹部的侧壁和底部上形成第二导电图案，其中第一导电图案通过第二导电图案彼此连接。去除电介质层。去除第一导电图案之间的第二导电图案。

65. 发明申请

US20110169106A1 MICRO ELECTRONIC MECHANICAL SYSTEM STRUCTURE AND MANUFACTURING METHOD THEREOF 有权
标题翻译：微电子机械系统结构及其制造方法
公开(公告)号：US20110169106A1
公开(公告)日：2011-07-14
申请号：US12721546
申请日：2010-03-10
申请人： Tsai-Chiang Nieh , Tung-Ming Lai , Feng-Tsai Tsai
发明人： Tsai-Chiang Nieh , Tung-Ming Lai , Feng-Tsai Tsai
IPC分类号： H01L29/84 , H01L21/02
CPC分类号： B81C1/00944 , B81B3/0008 , B81C2203/0742
摘要： A micro electronic mechanical system structure and a manufacturing method thereof are provided. A substrate has a plurality of conductive regions is provided. A dielectric layer is formed on the substrate. A plurality of openings and recesses are formed in the dielectric layer, wherein the openings expose the conductive regions. The recesses are located between the openings. A conductive layer is formed on the dielectric layer and the openings and the recesses are filled with the conductive layer. The conductive layer is patterned to form a plurality of strips of the first conductive patterns on the dielectric layer and a second conductive pattern on the sidewall and the bottom of each recess, wherein the first conductive patterns are connected with each other through the second conductive patterns. The dielectric layer is removed. The second conductive patterns between the first conductive patterns are removed.
摘要翻译：提供微电子机械系统结构及其制造方法。衬底具有多个导电区域。在基板上形成电介质层。在电介质层中形成多个开口和凹槽，其中开口暴露导电区域。凹槽位于开口之间。在电介质层上形成导电层，并且用导电层填充开口和凹部。导电层被图案化以在电介质层上形成多个第一导电图案的条带，并且在每个凹部的侧壁和底部上形成第二导电图案，其中第一导电图案通过第二导电图案彼此连接。去除电介质层。去除第一导电图案之间的第二导电图案。

66. 发明申请

US20110051224A1 LOW TEMPERATURE AMORPHOUS SILICON SACRIFICIAL LAYER FOR CONTROLLED ADHESION IN MEMS DEVICES 失效
标题翻译：用于MEMS器件中控制粘合的低温非晶硅绝缘层
公开(公告)号：US20110051224A1
公开(公告)日：2011-03-03
申请号：US12939909
申请日：2010-11-04
申请人： James Randolph Webster , Thanh Nghia Tu , Xiaoming Yan , Wonsuk Chung
发明人： James Randolph Webster , Thanh Nghia Tu , Xiaoming Yan , Wonsuk Chung
IPC分类号： G02B26/00
CPC分类号： B81B3/0008 , B81B2201/042 , B81C2201/0107 , B81C2201/0109 , B81C2201/115 , G02B26/001 , Y10T428/24917
摘要： Methods of fabricating an electromechanical systems device that mitigate permanent adhesion, or stiction, of the moveable components of the device are provided. The methods provide an amorphous silicon sacrificial layer with improved and reproducible surface roughness. The amorphous silicon sacrificial layers further exhibit excellent adhesion to common materials used in electromechanical systems devices.
摘要翻译：提供了减轻设备的可移动部件的永久性粘附或静电的机电系统装置的制造方法。该方法提供了具有改进和可再现的表面粗糙度的非晶硅牺牲层。非晶硅牺牲层对于机电系统器件中常用的材料进一步表现出优异的附着性。

67. 发明授权

US07733552B2 MEMS cavity-coating layers and methods 有权
标题翻译： MEMS空腔涂层及方法
公开(公告)号：US07733552B2
公开(公告)日：2010-06-08
申请号：US11689430
申请日：2007-03-21
申请人： Ana R. Londergan , Bangalore R. Natarajan , Evgeni Gousev , James Randolph Webster , David Heald
发明人： Ana R. Londergan , Bangalore R. Natarajan , Evgeni Gousev , James Randolph Webster , David Heald
IPC分类号： G02F1/00
CPC分类号： G02B26/001 , B81B3/0008 , B81B2201/047
摘要： Devices, methods, and systems comprising a MEMS device, for example, an interferometric modulator, that comprises a cavity in which a layer coats multiple surfaces. The layer is conformal or non-conformal. In some embodiments, the layer is formed by atomic layer deposition (ALD). Preferably, the layer comprises a dielectric material. In some embodiments, the MEMS device also exhibits improved characteristics, such as improved electrical insulation between moving electrodes, reduced stiction, and/or improved mechanical properties.
摘要翻译：包括MEMS器件（例如干涉式调制器）的器件，方法和系统，其包括其中层涂覆多个表面的空腔。该层是保形的或非保形的。在一些实施例中，该层由原子层沉积（ALD）形成。优选地，该层包括电介质材料。在一些实施例中，MEMS器件还表现出改进的特性，例如移动电极之间的改善的电绝缘性，降低的静摩擦力和/或改善的机械性能。

68. 发明申请

US20090305010A1 LOW TEMPERATURE AMORPHOUS SILICON SACRIFICIAL LAYER FOR CONTROLLED ADHESION IN MEMS DEVICES 有权
标题翻译：用于MEMS器件中控制粘合的低温非晶硅绝缘层
公开(公告)号：US20090305010A1
公开(公告)日：2009-12-10
申请号：US12133813
申请日：2008-06-05
申请人： James Randolph Webster , Thanh Nghia Tu , Xiaoming Yan , Wonsuk Chung
发明人： James Randolph Webster , Thanh Nghia Tu , Xiaoming Yan , Wonsuk Chung
IPC分类号： B05D5/06 , H05H1/24 , B32B3/00
CPC分类号： B81B3/0008 , B81B2201/042 , B81C2201/0107 , B81C2201/0109 , B81C2201/115 , G02B26/001 , Y10T428/24917
摘要： Methods of fabricating an electromechanical systems device that mitigate permanent adhesion, or stiction, of the moveable components of the device are provided. The methods provide an amorphous silicon sacrificial layer with improved and reproducible surface roughness. The amorphous silicon sacrificial layers further exhibit excellent adhesion to common materials used in electromechanical systems devices.
摘要翻译：提供了减轻设备的可移动部件的永久性粘附或静电的机电系统装置的制造方法。该方法提供了具有改进和可再现的表面粗糙度的非晶硅牺牲层。非晶硅牺牲层对于机电系统器件中常用的材料进一步表现出优异的附着性。

69. 发明授权

US07354787B2 Electrode design and positioning for controlled movement of a moveable electrode and associated support structure 有权
标题翻译：电极设计和定位，用于可移动电极和相关支撑结构的受控运动
公开(公告)号：US07354787B2
公开(公告)日：2008-04-08
申请号：US11096840
申请日：2005-03-30
申请人： John L. Dunec , Eric Peeters , Armin R. Volkel , Michel A. Rosa , Dirk DeBruyker , Thomas Hantschel
发明人： John L. Dunec , Eric Peeters , Armin R. Volkel , Michel A. Rosa , Dirk DeBruyker , Thomas Hantschel
IPC分类号： H01L21/00
CPC分类号： B81B3/0008 , B81B3/0021 , B81B2201/042 , B81B2201/045 , B81B2203/0118 , B81B2203/058 , G02B26/0841 , H02N1/002
摘要： A MEMS system including a fixed electrode and a suspended moveable electrode that is controllable over a wide range of motion. In traditional systems where an fixed electrode is positioned under the moveable electrode, the range of motion is limited because the support structure supporting the moveable electrode becomes unstable when the moveable electrode moves too close to the fixed electrode. By repositioning the fixed electrode from being directly underneath the moving electrode, a much wider range of controllable motion is achievable. Wide ranges of controllable motion are particularly important in optical switching applications.
摘要翻译：一种MEMS系统，包括可在宽范围的运动中控制的固定电极和悬挂的可移动电极。在固定电极位于可动电极下方的传统系统中，由于支撑可移动电极的支撑结构在可移动电极移动得太靠近固定电极时，运动范围受到限制。通过将固定电极重新定位在移动电极的正下方，可以实现更宽范围的可控运动。宽范围的可控运动在光交换应用中尤其重要。

70. 发明申请

US20070258130A1 Reflective spatial light modulator with high stiffness torsion spring hinge 有权
标题翻译：具有高刚度扭力弹簧铰链的反射空间光调制器
公开(公告)号：US20070258130A1
公开(公告)日：2007-11-08
申请号：US11418941
申请日：2006-05-04
申请人： Dongmin Chen , Tore Nauta
发明人： Dongmin Chen , Tore Nauta
IPC分类号： G02B26/00
CPC分类号： G02B26/0841 , B81B3/0008 , B81B3/007 , B81B2201/042 , B81B2203/0109 , B81B2203/058 , H04N5/7458
摘要： A spatial light modulator for use in display applications. The spatial light modulator includes a support substrate and a flexible member coupled to the support substrate. The spatial light modulator also includes a mirror plate coupled to the flexible member and characterized by an activated position. The mirror plate is adapted to rotate in relation to the flexible member from the activated position to a second activated position in a time less than 6.0 μs.
摘要翻译：用于显示应用的空间光调制器。空间光调制器包括支撑衬底和耦合到支撑衬底的柔性构件。空间光调制器还包括耦合到柔性构件的镜面板，其特征在于激活位置。镜板适于相对于柔性构件在小于6.0微米的时间内从启动位置旋转到第二激活位置。

你已经成功收藏专利！

检索式保存成功!

IPRDB

热门服务

关于我们

友情链接

联系方式