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    • 1. 发明授权
    • Method and system for resonant operation of a reflective spatial light modulator
    • 反射空间光调制器的谐振操作方法和系统
    • US07443568B2
    • 2008-10-28
    • US11429376
    • 2006-05-04
    • Dongmin ChenTore Nauta
    • Dongmin ChenTore Nauta
    • G02B26/00G02B26/08
    • G02B26/0841
    • A method of activating a micro-mirror includes applying a first electrode voltage to one or more electrodes associated with the micro-mirror. The micro-mirror is positioned at a first positive deflection angle during a portion of the application of the first electrode voltage. The method also includes maintaining the first electrode voltage for a first predetermined time and applying a second electrode voltage to the one or more electrodes. The micro-mirror rotates to a first negative deflection angle during a portion of the application of the second electrode voltage. The method further includes maintaining the second electrode voltage for a second predetermined time and applying a third electrode voltage to the one or more electrodes. The micro-mirror is positioned at a second positive deflection angle greater than the first positive deflection angle during a portion of the application of the third electrode voltage.
    • 激活微镜的方法包括将第一电极电压施加到与微镜相关联的一个或多个电极。 在施加第一电极电压的一部分期间,微镜被定位在第一正偏转角。 该方法还包括将第一电极电压保持第一预定时间并将第二电极电压施加到一个或多个电极。 微镜在施加第二电极电压的一部分期间旋转到第一负偏转角。 该方法还包括将第二电极电压维持第二预定时间并将第三电极电压施加到一个或多个电极。 在施加第三电极电压的一部分期间,微反射镜被定位成大于第一正偏转角的第二正偏转角。
    • 4. 发明申请
    • Method and system for resonant operation of a reflective spatial light modulator
    • 反射空间光调制器的谐振操作方法和系统
    • US20070258124A1
    • 2007-11-08
    • US11429376
    • 2006-05-04
    • Dongmin ChenTore Nauta
    • Dongmin ChenTore Nauta
    • G02F1/03
    • G02B26/0841
    • A method of activating a micro-mirror includes applying a first electrode voltage to one or more electrodes associated with the micro-mirror. The micro-mirror is positioned at a first positive deflection angle during a portion of the application of the first electrode voltage. The method also includes maintaining the first electrode voltage for a first predetermined time and applying a second electrode voltage to the one or more electrodes. The micro-mirror rotates to a first negative deflection angle during a portion of the application of the second electrode voltage. The method further includes maintaining the second electrode voltage for a second predetermined time and applying a third electrode voltage to the one or more electrodes. The micro-mirror is positioned at a second positive deflection angle greater than the first positive deflection angle during a portion of the application of the third electrode voltage.
    • 激活微镜的方法包括将第一电极电压施加到与微镜相关联的一个或多个电极。 在施加第一电极电压的一部分期间,微镜被定位在第一正偏转角。 该方法还包括将第一电极电压保持第一预定时间并将第二电极电压施加到一个或多个电极。 微镜在施加第二电极电压的一部分期间旋转到第一负偏转角。 该方法还包括将第二电极电压维持第二预定时间并将第三电极电压施加到一个或多个电极。 在施加第三电极电压的一部分期间,微反射镜被定位成大于第一正偏转角的第二正偏转角。
    • 7. 发明申请
    • LOW VOLTAGE MICRO MECHANICAL DEVICE
    • 低电压微机械装置
    • US20080122822A1
    • 2008-05-29
    • US11557769
    • 2006-11-08
    • Shaoher X. PanTore Nauta
    • Shaoher X. PanTore Nauta
    • G09G5/00
    • G09G3/346G02B26/0841
    • Methods for driving a plurality of MEMS devices in an apparatus are described. A voltage pulse is applied to an electrode or a structure portion of a MEMS device. The electrode is on the substrate underneath the structure portion. At least two MEMS devices of the plurality of MEMS devices have different threshold voltages, and the threshold voltage is the minimum voltage required to move the structure portion. A bias voltage is applied to whichever of the electrode or the structure portion of the MEMS device does not have the voltage pulse applied thereto. The bias voltage and the voltage pulse are capable of moving the structure portion of the MEMS device that has the higher threshold voltage of the different threshold voltages.
    • 描述了在装置中驱动多个MEMS器件的方法。 电压脉冲施加到MEMS器件的电极或结构部分。 电极位于结构部分下方的基板上。 多个MEMS器件中的至少两个MEMS器件具有不同的阈值电压,阈值电压是移动结构部分所需的最小电压。 偏置电压施加到MEMS器件的电极或结构部分中的哪一个不具有施加到其上的电压脉冲。 偏置电压和电压脉冲能够移动具有不同阈值电压的较高阈值电压的MEMS器件的结构部分。
    • 10. 发明授权
    • Low voltage micro mechanical device
    • 低压微机械装置
    • US07508569B2
    • 2009-03-24
    • US11557769
    • 2006-11-08
    • Shaoher X. PanTore Nauta
    • Shaoher X. PanTore Nauta
    • G02B26/00
    • G09G3/346G02B26/0841
    • Methods for driving a plurality of MEMS devices in an apparatus are described. A voltage pulse is applied to an electrode or a structure portion of a MEMS device. The electrode is on the substrate underneath the structure portion. At least two MEMS devices of the plurality of MEMS devices have different threshold voltages, and the threshold voltage is the minimum voltage required to move the structure portion. A bias voltage is applied to whichever of the electrode or the structure portion of the MEMS device does not have the voltage pulse applied thereto. The bias voltage and the voltage pulse are capable of moving the structure portion of the MEMS device that has the higher threshold voltage of the different threshold voltages.
    • 描述了在装置中驱动多个MEMS器件的方法。 电压脉冲施加到MEMS器件的电极或结构部分。 电极位于结构部分下方的基板上。 多个MEMS器件中的至少两个MEMS器件具有不同的阈值电压,阈值电压是移动结构部分所需的最小电压。 偏置电压施加到MEMS器件的电极或结构部分中的哪一个不具有施加到其上的电压脉冲。 偏置电压和电压脉冲能够移动具有不同阈值电压的较高阈值电压的MEMS器件的结构部分。