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61. 发明授权

US06333681B1 Piezoelectric/electrostrictive device 失效
标题翻译：压电/电致伸缩器件
公开(公告)号：US06333681B1
公开(公告)日：2001-12-25
申请号：US09491171
申请日：2000-01-25
申请人： Yukihisa Takeuchi , Tsutomu Nanataki , Masato Komazawa , Koji Kimura
发明人： Yukihisa Takeuchi , Tsutomu Nanataki , Masato Komazawa , Koji Kimura
IPC分类号： H01L4108
CPC分类号： H01L41/43 , H01L41/0946
摘要： A piezoelectric/electrostrictive device is disclosed comprising a driving portion to be driven by a displacement of a piezoelectric/electrostrictive element, a movable portion to be operated by a drive of the driving portion, a fixing portion for holding the driving portion and the movable portion, the movable portion being coupled with the fixing portion via the driving portion, and a hole formed by inner walls of the driving portion, an inner wall of the movable portion, and an inner wall of the fixing portion. The driving portion comprises a pair of mutually opposing thin plate portions, and a piezoelectric/electrostrictive element including a piezoelectric/electrostrictive operating portion comprising at least a pair or more of electrodes and a piezoelectric/electrostrictive layer formed on at least a part of the outer surface of at least one thin plate portion out of the thin plate portions, one end of the piezoelectric/electrostrictive operating portion in a direction in which the fixing portion is connected with the movable portion exists on the fixing portion or the movable portion, and the other end of the piezoelectric/electrostrictive operating portion is arranged on the thin plate portion, and at least a piezoelectric/electrostrictive layer of the piezoelectric/electrostrictive element exists extending over the movable portion and the fixing portion. The device of the present invention, having high rigidity in the width direction of the thin plate portions, namely in the Y-axis direction, enables rigid joining when functional parts such as sensors, magnetic heads, or the like are fixed to the present device, and further when the present device per se is fixed to another structure.
摘要翻译：公开了一种压电/电致伸缩器件，其包括驱动部分，该驱动部分由压电/电致伸缩元件的位移驱动，通过驱动部分的驱动而操作的可动部分，用于保持驱动部分和可动部分的固定部分所述可移动部分经由所述驱动部分与所述固定部分联接，以及由所述驱动部分的内壁，所述可移动部分的内壁和所述固定部分的内壁形成的孔。驱动部分包括一对相互相对的薄板部分，以及包括压电/电致伸缩操作部分的压电/电致伸缩元件，所述压电/电致伸缩操作部分包括至少一对或多个电极和形成在外部的至少一部分上的压电/电致伸缩层至少一个薄板部分的表面在薄板部分之外，压电/电致伸缩操作部分的固定部分与可动部分连接的方向的一端存在于固定部分或可移动部分上，并且压电/电致伸缩操作部分的另一端设置在薄板部分上，至少压电/电致伸缩元件的压电/电致伸缩层存在于可移动部分和固定部分上方延伸。本发明的薄板部的宽度方向的刚性即Y轴方向的本发明的装置能够在诸如传感器，磁头等的功能部件固定在本装置上时进行刚性接合并且当本装置本身固定到另一结构时。

62. 发明授权

US06217979B1 Piezoelectric/electrostrictive film element 失效
标题翻译：压电/电致伸缩膜元件
公开(公告)号：US06217979B1
公开(公告)日：2001-04-17
申请号：US09085853
申请日：1998-05-27
申请人： Yukihisa Takeuchi , Tsutomu Nanataki , Koji Kimura , Nobuo Takahashi
发明人： Yukihisa Takeuchi , Tsutomu Nanataki , Koji Kimura , Nobuo Takahashi
IPC分类号： C04B3700
CPC分类号： C04B35/486 , C04B35/4885 , C04B35/6264 , C04B2235/3225 , C04B2235/6025 , H01L41/0973 , H01L41/314 , H04R17/08 , Y10T428/24273 , Y10T428/24322 , Y10T428/24331
摘要： A method of producing a piezoelectric/electrostrictive film element is disclosed. The film element includes a zirconia substrate having a window which is closed by a diaphragm portion, and a piezoelectric or electrostrictive unit formed on the substrate and including a piezoelectric or electrostrictive layer between upper and lower electrodes. The method comprises the steps of: (a) preparing the substrate which has been sintered and in which at least the diaphragm portion contains alumina in an amount of 1.1-5.0 parts by weight; (b) forming, by a film-forming process, the lower electrode on the diaphragm portion, and the piezoelectric/electrostrictive layer on the lower electrode by using a piezoelectric/electrostrictive material which contains magnesia or a component which gives magnesia, in an independent form or in a compound form; and (c) firing the piezoelectric/electrostrictive layer, so as to deposit particles consisting principally of a compound of alumina and magnesia at least on an interface between the diaphragm portion and the lower electrode, the interface being located right under the piezoelectric/electrostrictive layer.
摘要翻译：公开了制造压电/电致伸缩薄膜元件的方法。薄膜元件包括具有由隔膜部分封闭的窗口的氧化锆基板，以及形成在基板上并且在上部和下部电极之间包括压电或电致伸缩层的压电或电致伸缩单元。该方法包括以下步骤：（a）制备已经烧结的衬底，其中至少隔膜部分含有1.1-5.0重量份的氧化铝; （b）通过使用含有氧化镁或氧化镁的成分的压电/电致伸缩材料，通过成膜工艺在隔膜部分上形成下电极和下电极上的压电/电致伸缩层，在独立的形式或复合形式; 和（c）对压电/电致伸缩层进行烧制，至少在隔膜部分和下电极之间的界面上沉积主要由氧化铝和氧化镁组成的颗粒，界面位于压电/电致伸缩层的正下方。

63. 发明授权

US5853514A Method of producing a piezoelectric/electrostrictive film element 失效
标题翻译：压电/电致伸缩薄膜元件的制造方法
公开(公告)号：US5853514A
公开(公告)日：1998-12-29
申请号：US716876
申请日：1996-09-20
申请人： Yukihisa Takeuchi , Tsutomu Nanataki , Koji Kimura , Nobuo Takahashi
发明人： Yukihisa Takeuchi , Tsutomu Nanataki , Koji Kimura , Nobuo Takahashi
IPC分类号： G01L1/16 , C04B35/49 , C04B35/493 , H01L41/09 , H01L41/22 , H04R17/00 , H04R17/08 , C04B37/00 , H01L41/08
CPC分类号： C04B35/486 , C04B35/4885 , C04B35/6264 , H01L41/0973 , H01L41/314 , C04B2235/3225 , C04B2235/6025 , H04R17/08 , Y10T428/24273 , Y10T428/24322 , Y10T428/24331
摘要： A method of producing a piezoelectric/electrostrictive film element is disclosed. The film element includes a zirconia substrate having a window which is closed by a diaphragm portion, and a piezoelectric or electrostrictive unit formed on the substrate and including a piezoelectric or electrostrictive layer between upper and lower electrodes. The method comprises the steps of: (a) preparing the substrate which has been sintered and in which at least the diaphragm portion contains alumina in an amount of 1.1-5.0 parts by weight; (b) forming, by a film-forming process, the lower electrode on the diaphragm portion, and the piezoelectric/electrostrictive layer on the lower electrode by using a piezoelectric/electrostrictive material which contains magnesia or a component which gives magnesia, in an independent form or in a compound form; and (c) firing the piezoelectric/electrostrictive layer, so as to deposit particles consisting principally of a compound of alumina and magnesia at least on an interface between the diaphragm portion and the lower electrode, the interface being located right under the piezoelectric/electrostrictive layer.
摘要翻译：公开了制造压电/电致伸缩薄膜元件的方法。薄膜元件包括具有由隔膜部分封闭的窗口的氧化锆基板，以及形成在基板上并且在上部和下部电极之间包括压电或电致伸缩层的压电或电致伸缩单元。该方法包括以下步骤：（a）制备已经烧结的衬底，其中至少隔膜部分含有1.1-5.0重量份的氧化铝; （b）通过使用含有氧化镁或氧化镁的成分的压电/电致伸缩材料，通过成膜工艺在隔膜部分上形成下电极和下电极上的压电/电致伸缩层，在独立的形式或复合形式; 和（c）对压电/电致伸缩层进行烧制，至少在隔膜部分和下电极之间的界面上沉积主要由氧化铝和氧化镁组成的颗粒，界面位于压电/电致伸缩层的正下方。

64. 发明授权

US06998763B2 Ceramic device 失效
标题翻译：陶瓷装置
公开(公告)号：US06998763B2
公开(公告)日：2006-02-14
申请号：US10230731
申请日：2002-08-29
申请人： Yukihisa Takeuchi , Tsutomu Nanataki , Koji Kimura , Masao Takahashi
发明人： Yukihisa Takeuchi , Tsutomu Nanataki , Koji Kimura , Masao Takahashi
IPC分类号： H01L41/08
CPC分类号： H01L41/0973 , B81B3/0035 , G01P15/09 , H01L41/0477 , H03H9/02133 , H03H9/105 , H03H9/12 , H03H9/132 , H03H9/173 , H03H9/176
摘要： A ceramic device has an actuator element which includes a shape-retaining layer, an upper electrode formed on an upper portion of the shape-retaining layer, and a lower electrode formed on a lower portion of the shape-retaining layer. A vibrating section of ceramics supports the actuator element and a fixed section of ceramics vibratingly supports the vibrating section. An electrode material of the lower electrode contacting the vibrating section contains an additive in an amount of 0.01% by weight to 20% by weight. The electrode material contains platinum as a major component, for example. The additive to the electrode material is preferably zirconium oxide, cerium oxide, or titanium oxide.
摘要翻译：陶瓷器件具有致动器元件，其包括形状保持层，形成在形状保持层的上部上的上电极和形成在形状保持层的下部的下电极。陶瓷的振动部支承致动元件，陶瓷的固定部振动地支承振动部。接触振动部的下部电极的电极材料含有0.01重量％〜20重量％的添加剂。电极材料例如包含铂作为主要成分。电极材料的添加剂优选为氧化锆，氧化铈或氧化钛。

65. 发明授权

US06883215B2 Piezoelectric/electrostrictive device and method of manufacturing same 失效
标题翻译：压电/电致伸缩器件及其制造方法
公开(公告)号：US06883215B2
公开(公告)日：2005-04-26
申请号：US10702391
申请日：2003-11-05
申请人： Yukihisa Takeuchi , Tsutomu Nanataki , Koji Kimura
发明人： Yukihisa Takeuchi , Tsutomu Nanataki , Koji Kimura
IPC分类号： B81B3/00 , B81C1/00 , H01L41/083 , H01L41/09 , H01L41/187 , H01L41/22 , H01L41/314 , H01L41/338 , H01L41/43 , H02N2/00 , H04R17/00
CPC分类号： H01L41/0946 , H01L41/27 , Y10T29/42 , Y10T29/49005 , Y10T29/49126 , Y10T29/49128 , Y10T29/49574 , Y10T29/49789 , Y10T29/49798
摘要： A piezoelectric/electrostrictive device includes a pair of mutually opposing thin plate sections, a movable section, and a fixation section for supporting the thin plate sections and the movable section. One or more piezoelectric/electrostrictive elements are arranged on the pair of thin plate sections. A hole is formed by both inner walls of the pair of thin plate sections, an inner wall of the movable section, and an inner wall of the fixation section. At least one thin plate section of the pair of thin plate sections is previously bent in a direction to make mutual approach so that it has an inwardly convex configuration to the hole.
摘要翻译：压电/电致伸缩装置包括一对相互相对的薄板部分，可移动部分和用于支撑薄板部分和可移动部分的固定部分。一对或多个压电/电致伸缩元件设置在一对薄板部分上。由一对薄板部分的内壁，可移动部分的内壁和固定部分的内壁两个孔形成一个孔。该一对薄板部分中的至少一个薄板部分预先沿着相互接近的方向弯曲，使得其具有朝向该孔的向内凸起的构造。

66. 发明授权

US06842550B2 Optical switch 失效
标题翻译：光开关
公开(公告)号：US06842550B2
公开(公告)日：2005-01-11
申请号：US10027775
申请日：2001-12-20
申请人： Yukihisa Takeuchi , Tsutomu Nanataki , Koji Kimura
发明人： Yukihisa Takeuchi , Tsutomu Nanataki , Koji Kimura
IPC分类号： G02B6/35 , G02B6/43
CPC分类号： G02B6/3522 , G02B6/3512 , G02B6/3556 , G02B6/3578 , G02B6/3582 , G02B6/43
摘要： An optical switch comprises a light transmission portion, an optical path-changing portion, an actuator portion and light transmission channels; said light transmission portion having a light reflecting plane provided on one part of a plane facing the changing portion to totally reflect light; said optical path-changing portion being provided in proximity to the light reflecting plane and having an optical path-changing member for reflecting or scattering light; said actuator portion having a mechanism being displaced and transmitting displacement to the optical path changing portion; and said light transmission channels having optical wave guiding bodies and being provided in three directions with the light reflecting plane as a starting point. Switching or dividing of an optical path is conducted by contacting or separating the optical path-changing portion to or from the light reflecting plane by displacement of the actuator portion.
摘要翻译：光开关包括光传输部分，光路改变部分，致动器部分和光传输通道; 所述光传输部分具有设置在面对所述改变部分的平面的一部分上以全反射光的光反射面; 所述光路改变部分设置在光反射面附近并具有用于反射或散射光的光路改变部件; 所述致动器部分具有位移并将位移传递到光路改变部分的机构; 并且所述光传输通道具有光波导体并且以三个方向设置有光反射面作为起点。通过使致动器部分的位移与光反射面接触或分离光路改变部分来进行光路的切换或分割。

67. 发明授权

US06796011B2 Piezoelectric/electrostrictive device and method of manufacturing same 失效
标题翻译：压电/电致伸缩器件及其制造方法
公开(公告)号：US06796011B2
公开(公告)日：2004-09-28
申请号：US10106141
申请日：2002-03-26
申请人： Yukihisa Takeuchi , Tsutomu Nanataki , Masahiko Namerikawa , Koji Kimura , Kazuyoshi Shibata
发明人： Yukihisa Takeuchi , Tsutomu Nanataki , Masahiko Namerikawa , Koji Kimura , Kazuyoshi Shibata
IPC分类号： H04R1700
CPC分类号： H01L41/0946 , H01L41/273 , Y10T29/42 , Y10T29/435 , Y10T29/49078 , Y10T29/49126
摘要： A piezoelectric/electrostrictive device includes a pair of mutually opposing thin plate sections, a movable section, and a fixing section for supporting the thin plate sections and the movable section. Piezoelectric/electrostrictive elements are arranged on at least one thin plate section of the pair of thin plate sections. A hole is formed by both inner walls of the pair of thin plate sections, an inner wall of the movable section, and an inner wall of the fixing section. The piezoelectric/electrostrictive device has a mechanism for restricting amplitude of the thin plate sections. The mechanism includes a cavity portion formed in the inner wall of the movable section and a stopper member provided on the inner wall of the fixing section, wherein the forward end of the stopper member extends into the cavity portion.
摘要翻译：压电/电致伸缩装置包括一对相互相对的薄板部分，可移动部分和用于支撑薄板部分和可移动部分的固定部分。压电/电致伸缩元件布置在该对薄板部分的至少一个薄板部分上。一对薄壁部分的内壁，可移动部分的内壁和固定部分的内壁都由一个孔形成。压电/电致伸缩装置具有用于限制薄板部分的振幅的机构。该机构包括形成在可动部分的内壁中的空腔部分和设置在固定部分的内壁上的止动部件，其中止动件的前端延伸到空腔部分中。

68. 发明授权

US06715192B2 Method for manufacturing a piezoelectric/electrostrictive device 失效
标题翻译：压电/电致伸缩器件的制造方法
公开(公告)号：US06715192B2
公开(公告)日：2004-04-06
申请号：US09970169
申请日：2001-10-03
申请人： Yukihisa Takeuchi , Tsutomu Nanataki , Toshikazu Hirota , Koji Kimura
发明人： Yukihisa Takeuchi , Tsutomu Nanataki , Toshikazu Hirota , Koji Kimura
IPC分类号： H04R1700
CPC分类号： H01L41/0946 , H01L41/314 , Y10T29/42 , Y10T29/49005 , Y10T29/49131 , Y10T29/49135 , Y10T29/49163
摘要： A fabricating method of a piezoelectric/electrostrictive device including a driving portion having thin plates facing each other and a film-like piezoelectric/electrostrictive element formed on the surface of at least one thin plate of the thin plates, and a fixing portion and a movable portion in rectangular solid form. The thin plates are spanned so that the side faces of the movable portion and the fixing portion are continuous. The fabricating method includes steps of preparing a laminated body of green sheets comprising at least one green sheet to constitute the thin plate, and at least one green sheet with at least one hole formed thereon, sintering a green-sheet laminated body, and forming a piezoelectric/electrostrictive element on an outer surface of the thin plates of the sintered body obtained.
摘要翻译：一种压电/电致伸缩器件的制造方法，包括具有彼此相对的薄板的驱动部分和形成在薄板的至少一个薄板的表面上的膜状压电/电致伸缩元件，以及固定部分和可移动的部分为矩形固体形式。这些薄板被跨越，使得可动部分和固定部分的侧面是连续的。制造方法包括以下步骤：制备包含至少一个生片的生片层压体以构成薄板;以及至少一个生片，其上形成有至少一个孔，烧结生片层压体，并形成在所获得的烧结体的薄板的外表面上的压电/电致伸缩元件。

69. 发明授权

US06643902B2 Piezoelectric/electrostrictive device and method of manufacturing same 失效
标题翻译：压电/电致伸缩器件及其制造方法
公开(公告)号：US06643902B2
公开(公告)日：2003-11-11
申请号：US09683477
申请日：2002-01-04
申请人： Yukihisa Takeuchi , Tsutomu Nanataki , Koji Kimura
发明人： Yukihisa Takeuchi , Tsutomu Nanataki , Koji Kimura
IPC分类号： H04R1700
CPC分类号： H01L41/0926 , H01L41/0946 , H01L41/1876 , H01L41/27 , Y10T29/42 , Y10T29/49005 , Y10T29/49574 , Y10T29/49789
摘要： A method of manufacturing a piezoelectric/electrostrictive device comprises a pair of mutually opposing thin plate sections, a movable section, and a fixation section for supporting the thin plate sections and the movable section. Piezoelectric/electrostrictive elements are arranged on the pair of thin plate sections. A hole is formed by the inner walls of the pair of thin plate sections, an inner wall of the movable section, and an inner wall of the fixation section. A through-hole having a rectangular cross section is formed over a range from a forward end surface of the movable section to the hole to realize a light weight of the movable section.
摘要翻译：制造压电/电致伸缩器件的方法包括一对相互相对的薄板部分，可移动部分和用于支撑薄板部分和可移动部分的固定部分。压电/电致伸缩元件布置在一对薄板部分上。由一对薄板部分的内壁，可移动部分的内壁和固定部分的内壁形成一个孔。在从可动部的前端面到孔的范围内形成具有矩形截面的通孔，以实现可动部的轻量化。

70. 发明授权

US06624549B2 Piezoelectric/electrostrictive device and method of fabricating the same 有权
公开(公告)号：US06624549B2
公开(公告)日：2003-09-23
申请号：US09802474
申请日：2001-03-09
申请人： Yukihisa Takeuchi , Tsutomu Nanataki , Koji Kimura
发明人： Yukihisa Takeuchi , Tsutomu Nanataki , Koji Kimura
IPC分类号： H02N4108
CPC分类号： G02B26/0858 , H01L41/094 , H01L41/0946 , H01L41/314 , H01L41/338 , Y10T29/42 , Y10T29/49002 , Y10T29/49005 , Y10T29/4902 , Y10T29/4908
摘要： A piezoelectric/electrostrictive device includes a functional element. The functional element includes a base portion; a deformable portion assuming the form of a thin plate and extending from the base portion to thereby form a plane; a piezoelectric/electrostrictive element formed on the deformable portion; and a reflective portion extending from the deformable portion so as to form an active plane intersecting with the plane of the deformable portion, and having a light-reflecting member disposed on the active plane. Operation of the piezoelectric/electrostrictive element causes the deformable portion to be deformed in a direction substantially perpendicular to the plane of the deformable portion to thereby change a reflection angle of light reflected from the reflective portion.

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