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    • 61. 发明授权
    • Method for fabricating thin film magnetic heads using CMP with polishing stop layer
    • 使用具有抛光停止层的CMP制造薄膜磁头的方法
    • US07279424B2
    • 2007-10-09
    • US10928002
    • 2004-08-27
    • Hung-Chin GuthrieMing JiangHong Zhang
    • Hung-Chin GuthrieMing JiangHong Zhang
    • H01L21/302
    • B82Y25/00G11B5/3163G11B5/3169
    • A method is described for thin film processing using a selected CMP slurry with a silicon dioxide stop layer. The slurry includes an abrasive, preferably alumina, a corrosion inhibitor, preferably benzotriazole (BTA), and an oxidizer preferably hydrogen peroxide. The method is particularly useful for fabricating thin film heads where alumina is used as the dielectric. The method can be used to planarize metal structures surrounded by alumina in magnetic heads. The alumina refill is deposited to the final target height which is slightly below the height of the metal. A thin silicon dioxide stop layer is deposited over the alumina. The CMP is executed using the selected slurry to planarize the wafer down to the stop layer. Preferably only a negligible amount of the stop layer remains and the height of the metal structure is essentially the same as the deposited height of the refilled alumina.
    • 描述了使用具有二氧化硅停止层的所选CMP浆料进行薄膜处理的方法。 浆料包括研磨剂,优选氧化铝,腐蚀抑制剂,优选苯并三唑(BTA)和优选过氧化氢的氧化剂。 该方法对于制造其中使用氧化铝作为电介质的薄膜头特别有用。 该方法可用于平面化由磁头中的氧化铝包围的金属结构。 氧化铝填充物沉积到稍低于金属高度的最终目标高度。 在氧化铝上沉积薄的二氧化硅阻挡层。 使用所选择的浆料执行CMP以将晶片平坦化到停止层。 优选地,仅剩下可忽略量的止挡层,并且金属结构的高度与再填充氧化铝的沉积高度基本相同。
    • 64. 发明申请
    • Small Form Factor Web Browsing
    • 小尺寸网页浏览
    • US20060282444A1
    • 2006-12-14
    • US11465718
    • 2006-08-18
    • Yu ChenWei-Ying MaMing-Yu WangHong Zhang
    • Yu ChenWei-Ying MaMing-Yu WangHong Zhang
    • G06F7/00
    • G06F17/30905
    • A large web page is analyzed and partitioned into smaller sub-pages so that a user can navigate the web page on a small form factor device. The user can browse the sub-pages to find and read information in the content of the large web page. The partitioning can be performed at a web server, an edge server, at the small form factor device, or can be distributed across one or more such devices. The analysis leverages design habits of a web page author to extract a representation structure of an authored web page. The extracted representation structure includes high level structure using several markup language tag selection rules and low level structure using visual boundary detection in which visual units of the low level structure are provided by clustering markup language tags. User viewing habits can be learned to display favorite parts of a web page.
    • 分析大型网页并将其划分为更小的子页面,以便用户可以在小尺寸设备上浏览网页。 用户可以浏览子页面,以便在大型网页的内容中查找和读取信息。 分区可以在Web服务器,边缘服务器,小尺寸设备处执行,或者可以分布在一个或多个这样的设备上。 分析利用网页作者的设计习惯来提取创作网页的表示结构。 所提取的表示结构包括使用几种标记语言标签选择规则的高级结构和使用视觉边界检测的低级结构,其中通过聚类标记语言标签提供低级结构的视觉单元。 可以学习用户观看习惯来显示网页的喜爱部分。