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61. 发明授权

US06693008B1 Method of manufacturing a semiconductor integrated circuit device and a semiconductor integrated circuit device 有权
标题翻译：半导体集成电路器件和半导体集成电路器件的制造方法
公开(公告)号：US06693008B1
公开(公告)日：2004-02-17
申请号：US09709403
申请日：2000-11-13
申请人： Hidenori Sato , Norio Suzuki , Akira Takamatsu , Hiroyuki Maruyama , Takeshi Saikawa , Katsuhiko Hotta , Hiroyuki Ichizoe
发明人： Hidenori Sato , Norio Suzuki , Akira Takamatsu , Hiroyuki Maruyama , Takeshi Saikawa , Katsuhiko Hotta , Hiroyuki Ichizoe
IPC分类号： H01L218242
CPC分类号： H01L21/76229 , H01L21/02271 , H01L21/02282 , H01L21/3125 , H01L21/31612 , H01L27/0211 , H01L27/105 , H01L27/1052 , H01L27/10814 , H01L27/10844 , H01L27/10894
摘要： In order to fill in an isolation trench formed on a semiconductor substrate, the isolation trench is filled up to a predetermined middle position with a coating film first, and then an insulating film formed by a CVD method is deposited thereon. Additionally, the insulating film is polished by a CMP method, for example, so as to be ground. Thus, the isolation trench is filled with stacked films of the coating film and the insulating film. Further, an electrode pattern and a dummy pattern are formed on the semiconductor substrate, and the trench formed between these patterns is filled up to a predetermined middle position in its depth direction with the coating film. Then, a remaining depth portion of the trench is filled with the insulating film formed by a CVD method.
摘要翻译：为了填充形成在半导体衬底上的隔离沟槽，首先将隔离沟槽填充到具有涂膜的预定中间位置，然后沉积通过CVD法形成的绝缘膜。此外，例如通过CMP方法对绝缘膜进行研磨以进行研磨。因此，隔离沟槽填充有涂膜和绝缘膜的堆叠膜。此外，在半导体衬底上形成电极图案和虚拟图案，并且在这些图案之间形成的沟槽在其深度方向上与涂膜填充到预定的中间位置。然后，用CVD法形成的绝缘膜填充沟槽的剩余深度部分。

62. 发明授权

US5956161A Image reading apparatus having a steeply inclined paper transport path 失效
标题翻译：图像读取装置具有陡倾斜的纸张输送路径
公开(公告)号：US5956161A
公开(公告)日：1999-09-21
申请号：US962355
申请日：1997-10-31
申请人： Yoshihiro Takashimizu , Masahiro Yoshida , Toshiaki Anzai , Hirotoshi Kakegawa , Noriaki Yamazaki , Toshio Saito , Hiroyuki Maruyama , Fumiaki Harada , Seigo Umeda , Yoshio Tabata
发明人： Yoshihiro Takashimizu , Masahiro Yoshida , Toshiaki Anzai , Hirotoshi Kakegawa , Noriaki Yamazaki , Toshio Saito , Hiroyuki Maruyama , Fumiaki Harada , Seigo Umeda , Yoshio Tabata
IPC分类号： G06T1/00 , H04N1/00 , H04N1/12 , H04N1/193 , H04N1/203 , G03G21/00
CPC分类号： H04N1/00588 , H04N1/00567 , H04N1/00591 , H04N1/00602 , H04N1/0062 , H04N1/00631 , H04N1/00681 , H04N1/00687 , H04N1/00694 , H04N1/00708 , H04N1/00734 , H04N1/00745 , H04N1/0075 , H04N1/00755 , H04N1/203 , H04N1/2032 , H04N1/121 , H04N1/193
摘要： An improved image reading apparatus suitable for use with an image scanner which can read a large number of paper sheets successively and rapidly and cope with various paper sizes from a small size to a large size. The image reading apparatus includes a paper supply mechanism, a paper transport mechanism, an optical image reading mechanism for optically reading information on a paper sheet being transported by the paper transport mechanism, and a paper stacking mechanism. The paper transport mechanism includes a paper transport path including an inclined transport path and a paper reversing transport path contiguous to the inclined transport path, a plurality of paper transport rollers disposed in a spaced relationship from each other by a distance smaller than the length of a paper sheet in its transportation direction along the paper transport path, a roller driving mechanism for driving the paper transport rollers, and a roller driving mechanism control apparatus for controlling the roller driving mechanism. The optical image reading mechanism includes an optical image reading unit, and an image information extraction control apparatus for controlling extraction of image information obtained by the optical image reading unit.
摘要翻译：一种改进的图像读取装置，适用于能够连续快速读取大量纸张的图像扫描器，并且能够处理从小尺寸到大尺寸的各种纸张尺寸。图像读取装置包括供纸机构，纸张输送机构，用于光学读取由纸张传送机构传送的纸张上的信息的光学图像读取机构以及纸张堆叠机构。纸张传送机构包括一个纸张传送路径，该传送路径包括倾斜传送路径和与该倾斜传送路径相邻的纸张反转传送路径，多个纸张传送辊以彼此间隔开的距离彼此间隔一个小于沿着纸张输送路径的输送方向的纸张，用于驱动纸张传送辊的辊驱动机构，以及用于控制辊驱动机构的辊驱动机构控制装置。光学图像读取机构包括光学图像读取单元和用于控制由光学图像读取单元获得的图像信息的提取的图像信息提取控制装置。

63. 发明授权

US5823522A Sheet holder removably attached to data processing apparatus 失效
标题翻译：可拆卸地附接到数据处理设备的纸张保持架
公开(公告)号：US5823522A
公开(公告)日：1998-10-20
申请号：US689729
申请日：1996-08-13
申请人： Tatsuo Fujiwara , Hiroyuki Maruyama , Toshio Saitoh
发明人： Tatsuo Fujiwara , Hiroyuki Maruyama , Toshio Saitoh
IPC分类号： B65H1/26 , B65H1/04 , G06K13/16 , B65H5/22
CPC分类号： G06K13/16
摘要： A sheet holder removably attached to a hopper of a image reading apparatus. The sheet holder has a front bottom wall, a rear top wall, and an intermediate wall connecting the front bottom wall to the rear top wall. The front bottom wall provides a sheet placing area onto which small and thick sheets like business cards are placed and a holding member holds the sheets on the sheet placing area. A pick roller of the image reading apparatus can contact the sheet on the sheet placing area when the sheet holder is attached to the apparatus. The apparatus has a box-shaped a casing having a drawable hopper table providing a hopper for placing normal thin sheets thereon.
摘要翻译：纸张保持器，其可移除地附接到图像读取装置的料斗。片材保持具有前底壁，后顶壁和连接前底壁和后顶壁的中间壁。前底壁提供了放置小型和厚板的名片放置区域，并且保持构件将片材保持在片材放置区域上。当纸张保持器附接到装置时，图像读取装置的拾取辊可以与片材放置区域上的片材接触。该装置具有盒形壳体，该壳体具有可拉出的料斗台，其提供用于在其上放置普通薄片的料斗。

64. 发明授权

US07474764B2 Picture processing apparatus, picture processing method, picture pickup apparatus, and program 有权
标题翻译：图像处理装置，图像处理方法，图像拾取装置和程序
公开(公告)号：US07474764B2
公开(公告)日：2009-01-06
申请号：US11201262
申请日：2005-08-11
申请人： Machiko Segawa , Keigo Ihara , Nobuyuki Matsushita , Makoto Murata , Eiji Takahashi , Ryu Aoyama , Caoyi Lu , Hiroyuki Maruyama
发明人： Machiko Segawa , Keigo Ihara , Nobuyuki Matsushita , Makoto Murata , Eiji Takahashi , Ryu Aoyama , Caoyi Lu , Hiroyuki Maruyama
IPC分类号： G06K9/00 , H04N5/225 , H04N3/20
CPC分类号： G11B27/28 , G11B27/034
摘要： A picture processing apparatus is disclosed which processes pictures showing subjects wearing devices each assigned identification information. The picture processing apparatus includes: an acquiring mechanism acquiring a first picture sequence formed by the pictures showing the subjects wearing the devices, and a time series of the identification information assigned to the devices; and a clustering mechanism which, based on how the time series acquired by the acquiring mechanism is linked according to the identification information, links together scenes constituting the first picture sequence, the scenes having been picked up at corresponding points in time.
摘要翻译：公开了一种图像处理装置，其处理显示被分配了识别信息的装置的被摄体的图像。图像处理装置包括：获取机构，获取由显示穿戴设备的被摄体的图像形成的第一图像序列，以及分配给该装置的识别信息的时间序列; 以及聚类机构，其基于由获取机构获取的时间序列如何根据识别信息链接，将构成第一图像序列的场景链接在对应的时间点被拾取的场景。

65. 发明授权

US07176121B2 Semiconductor device and manufacturing method thereof 有权
公开(公告)号：US07176121B2
公开(公告)日：2007-02-13
申请号：US10684399
申请日：2003-10-15
申请人： Kazutoshi Ohmori , Tsuyoshi Tamaru , Naohumi Ohashi , Kiyohiko Sato , Hiroyuki Maruyama
发明人： Kazutoshi Ohmori , Tsuyoshi Tamaru , Naohumi Ohashi , Kiyohiko Sato , Hiroyuki Maruyama
IPC分类号： H01L21/4763
CPC分类号： H01L23/53238 , H01L21/76807 , H01L21/7681 , H01L21/76829 , H01L21/76832 , H01L21/76834 , H01L23/53295 , H01L2924/0002 , H01L2924/00
摘要： A semiconductor device and a manufacturing method thereof are provided for the improvement of the reliability of copper damascene wiring in which a film between wiring layers and a film between via layers are comprised of an SiOC film with low dielectric constant. A film between wiring layers, a film between wiring layers, and a film between via layers are respectively comprised of an SiOC film, and stopper insulating films and a cap insulating film are comprised of a laminated film of an SiCN film A and an SiC film B. By doing so, it becomes possible to reduce the leakage current of the film between wiring layers, the film between wiring layers, and the film between via layers, and also possible to improve the adhesion of the film between wiring layers, the film between wiring layers, and the film between via layers to the stopper insulating films and the cap insulating film.

66. 发明申请

US20060209275A1 Exposure apparatus, and device manufacturing method 失效
标题翻译：曝光装置和装置制造方法
公开(公告)号：US20060209275A1
公开(公告)日：2006-09-21
申请号：US11373172
申请日：2006-03-13
申请人： Chiharu Kido , Hiroyuki Maruyama
发明人： Chiharu Kido , Hiroyuki Maruyama
IPC分类号： G03B27/52
CPC分类号： G03F7/70858
摘要： Disclosed is an exposure apparatus for exposing a substrate through a reticle, that includes a cooling device configured to cooling first water supplied from a facility by use of second water supplied fro the facility and having a temperature lower than the first water, and a supplying system for supplying water cooled by the cooling device, to a heat source inside the exposure apparatus. Also disclosed is an exposure apparatus for exposing a substrate through a reticle, that includes a chamber in which an exposure process is to be carried out, a circulation system configured to circulate a gas through the chamber, a supplying system configured to supply water, supplied from a facility, to a heat source inside the exposure apparatus, and a heat exchanger configured perform heat exchange between a gas discharged out of the chamber by the circulation system and the water to be supplied to the heat source by the supplying system.
摘要翻译：公开了一种曝光装置，用于使基板通过掩模版曝光，该曝光装置包括冷却装置，该冷却装置构造成通过使用从设备供应的第二水并且具有低于第一水的温度冷却从设施供应的第一水;以及供应系统用于将由冷却装置冷却的水供应到曝光装置内部的热源。还公开了一种曝光装置，用于通过掩模版露出衬底，该掩模版包括将要进行曝光处理的腔室，构造成使气体循环通过腔室的循环系统，被供应的供水系统从设施到曝光装置内的热源，构成的热交换器通过循环系统进行从室排出的气体与由供给系统供给到热源的水之间的热交换。

67. 发明申请

US20060176465A1 Alignment apparatus, exposure apparatus, and device manufacturing method using exposure apparatus 失效
标题翻译：对准装置，曝光装置和使用曝光装置的装置制造方法
公开(公告)号：US20060176465A1
公开(公告)日：2006-08-10
申请号：US11347037
申请日：2006-02-03
申请人： Hiroyuki Maruyama
发明人： Hiroyuki Maruyama
IPC分类号： G03B27/58
CPC分类号： G03F7/70933 , G03F7/70758 , G03F7/70775 , G03F7/70858
摘要： An alignment apparatus includes driving means having a movable element and a stator, a measurement unit which measures a position of a moving member moved by the driving means using measurement light, and a discharging unit to discharge gas existing in an optical path of the measurement light. The discharging unit is provided to the stator.
摘要翻译：对准装置包括具有可移动元件和定子的驱动装置，测量单元，其测量由驱动装置利用测量光移动的移动构件的位置;以及放电单元，用于排出存在于测量光的光路中的气体。放电单元设置在定子上。

68. 发明授权

US07074691B2 Method of manufacturing a semiconductor integrated circuit device that includes forming dummy patterns in an isolation region prior to filling with insulating material 失效
标题翻译：一种制造半导体集成电路器件的方法，包括在填充绝缘材料之前在隔离区域中形成虚拟图案
公开(公告)号：US07074691B2
公开(公告)日：2006-07-11
申请号：US11149539
申请日：2005-06-10
申请人： Hidenori Sato , Norio Suzuki , Akira Takamatsu , Hiroyuki Maruyama , Takeshi Saikawa , Katsuhiko Hotta , Hiroyuki Ichizoe
发明人： Hidenori Sato , Norio Suzuki , Akira Takamatsu , Hiroyuki Maruyama , Takeshi Saikawa , Katsuhiko Hotta , Hiroyuki Ichizoe
IPC分类号： H01L21/762
CPC分类号： H01L21/76229 , H01L21/02271 , H01L21/02282 , H01L21/3125 , H01L21/31612 , H01L27/0211 , H01L27/105 , H01L27/1052 , H01L27/10814 , H01L27/10844 , H01L27/10894
摘要： A method for manufacturing a semiconductor integrated circuit device includes the steps of forming an isolation trench in an isolation region of a semiconductor substrate, filling the isolation trench up to predetermined middle position in its depth direction with a first insulating film deposited by a coating method, filling a remaining depth portion of the isolation trench into which the first insulating film is filled with a second insulating film, then forming a plurality of patterns on the semiconductor substrate, filling a trench forming between the plurality of patterns up to predetermined middle position in a trench depth direction with a third insulating film deposited by a coating method, and filling a remaining portion of the trench into which the third insulating film is filled with a fourth insulating film that is more difficult to etch than the third insulating film. The method may also include the step of forming dummy patters in a relatively large isolation region of isolation regions with relatively different planar dimensions before the first insulating film is deposited.
摘要翻译：一种制造半导体集成电路器件的方法包括以下步骤：在半导体衬底的隔离区域中形成隔离沟槽，通过涂覆方法沉积的第一绝缘膜将隔离沟填充到其深度方向上的预定中间位置，用第二绝缘膜填充绝缘沟槽的剩余深度部分，然后在半导体衬底上形成多个图案，在多个图案之间填充形成沟槽直到预定中间位置的沟槽沟槽深度方向与通过涂覆方法沉积的第三绝缘膜，并且填充第三绝缘膜填充有比第三绝缘膜更难蚀刻的第四绝缘膜的沟槽的剩余部分。该方法还可以包括在第一绝缘膜沉积之前在具有相对不同的平面尺寸的隔离区的相对大的隔离区域中形成伪图案的步骤。

69. 发明授权

US06977759B2 Optical image reader 失效
标题翻译：光学图像阅读器
公开(公告)号：US06977759B2
公开(公告)日：2005-12-20
申请号：US09741019
申请日：2000-12-21
申请人： Toshimitsu Kumagai , Hiroyuki Maruyama
发明人： Toshimitsu Kumagai , Hiroyuki Maruyama
IPC分类号： G06T1/00 , H04N1/00 , H04N1/04 , H04N1/10 , H04N1/40 , H04N1/403
CPC分类号： H04N1/00806 , H04N1/00795 , H04N1/10 , H04N1/40056 , H04N1/403 , H04N2201/0422
摘要： Optical image reading equipment is disclosed, whereby a background color of a document can be changed depending on a processing of the acquired image. The equipment is provided with an illuminating member (32) for illuminating a document, a reading portion (30) for reading reflected light of the document, and a backing member provided at least in the reading position of the document. The backing member is disposed on the opposite side to the reading portion across the document. The backing member is configured by a member which produces background color outside the document changeable by means of electric control. Thus an image suitable for a successive processing can be output.
摘要翻译：公开了光学图像读取设备，由此可以根据所获取的图像的处理来改变文档的背景颜色。该设备设置有用于照射文件的照明部件（32），用于读取文件的反射光的读取部分（30）和至少设置在文档读取位置的背衬部件。背衬构件设置在穿过文件的读取部分的相对侧上。背衬构件由通过电气控制可改变的文档外部产生背景颜色的构件构成。因此，可以输出适合于连续处理的图像。

70. 发明申请

US20050205278A1 Cable system to exchange data 审中-公开
标题翻译：有线系统交换数据
公开(公告)号：US20050205278A1
公开(公告)日：2005-09-22
申请号：US10848104
申请日：2004-05-17
申请人： Hiroyuki Maruyama , John Spencer , Clas Siversten , Tohru Iwama
发明人： Hiroyuki Maruyama , John Spencer , Clas Siversten , Tohru Iwama
IPC分类号： H01B11/02 , H01R13/46 , H01R29/00
CPC分类号： H01R13/465 , H01R29/00 , H01R2201/04
摘要： A cable system is provided that allows a computer to communicate or share data with a variety of cellular phones having different interface connectors. The cable system includes a base cable and a plurality of adapter cables. The plurality of adapter cables are adapted to communicably couple to the base cable. Each of the adapter cables is configured to communicably couple with one of the plurality of cellular phones. Depending on the cellular phone a user is using, the user may select one adapter cable from the plurality of adapter cables, which is configured to communicably couple with the user's cellular phone. The base cable is adapted to communicably couple with the computer. With the communication line linked from the PC to the base cable, from base cable to the selected adapter cable, and from the selected base cable to the user's cellular phone, the PC may exchange electronic data with the cellular phone.
摘要翻译：提供了一种电缆系统，其允许计算机与具有不同接口连接器的各种蜂窝电话进行通信或共享数据。电缆系统包括基座电缆和多个适配器电缆。多个适配器电缆适于可通信地耦合到基础电缆。每个适配器电缆被配置为与所述多个蜂窝电话之一可通信地耦合。根据用户正在使用的蜂窝电话，用户可以从多个适配器电缆中选择一个适配器电缆，其被配置为与用户的蜂窝电话可通信地耦合。基座电缆适于与计算机通信地连接。通过从PC到基础电缆的通信线路，从基础电缆到选定的适配器电缆，从所选的基础电缆到用户的手机，PC可以与蜂窝电话交换电子数据。

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