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1. 发明授权

US08012871B2 Semiconductor device and manufacturing method thereof 有权
标题翻译：半导体装置及其制造方法
公开(公告)号：US08012871B2
公开(公告)日：2011-09-06
申请号：US12771494
申请日：2010-04-30
申请人： Kazutoshi Ohmori , Tsuyoshi Tamaru , Naohumi Ohashi , Kiyohiko Sato , Hiroyuki Maruyama
发明人： Kazutoshi Ohmori , Tsuyoshi Tamaru , Naohumi Ohashi , Kiyohiko Sato , Hiroyuki Maruyama
IPC分类号： H01L21/4763
CPC分类号： H01L21/76829 , H01L21/02126 , H01L21/0214 , H01L21/02167 , H01L21/022 , H01L21/02211 , H01L21/02274 , H01L21/3148 , H01L21/31633 , H01L21/3185 , H01L21/76801 , H01L21/7681 , H01L21/76832 , H01L21/7684 , H01L2924/0002 , H01L2924/00
摘要： A semiconductor device and a manufacturing method thereof are provided for the improvement of the reliability of copper damascene wiring in which a film between wiring layers and a film between via layers are comprised of an SiOC film with low dielectric constant. A film between wiring layers, a film between wiring layers, and a film between via layers are respectively comprised of an SiOC film, and stopper insulating films and a cap insulating film are comprised of a laminated film of an SiCN film A and an SiC film B. By doing so, it becomes possible to reduce the leakage current of the film between wiring layers, the film between wiring layers, and the film between via layers, and also possible to improve the adhesion of the film between wiring layers, the film between wiring layers, and the film between via layers to the stopper insulating films and the cap insulating film.
摘要翻译：提供一种半导体器件及其制造方法，用于提高布线层之间的膜和通孔层之间的膜由具有低介电常数的SiOC膜构成的铜镶嵌线的可靠性的提高。布线层之间的膜，布线层之间的膜和通孔层之间的膜分别由SiOC膜构成，并且阻挡绝缘膜和帽绝缘膜由SiCN膜A和SiC膜的层压膜构成通过这样做，可以减少布线层之间的膜，布线层之间的膜和通孔层之间的膜的漏电流，并且还可以提高布线层之间的膜的粘附性，膜布线层之间的通孔层与阻挡绝缘膜和帽绝缘膜之间的膜。

2. 发明申请

US20100210107A1 SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREOF 有权
标题翻译：半导体器件及其制造方法
公开(公告)号：US20100210107A1
公开(公告)日：2010-08-19
申请号：US12771494
申请日：2010-04-30
申请人： Kazutoshi Ohmori , Tsuyoshi Tamaru , Naohumi Ohashi , Kiyohiko Sato , Hiroyuki Maruyama
发明人： Kazutoshi Ohmori , Tsuyoshi Tamaru , Naohumi Ohashi , Kiyohiko Sato , Hiroyuki Maruyama
IPC分类号： H01L21/768
CPC分类号： H01L21/76829 , H01L21/02126 , H01L21/0214 , H01L21/02167 , H01L21/022 , H01L21/02211 , H01L21/02274 , H01L21/3148 , H01L21/31633 , H01L21/3185 , H01L21/76801 , H01L21/7681 , H01L21/76832 , H01L21/7684 , H01L2924/0002 , H01L2924/00
摘要： A semiconductor device and a manufacturing method thereof are provided for the improvement of the reliability of copper damascene wiring in which a film between wiring layers and a film between via layers are comprised of an SiOC film with low dielectric constant. A film between wiring layers, a film between wiring layers, and a film between via layers are respectively comprised of an SiOC film, and stopper insulating films and a cap insulating film are comprised of a laminated film of an SiCN film A and an SiC film B. By doing so, it becomes possible to reduce the leakage current of the film between wiring layers, the film between wiring layers, and the film between via layers, and also possible to improve the adhesion of the film between wiring layers, the film between wiring layers, and the film between via layers to the stopper insulating films and the cap insulating film.
摘要翻译：提供一种半导体器件及其制造方法，用于提高布线层之间的膜和通孔层之间的膜由具有低介电常数的SiOC膜构成的铜镶嵌线的可靠性的提高。布线层之间的膜，布线层之间的膜和通孔层之间的膜分别由SiOC膜构成，并且阻挡绝缘膜和帽绝缘膜由SiCN膜A和SiC膜的层压膜构成通过这样做，可以减少布线层之间的膜，布线层之间的膜和通孔层之间的膜的漏电流，并且还可以提高布线层之间的膜的粘附性，膜布线层之间的通孔层与阻挡绝缘膜和帽绝缘膜之间的膜。

3. 发明授权

US07542058B2 Color image forming apparatus using registration marks 失效
标题翻译：使用配准标记的彩色图像形成装置
公开(公告)号：US07542058B2
公开(公告)日：2009-06-02
申请号：US11126129
申请日：2005-05-10
申请人： Eiji Nishikawa , Hiroyuki Maruyama , Hiroyuki Arai , Toshihiro Motoi , Kenji Izumiya , Ryuji Okutomi , Shinobu Kishi , Satoshi Ogata , Kenichi Ozawa , Tadayuki Ueda , Yumiko Higashi
发明人： Eiji Nishikawa , Hiroyuki Maruyama , Hiroyuki Arai , Toshihiro Motoi , Kenji Izumiya , Ryuji Okutomi , Shinobu Kishi , Satoshi Ogata , Kenichi Ozawa , Tadayuki Ueda , Yumiko Higashi
IPC分类号： G03G15/01
CPC分类号： B41J29/393 , G03G15/0194 , G03G2215/0119 , G03G2215/0161 , G06K15/129 , H04N1/506
摘要： In an image forming apparatus for forming a color image by superposing component color images, a control device obtains position data representing a forming position of each of plural registration mark images for the component color images with respect to a positional reference value arbitrarily determined, divides the position data into each of a unit reference range representing a range in which one mark image is formed, converts the position data divided for each unit reference range into those based on respective reference values representing the front edge of the unit reference ranges, extracts the position data representing ranges common to the mutually overlapping ranges each of which is representing by a couple of position data corresponding to the rising and falling edges of a passage timing pulse as read position data of the mark image of the component color, and calculates the amounts of positional deviations of the component color images from one another on the basis of the position data extracted.
摘要翻译：在通过叠加分量彩色图像形成彩色图像的图像形成装置中，控制装置获取表示相对于任意确定的位置基准值的分量彩色图像的多个对准标记图像中的每一个的形成位置的位置数据，将位置数据分配到表示形成一个标记图像的范围的单位基准范围的每一个中，根据表示单位基准范围的前沿的各个基准值，将每个单位基准范围划分的位置数据转换为基准值，数据表示相互重叠的范围共同的范围，每个范围通过对应于通过定时脉冲的上升沿和下降沿的一对位置数据表示为分量颜色的标记图像的读取位置数据，并且计算基于此，分量彩色图像彼此的位置偏差提取位置数据。

4. 发明授权

US07460213B2 Alignment apparatus, exposure apparatus, and device manufacturing method using exposure apparatus 失效
标题翻译：对准装置，曝光装置和使用曝光装置的装置制造方法
公开(公告)号：US07460213B2
公开(公告)日：2008-12-02
申请号：US11925026
申请日：2007-10-26
申请人： Hiroyuki Maruyama
发明人： Hiroyuki Maruyama
IPC分类号： G03B27/58
CPC分类号： G03F7/70933 , G03F7/70758 , G03F7/70775 , G03F7/70858
摘要： An alignment apparatus includes driving means having a movable element and a stator, a measurement unit which measures a position of a moving member moved by the driving means using measurement light, and a discharging unit to discharge gas existing in an optical path of the measurement light. The discharging unit is provided to the stator.
摘要翻译：对准装置包括具有可移动元件和定子的驱动装置，测量单元，其测量由驱动装置利用测量光移动的移动构件的位置;以及放电单元，用于排出存在于测量光的光路中的气体。放电单元设置在定子上。

5. 发明申请

US20080056790A1 Sheet conveyance apparatus and image forming apparatus 有权
标题翻译：片材输送装置和图像形成装置
公开(公告)号：US20080056790A1
公开(公告)日：2008-03-06
申请号：US11882923
申请日：2007-08-07
申请人： Hiroyuki Maruyama
发明人： Hiroyuki Maruyama
IPC分类号： G03G15/00
CPC分类号： G03G15/6567 , G03G15/235 , G03G15/6564
摘要： A sheet conveying apparatus which conveys a recording sheet fed from a sheet feeding section toward a transfer position with controlled timing, including: a pair of registration rollers; a pair of loop rollers to form a loop of the recording sheet, the loop rollers being disposed upstream of the registration rollers in a sheet feeding direction; and a movable conveying unit configured such that the registration rollers and the loop rollers move as a unified body when correcting at least a lateral misalignment, which is a misalignment in a vertical direction to the sheet feeding direction, and inclination of the recording sheet.
摘要翻译：一种纸张输送装置，其将从纸张供给部供给到具有受控定时的转印位置的记录纸输送，包括：一对定位辊; 一对环形辊，以形成记录纸的环，所述环形辊在纸张进给方向上设置在所述对位辊的上游; 以及可移动输送单元，其构造成使得当校正至少一个垂直方向与片材进给方向不对准的横向偏移和记录片材的倾斜时，定位辊和环形辊作为统一的主体移动。

6. 发明授权

US07208391B2 Method of manufacturing a semiconductor integrated circuit device that includes forming an isolation trench around active regions and filling the trench with two insulating films 有权
标题翻译：制造半导体集成电路器件的方法包括在有源区周围形成隔离沟槽并用两个绝缘膜填充沟槽
公开(公告)号：US07208391B2
公开(公告)日：2007-04-24
申请号：US11149538
申请日：2005-06-10
申请人： Hidenori Sato , Norio Suzuki , Akira Takamatsu , Hiroyuki Maruyama , Takeshi Saikawa , Katsuhiko Hotta , Hiroyuki Ichizoe
发明人： Hidenori Sato , Norio Suzuki , Akira Takamatsu , Hiroyuki Maruyama , Takeshi Saikawa , Katsuhiko Hotta , Hiroyuki Ichizoe
IPC分类号： H01L21/762
CPC分类号： H01L21/76229 , H01L21/02271 , H01L21/02282 , H01L21/3125 , H01L21/31612 , H01L27/0211 , H01L27/105 , H01L27/1052 , H01L27/10814 , H01L27/10844 , H01L27/10894
摘要： A method for manufacturing a semiconductor integrated circuit device includes the steps of forming an isolation trench in an isolation region of a semiconductor substrate, filling the isolation trench up to predetermined middle position in its depth direction with a first insulating film deposited by a coating method, filling a remaining depth portion of the isolation trench into which the first insulating film is filled with a second insulating film, then forming a plurality of patterns on the semiconductor substrate, filling a trench forming between the plurality of patterns up to predetermined middle position in a trench depth direction with a third insulating film deposited by a coating method, and filling a remaining portion of the trench into which the third insulating film is filled with a fourth insulating film that is more difficult to etch than the third insulating film. The method may also include the step of forming dummy patters in a relatively large isolation region of isolation regions with relatively different planar dimensions before the first insulating film is deposited.
摘要翻译：一种制造半导体集成电路器件的方法包括以下步骤：在半导体衬底的隔离区域中形成隔离沟槽，通过涂覆方法沉积的第一绝缘膜将隔离沟填充到其深度方向上的预定中间位置，用第二绝缘膜填充绝缘沟槽的剩余深度部分，然后在半导体衬底上形成多个图案，在多个图案之间填充形成沟槽直到预定中间位置的沟槽沟槽深度方向与通过涂覆方法沉积的第三绝缘膜，并且填充第三绝缘膜填充有比第三绝缘膜更难蚀刻的第四绝缘膜的沟槽的剩余部分。该方法还可以包括在第一绝缘膜沉积之前在具有相对不同的平面尺寸的隔离区的相对大的隔离区域中形成伪图案的步骤。

7. 发明授权

US07201016B2 Refrigerant supply apparatus 失效
标题翻译：制冷剂供应装置
公开(公告)号：US07201016B2
公开(公告)日：2007-04-10
申请号：US10776168
申请日：2004-02-12
申请人： Hiroyuki Maruyama
发明人： Hiroyuki Maruyama
IPC分类号： F25B43/04
CPC分类号： H01L21/67109 , G03F7/70758 , G03F7/70858
摘要： A refrigerant supply apparatus for supplying a refrigerant to a cooling target. The apparatus includes a refrigerant supply channel through which pure water as the refrigerant is supplied to the cooling target, an impurity removing unit disposed in an impurity removing channel which is a channel different from the refrigerant supply channel, a sensor which measures a purity of the pure water, and a valve which stops supply of the pure water to the cooling target when the purity of the pure water does not satisfy a predetermined standard.
摘要翻译：一种用于向冷却对象供给制冷剂的制冷剂供给装置。该装置包括制冷剂供给通道，通过该制冷剂供给通道将作为制冷剂的纯水供给到冷却对象，杂质除去单元，设置在不同于制冷剂供给通道的通道的杂质去除通道中，测量纯度的传感器纯水以及当纯水的纯度不满足预定标准时停止向冷却对象供应纯水的阀。

8. 发明申请

US20050239257A1 Method of manufacturing a semiconductor integrated circuit device and a semiconductor integrated circuit device 有权
公开(公告)号：US20050239257A1
公开(公告)日：2005-10-27
申请号：US11149538
申请日：2005-06-10
申请人： Hidenori Sato , Norio Suzuki , Akira Takamatsu , Hiroyuki Maruyama , Takeshi Saikawa , Katsuhiko Hotta , Hiroyuki Ichizoe
发明人： Hidenori Sato , Norio Suzuki , Akira Takamatsu , Hiroyuki Maruyama , Takeshi Saikawa , Katsuhiko Hotta , Hiroyuki Ichizoe
IPC分类号： H01L21/76 , G02B17/00 , G02B21/00 , G02B23/00 , H01L21/302 , H01L21/312 , H01L21/316 , H01L21/461 , H01L21/762 , H01L21/8239 , H01L21/8242 , H01L27/02 , H01L27/10 , H01L27/105 , H01L27/108
CPC分类号： H01L21/76229 , H01L21/02271 , H01L21/02282 , H01L21/3125 , H01L21/31612 , H01L27/0211 , H01L27/105 , H01L27/1052 , H01L27/10814 , H01L27/10844 , H01L27/10894
摘要： A method for manufacturing a semiconductor integrated circuit device includes the steps of forming an isolation trench in an isolation region of a semiconductor substrate, filling the isolation trench up to predetermined middle position in its depth direction with a first insulating film deposited by a coating method, filling a remaining depth portion of the isolation trench into which the first insulating film is filled with a second insulating film, then forming a plurality of patterns on the semiconductor substrate, filling a trench forming between the plurality of patterns up to predetermined middle position in a trench depth direction with a third insulating film deposited by a coating method, and filling a remaining portion of the trench into which the third insulating film is filled with a fourth insulating film that is more difficult to etch than the third insulating film. The method may also include the step of forming dummy patters in a relatively large isolation region of isolation regions with relatively different planar dimensions before the first insulating film is deposited.

9. 发明申请

US20050206980A1 Color image forming apparatus using registration marks 失效
公开(公告)号：US20050206980A1
公开(公告)日：2005-09-22
申请号：US11126128
申请日：2005-05-10
申请人： Eiji Nishikawa , Hiroyuki Maruyama , Hiroyuki Arai , Toshihiro Motoi , Kenji Izumiya , Ryuji Okutomi , Shinobu Kishi , Satoshi Ogata , Kenichi Ozawa , Tadayuki Ueda , Yumiko Higashi
发明人： Eiji Nishikawa , Hiroyuki Maruyama , Hiroyuki Arai , Toshihiro Motoi , Kenji Izumiya , Ryuji Okutomi , Shinobu Kishi , Satoshi Ogata , Kenichi Ozawa , Tadayuki Ueda , Yumiko Higashi
IPC分类号： B41J29/393 , G03F3/08 , G03G15/01 , G06F15/00 , G06K15/12 , H04N1/50
CPC分类号： B41J29/393 , G03G15/0194 , G03G2215/0119 , G03G2215/0161 , G06K15/129 , H04N1/506
摘要： In an image forming apparatus for forming a color image by superposing component color images, a control device obtains position data representing a forming position of each of plural registration mark images for the component color images with respect to a positional reference value arbitrarily determined, divides the position data into each of a unit reference range representing a range in which one mark image is formed, converts the position data divided for each unit reference range into those based on respective reference values representing the front edge of the unit reference ranges, extracts the position data representing ranges common to the mutually overlapping ranges each of which is represented by a couple of position data corresponding to the rising and falling edges of a passage timing pulse as read position data of the mark image of the component color, and calculates the amounts of positional deviations of the component color images from one another on the basis of the position data extracted.

10. 发明申请

US20050046365A1 Driving device and image forming device 失效
标题翻译：驱动装置和成像装置
公开(公告)号：US20050046365A1
公开(公告)日：2005-03-03
申请号：US10831271
申请日：2004-04-23
申请人： Tadayuki Ueda , Hiroyuki Maruyama , Jun Onishi
发明人： Tadayuki Ueda , Hiroyuki Maruyama , Jun Onishi
IPC分类号： G03G21/14 , B25J9/10 , G03G15/00 , G03G15/16 , H02P5/00 , H02P29/00
CPC分类号： G03G15/1685 , G03G15/50 , G03G2215/1623
摘要： There is described an image-forming apparatus having a rotation system constituted by a driving roller, a driven roller and a transfer belt, threaded on both the driving roller and the driven roller. The apparatus includes: a motor to drive the rotation system, a rotational axis of the motor being coupled to the driving roller directly or through a power transmission element disposed between them; a first rotational-velocity controlling section to control a first rotational velocity of the motor; a velocity detecting section to detect a second rotational velocity of the driving roller or the driven roller; and a second rotational-velocity controlling section to also control the first rotational velocity of the motor, based on a detected signal detected by the velocity detecting section. The second rotational-velocity controlling section employs either a feedback controlling method or a feed-forward controlling method to control the first rotational velocity.
摘要翻译：描述了一种图像形成装置，其具有由驱动辊和从动辊两者上的驱动辊，从动辊和转印带构成的旋转系统。该装置包括：驱动旋转系统的马达，马达的旋转轴线直接或通过布置在其间的动力传递元件联接到驱动辊; 第一旋转速度控制部，其控制所述电动机的第一旋转速度; 检测驱动辊或从动辊的第二转速的速度检测部; 以及第二旋转速度控制部，其还基于由所述速度检测部检测出的检测信号，来控制所述电动机的第一旋转速度。第二旋转速度控制部分采用反馈控制方法或前馈控制方法来控制第一旋转速度。

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