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    • 65. 发明授权
    • Method for manufacturing magnetoresistance element
    • 制造磁阻元件的方法
    • US06482329B1
    • 2002-11-19
    • US09381822
    • 2000-12-18
    • Migaku TakahashiSatoshi MiuraMasakiyo Tsunoda
    • Migaku TakahashiSatoshi MiuraMasakiyo Tsunoda
    • H01F4118
    • B82Y25/00B82Y40/00H01F41/18H01F41/308H01L43/12
    • A method of manufacturing a magnetoresistance element which can reproduce magnetic signals with higher sensitivity. The manufacturing method includes the steps of providing a vacuum below 10−9 Torr in a film forming chamber for forming a nonmagnetic layer and ferromagnetic layer; performing plasma-etching of the surface of a substrate body by using a mixture of a gas (a) containing at least oxygen or water introduced into the chamber and an Ar gas (b) introduced into the chamber in a vacuum, state controlled to higher than 10−9 Torr; and forming the nonmagnetic and ferromagnetic layers on the etched substrate body by sputtering a prescribed target by using the mixture of the gases (a) and (b).
    • 一种制造可以以更高灵敏度再现磁信号的磁阻元件的方法。 该制造方法包括以下步骤:在用于形成非磁性层和铁磁层的成膜室中提供10 -9乇以下的真空; 通过使用至少含有氧气或引入室中的水的气体(a)和在真空中引入室中的Ar气体(b)进行等离子体蚀刻,从而对基体的表面进行等离子体蚀刻,状态被控制到更高 超过10-9乇; 以及通过使用气体(a)和(b)的混合物溅射规定的靶材,在蚀刻的基板主体上形成非磁性和铁磁性层。
    • 67. 发明授权
    • Magnetic recording medium and its manufacture
    • 磁记录介质及其制造
    • US5853847A
    • 1998-12-29
    • US591624
    • 1996-01-19
    • Migaku Takahashi
    • Migaku Takahashi
    • G11B5/64G11B5/73G11B5/851G11B5/66
    • G11B5/7325G11B5/65G11B5/656G11B5/851Y10S428/90Y10T428/24355Y10T428/265
    • An inexpensive high-density recording medium which is increased in coercive force without using expensive ferromagnetic metallic layer. In a magnetic recording medium on the base body of which a ferromagnetic metallic layer is formed on a base body with a metallic underlying layer in between and which utilizes reversal of magnetization, the oxygen concentration in the ferromagnetic metallic layer is 100 wt. ppm or less, and in addition, oxygen concentration in the metallic base layer is also 100 wt. ppm or less. In a method of manufacturing a magnetic recording medium on the base body of which the metallic base layer and ferromagnetic metallic layer are successively formed by sputtering, the impurity concentration of Ar gas used for the formation of the layer is 10 ppb or less. Before forming the metallic base layer, in addition, the surface of the base body is cleaned by high-frequency sputtering using Ar gas the impurity concentration of which is 10 ppb and surface section of the base body is partially removed to a depth of 0.2-1 nm.
    • PCT No.PCT / JP94 / 01184第 371日期1996年1月19日 102(e)1996年1月19日PCT PCT 1994年7月19日PCT公布。 公开号WO95 / 03603 日期1995年2月2日一种廉价的高密度记录介质,其在不使用昂贵的铁磁性金属层的情况下增强了矫顽力。 在基体上的磁记录介质中,铁基金属层在基体上形成有介于其间的金属底层,并且利用磁化反转,铁磁性金属层中的氧浓度为100重量%。 ppm以下,另外,金属基层中的氧浓度也为100重量%。 ppm以下。 在通过溅射连续形成金属基层和强磁性金属层的基体上制造磁记录介质的方法中,用于形成该层的Ar气体的杂质浓度为10ppb以下。 另外,在形成金属基层之前,通过使用杂质浓度为10ppb的Ar气体和基体的表面部分部分地去除深度为0.2μm的高频溅射来清洗基体的表面, 1nm。
    • 68. 发明授权
    • Method and apparatus for preparing crystal thin films by using a surface
acoustic wave
    • 通过使用表面声波制备晶体薄膜的方法和装置
    • US5837332A
    • 1998-11-17
    • US690030
    • 1996-07-31
    • Migaku TakahashiKatsuya YokoyamaJun YamadaTakashi Shiba
    • Migaku TakahashiKatsuya YokoyamaJun YamadaTakashi Shiba
    • C23C14/22C23C16/44G11B5/012G11B5/31G11B5/84G11B5/85G11B5/851H01F41/30H01L39/24B06B1/00H03H9/00
    • B82Y25/00B82Y40/00C23C14/22C23C16/4415G11B5/012G11B5/3163G11B5/8404G11B5/85G11B5/851H01F41/302H01L39/2496
    • A method and apparatus for preparing thin films, a device, an electronic and magnetic apparatus, an information recording and reproducing apparatus, an information processing apparatus and a crystal preparing method from the molten state. A thin film is prepared as the substrate or the surface of the substrate is being excited and characterized by a device having at least a substrate and a thin film with at least one layer prepared thereon and an electronic and magnetic apparatus having integration of the devices, wherein at least one layer of the thin film is prepared as the surface of the substrate is being excited. The recording and reproducing apparatus for recording and reproducing information is composed of an information memory medium device having a recording layer of the thin film prepared as the surface of the substrate is being excited and a recording head whose core is prepared as the surface of the substrate is being excited. An information processing apparatus for use in input, record, process and output of information is composed of an information memory medium device having a recording layer which is prepared as the surface of the substrate is being excited and a processing part having a semiconductor device with a thin film prepared as the surface of the substrate is being excited.
    • 一种从熔融状态制备薄膜的方法和装置,装置,电子和磁性装置,信息记录和再现装置,信息处理装置和晶体制备方法。 制备薄膜作为衬底或者衬底的表面被激发并且通过具有至少一个衬底的薄膜和其上制备有至少一层的薄膜和具有这些器件集成的电子和磁性设备被激发并表征, 其中当衬底的表面被激发时,制备至少一层薄膜。 用于记录和再现信息的记录和再现装置由一个信息存储介质装置组成,该信息存储介质装置具有被激励的衬底表面所制备的薄膜的记录层,以及一个记录头,其芯准备为衬底的表面 正在兴奋 用于信息的输入,记录,处理和输出的信息处理装置由具有记录层的信息存储介质装置组成,该记录层是在被激励的基板的表面上准备的,并且具有半导体装置的处理部分具有 作为衬底表面制备的薄膜正在被激发。