专利快速检索-快速检索全球专利，免费商用专利数据库-IPRDB

61. 发明申请

US20060082755A1 Stage system, exposure apparatus, and device manufacturing method 审中-公开
标题翻译：舞台系统，曝光装置和装置制造方法
公开(公告)号：US20060082755A1
公开(公告)日：2006-04-20
申请号：US11289472
申请日：2005-11-30
申请人： Kotaro Akutsu , Nobushige Korenaga , Mitsuru Inoue
发明人： Kotaro Akutsu , Nobushige Korenaga , Mitsuru Inoue
IPC分类号： G03B27/58
CPC分类号： G03F7/70808 , G03F7/70716 , G03F7/70758 , G03F7/70816 , H01J37/20 , H01J2237/20292 , H01J2237/3175 , H02K1/278 , H02K16/00 , H02K41/031 , H02K2201/18
摘要： A stage system that can meet enlargement of a stroke and thus, particularly, that can be suitably incorporated into an electron beam exposure apparatus. The stage system includes a first fixed guide having a plane along X and Y directions, a first movable guide to be guided by the first fixed guided (the first movable guide having a Y guide 3f extending in the Y direction), a second fixed guide having a plane along X and Y directions, a second movable guide to be guided by the second fixed guide (the second movable guide having an X guide extending in the X direction), and a central movable member to be guided in the X and Y directions by the Y guide and the X guide.
摘要翻译：能够满足行程的放大，特别是可以适合地并入电子束曝光装置的舞台系统。舞台系统包括具有沿X和Y方向的平面的第一固定引导件，由第一固定引导（第一可移动引导件具有沿Y方向延伸的Y引导件3f）引导的第一可移动引导件，第二固定引导件引导件沿着X和Y方向具有平面，第二可移动引导件由第二固定引导件（具有在X方向上延伸的X引导件的第二可移动引导件）引导，以及在X中被引导的中心可移动元件，以及 Y方向由Y指导和X指导。

62. 发明授权

US07030964B2 Stage system, exposure apparatus, and device manufacturing method 失效
标题翻译：舞台系统，曝光装置和装置制造方法
公开(公告)号：US07030964B2
公开(公告)日：2006-04-18
申请号：US10862383
申请日：2004-06-08
申请人： Kotaro Akutsu , Nobushige Korenaga , Mitsuru Inoue
发明人： Kotaro Akutsu , Nobushige Korenaga , Mitsuru Inoue
IPC分类号： G03B27/42 , G03B27/58 , H01J37/08 , H02K41/00
CPC分类号： G03F7/70808 , G03F7/70716 , G03F7/70758 , G03F7/70816 , H01J37/20 , H01J2237/20292 , H01J2237/3175 , H02K1/278 , H02K16/00 , H02K41/031 , H02K2201/18
摘要： A stage system including a first fixed guide having a first guide surface being parallel to a first direction and a second direction being orthogonal to the first direction, a first movable guide to be guided by the first fixed guide and having three freedoms of straight motions in the first and second directions and a motion in a rotational direction about a third direction being orthogonal to the first and second directions, the first movable guide extending in the second direction, a second fixed guide having a second guide surface being parallel to the first and second directions, a second movable guide to be guided by the second fixed guide and having three freedoms of straight motions in the first and second directions and a motion in a rotational direction about the third direction, the second movable guide having a second guide extending in the first direction, and a movable member to be guided in the first and second directions by the first and second movable guides.
摘要翻译：一种舞台系统，包括：第一固定导向器，具有平行于第一方向的第一导向表面和与第一方向正交的第二方向;第一可移动引导件，由第一固定引导件引导，并且具有三个直线运动自由度所述第一和第二方向以及围绕第三方向的旋转方向的运动与所述第一和第二方向正交，所述第一可移动引导件沿所述第二方向延伸;第二固定引导件，其具有与所述第一和第二方向平行的第二引导表面，第二方向，由第二固定引导件引导并且具有在第一和第二方向上的直线运动的三个自由度的第二可移动引导件和围绕第三方向的旋转方向的运动，第二可移动引导件具有延伸到第二方向的第二引导件第一方向，以及通过第一和第二可移动引导件在第一和第二方向上被引导的可动构件。

63. 发明授权

US06935646B2 Torsion beam suspension 失效
标题翻译：扭转梁悬挂
公开(公告)号：US06935646B2
公开(公告)日：2005-08-30
申请号：US10313952
申请日：2002-12-06
申请人： Mitsuru Inoue , Kiyoshi Horiuchi
发明人： Mitsuru Inoue , Kiyoshi Horiuchi
IPC分类号： B60G9/04 , B60G3/14 , B60G7/00 , B60G21/05
CPC分类号： B60G21/051 , B60G3/145 , B60G7/008 , B60G2200/21 , B60G2200/42 , B60G2202/136 , B60G2204/1246 , B60G2204/148 , B60G2206/012 , B60G2206/20 , B60G2206/30 , B60G2206/50 , B60G2206/722 , B60G2206/8102 , B60G2206/8201
摘要： Opposite ends of a torsion beam are connected to left and right trailing arms, and a spindle which supports a wheel is secured to a spindle support plate which is welded to each of the left and right trailing arms. Bent flanges which are formed in the outer periphery of a body of the spindle support plate, are fitted to the outer periphery of the end of trailing arm and secured by welding. With this arrangement, thermal warp of the body of the spindle support plate which supports spindle can be prevented, and not only can the mounting precision of the spindle be improved, but also the thickness of the spindle support plate can be reduced to reduce the weight.
摘要翻译：扭力梁的相对端连接到左右后臂，并且支撑车轮的心轴被固定到主轴支撑板，该主轴支撑板被焊接到左右拖臂中的每一个上。形成在主轴支撑板的主体的外周中的弯曲凸缘被装配到拖臂的端部的外周并通过焊接固定。通过这种布置，可以防止支撑主轴的主轴支撑板的主体的热翘曲，而不仅可以提高主轴的安装精度，而且可以减小主轴支撑板的厚度以减小重量。

64. 发明授权

US06843492B2 Vehicular suspension 失效
标题翻译：车辆悬挂
公开(公告)号：US06843492B2
公开(公告)日：2005-01-18
申请号：US10388372
申请日：2003-03-13
申请人： Mitsuru Inoue , Junichi Midorikawa
发明人： Mitsuru Inoue , Junichi Midorikawa
IPC分类号： B60G3/28 , B60G3/10 , B60G3/20 , B60G7/00 , B60G3/18
CPC分类号： B60G3/20 , B60G7/001 , B60G2206/121 , B60G2206/8201
摘要： A vehicular suspension includes a trailing arm and a substantially plate-like lower arm. The trailing arm is pivotably supported at its front end on a vehicle body via an elastic joint and extends from the front end toward the rear of the vehicle body. The lower arm extends in the vehicle width direction with its inner end pivotably supported on the vehicle body and its outer end fixed to a rear part of the trailing arm. A flat first seating surface of an end plate welded to the rear end of the trailing arm is superimposed on a flat second seating surface provided at the outer end of the lower arm, and an inner periphery of a closed rectangular opening formed on the second seating surface is welded to the first seating surface by a weld. The second seating surface of the lower arm protrudes from a main body portion via a slant surface.
摘要翻译：车辆悬架包括拖臂和大致板状的下臂。牵引臂通过弹性接头在其前端枢转地支撑在车体上，并从车体的前端朝向后方延伸。下臂在车宽方向上延伸，其内端可枢转地支撑在车体上，其外端固定在拖臂的后部。焊接在后臂的后端的端板的平坦的第一座面重叠在设置在下臂的外端的平坦的第二座面上，并且形成在第二座上的封闭矩形开口的内周表面通过焊缝焊接到第一座面。下臂的第二座面经由斜面从主体部突出。

65. 发明授权

US6133982A Exposure apparatus 失效
标题翻译：曝光装置
公开(公告)号：US6133982A
公开(公告)日：2000-10-17
申请号：US968726
申请日：1997-11-12
申请人： Mitsuru Inoue , Ryuichi Ebinuma , Kazunori Iwamoto , Hideki Nogawa
发明人： Mitsuru Inoue , Ryuichi Ebinuma , Kazunori Iwamoto , Hideki Nogawa
IPC分类号： G03F7/20 , H01L21/027 , G03B27/42 , G03B27/52
CPC分类号： G03F7/70691 , G03F7/70358 , G03F7/70833 , G03F7/709
摘要： An exposure apparatus having an optical stand for supporting a projecting optical system and a reticle stage, and a base frame have a plurality of struts for supporting the optical stand via dampers. The plurality of struts of the base frame are joined at their upper ends to increase the rigidity of the base frame, thereby reducing vibration caused by acceleration and deceleration of the reticle stage.
摘要翻译：具有用于支撑投影光学系统和标线片台的光学支架的曝光装置和具有用于通过阻尼器支撑光学支架的多个支柱的基座框架。底架的多个支柱在其上端连接以增加基架的刚性，从而减少由于标线片台的加速和减速引起的振动。

66. 发明授权

US5905282A Multi-terminal surge protection device 失效
标题翻译：多端子浪涌保护装置
公开(公告)号：US5905282A
公开(公告)日：1999-05-18
申请号：US856997
申请日：1997-05-15
申请人： Masaaki Sato , Mitsuru Inoue , Yasuharu Yamada , Akihiro Kasai , Hideyuki Harada , Hirofumi Yoshihara
发明人： Masaaki Sato , Mitsuru Inoue , Yasuharu Yamada , Akihiro Kasai , Hideyuki Harada , Hirofumi Yoshihara
IPC分类号： H01L29/74 , H01L23/495 , H01L27/02 , H01L27/06 , H01L29/747 , H01L29/861 , H01L29/87 , H02H9/04 , H02M1/00 , H03K19/003 , H01L29/792 , H01L23/62
CPC分类号： H01L23/49562 , H01L24/05 , H01L27/0259 , H01L29/87 , H01L2224/05572 , H01L2224/06181 , H01L2924/12036 , H01L2924/1301
摘要： A multi-terminal surge protection device able to absorb surges of either polarity between lines and between a line and ground, in which the difference in operating time between the device elements connected to lines is reduced. A plurality of unipolar surge protection device elements are used which only operate to absorb surges of a specific polarity, and do not exhibit a reverse withstand characteristic upon application of a reverse-polarity voltage. One element is connected to a first line and another element to a second line, while a different element is connected to ground. A semiconductor substrate and second electrode are used that are common to all elements. To prevent lateral interference between elements, at least the element connected to ground is isolated from the line elements.
摘要翻译：一种多端子浪涌保护装置，其能够吸收线路之间以及线路与地线之间的极性的浪涌，其中连接到线路的器件元件之间的操作时间差减小。使用多个单极浪涌保护器件元件，其仅用于吸收特定极性的浪涌，并且在施加反极性电压时不表现出反向耐受特性。一个元件连接到第一线，另一个元件连接到第二线，而不同的元件连接到地。使用对所有元件是共同的半导体衬底和第二电极。为了防止元件之间的横向干涉，至少连接到地面的元件与线路元件隔离。

67. 发明授权

US5685232A Positioning stage device exposure apparatus and device manufacturing method utilizing the same 失效
标题翻译：定位台装置曝光装置及利用其的装置制造方法
公开(公告)号：US5685232A
公开(公告)日：1997-11-11
申请号：US744276
申请日：1996-11-06
申请人： Mitsuru Inoue
发明人： Mitsuru Inoue
IPC分类号： G03F9/00 , A47B85/00 , B23Q16/00 , G03F7/20 , H01L21/027 , H01L21/68 , H01L21/683
CPC分类号： A47B85/00 , G03F7/70691 , H01L21/6838
摘要： A positioning stage device capable of regulating in a wide range the rotational angle of a Z-stage supporting a suction chuck. The suction chuck is constructed integrally with the Z-stage, which is supported by a bearing so as to be movable along the Z-axis and rotatable about the Z-axis. A rotation stopper plate integral with the Z-stage is supported on both faces by bearing pads of an air bearing supported by a rotary ring, and is rotated about the Z-axis together with the air bearing by means of a motor, whereby the rotational angel of the Z-stage is regulated.
摘要翻译：一种能够在宽范围内调节支撑吸盘的Z档的转角的定位台装置。吸盘与Z平台一体地构成，该Z平台由轴承支撑，以便能够沿Z轴移动并且能够围绕Z轴旋转。与Z档一体的旋转止动板通过由旋转环支撑的空气轴承的支承垫支撑在两个面上，并且通过电动机与空气轴承一起围绕Z轴旋转，由此旋转 Z阶段的天使受到管制。

你已经成功收藏专利！

检索式保存成功!

IPRDB

热门服务

关于我们

友情链接

联系方式