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    • 63. 发明申请
    • ATOMIC LAYER GROWING APPARATUS
    • 原子层生长装置
    • US20090266296A1
    • 2009-10-29
    • US12295194
    • 2007-03-28
    • Hiroyuki TachibanaKazutoshi MurataNozomu Hattori
    • Hiroyuki TachibanaKazutoshi MurataNozomu Hattori
    • C23C16/54
    • C23C16/45544C23C16/4485
    • An atomic layer growing apparatus includes a film forming chamber (101) in which the vapor phase growth of a film is performed, a substrate table (102) having a heating mechanism accommodated in the film forming chamber (101), and an exhaust mechanism (104). The atomic layer growing apparatus also includes a material supply unit (105) including a material vaporizer (151), two buffer tanks, i.e., a buffer tank A (152a) and buffer tank B (152b), a fill valve A (153a) and supply valve A (154a) of the buffer tank A (152a), a fill valve B (153b) and supply valve B (154b) of the buffer tank B (152b), an injection control valve (155), and a control unit (156) which controls the opening/closing of each valve.
    • 原子层生长装置包括其中进行膜的气相生长的成膜室(101),具有容纳在成膜室(101)中的加热机构的基板台(102)和排气机构 104)。 原子层生长装置还包括材料供给单元(105),其包括材料蒸发器(151),两个缓冲罐,即缓冲罐A(152a)和缓冲罐B(152b),填充阀A(153a) 缓冲罐B(152a)的缓冲罐A(152a)的供给阀A(154a),缓冲罐B(152b)的填充阀B(153b)和供给阀B(154b),喷射控制阀(155) 单元(156),其控制每个阀的打开/关闭。
    • 64. 发明授权
    • Plasma display panel and method of manufacturing the same
    • 等离子显示面板及其制造方法
    • US07422503B2
    • 2008-09-09
    • US10555002
    • 2004-05-18
    • Morio FujitaniKeisuke SumidaTatsuo MifuneShinichiro IshinoHiroyuki Tachibana
    • Morio FujitaniKeisuke SumidaTatsuo MifuneShinichiro IshinoHiroyuki Tachibana
    • H01J17/49H01J9/00
    • H01J11/28H01J9/02H01J11/12
    • Disclosed here is a plasma display panel having stable addressing characteristics and a method of manufacturing a plasma display panel having such a reliable structure. According to the plasma display panel and the manufacturing method, on back plate (2) that confronts front plate (1) having scan electrodes (6) and sustain electrodes (7) thereon, data electrodes (10), first dielectric layer (17) disposed to cover the data electrodes, priming electrodes (15), and second dielectric layer (18) disposed to cover the priming electrodes are formed in the order named; at the same time, the softening temperatures of the materials forming the components disposed on the back plate are determined so as to become lower in the order named. The temperature setting protects first dielectric layer (17) from deterioration or deformation, improving dielectric voltage between data electrodes (10) and priming electrodes (15).
    • 这里公开了具有稳定的寻址特性的等离子体显示面板和具有这种可靠结构的等离子体显示面板的制造方法。 根据等离子体显示面板及其制造方法,在与其上具有扫描电极(6)和维持电极(7)的前板(1)相对的背板(2)上,数据电极(10),第一电介质层(17) 被设置为覆盖数据电极,引发电极(15)和设置成覆盖引发电极的第二介电层(18)以所述顺序形成; 同时,形成设置在背板上的部件的材料的软化温度被确定为按照所述的顺序变低。 温度设置保护第一介电层(17)免受恶化或变形,改善数据电极(10)和引发电极(15)之间的介电电压。
    • 67. 发明申请
    • Plasma display panel and method of manufacturing the same
    • 等离子显示面板及其制造方法
    • US20060279214A1
    • 2006-12-14
    • US10555002
    • 2004-05-18
    • Morio FujitaniKeisuke SumidaTatsuo MifuneShinichiro IshinoHiroyuki Tachibana
    • Morio FujitaniKeisuke SumidaTatsuo MifuneShinichiro IshinoHiroyuki Tachibana
    • H01J11/02H01J17/49
    • H01J11/28H01J9/02H01J11/12
    • Disclosed here is a plasma display panel having stable addressing characteristics and a method of manufacturing a plasma display panel having such a reliable structure. According to the plasma display panel and the manufacturing method, on back plate (2) that confronts front plate (1) having scan electrodes (6) and sustain electrodes (7) thereon, data electrodes (10), first dielectric layer (17) disposed to cover the data electrodes, priming electrodes (15), and second dielectric layer (18) disposed to cover the priming electrodes are formed in the order named; at the same time, the softening temperatures of the materials forming the components disposed on the back plate are determined so as to become lower in the order named. The temperature setting protects first dielectric layer (17) from deterioration or deformation, improving dielectric voltage between data electrodes (10) and priming electrodes (15).
    • 这里公开了具有稳定的寻址特性的等离子体显示面板和具有这种可靠结构的等离子体显示面板的制造方法。 根据等离子体显示面板及其制造方法,在与其上具有扫描电极(6)和维持电极(7)的前板(1)相对的背板(2)上,数据电极(10),第一电介质层(17) 被设置为覆盖数据电极,引发电极(15)和设置成覆盖引发电极的第二介电层(18)以所述顺序形成; 同时,形成设置在背板上的部件的材料的软化温度被确定为按照所述的顺序变低。 温度设置保护第一介电层(17)免受恶化或变形,改善数据电极(10)和引发电极(15)之间的介电电压。