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61. 发明授权

US06483586B1 Beam splitting analyzer means in rotating compensator ellipsometer 有权
标题翻译：光束分束分析仪是指旋转补偿椭圆偏振仪
公开(公告)号：US06483586B1
公开(公告)日：2002-11-19
申请号：US09950036
申请日：2001-09-10
申请人： Blaine D. Johs , Craig M. Herzinger , Steven E. Green , Jeffrey S. Hale
发明人： Blaine D. Johs , Craig M. Herzinger , Steven E. Green , Jeffrey S. Hale
IPC分类号： G01N2121
CPC分类号： G01J3/447 , G01J4/00 , G01J2003/2866 , G01N21/211
摘要： Disclosed is a rotating compensator sample system investigation system which includes a source of a beam of electromagnetic radiation, a polarizer, a stage for supporting a sample system, a beam splitting analyzer, and at least two detector systems which are positioned each to intercept a different of the at least two electromagnetic beams which emerge from the beam splitting analyzer. Also disclosed is a regression based approach to calibration which simultaneously extracts a sample system PSI and DELTA.
摘要翻译：公开了一种旋转补偿器样本系统调查系统，其包括电磁辐射源的源，偏振器，用于支撑样本系统的平台，分束分析器和至少两个检测器系统，每个检测器系统被定位成截取不同的的从分束分析仪出现的至少两个电磁波束。还公开了一种基于回归的校准方法，其同时提取样品系统PSI和DELTA。

62. 发明授权

US06353477B1 Regression calibrated spectroscopic rotating compensator ellipsometer system with pseudo-achromatic retarder system 有权
标题翻译：具有伪消色差延迟器系统的回归校准光谱旋转补偿器椭偏仪系统
公开(公告)号：US06353477B1
公开(公告)日：2002-03-05
申请号：US09496011
申请日：2000-02-01
申请人： Blaine D. Johs , Craig M. Herzinger
发明人： Blaine D. Johs , Craig M. Herzinger
IPC分类号： G01N2121
CPC分类号： G01J3/447 , G01J4/00 , G01J2003/2866 , G01N21/21 , G01N21/211 , G02B5/3058 , G02B5/3083 , G02B27/46
摘要： A Spectroscopic Rotating Compensator Material System Investigation System including a Dual Waveplate Pseudo-Achromatic Compensator System, and a Photo-Array for simultaneously detecting a Multiplicity of Wavelengths, is disclosed. The Spectroscopic Rotating Compensator Material System Investigation System is calibrated by a Mathematical Regression based technique involving, where desirable, Parameterization of Calibration Parameters. Calibration is possible utilizing various dimensional Data Set(s) obtained with the Spectroscopic Rotating Compensator Material System Investigation System in a “Material System present” or in a Straight-through” configuration, said data sets being variously normalized to D.C., A.C. or combination D.C. and A.C. components thereof.
摘要翻译：公开了一种包括双波片伪消色差补偿器系统的光谱旋转补偿器材料系统调查系统和用于同时检测波长的多重性的光阵列。光谱旋转补偿器材料系统调查系统通过基于数学回归的技术进行校准，该技术涉及校准参数的参数化。使用在“材料系统存在”或“直通”配置中的光谱旋转补偿器材料系统调查系统获得的各种维度数据集可以进行校准，所述数据集被不同地归一化到DC，AC或组合DC 及其AC成分。

63. 发明授权

US06822738B1 Spectroscopic rotating compensator ellipsometer system with pseudo-achromatic retarder system 有权
标题翻译：具有伪消色差延迟器系统的光谱旋转补偿器椭偏仪系统
公开(公告)号：US06822738B1
公开(公告)日：2004-11-23
申请号：US10034800
申请日：2001-12-28
申请人： Blaine D. Johs , Craig M. Herzinger
发明人： Blaine D. Johs , Craig M. Herzinger
IPC分类号： G01N2100
CPC分类号： G01J3/447 , G01J3/0224 , G01J4/00 , G01J2003/2866 , G01N21/211
摘要： Disclosed is a spectroscopic Ellipsometer having pseudo-achromatic compensator(s) having fast axes which vary with wavelength and which provide, a range of retardations, (that is, maximum retardance minus minimum retardance), of less than 90 degrees over a range of wavelengths, said range of retardations being bounded by a minimum of preferably at least 30 degrees, to a maximum of less than 135 degrees. Calibration is achieved by a Mathematical Regression based technique involving, where desirable, Parameterization of Calibration Parameters. Various Dimensional Data Set(s) obtained with the Spectroscopic Ellipsometer configured in a Sample, present” or in a Straight-through” configuration, are variously normalized to D.C., A.C. or combination D.C. and A.C. components. Sample analysis using a detector provided intensity signal simultaneously comprising 2&ohgr; and 4&ohgr; signals simultaneously, and use of un-normalized A.C. and/or D.C. signals in reflectance monitoring are also disclosed.
摘要翻译：公开了一种光谱椭圆计，其具有伪波消除补偿器，其具有随波长变化的快轴，并且在波长范围内提供小于90度的延迟范围（即最大延迟减去最小延迟）所述延迟范围由最小至少30度的最小值限制到最大不超过135度。通过基于数学回归的技术实现校准，该技术涉及校准参数的参数化。使用配置在样品中的“或”直通“配置的样品中的光谱椭圆计数器获得的各种尺寸数据集被不同地归一化为D.C.，A.C.或组合D.C.和A.C.组分。还公开了使用检测器提供的同时包含2omega和4omega信号的强度信号的样本分析，并且还公开了在反射率监测中使用未归一化的交直流信号和/或直流信号。

64. 发明授权

US06118537A Multiple tipped berek plate optical retarder elements for use in spectroscopic ellipsometer and polarimeter systems 有权
标题翻译：用于光谱椭圆光度计和偏光计系统的多个倾斜的人造革板光学延迟器元件
公开(公告)号：US06118537A
公开(公告)日：2000-09-12
申请号：US223822
申请日：1999-01-04
申请人： Blaine D. Johs , Craig M. Herzinger , Steven E. Green
发明人： Blaine D. Johs , Craig M. Herzinger , Steven E. Green
IPC分类号： G01J3/28 , G02B5/30 , G01N21/21
CPC分类号： G02B5/3083 , G01J2003/2866
摘要： Disclosed are retarder systems, for entering retardation between orthogonal components of an electromagnetic beam of radiation, having first and second Berek-type retarders which each present with first and second essentially parallel sides. The first and second Berek-type retarders are oriented, as viewed in side elevation, with first and second sides of one Berek-type retarder being oriented other than parallel to first and second sides of the other Berek-type retarder. During use in a spectroscopic ellipsometer/polarimeter system, a beam of electromagnetic radiation exits in a propagation direction which is essentially undeviated and undisplaced from the direction of an incident beam of electromagnetic radiation, even when the retarder system is caused to rotate about the locus of the beam of electromagnetic radiation. A system with similarly oriented third and fourth Berek-type retarders, sequentially placed after the first and second Berek-type retarders, is also disclosed.
摘要翻译：公开了用于在电磁辐射束的正交部件之间输入延迟的延迟器系统，其具有第一和第二Berek型延迟器，每个Berek型延迟器具有第一和第二基本平行的侧面。第一和第二Berek型延迟器从侧视图中被定向，其中一个Berek型延迟器的第一和第二侧面定向成不同于另一Berek型延迟器的第一和第二侧。在光谱椭偏仪/偏振计系统中使用时，电磁辐射束在传播方向上离开，即使当延迟器系统绕电磁辐射的轨迹旋转电磁辐射束。还公开了具有相似方向的第三和第四Berek型延迟器的系统，其顺序地放置在第一和第二Berek型延迟器之后。

65. 发明授权

US5796983A Dielectric function parametric model, and method of use 失效
标题翻译：介电函数参数模型及其使用方法
公开(公告)号：US5796983A
公开(公告)日：1998-08-18
申请号：US514959
申请日：1995-08-14
申请人： Craig M. Herzinger , Blaine D. Johs
发明人： Craig M. Herzinger , Blaine D. Johs
IPC分类号： H01L21/66 , G01N21/00
CPC分类号： H01L22/12
摘要： Novel dielectric function parametric model oscillator structures comprised of finite order polynomials and/or essentially zero-width finite magnitude discontinuities in appropriate sequences, which novel oscillator structures are suitable for application in a Kronig-Kramer consistent dielectric function oscillator structure based mathematical model, are disclosed. The present invention method of application enables production of one-dimensional normalized dependent variable vs. independent variable evaluating look-up tables by application of convolution integration effected oscillator structure Gaussian broadening, as applied to finite order polynomials, without the requirement that numerical derivatives or integrations be performed. In use, addition of contributions from one or more said present invention oscillator structures allows determination of dependent variable values given independent variable values, without requiring subtraction of relatively large numbers. In addition only a relatively small set of essentially uncorrelated present invention oscillator structure finite order polynomial term coefficient and finite magnitude discontinuity magnitude defining mathematical model coefficients are required. The present invention dielectric function model oscillator structure mathematical model allows user determinable degrees of freedom which allow essentially any plot of dielectric function dependent vs. independent variable data to be modeled with a high degree of mathematical model coefficients.
摘要翻译：公开了新颖的介电函数参数模型振荡器结构，该结构由适当序列中的有限阶多项式和/或基本上零宽度有限幅度不连续性组成，该新型振荡器结构适用于基于Kronig-Kramer一致的介电函数振荡器结构的数学模型。本发明的应用方法能够通过应用卷积积分实现的振荡器结构高斯加宽，适用于有限阶多项式，而不需要数值导数或积分，从而生成一维归一化因变量与独立变量评估查找表。被执行。在使用中，从一个或多个所述本发明振荡器结构的贡献的添加允许确定给定独立变量值的因变量值，而不需要相减较大数目。此外，仅需要一组基本上不相关的本发明的振荡器结构有限阶多项式项系数和限定数学模型系数的有限幅度不连续量级。本发明的介电函数模型振荡器结构数学模型允许用户可确定的自由度，其允许使用高度的数学模型系数对基本上任何相对于独立可变数据的介电函数图进行建模。

66. 发明授权

US07796260B1 System and method of controlling intensity of an electromagnetic beam 有权
标题翻译：控制电磁束强度的系统和方法
公开(公告)号：US07796260B1
公开(公告)日：2010-09-14
申请号：US11788796
申请日：2007-04-21
申请人： Blaine D. Johs , Christopher A. Goeden , Galen L. Pfeiffer
发明人： Blaine D. Johs , Christopher A. Goeden , Galen L. Pfeiffer
IPC分类号： G01J4/00
CPC分类号： G01J4/04 , G01J3/02 , G01J3/0205 , G01J3/021 , G01J3/0213 , G01J3/0224 , G01J3/0229 , G01N2021/213
摘要： A system and method of substantially achromatically controlling the intensity of a spectroscopic beam with application in spectrophotometers, reflectometers, ellipsometers, polarimeters or the like systems.
摘要翻译：应用于分光光度计，反射计，椭偏仪，偏振仪等系统中基本上可变色地控制分光束强度的系统和方法。

67. 发明授权

US09347768B1 In line ellipsometer system and method of use 有权
标题翻译：在线椭偏仪系统及使用方法
公开(公告)号：US09347768B1
公开(公告)日：2016-05-24
申请号：US13385761
申请日：2012-03-06
申请人： Galen L. Pfeiffer , Blaine D. Johs , Brian D. Guenther , Martin M. Liphardt , Jeffrey S. Hale
发明人： Galen L. Pfeiffer , Blaine D. Johs , Brian D. Guenther , Martin M. Liphardt , Jeffrey S. Hale
IPC分类号： G01J4/00 , G01B11/14 , G01J3/02 , G01J1/02 , G01N21/01
CPC分类号： G01B11/14 , G01J1/0242 , G01J3/0278 , G01N21/01 , G01N21/21 , G01N21/211 , G01N21/55 , G01N21/8901 , G01N2021/8609
摘要： A system for monitoring, in real time, relatively large samples as they are caused to pass by an ellipsometer or the like system, and method of its use.
摘要翻译：一种用于通过椭偏仪或类似系统实时监测相对较大的样本的系统及其使用方法。

68. 发明授权

US07099006B1 Ellipsometer or polarimeter and the like system with beam chromatic shifting and directing means 有权
标题翻译：椭偏仪或偏光计等具有光束色移和定向装置的系统
公开(公告)号：US07099006B1
公开(公告)日：2006-08-29
申请号：US10613051
申请日：2003-07-07
申请人： Blaine D. Johs , Galen L. Pfeiffer , Jeffrey S. Hale , Christopher A. Goeden
发明人： Blaine D. Johs , Galen L. Pfeiffer , Jeffrey S. Hale , Christopher A. Goeden
IPC分类号： G01J4/00
CPC分类号： G01N21/211 , G01N21/274 , G01N2021/213
摘要： An electromagnetic beam chromatic shifting and directing means for use in reflectively directing a spectroscopic beam of electromagnetic radiation while de-emphasizing visual wavelength intensity and simultaneously emphasizing both IR and UV wavelength intensities, applied in ellipsometer or polarimeter and the like systems.
摘要翻译：用于反射地引导电磁辐射的分光束的电磁光束色移和引导装置，同时强调视觉波长强度并且同时强调以椭偏仪或偏光计等应用的IR和UV波长强度。

69. 发明授权

US08248607B1 Empirical correction for spectroscopic ellipsometric measurements of rough or textured surfaces 有权
标题翻译：粗糙或纹理表面光谱椭偏测量的经验校正
公开(公告)号：US08248607B1
公开(公告)日：2012-08-21
申请号：US12804958
申请日：2010-08-03
申请人： Craig M. Herzinger , Blaine D. Johs , Mathias M. Schubert , Tino Hofmann
发明人： Craig M. Herzinger , Blaine D. Johs , Mathias M. Schubert , Tino Hofmann
IPC分类号： G01J4/00
CPC分类号： G01N21/211 , G01N2021/213
摘要： A method of applying spectroscopic ellipsometry to arrive at accurate values of optical and physical properties for thin films on samples having rough or textured surfaces.
摘要翻译：一种应用光谱椭偏仪的方法，以获得具有粗糙或纹理表面的样品上的薄膜的光学和物理性质的准确值。

70. 发明授权

US07460230B2 Deviation angle self compensating substantially achromatic retarder 有权
公开(公告)号：US07460230B2
公开(公告)日：2008-12-02
申请号：US11590408
申请日：2006-10-31
申请人： Blaine D. Johs , Steven E. Green , Craig M. Herzinger , Duane E. Meyer
发明人： Blaine D. Johs , Steven E. Green , Craig M. Herzinger , Duane E. Meyer
IPC分类号： G01J4/00 , G02B5/30
CPC分类号： G02B27/286
摘要： A substantially achromatic multiple element compensator system for use in wide spectral range (for example, 190-1700 nm) rotating compensator spectroscopic ellipsometer and/or polarimeter systems. Multiple total internal reflections enter retardance into an entered beam of electromagnetic radiation, and the elements are oriented to minimize changes in the net retardance vs. the input beam angle resulting from changes in the position and/or rotation of the system of elements.

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