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61. 发明授权

US09169558B2 Fluid control apparatus 有权
标题翻译：流体控制装置
公开(公告)号：US09169558B2
公开(公告)日：2015-10-27
申请号：US13203866
申请日：2009-11-06
申请人： Jun Hirose , Kazuyuki Tezuka , Yohei Uchida , Mutsunori Koyomogi , Takahiro Matsuda , Ryousuke Dohi , Kouji Nishino , Nobukazu Ikeda
发明人： Jun Hirose , Kazuyuki Tezuka , Yohei Uchida , Mutsunori Koyomogi , Takahiro Matsuda , Ryousuke Dohi , Kouji Nishino , Nobukazu Ikeda
IPC分类号： C23C16/455 , H01L21/67
CPC分类号： C23C16/45561 , H01L21/67017 , Y10T137/0396
摘要： To provide a fluid control apparatus capable of reducing the space, while reducing the cost. A fluid control apparatus has a fluid controlling unit and a fluid introducing unit. The fluid introducing unit is divided into three parts: a first and a second inlet-side shutoff/open parts disposed on the inlet side, each made up of 2×N/2, disposed between the first and second inlet-side shutoff/open parts and the fluid controlling unit.
摘要翻译：提供能够减少空间的流体控制装置，同时降低成本。流体控制装置具有流体控制单元和流体引入单元。流体引入单元被分为三部分：设置在入口侧的第一和第二入口侧截止/打开部分，每个由2×N / 2构成，设置在第一和第二入口侧截止/打开之间零件和流体控制单元。

62. 发明授权

US08724974B2 Vaporizer 有权
标题翻译：汽化器
公开(公告)号：US08724974B2
公开(公告)日：2014-05-13
申请号：US13563983
申请日：2012-08-01
申请人： Tadahiro Ohmi , Yasuyuki Shirai , Masaaki Nagase , Satoru Yamashita , Atsushi Hidaka , Ryousuke Dohi , Kouji Nishino , Nobukazu Ikeda , Keiji Hirao
发明人： Tadahiro Ohmi , Yasuyuki Shirai , Masaaki Nagase , Satoru Yamashita , Atsushi Hidaka , Ryousuke Dohi , Kouji Nishino , Nobukazu Ikeda , Keiji Hirao
IPC分类号： B01D7/00
CPC分类号： C23C16/4483 , F22B1/284
摘要： A vaporizer, capable of stabilizing the behavior of pressure inside the vaporizer, includes a chamber having an inlet and an outlet, a heating device that heats the inside of the chamber, a partition wall structure 13 that is provided inside the vaporizer and partitions the liquid material inside the chamber into a plurality of sections, and liquid distribution portions 20 that are provided at the lower portion of the partition wall structure 13 and that allow liquid distribution among the sections partitioned by the partition wall structure 13, and the partition wall structure includes a grid-like, honeycomb-shaped, mesh-like, or pipe-shaped partition wall.
摘要翻译：能够稳定蒸发器内的压力行为的蒸发器包括具有入口和出口的室，加热室内的加热装置，设置在蒸发器内部并分隔液体的分隔壁结构13 室内的材料分成多个部分，分隔部分20设置在分隔壁结构13的下部并且允许在由分隔壁结构13分隔的部分之间进行液体分配，以及分隔壁结构包括网状，蜂窝状，网状或管状隔壁。

63. 发明授权

US08662471B2 Solenoid valve 有权
标题翻译：电磁阀
公开(公告)号：US08662471B2
公开(公告)日：2014-03-04
申请号：US12935119
申请日：2009-03-26
申请人： Tadahiro Ohmi , Kouji Nishino , Tsuyoshi Tanigawa , Michio Yamaji , Nobukazu Ikeda , Ryousuke Dohi
发明人： Tadahiro Ohmi , Kouji Nishino , Tsuyoshi Tanigawa , Michio Yamaji , Nobukazu Ikeda , Ryousuke Dohi
IPC分类号： F16K31/02
CPC分类号： F16K31/0658 , F16K31/0675 , H01F7/1816 , H01F2007/1822
摘要： There is provided a solenoid valve that realizes space-saving by reducing the size of a dedicated driving power source. There is provided a solenoid valve capable of instantaneously opening and closing that includes an electric double layer capacitor having a low direct current internal resistance and a low equivalent series resistance as a motive power supply. The electric double layer capacitor has single-cell electrical properties including a capacitance of 1 to 5 F, a rated voltage of 21 to 2.7 V, a direct current internal resistance of 0.01 to 0.1Ω, and an equivalent series resistance at 1 KHz of 0.03 to 0.09Ω, and includes a polarizable electrode made of glassy carbon having a specific surface area of 1 to 500 m2/g.
摘要翻译：提供了一种通过减小专用驱动电源的尺寸实现节省空间的电磁阀。提供了能够瞬时打开和关闭的电磁阀，其包括具有低直流内阻和作为动力源的低等效串联电阻的双电层电容器。双电层电容器具有单电池电特性，包括1至5F的电容，额定电压为21至2.7V，直流内阻为0.01至0.1Ome，1KHz的等效串联电阻为0.03 为0.09Omega，并且包括比表面积为1〜500m 2 / g的玻璃碳制的可极化电极。

64. 发明申请

US20120223265A1 CAM CONTROL VALVE 有权
标题翻译： CAM控制阀
公开(公告)号：US20120223265A1
公开(公告)日：2012-09-06
申请号：US13389671
申请日：2010-11-05
申请人： Yohei Sawada , Ryousuke Dohi , Kouji Nishino , Nobukazu Ikeda
发明人： Yohei Sawada , Ryousuke Dohi , Kouji Nishino , Nobukazu Ikeda
IPC分类号： F16K31/524 , F16K31/04 , F16K7/16
CPC分类号： F16K7/16 , F16K31/047 , F16K31/52408
摘要： A cam control valve includes a valve casing having a fluid passage and valve seat, a valve disc seated on the valve seat to open and close the fluid passage, a valve stem holding down the valve disc so it contacts the valve seat, a cam acting on the valve stem to hold it down, a motor rotating the cam, a motor holder holding the motor, a supporting frame fixed to the valve casing and supporting the motor holder so it moves vertically, an elastic member biasing the motor holder towards spacing from an upper side portion of the supporting frame, and height adjustable screws suspending the motor holder from the supporting frame, and adjusting a height of the motor holder with respect to the supporting frame, wherein the height adjustable screws are slidably inserted into the upper side portion of the supporting frame and screwed into the motor holder.
摘要翻译：凸轮控制阀包括具有流体通道和阀座的阀壳体，阀座位于阀座上以打开和关闭流体通道;阀杆，其压紧阀盘，使其接触阀座;凸轮作用在阀杆上保持下降，电动机旋转凸轮，保持电动机的电动机支架，固定在阀壳体上的支撑框架，并支撑电动机支架使其垂直移动;弹性构件，将电动机支架偏压支撑框架的上侧部分和高度可调节的螺钉，使马达夹持器从支撑框架上悬挂起来，并且相对于支撑框架调节马达夹持器的高度，其中高度可调节螺钉可滑动地插入到上侧部分的支撑框架并拧入电机支架。

65. 发明申请

US20110121217A1 SOLENOID VALVE 有权
标题翻译：电磁阀
公开(公告)号：US20110121217A1
公开(公告)日：2011-05-26
申请号：US12935119
申请日：2009-03-26
申请人： Tadahiro Ohmi , Kouji Nishino , Tsuyoshi Tanigawa , Michio Yamaji , Nobukazu Ikeda , Ryousuke Dohi
发明人： Tadahiro Ohmi , Kouji Nishino , Tsuyoshi Tanigawa , Michio Yamaji , Nobukazu Ikeda , Ryousuke Dohi
IPC分类号： F16K31/02
CPC分类号： F16K31/0658 , F16K31/0675 , H01F7/1816 , H01F2007/1822
摘要： There is provided a solenoid valve that realizes space-saving by reducing the size of a dedicated driving power source. There is provided a solenoid valve capable of instantaneously opening and closing that includes an electric double layer capacitor having a low direct current internal resistance and a low equivalent series resistance as a motive power supply. The electric double layer capacitor has single-cell electrical properties including a capacitance of 1 to 5 F, a rated voltage of 21 to 2.7 V, a direct current internal resistance of 0.01 to 0.1 Ω, and an equivalent series resistance at 1 KHz of 0.03 to 0.09 Ω, and includes a polarizable electrode made of glassy carbon having a specific surface area of 1 to 500 m2/g.
摘要翻译：提供了一种通过减小专用驱动电源的尺寸实现节省空间的电磁阀。提供了能够瞬时打开和关闭的电磁阀，其包括具有低直流内阻和作为动力源的低等效串联电阻的双电层电容器。双电层电容器具有单电池电特性，包括1至5F的电容，额定电压为21至2.7V，直流内阻为0.01至0.1Ω，OHgr为1KHz的等效串联电阻 0.03〜0.09＆OHgr，并且包括由比表面积为1〜500m 2 / g的玻璃碳制成的极化电极。

66. 发明授权

US07849869B2 Method for water hammerless opening of fluid passage, and method for supplying chemical solutions and device for water hammerless opening for which the method is used 有权
标题翻译：流体通道的无水锤打开方法，以及用于提供化学溶液的方法和使用该方法的无水锤打开装置
公开(公告)号：US07849869B2
公开(公告)日：2010-12-14
申请号：US10597343
申请日：2005-01-13
申请人： Tadahiro Ohmi , Kouji Nishino , Masaaki Nagase , Ryousuke Dohi , Nobukazu Ikeda , Ryutaro Nishimura
发明人： Tadahiro Ohmi , Kouji Nishino , Masaaki Nagase , Ryousuke Dohi , Nobukazu Ikeda , Ryutaro Nishimura
IPC分类号： F17D5/06
CPC分类号： F16K47/02 , Y10T137/0324 , Y10T137/0396 , Y10T137/7761 , Y10T137/7762 , Y10T137/7842 , Y10T137/86389 , Y10T137/86397 , Y10T137/86461
摘要： The water hammerless opening device comprises an actuator operating type valve installed on the fluid passage, an electro-pneumatic conversion device to supply the 2-step actuator operating pressure Pa to the afore-mentioned actuator operating type valve, a vibration sensor removably fixed to the pipe passage on the upstream side of the actuator operating type valve, and a tuning box to which the vibration detecting signal Pr detected by the vibration sensor is inputted, through which the control signal Sc to control the step operating pressure Ps′ of the afore-mentioned 2-step actuator operating pressure Pa is outputted to the electro-pneumatic conversion device, and with which the 2-step actuator operating pressure Pa, of the step operating pressure Ps′ which makes the vibration detecting signal Pr nearly zero, is outputted from the electro-pneumatic conversion by adjusting the control signal Sc.
摘要翻译：无水锤打开装置包括安装在流体通道上的致动器操作型阀，向上述致动器操作型阀提供2级致动器操作压力Pa的电动气动转换装置，可拆卸地固定到在致动器操作型阀的上游侧的管道通道和输入了由振动传感器检测到的振动检测信号Pr的调谐箱，通过该调谐箱控制控制信号Sc以控制前述的操作压力Ps' 将上述的2步执行器工作压力Pa输出到电动气动变换装置，将使振动检测信号Pr接近零的阶梯操作压力Ps'的2级致动器工作压力Pa'从通过调节控制信号Sc进行电 - 气转换。

67. 发明授权

US07798167B2 Internal pressure controller of chamber and internal pressure subject-to-control type chamber 有权
标题翻译：内部压力控制器和内部压力控制型室
公开(公告)号：US07798167B2
公开(公告)日：2010-09-21
申请号：US11278909
申请日：2006-04-06
申请人： Tadahiro Ohmi , Akniobu Teramoto , Tomio Uno , Ryousuke Dohi , Kouji Nishino , Osamu Nakamura , Atsushi Matsumoto , Masaaki Nagase , Nobukazu Ikeda
发明人： Tadahiro Ohmi , Akniobu Teramoto , Tomio Uno , Ryousuke Dohi , Kouji Nishino , Osamu Nakamura , Atsushi Matsumoto , Masaaki Nagase , Nobukazu Ikeda
IPC分类号： G05D7/06
CPC分类号： G05D16/208 , Y10T137/7761 , Y10T137/8741 , Y10T137/87507
摘要： A gas supply facility includes a plurality of pressure type flow controllers connected in parallel, and a first controller to control operation of the plurality of pressure type flow controllers so as to supply a desired gas exhausted by a vacuum pump to a chamber while controlling its flow rate, one of the pressure type flow controllers operates as a second controller to control the gas flow rate range up to 10% of the maximum flow rate supplied to the chamber, while the remaining pressure type flow controllers are made to be ones that control the rest of the gas flow rate range. Furthermore, pressure inside the chamber is controlled by installing a pressure detector in the chamber, inputting the value detected by the detector to the controller, and by adjusting a control signal to the pressure type flow controllers.
摘要翻译：气体供给设备包括并联连接的多个压力式流量控制器和控制多个压力式流量控制器的操作的第一控制器，以便在控制其流动的同时将由真空泵排出的期望气体供应到腔室压力型流量控制器中的一个作为第二控制器操作，以将气体流量范围控制在高达供应给腔室的最大流速的10％，而剩余的压力式流量控制器被制成控制剩余的气体流量范围。此外，通过在室内安装压力检测器，将检测器检测到的值输入到控制器，并通过调节压力型流量控制器的控制信号来控制室内的压力。

68. 发明申请

US20060236781A1 Differential pressure type flowmeter and differential pressure type flowmeter controller 有权
标题翻译：差压式流量计和差压式流量计控制器
公开(公告)号：US20060236781A1
公开(公告)日：2006-10-26
申请号：US10563226
申请日：2004-06-18
申请人： Tadahiro Ohmi , Kazuhiko Sugiyama , Tomio Uno , Nobukazu Ikeda , Kouji Nishino , Osamu Nakamura , Ryousuke Dohi , Atsushi Matsumoto
发明人： Tadahiro Ohmi , Kazuhiko Sugiyama , Tomio Uno , Nobukazu Ikeda , Kouji Nishino , Osamu Nakamura , Ryousuke Dohi , Atsushi Matsumoto
IPC分类号： G01F1/37
CPC分类号： G01F1/50 , G01F1/42 , G05D7/0635
摘要： A cost reduction can be achieved by making a differential pressure type flowmeter simple in structure, and highly accurate flow rate measurements can be attained over the wide flow rate range of 100% to 1% with errors E of less than 1 (% SP) both in real time and in a state of inline. To achieve the ends, a differential pressure type flowmeter comprises an orifice, a detector to detect a fluid pressure P1 on the upstream side of an orifice, a detector to detect a fluid pressure P2 on the downstream side of an orifice, a detector to detect a fluid temperature T on the upstream side of an orifice, and a control computation circuit to compute a fluid's flow rate Q passing through an orifice by using the pressure P1, pressure P2 and temperature T detected with the aforementioned detectors, and the aforementioned fluid's flow rate Q is computed with the equation Q=C1·P1/√{square root over ( )}T·((P2/P1)m−(P2/P1)n)1/2 (where C1 is a proportional constant, and m and n are constants).
摘要翻译：通过使差压式流量计结构简单，可以实现成本降低，并且在100％至1％的宽流量范围内可以获得高精度的流量测量，误差E小于1（％SP），均为在实时和处于内联状态。为了实现这一目的，差压式流量计包括孔口，用于检测孔口上游侧的流体压力P 1> 1的检测器，检测流体压力P 2 在孔的下游侧具有用于检测孔口上游侧的流体温度T的检测器，以及控制计算电路，其通过使用压力P <0而计算通过孔口的流体流量Q，使用上述检测器检测到的SUB> 1 <！ - SIPO - >压力P <2>和温度T，并且上述流体的流量Q用等式Q = （P（（P 2/2 / P 1））（P 2 / P 1/2）其中C 1 ）其中C 1 是比例常数，m和n是常数）。

69. 发明申请

US20050257603A1 Small hole diameter automatic measuring apparatus, small hole diameter measurement method, and shower plate manufacturing method 有权
标题翻译：小孔径自动测量装置，小孔径测量方法和淋浴板制造方法
公开(公告)号：US20050257603A1
公开(公告)日：2005-11-24
申请号：US11015097
申请日：2004-12-16
申请人： Tadahiro Ohmi , Masaaki Nagase , Ryousuke Dohi , Kouji Nishino , Osamu Nakamura , Tomio Uno , Nobukazu Ikeda
发明人： Tadahiro Ohmi , Masaaki Nagase , Ryousuke Dohi , Kouji Nishino , Osamu Nakamura , Tomio Uno , Nobukazu Ikeda
IPC分类号： G01B13/10
CPC分类号： G01B13/10 , Y10T29/49432
摘要： A small hole diameter measuring apparatus including: a flow rate measurement section comprised of an automatic pressure control device which supplies a fluid to the inlet side of small holes in a plate while maintaining the outlet- and inlet-side pressures of the small holes in the critical state of the fluid and controlling the inlet-side pressure to a predetermined inlet-side pressure; a plate holding section comprised of a plate supporting device which rotatably holds the plate, and a test probe supporting device which supports a test probe so that the test probe is moved vertically and horizontally; and a control section comprised of a calculation and judgment part, which calculates the hole diameter during the supply of the fluid based upon the measured value of the flow rate from the flow rate measurement section, and an external output part, which outputs the calculated value to the outside.
摘要翻译：一种小孔直径测量装置，包括：流量测量部分，包括自动压力控制装置，该自动压力控制装置将流体供应到板中的小孔的入口侧，同时保持小孔的出口和入口侧压力流体的临界状态并将入口侧压力控制到预定的入口侧压力; 由可转动地保持该板的板支撑装置构成的板保持部和支撑测试探针的测试探针支撑装置，使得测试探针垂直和水平地移动; 以及控制部，包括计算判断部，其基于来自流量测量部的流量的测定值，计算流体供给时的孔径，以及输出计算值的外部输出部到外面

70. 发明申请

US20050109967A1 Valve with an integral orifice 有权
公开(公告)号：US20050109967A1
公开(公告)日：2005-05-26
申请号：US11011379
申请日：2004-12-15
申请人： Tadahiro Ohmi , Kouji Nishino , Nobukazu Ikeda , Michio Yamaji , Ryousuke Dohi , Eiji Ideta , Takashi Hirose
发明人： Tadahiro Ohmi , Kouji Nishino , Nobukazu Ikeda , Michio Yamaji , Ryousuke Dohi , Eiji Ideta , Takashi Hirose
IPC分类号： F04F1/08 , F16K7/14 , F16K7/16 , F16K25/00 , F16K27/00 , F16K31/02 , F16K47/00 , H04B17/00 , H04W4/22 , H04W48/12 , H04W74/08
CPC分类号： F16K25/005 , F16K7/14 , F16K7/16 , F16K27/00 , H04W4/90 , H04W48/12 , H04W74/006 , H04W74/0833 , H04W76/50
摘要： A valve with an integral orifice for use in gas feeding equipment provided with a pressure-type flow volume control device to be employed for manufacturing of semi-conductors and chemical goods. The valve with an integral orifice has the excellent flow rate control characteristics by improving the processing accuracy of the orifice and preventing the distortion of the orifice at the time of assembling. The orifice is formed in a stainless steel made orifice disc. The metal-made orifice disc with the orifice formed by separate processing and the synthetic-resin-made valve seat body are removably assembled, wherein the orifice disc and the synthetic resin made valve seat body are fixed airtight to the valve main body by pressing the valve seat body via a metal inner disc.

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