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1. 发明授权

US07219533B2 Small hole diameter automatic measuring apparatus, small hole diameter measurement method, and shower plate manufacturing method 有权
标题翻译：小孔径自动测量装置，小孔径测量方法和淋浴板制造方法
公开(公告)号：US07219533B2
公开(公告)日：2007-05-22
申请号：US11015097
申请日：2004-12-16
申请人： Tadahiro Ohmi , Masaaki Nagase , Ryousuke Dohi , Kouji Nishino , Osamu Nakamura , Tomio Uno , Nobukazu Ikeda
发明人： Tadahiro Ohmi , Masaaki Nagase , Ryousuke Dohi , Kouji Nishino , Osamu Nakamura , Tomio Uno , Nobukazu Ikeda
IPC分类号： G01M3/02
CPC分类号： G01B13/10 , Y10T29/49432
摘要： A small hole diameter measuring apparatus including: a flow rate measurement section comprised of an automatic pressure control device which supplies a fluid to the inlet side of small holes in a plate while maintaining the outlet- and inlet-side pressures of the small holes in the critical state of the fluid and controlling the inlet-side pressure to a predetermined inlet-side pressure; a plate holding section comprised of a plate supporting device which rotatably holds the plate, and a test probe supporting device which supports a test probe so that the test probe is moved vertically and horizontally; and a control section comprised of a calculation and judgment part, which calculates the hole diameter during the supply of the fluid based upon the measured value of the flow rate from the flow rate measurement section, and an external output part, which outputs the calculated value to the outside.
摘要翻译：一种小孔直径测量装置，包括：流量测量部分，包括自动压力控制装置，该自动压力控制装置将流体供应到板中的小孔的入口侧，同时保持小孔的出口和入口侧压力流体的临界状态并将入口侧压力控制到预定的入口侧压力; 由可转动地保持该板的板支撑装置构成的板保持部和支撑测试探针的测试探针支撑装置，使得测试探针垂直和水平地移动; 以及控制部，包括计算判断部，其基于来自流量测量部的流量的测定值，计算流体供给时的孔径，以及输出计算值的外部输出部到外面

2. 发明授权

US07798167B2 Internal pressure controller of chamber and internal pressure subject-to-control type chamber 有权
标题翻译：内部压力控制器和内部压力控制型室
公开(公告)号：US07798167B2
公开(公告)日：2010-09-21
申请号：US11278909
申请日：2006-04-06
申请人： Tadahiro Ohmi , Akniobu Teramoto , Tomio Uno , Ryousuke Dohi , Kouji Nishino , Osamu Nakamura , Atsushi Matsumoto , Masaaki Nagase , Nobukazu Ikeda
发明人： Tadahiro Ohmi , Akniobu Teramoto , Tomio Uno , Ryousuke Dohi , Kouji Nishino , Osamu Nakamura , Atsushi Matsumoto , Masaaki Nagase , Nobukazu Ikeda
IPC分类号： G05D7/06
CPC分类号： G05D16/208 , Y10T137/7761 , Y10T137/8741 , Y10T137/87507
摘要： A gas supply facility includes a plurality of pressure type flow controllers connected in parallel, and a first controller to control operation of the plurality of pressure type flow controllers so as to supply a desired gas exhausted by a vacuum pump to a chamber while controlling its flow rate, one of the pressure type flow controllers operates as a second controller to control the gas flow rate range up to 10% of the maximum flow rate supplied to the chamber, while the remaining pressure type flow controllers are made to be ones that control the rest of the gas flow rate range. Furthermore, pressure inside the chamber is controlled by installing a pressure detector in the chamber, inputting the value detected by the detector to the controller, and by adjusting a control signal to the pressure type flow controllers.
摘要翻译：气体供给设备包括并联连接的多个压力式流量控制器和控制多个压力式流量控制器的操作的第一控制器，以便在控制其流动的同时将由真空泵排出的期望气体供应到腔室压力型流量控制器中的一个作为第二控制器操作，以将气体流量范围控制在高达供应给腔室的最大流速的10％，而剩余的压力式流量控制器被制成控制剩余的气体流量范围。此外，通过在室内安装压力检测器，将检测器检测到的值输入到控制器，并通过调节压力型流量控制器的控制信号来控制室内的压力。

3. 发明申请

US20050257603A1 Small hole diameter automatic measuring apparatus, small hole diameter measurement method, and shower plate manufacturing method 有权
标题翻译：小孔径自动测量装置，小孔径测量方法和淋浴板制造方法
公开(公告)号：US20050257603A1
公开(公告)日：2005-11-24
申请号：US11015097
申请日：2004-12-16
申请人： Tadahiro Ohmi , Masaaki Nagase , Ryousuke Dohi , Kouji Nishino , Osamu Nakamura , Tomio Uno , Nobukazu Ikeda
发明人： Tadahiro Ohmi , Masaaki Nagase , Ryousuke Dohi , Kouji Nishino , Osamu Nakamura , Tomio Uno , Nobukazu Ikeda
IPC分类号： G01B13/10
CPC分类号： G01B13/10 , Y10T29/49432
摘要： A small hole diameter measuring apparatus including: a flow rate measurement section comprised of an automatic pressure control device which supplies a fluid to the inlet side of small holes in a plate while maintaining the outlet- and inlet-side pressures of the small holes in the critical state of the fluid and controlling the inlet-side pressure to a predetermined inlet-side pressure; a plate holding section comprised of a plate supporting device which rotatably holds the plate, and a test probe supporting device which supports a test probe so that the test probe is moved vertically and horizontally; and a control section comprised of a calculation and judgment part, which calculates the hole diameter during the supply of the fluid based upon the measured value of the flow rate from the flow rate measurement section, and an external output part, which outputs the calculated value to the outside.
摘要翻译：一种小孔直径测量装置，包括：流量测量部分，包括自动压力控制装置，该自动压力控制装置将流体供应到板中的小孔的入口侧，同时保持小孔的出口和入口侧压力流体的临界状态并将入口侧压力控制到预定的入口侧压力; 由可转动地保持该板的板支撑装置构成的板保持部和支撑测试探针的测试探针支撑装置，使得测试探针垂直和水平地移动; 以及控制部，包括计算判断部，其基于来自流量测量部的流量的测定值，计算流体供给时的孔径，以及输出计算值的外部输出部到外面

4. 发明授权

US07926509B2 Method for flow rate control of clustering fluid and device for flow rate control of clustering fluid employed in the method 有权
标题翻译：聚类流体流量控制方法和方法中采用的聚类流体流量控制装置
公开(公告)号：US07926509B2
公开(公告)日：2011-04-19
申请号：US11182762
申请日：2005-07-18
申请人： Tadahiro Ohmi , Kazuhiko Sugiyama , Kenetu Mizusawa , Eiji Takahashi , Tomio Uno , Kouji Nishino , Ryousuke Dohi , Nobukazu Ikeda , Masaaki Nagase
发明人： Tadahiro Ohmi , Kazuhiko Sugiyama , Kenetu Mizusawa , Eiji Takahashi , Tomio Uno , Kouji Nishino , Ryousuke Dohi , Nobukazu Ikeda , Masaaki Nagase
IPC分类号： F16K49/00
CPC分类号： H01L21/67023 , G05D7/0635 , Y10T137/6416 , Y10T137/6606 , Y10T137/7761
摘要： Disclosed is a method of controlling the flow rate of clustering fluid using a pressure type flow rate control device in which the flow rate Q of gas passing through an orifice is computed as K=KP1 (where K is a constant) with the gas being in a state where the ratio P2/P1 between the gas pressure P1 on the upstream side of the orifice and the gas pressure P2 on the downstream side of the orifice is held at a value not higher than the critical pressure ratio of the gas wherein the association of molecules is dissociated either by heating the pressure type flow rate control device to the temperature higher than 40° C., or by applying the diluting gas to the clustering fluid to make it lower than a partial pressure so the clustering fluid is permitted to pass through the orifice in a monomolecular state.
摘要翻译：公开了一种使用压力式流量控制装置控制聚集流体的流量的方法，其中通过孔口的气体的流量Q被计算为K = KP1（其中K是常数），气体处于孔口上游侧的气体压力P1与孔口下游侧的气体压力P2之间的比P2 / P1保持在不高于气体的临界压力比的值的状态，的分子通过将压力型流量控制装置加热到高于40℃的温度来解离，或者通过将稀释气体施加到聚集流体以使其低于分压使得聚集流体被允许通过通过孔在单分子状态。

5. 发明申请

US20060076060A1 Method for flow rate control of clustering fluid and device for flow rate control of clustering fluid employed in the method 有权
标题翻译：聚类流体流量控制方法和方法中采用的聚类流体流量控制装置
公开(公告)号：US20060076060A1
公开(公告)日：2006-04-13
申请号：US11182762
申请日：2005-07-18
申请人： Tadahiro Ohmi , Kazuhiko Sugiyama , Kenetu Mizusawa , Eiji Takahashi , Tomio Uno , Kouji Nishino , Ryousuke Dohi , Nobukazu Ikeda , Masaaki Nagase
发明人： Tadahiro Ohmi , Kazuhiko Sugiyama , Kenetu Mizusawa , Eiji Takahashi , Tomio Uno , Kouji Nishino , Ryousuke Dohi , Nobukazu Ikeda , Masaaki Nagase
IPC分类号： F16K49/00
CPC分类号： H01L21/67023 , G05D7/0635 , Y10T137/6416 , Y10T137/6606 , Y10T137/7761
摘要： Disclosed is a method of controlling the flow rate of clustering fluid using a pressure type flow rate control device in which the flow rate Q of gas passing through an orifice is computed as K=KP1 (where K is a constant) with the gas being in a state where the ratio P2/P1 between the gas pressure P1 on the upstream side of the orifice and the gas pressure P2 on the downstream side of the orifice is held at a value not higher than the critical pressure ratio of the gas wherein the association of molecules is dissociated either by heating the pressure type flow rate control device to the temperature higher than 40° C., or by applying the diluting gas to the clustering fluid to make it lower than a partial pressure so the clustering fluid is permitted to pass through the orifice in a monomolecular state.
摘要翻译：公开了一种使用压力式流量控制装置控制聚集流体的流量的方法，其中通过孔口的气体的流量Q被计算为K = KP 1（其中K是常数），气体为在孔口上游侧的气体压力P 1与孔口下游侧的气体压力P 2之间的比率P 2 / P 1保持在不高于孔口的临界压力比的值的状态下通过将压力型流量控制装置加热到高于40℃的温度，或者通过将稀释气体施加到聚集流体以使其低于分压，分离的缔合来分离气体，使得聚合允许流体以单分子状态通过孔口。

6. 发明授权

US07367241B2 Differential pressure type flowmeter and differential pressure type flow controller 有权
标题翻译：差压式流量计和差压式流量控制器
公开(公告)号：US07367241B2
公开(公告)日：2008-05-06
申请号：US10563226
申请日：2004-06-18
申请人： Tadahiro Ohmi , Kazuhiko Sugiyama , Tomio Uno , Nobukazu Ikeda , Kouji Nishino , Osamu Nakamura , Ryousuke Dohi , Atsushi Matsumoto
发明人： Tadahiro Ohmi , Kazuhiko Sugiyama , Tomio Uno , Nobukazu Ikeda , Kouji Nishino , Osamu Nakamura , Ryousuke Dohi , Atsushi Matsumoto
IPC分类号： G01F1/37
CPC分类号： G01F1/50 , G01F1/42 , G05D7/0635
摘要： A differential pressure type flowmeter comprises an orifice, a detector to detect a fluid pressure P1 on the upstream side of an orifice, a detector to detect a fluid pressure P2 on the downstream side of an orifice, a detector to detect a fluid temperature T on the upstream side of an orifice, and a control computation circuit to compute a fluid's flow rate Q passing through an orifice by using the pressure P1, where P2 and temperature T detected with the aforementioned detectors, and the aforementioned fluid's flow rate Q is computed with the equation Q=C1•P1/√T•((P2/P1)m−(P2/P1)m)1/2 (where C1 is a proportional constant, and m and n are constants).
摘要翻译：差压式流量计包括孔口，用于检测孔口上游侧的流体压力P 1> 1的检测器，用于检测流体压力P 2> 2的检测器孔的下游侧，用于检测孔口上游侧的流体温度T的检测器，以及控制计算电路，用于通过使用压力P 1计算通过孔口的流体的流量Q， SUB>，其中P＆lt; 2＆gt;和用上述检测器检测的温度T，并且上述流体的流量Q用公式<？in-line-formula description =“In-line Formulas”end =“铅”→Q = C 1 P 1 <？in-line-formula description =“In-line Formulas”end =“tail”？>（其中C <1> 是比例常数，m和n是常数）。

7. 发明授权

US07085628B2 Apparatus for the correction of temperature drift for pressure sensor, pressure control apparatus and pressure-type flow rate control apparatus 有权
标题翻译：用于校正压力传感器，压力控制装置和压力型流量控制装置的温度漂移的装置
公开(公告)号：US07085628B2
公开(公告)日：2006-08-01
申请号：US10476973
申请日：2002-11-22
申请人： Tadahiro Ohmi , Tomio Uno , Osamu Nakamura , Nobukazu Ikeda , Ryousuke Dohi , Kouji Nishino , Atsushi Matsumoto , Kazuhiko Sugiyama
发明人： Tadahiro Ohmi , Tomio Uno , Osamu Nakamura , Nobukazu Ikeda , Ryousuke Dohi , Kouji Nishino , Atsushi Matsumoto , Kazuhiko Sugiyama
IPC分类号： G06D23/00
CPC分类号： G05D7/0635 , G01D3/022 , G01F1/50 , G01F15/046 , G01L9/025
摘要： A pressure sensor, a pressure control apparatus, and a flow rate control apparatus are provided to automatically correct temperature drift of the pressure sensor and accurately detect pressure despite changes in temperature. An embodiment includes an upstream side pressure sensor between an orifice and a control valve, to control flow rate through the orifice by a regulating control valve, while calculating the flow from the upstream side pressure. With a temperature sensor, a memory means, and a temperature drift correcting means which calculates drift of the upstream side pressure sensor from data in the memory means when the temperature of the fluid changes and offsets the output drift of the upstream side pressure sensor with the calculated amount of the output drift, temperature drift of the pressure sensor is automatically corrected, enabling accurate control of flow rate.
摘要翻译：提供压力传感器，压力控制装置和流量控制装置来自动校正压力传感器的温度漂移并且尽管温度变化来精确地检测压力。一个实施例包括在孔口和控制阀之间的上游侧压力传感器，用于通过调节控制阀控制通过孔口的流量，同时计算从上游侧压力的流量。利用温度传感器，存储装置和温度漂移校正装置，当流体的温度变化时，上游侧压力传感器的输出漂移与输出漂移的计算量，压力传感器的温度漂移自动校正，可以精确控制流量。

8. 发明授权

US06964279B2 Pressure-type flow rate control apparatus 有权
标题翻译：压力式流量控制装置
公开(公告)号：US06964279B2
公开(公告)日：2005-11-15
申请号：US10469151
申请日：2002-11-22
申请人： Tadahiro Ohmi , Tomio Uno , Osamu Nakamura , Nobukazu Ikeda , Ryousuke Dohi , Kouji Nishino , Atsushi Matsumoto , Kazuhiko Sugiyama , Shujiro Inui , Taiji Sakai , Masanori Ueyama
发明人： Tadahiro Ohmi , Tomio Uno , Osamu Nakamura , Nobukazu Ikeda , Ryousuke Dohi , Kouji Nishino , Atsushi Matsumoto , Kazuhiko Sugiyama , Shujiro Inui , Taiji Sakai , Masanori Ueyama
IPC分类号： G01F1/00 , G01F1/36 , G01F1/42 , G05D7/06
CPC分类号： G05D7/0635 , Y10T137/7759 , Y10T137/7761
摘要： A pressure-type flow rate control apparatus controls the flow rate of fluid passing through an orifice to a target flow rate. The flow rate of a compressible fluid under non-critical conditions (sub-sonic) passing through the orifice is calculated by: Qc=KP2m(P1−P2)n so that the flow rate can be controlled to the target flow rate with high precision and speed. Also provided is an improved pressure-type flow rate control apparatus in which a pressure ratio P2/P1=r, obtained from an upstream pressure P1 and a downstream pressure P2 is constantly compared with a critical value r, and under critical conditions (r≦rc), the flow rate is calculated by: Qc=KP1. Under non-critical conditions (r>rc), the flow rate is calculated by Qc=KP2m(P1−P2)n.
摘要翻译：压力式流量控制装置将通过孔口的流体的流量控制为目标流量。通过孔口的非临界条件（亚音）的可压缩流体的流量通过以下公式计算：<？in-line-formula description =“In-line Formulas”end =“lead”？> Qc = KP （P 1→P 2） -formulae description =“在线公式”end =“tail”？>，可以以高精度和高速度将流量控制在目标流量上。还提供了一种改进的压力型流量控制装置，其中从上游压力P 1获得的压力比P 2 / P 1 / / SUB>和下游压力P 2 2不断与临界值r进行比较，在临界条件（r≤Rc c）下，流量由下式计算：：<？in-line-formula description =“In-line Formulas”end =“lead”？> Qc = KP <1> <？in-line-formula description =“In-line Formulas” end =“tail”？>在非关键条件下（r> r> c ），流量通过Qc = KP 2 / （P 1→P 2）。

9. 发明申请

US20060236781A1 Differential pressure type flowmeter and differential pressure type flowmeter controller 有权
标题翻译：差压式流量计和差压式流量计控制器
公开(公告)号：US20060236781A1
公开(公告)日：2006-10-26
申请号：US10563226
申请日：2004-06-18
申请人： Tadahiro Ohmi , Kazuhiko Sugiyama , Tomio Uno , Nobukazu Ikeda , Kouji Nishino , Osamu Nakamura , Ryousuke Dohi , Atsushi Matsumoto
发明人： Tadahiro Ohmi , Kazuhiko Sugiyama , Tomio Uno , Nobukazu Ikeda , Kouji Nishino , Osamu Nakamura , Ryousuke Dohi , Atsushi Matsumoto
IPC分类号： G01F1/37
CPC分类号： G01F1/50 , G01F1/42 , G05D7/0635
摘要： A cost reduction can be achieved by making a differential pressure type flowmeter simple in structure, and highly accurate flow rate measurements can be attained over the wide flow rate range of 100% to 1% with errors E of less than 1 (% SP) both in real time and in a state of inline. To achieve the ends, a differential pressure type flowmeter comprises an orifice, a detector to detect a fluid pressure P1 on the upstream side of an orifice, a detector to detect a fluid pressure P2 on the downstream side of an orifice, a detector to detect a fluid temperature T on the upstream side of an orifice, and a control computation circuit to compute a fluid's flow rate Q passing through an orifice by using the pressure P1, pressure P2 and temperature T detected with the aforementioned detectors, and the aforementioned fluid's flow rate Q is computed with the equation Q=C1·P1/√{square root over ( )}T·((P2/P1)m−(P2/P1)n)1/2 (where C1 is a proportional constant, and m and n are constants).
摘要翻译：通过使差压式流量计结构简单，可以实现成本降低，并且在100％至1％的宽流量范围内可以获得高精度的流量测量，误差E小于1（％SP），均为在实时和处于内联状态。为了实现这一目的，差压式流量计包括孔口，用于检测孔口上游侧的流体压力P 1> 1的检测器，检测流体压力P 2 在孔的下游侧具有用于检测孔口上游侧的流体温度T的检测器，以及控制计算电路，其通过使用压力P <0而计算通过孔口的流体流量Q，使用上述检测器检测到的SUB> 1 <！ - SIPO - >压力P <2>和温度T，并且上述流体的流量Q用等式Q = （P（（P 2/2 / P 1））（P 2 / P 1/2）其中C 1 ）其中C 1 是比例常数，m和n是常数）。

10. 发明授权

US06302130B1 Method and apparatus for detection of orifice clogging in pressure-type flow rate controllers 有权
标题翻译：用于检测压力型流量控制器孔堵塞的方法和装置
公开(公告)号：US06302130B1
公开(公告)日：2001-10-16
申请号：US09529985
申请日：2000-07-18
申请人： Tadahiro Ohmi , Seiichi Iida , Satoshi Kagatsume , Jun Hirose , Kouji Nishino , Nobukazu Ikeda , Michio Yamaji , Ryousuke Dohi , Kazuhiro Yoshikawa , Mutsunori Koyomogi , Tomio Uno , Eiji Ideta , Takashi Hirose
发明人： Tadahiro Ohmi , Seiichi Iida , Satoshi Kagatsume , Jun Hirose , Kouji Nishino , Nobukazu Ikeda , Michio Yamaji , Ryousuke Dohi , Kazuhiro Yoshikawa , Mutsunori Koyomogi , Tomio Uno , Eiji Ideta , Takashi Hirose
IPC分类号： F17D116
CPC分类号： G05D7/0635 , Y10T137/0396 , Y10T137/7759 , Y10T137/7761 , Y10T137/8326
摘要： A method and apparatus for detection of clogging of an orifice by measuring the upstream side pressure without breaking up the piping system in a flow rate control unit using an orifice, so as to extend the life of the flow rate control unit and enhance its safety. The apparatus of detecting clogging of an orifice in a pressure-type flow rate controller has a control valve (CV), an orifice (2), a pressure detector (14) for measuring the upstream pressure P1 therebetween, and a flow rate setting circuit (32) wherein, with the upstream pressure P1 maintained about two or more times higher than the downstream pressure P2, the downstream flow rate QC is calculated with the equation QC=KP1 (K=constant) and wherein the control valve (CV) is controlled by the difference signal QY between the calculated flow rate QC and the set flow rate QS. The apparatus comprises: a storage memory M memorizing standard pressure attenuation data Y(t) of the upstream pressure P1 measured with the flow rate switched from the high set flow rate QSH to the low set flow rate QSL with the orifice (2) not clogged, a pressure detector (14) for determination of the pressure attenuation data P(t) of the upstream pressure P1 with the flow rate switched from the high set flow rate QSH to the low set flow rate QSL with the orifice (2) in the actual conditions, a central processing unit CPU for checking the pressure attenuation data P(t) against standard pressure attenuation data Y(t), and an alarm circuit (46) that turns on a clogging alarm when the pressure attenuation data P(t) deviates from standard pressure attenuation data Y(t) to a specific degree or beyond that.
摘要翻译：一种用于通过测量上游侧压力而不破坏使用孔口的流量控制单元中的管道系统来检测孔口堵塞的方法和装置，以延长流量控制单元的寿命并提高其安全性。检测压力型流量控制器中的孔口堵塞的装置具有控制阀（CV），用于测量其上游压力P1的孔口（2），压力检测器（14）和流量设定电路（32）其中，在上游压力P1保持大于下游压力P2的两倍或更多倍的情况下，下游流量QC用等式QC = KP1（K =常数）计算，并且其中控制阀（CV）为由计算流量QC和设定流量QS之间的差分信号QY控制。该装置包括：存储存储器M，存储以从高设定流量QSH切换到低设定流量QSL的流量测量的上游压力P1的标准压力衰减数据Y（t），其中孔口（2）没有堵塞，用于确定上游压力P1的压力衰减数据P（t）的压力检测器（14），其中流量从高设定流量QSH切换到具有孔口（2）的低设定流量QSL 实际情况是用于根据标准压力衰减数据Y（t）检测压力衰减数据P（t）的中央处理单元CPU以及当压力衰减数据P（t）偏离时引起堵塞报警的报警电路（46）从标准压力衰减数据Y（t）到特定程度或以上。

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