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    • 65. 发明授权
    • Image reading apparatus and image forming apparatus with a control device for adjusting a white reference member to a set position according to shading correction or image reading operation
    • 图像读取装置和图像形成装置,具有用于根据阴影校正或图像读取操作将白色基准构件调整到设定位置的控制装置
    • US08320026B2
    • 2012-11-27
    • US12356228
    • 2009-01-20
    • Koichi Tanaka
    • Koichi Tanaka
    • H04N1/40
    • H04N1/4076H04N1/125H04N1/4095
    • An image reading apparatus including: an image sensor unit having a light source that irradiates light onto an original document transferred to a predetermined image reading position, and a light receiving element that receives reflected light of the light; a white reference member for shading correction, provided so as to oppose the image sensor unit across a transferring path for the original document; an actuator that adjusts a position or an angle of the white reference member; and a control device that sets a position or angle of the white reference member and controls the actuator so as to adjust the white reference member to the set position or to the set angle, so that light reflected from the white reference member is received on the light receiving element when correcting shading, and so that the reflected light is not received on the light receiving element when reading an image.
    • 一种图像读取装置,包括:具有将光照射到转印到预定图像读取位置的原稿上的光源的图像传感器单元和接收所述光的反射光的光接收元件; 用于阴影校正的白色参考构件,被设置为与原始文档的传送路径相对的图像传感器单元; 调节白色参考构件的位置或角度的致动器; 以及控制装置,其设置白色基准部件的位置或角度并控制致动器,以便将白色基准部件调整到设定位置或设定角度,使得从白色参考部件反射的光被接收在 光接收元件在校正阴影时,并且使得当读取图像时反射光不被接收在光接收元件上。
    • 66. 发明授权
    • Method for manufacturing SOI wafer
    • 制造SOI晶圆的方法
    • US08268700B2
    • 2012-09-18
    • US12153160
    • 2008-05-14
    • Shoji AkiyamaYoshihiro KubotaAtsuo ItoKoichi TanakaMakoto KawaiYuuji Tobisaka
    • Shoji AkiyamaYoshihiro KubotaAtsuo ItoKoichi TanakaMakoto KawaiYuuji Tobisaka
    • H01L21/30
    • H01L21/76254
    • There is disclosed a method for manufacturing an SOI wafer comprising at least: implanting a hydrogen ion, a rare gas ion, or both the ions into a donor wafer formed of a silicon wafer or a silicon wafer having an oxide film formed on a surface thereof from a surface of the donor wafer, thereby forming an ion implanted layer; performing a plasma activation treatment with respect to at least one of an ion implanted surface of the donor wafer and a surface of a handle wafer, the surface of the handle wafer is to be bonded to the ion implanted surface; closely bonding these surfaces to each other; mechanically delaminating the donor wafer at the ion implanted layer as a boundary and thereby reducing a film thickness thereof to provide an SOI layer, and performing a heat treatment at 600 to 1000° C.; and polishing a surface of the SOI layer for 10 to 50 nm based on chemical mechanical polishing.A method for manufacturing with excellent productivity an SOI wafer having an SOI layer with a mirror-finished surface and high film thickness uniformity can be provided.
    • 公开了一种制造SOI晶片的方法,该方法至少包括:将氢离子,稀有气体离子或两者离子注入到由硅晶片或具有在其表面上形成的氧化膜的硅晶片形成的施主晶片中 从施主晶片的表面,从而形成离子注入层; 对施主晶片的离子注入表面和处理晶片的表面中的至少一个进行等离子体激活处理,把手晶片的表面与离子注入表面结合; 将这些表面彼此紧密结合; 以离子注入层的施主晶片作为边界进行机械分层,由此降低其膜厚以提供SOI层,并在600〜1000℃下进行热处理。 并且基于化学机械抛光将SOI层的表面抛光10至50nm。 可以提供具有优异的生产率的具有SOI层的具有镜面精加工表面和高膜厚均匀性的SOI晶片的方法。
    • 68. 发明授权
    • Multilayer wiring board and method of manufacturing the same
    • 多层布线板及其制造方法
    • US08026448B2
    • 2011-09-27
    • US12068169
    • 2008-02-04
    • Koichi Tanaka
    • Koichi Tanaka
    • H05K1/03
    • H05K3/462H05K1/0289H05K3/4647H05K2201/09245H05K2203/0733H05K2203/1327Y10T29/49126
    • A multilayer wiring board includes at least two wiring boards having wiring layers containing wiring patterns formed on both sides. A pair of fin-shaped bumps are formed at desired positions on wiring patterns on the surfaces facing each other, of the wiring boards, so that the bumps assume a slender shape as seen in plan view and that the bumps intersect each other. The pair of fin-shaped bumps are electrically connected to form an inter-board connection terminal. Further, an insulating layer is formed between the wiring boards, and protection films are formed to cover the entire surface except pad areas defined at predetermined positions on outer wiring layers of the wiring boards.
    • 多层布线基板包括至少两个布线板,布线层包含形成在两侧的布线图案。 在布线板的彼此相对的表面上的布线图案的期望位置处形成一对鳍状凸起,使得凸起呈现如平面图中看到的细长形状,并且凸块彼此相交。 一对鳍状凸块电连接以形成板间连接端子。 此外,在布线板之间形成绝缘层,并且形成保护膜以覆盖限定在布线板的外部布线层上的预定位置处的焊盘区域之外的整个表面。
    • 69. 发明授权
    • Method for manufacturing pyrolytic boron nitride composite substrate
    • 制造热解氮化硼复合基板的方法
    • US07879175B2
    • 2011-02-01
    • US12078276
    • 2008-03-28
    • Makoto KawaiYoshihiro KubotaAtsuo ItoKoichi TanakaYuuji TobisakaShoji Akiyama
    • Makoto KawaiYoshihiro KubotaAtsuo ItoKoichi TanakaYuuji TobisakaShoji Akiyama
    • B32B38/10
    • H01L21/76254C23C14/48
    • Wettability of a PBN material surface with respect to a metal is improved to expand use applications. Hydrogen ions are implanted into a surface of a silicon substrate 10 to form an ion implanted region 11 at a predetermined depth near a surface of the silicon substrate 10, and a plasma treatment or an ozone treatment is performed with respect to a main surface of the silicon substrate 10 for the purpose of surface cleaning or surface activation. The main surfaces of the silicon substrate 10 and a PBN substrate 20 subjected to the surface treatment are appressed against each other to be bonded at a room temperature, and an external impact shock is given to the bonded substrate to mechanically delaminate a silicon film 12 from a bulk 13 of the silicon substrate to be transferred. An obtained PBN composite substrate 30 is diced to form a chip having a desired size, and a refractory metal is metallized on the silicon film 12 side to be connected with a wiring material.
    • PBN材料表面相对于金属的润湿性得到改善以扩大使用应用。 将氢离子注入到硅衬底10的表面中以在硅衬底10的表面附近的预定深度处形成离子注入区11,并且相对于硅衬底10的主表面进行等离子体处理或臭氧处理 硅基板10,用于表面清洁或表面活化。 经过表面处理的硅衬底10和PBN衬底20的主表面在室温下相互粘合,并且对键合衬底施加外部冲击冲击,从而将硅膜12从 待转移的硅衬底的体积13。 将获得的PBN复合基板30切割成具有所需尺寸的芯片,并且将难熔金属在硅膜12侧金属化以与布线材料连接。
    • 70. 发明申请
    • Method for manufacturing semiconductor substrate
    • 半导体衬底的制造方法
    • US20100311221A1
    • 2010-12-09
    • US12805582
    • 2010-08-06
    • Shoji AkiyamaYoshihiro KubotaAtsuo ItoKoichi TanakaMakoto KawaiYuuji Tobisaka
    • Shoji AkiyamaYoshihiro KubotaAtsuo ItoKoichi TanakaMakoto KawaiYuuji Tobisaka
    • H01L21/762
    • H01L21/76254H01L27/1266H01L29/78603
    • Hydrogen ions are implanted to a surface (main surface) of the single crystal Si substrate 10 at a dosage of 1.5×1017 atoms/cm2 or higher to form the hydrogen ion implanted layer (ion-implanted damage layer) 11. As a result of the hydrogen ion implantation, the hydrogen ion implanted boundary 12 is formed. The single crystal Si substrate 10 and the low melting glass substrate 20 are bonded together. The bonded substrate is heated at relatively low temperature, 120° C. or higher and 250° C. or lower (below a melting point of the support substrate). Further, an external shock is applied to delaminate the Si crystal film along the hydrogen ion implanted boundary 12 of the single crystal Si substrate 10 out of the heat-treated bonded substrate. Then, the surface of the resultant silicon thin film 13 is polished to remove a damaged portion, so that a semiconductor substrate can be fabricated. There can be provided a semiconductor substrate in which a high-quality silicon thin film is transferred onto a substrate made of a low melting point material.
    • 将氢离子以1.5×10 17原子/ cm 2或更高的剂量注入单晶Si衬底10的表面(主表面),以形成氢离子注入层(离子注入损伤层)11。 氢离子注入,形成氢离子注入边界12。 单晶Si衬底10和低熔点玻璃衬底20结合在一起。 键合衬底在相对较低的温度,120℃或更高和250℃或更低(低于支撑衬底的熔点)下加热。 此外,施加外部冲击以沿着经热处理的键合衬底的单晶Si衬底10的氢离子注入边界12将Si晶体膜分层。 然后,对所得的硅薄膜13的表面进行抛光以去除损坏部分,从而可以制造半导体衬底。 可以提供一种半导体衬底,其中将高质量的硅薄膜转移到由低熔点材料制成的衬底上。