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51. 发明授权

US06692893B2 Onium salts, photoacid generators, resist compositions, and patterning process 有权
标题翻译：鎓盐，光酸产生剂，抗蚀剂组合物和图案化方法
公开(公告)号：US06692893B2
公开(公告)日：2004-02-17
申请号：US09983155
申请日：2001-10-23
申请人： Youichi Ohsawa , Jun Watanabe , Takeshi Nagata , Jun Hatakeyama
发明人： Youichi Ohsawa , Jun Watanabe , Takeshi Nagata , Jun Hatakeyama
IPC分类号： G03C173
CPC分类号： G03F7/0045 , G03F7/0382 , G03F7/0392 , G03F7/0397 , Y10S430/115 , Y10S430/12 , Y10S430/122 , Y10S430/126
摘要： Onium salts of arylsulfonyloxynaphthalenesulfonate anions with iodonium or sulfonium cations are novel. A chemically amplified resist composition comprising the onium salt as a photoacid generator is suited for microfabrication, especially by deep UV lithography because of many advantages including improved resolution, improved focal latitude, minimized line width variation or shape degradation even on long-term PED, minimized debris after coating, development and peeling, and improved pattern profile after development.
摘要翻译：芳基磺酰氧基萘磺酸盐与碘鎓或锍阳离子的鎓盐是新颖的。包含作为光致酸发生剂的鎓盐的化学放大抗蚀剂组合物特别适用于微细加工，特别是通过深紫外光刻技术，因为许多优点，包括改进的分辨率，改善的焦点纬度，最小化的线宽变化或甚至在长期PED下的形状退化涂层，显影和剥离后的碎屑，以及显影后改进的图案轮廓。

52. 发明授权

US06338931B1 Resist compositions and patterning process 有权
标题翻译：抗蚀剂组合物和图案化工艺
公开(公告)号：US06338931B1
公开(公告)日：2002-01-15
申请号：US09637595
申请日：2000-08-15
申请人： Kazunori Maeda , Takeshi Nagata , Satoshi Watanabe , Youichi Ohsawa , Jun Watanabe , Shigehiro Nagura
发明人： Kazunori Maeda , Takeshi Nagata , Satoshi Watanabe , Youichi Ohsawa , Jun Watanabe , Shigehiro Nagura
IPC分类号： G03F7039
CPC分类号： G03F7/0045 , G03F7/0382 , G03F7/0392 , G03F7/0397 , Y10S430/106
摘要： A chemical amplification type resist composition contains as a photoacid generator a sulfonyldiazomethane compound of the formula (1): wherein R1 is C1-10 alkyl or C6-14 aryl, R2 is C1-6 alkyl, G is SO2 or CO, R3 is C1-10 alkyl or C6-14 aryl, p is an integer of 0 to 4, q is an integer of 1 to 5, 1≦p+q≦5, n is 1 or 2, m is 0 or 1, and n+m=2. The composition is suited for microfabrication, especially by deep UV lithography because of many advantages including improved resolution, minimized line width variation or shape degradation even on long-term PED, minimized debris after coating, development and peeling, and improved pattern profile after development.
摘要翻译：化学放大型抗蚀剂组合物含有式（1）的磺酰基二氮甲烷化合物作为光酸产生剂：其中R1是C1-10烷基或C6-14芳基，R2是C1-6烷基，G是SO2或CO，R3是C1 -10烷基或C6-14芳基，p为0〜4的整数，q为1〜5的整数，1 <= p + q <= 5，n为1或2，m为0或1， n + m = 2。该组合物特别适用于微细加工，因为包括改进的分辨率，最小化的线宽变化或形状退化的许多优点，即使在长期PED，涂布后的最小化碎片，显影和剥离以及显影后的改进的图案轮廓方面也是如此。

53. 发明授权

US6030746A Di- and triphenyl monoterpene hydrocarbon derivatives, dissolution inhibitors, and chemically amplified positive resist compositions 失效
标题翻译：二苯基和三苯基单萜烃衍生物，溶解抑制剂和化学增强正性抗蚀剂组合物
公开(公告)号：US6030746A
公开(公告)日：2000-02-29
申请号：US831749
申请日：1997-04-01
申请人： Takeshi Nagata , Satoshi Watanabe , Tsunehiro Nishi , Jun Hatakeyama , Shigehiro Nagura , Toshinobu Ishihara
发明人： Takeshi Nagata , Satoshi Watanabe , Tsunehiro Nishi , Jun Hatakeyama , Shigehiro Nagura , Toshinobu Ishihara
IPC分类号： C07C43/205 , C07C43/30 , C07C43/303 , C07C43/315 , C07C43/32 , C07C69/28 , C07C69/30 , C07C69/712 , C07C69/96 , C07F7/06 , C07F7/08 , C07F7/18 , G03F7/004 , G03F7/039 , H01L21/027
CPC分类号： C07C43/303 , C07C69/96 , G03F7/0045 , C07C2101/14 , G03F7/039 , Y10S430/118
摘要： Di- or triphenyl monoterpene hydrocarbon derivatives of formula (1) are novel. ##STR1## X is a di- or trivalent monoterpene hydrocarbon group, R.sup.1 to R.sup.3 are hydrogen or an alkyl, alkoxy, alkoxyalkyl, alkenyl or aryl group, R.sup.4 is hydrogen or an acid labile group, at least one R.sup.4 being an acid labile group, letter n is an integer of 1-5, j, k and m are integers of 0-4, n+j+k+m=5, and p is 2 or 3. When used as a dissolution rate regulator, the compound of formula (1) exerts remarkably enhanced dissolution inhibitory effect and minimized light absorption in the deep-UV region. A chemically amplified positive resist composition having the compound of formula (1) blended therein is highly sensitive to actinic radiation such as deep-UV radiation, electron beam and X-ray, especially KrF excimer laser light, and has improved sensitivity, resolution and plasma etching resistance.
摘要翻译：式（1）的二 - 或三苯基单萜烃衍生物是新颖的。 X是二价或三价单萜烃基，R 1至R 3是氢或烷基，烷氧基，烷氧基烷基，烯基或芳基，R 4是氢或酸不稳定基团，至少一个R 4是酸不稳定基团，字母n 是1-5的整数，j，k和m是0-4，n + j + k + m = 5的整数，p是2或3.当用作溶出速率调节剂时，式 1）在深紫外区域发挥显着增强的溶解抑制作用和最小化的光吸收。具有其中混合的式（1）化合物的化学放大正性抗蚀剂组合物对光化辐射如深UV辐射，电子束和X射线，特别是KrF准分子激光具有高度敏感性，并且具有改善的灵敏度，分辨率和等离子体耐腐蚀性。

54. 发明授权

US5839850A Road traffic sign of solid graphic pattern 失效
标题翻译：道路交通标志的坚实图形
公开(公告)号：US5839850A
公开(公告)日：1998-11-24
申请号：US775645
申请日：1996-12-31
申请人： Kazuhiro Noguchi , Nobuhisa Deki , Takeshi Nagata , Yohei Inagaki
发明人： Kazuhiro Noguchi , Nobuhisa Deki , Takeshi Nagata , Yohei Inagaki
IPC分类号： E01F9/00 , E01F9/04 , E01F9/08
CPC分类号： E01F9/512
摘要： The following constitution is employed for enhancing the visual recognition of a road traffic sign by presenting a road traffic sign composed of a solid pattern having shades as visual image. A marking pattern divided into plural sections is tightly formed on the road, and the adjacent sections are mutually different in lightness, so that, in the road traffic sign of the invention, a solid figure is recognized as the visual image of the marking pattern. Herein, the adjacent sections have a lightness difference of 1 or more in Munsell value, and the lightness of each section is selected at lightness in two to four stages set at mutually different Munsell values. Moreover, when the adjacent sections are colored in hues mutually different in lightness, a more solid visual image will be obtained due to the difference in hue among the sections.
摘要翻译：通过呈现由具有阴影的实体图案构成的道路交通标志作为视觉图像，采用以下结构来增强道路交通标志的视觉识别。划分为多个部分的标记图案紧紧地形成在道路上，并且相邻部分的亮度相互不同，使得在本发明的道路交通标志中，将实心图形识别为标记图案的视觉图像。这里，相邻部分在孟塞尔值中具有1以上的亮度差，并且以相互不同的孟塞尔值设定的2至4级的亮度选择每个部分的亮度。此外，当相邻部分在亮度相互不同的色相中着色时，由于部分之间的色调差异，将获得更稳固的视觉图像。

55. 发明授权

US5743165A Method for controlling driving of a ram of a hydraulic cylinder of a hydraulic press equipment 失效
标题翻译：一种用于控制液压机设备的液压缸的冲头的驱动的方法
公开(公告)号：US5743165A
公开(公告)日：1998-04-28
申请号：US567124
申请日：1995-12-04
申请人： Hirohisa Tanaka , Takeshi Nagata
发明人： Hirohisa Tanaka , Takeshi Nagata
IPC分类号： F15B9/09 , B30B15/18 , B30B15/22 , F15B11/048
CPC分类号： B30B15/22
摘要： It is possible for the present invention to operate with the optimal control to prevent a ram from overshooting in a case that a load acting on the ram is decreasing rapidly, like a stamping machining process. Linking a hydraulic circuit which consists of a hydraulic pump 3 and a hydraulic cylinder 2 to make the ram 1 for the hydraulic press equipment move upward and downward and a full-bridge hydraulic circuit with four proportional sheet valves V1 through V4, the working timings of the proportional sheet valves V1 through V4 are controlled by a NC controller 9. In the normal operation, operating the proportional sheet valves V2 and V3 with the turn-on-off control system and with the meter out control system, oil pressure PU acting on the upper chamber 2U of the hydraulic cylinder 2, driving the ram 1 by the piston 10 moving downward, a work is stamped out. The NC controller 9 detects the running by inertia of the ram 1 in the instance of having stamped out a work in the stamping out machining process. As soon as the NC controller 9 detects the rapidly large speed fluctuation by a speed detecting sensor, the NC controller 9 commands the pilot valve 8 of the proportional sheet valve V1 in order to prevent the running by inertia of the ram 1 by controlling the back pressure PL of the lower chamber 2L of the hydraulic cylinder.
摘要翻译：在冲压加工过程中，如果作用在冲头上的载荷快速下降，则本发明可以以最佳控制来操作，以防止冲头过冲。连接由液压泵3和液压缸2组成的液压回路，使液压机设备的压头1上下移动，并具有四个比例薄板阀V1至V4的全桥液压回路，其工作时间比例片阀V1至V4由NC控制器9控制。在正常操作中，通过开关控制系统和仪表输出控制系统操作比例片阀V2和V3，油压PU作用于液压缸2的上室2U，通过活塞10向下移动来驱动压头1，冲压成品。 NC控制器9在冲压加工过程中冲压出工件的情况下，检测冲头1的惯性运行。一旦NC控制器9通过速度检测传感器检测到快速的大速度波动，则NC控制器9命令比例薄片阀V1的先导阀8，以便通过控制后背来控制压头1的惯性运行液压缸的下室2L的压力PL。

56. 发明授权

US3938975A Treatment of blast furnace slag 失效
标题翻译：高炉渣处理
公开(公告)号：US3938975A
公开(公告)日：1976-02-17
申请号：US498023
申请日：1974-08-16
申请人： Takeshi Nagata
发明人： Takeshi Nagata
IPC分类号： C04B5/00 , B09B3/00 , C04B5/06 , C21B3/06 , C21B3/08 , C03B1/00
CPC分类号： C21B3/08
摘要： A method for treating blast furnace slag comprising cooling and solidifying the slag discharged from the blast furnace with an aqueous solution containing not less than 0.003% ferrous sulfate and/or ferrous chloride.
摘要翻译：一种处理高炉渣的方法，包括用含有不少于0.003％硫酸亚铁和/或氯化亚铁的水溶液冷却和固化从高炉排出的炉渣。

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