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    • 58. 发明授权
    • Combine-information processing apparatus, method for processing combine-information, program, and recording medium
    • 组合信息处理装置,处理组合信息,程序和记录介质的方法
    • US07640126B2
    • 2009-12-29
    • US12108153
    • 2008-04-23
    • Toru Fujii
    • Toru Fujii
    • G06F19/00
    • G05B23/024G05B2219/31477G05B2219/32221Y02P90/14Y02P90/22
    • An inspectional equation storage unit 103 for storing an inspectional equation calculating one or more principal component scores, the inspectional equation being obtained by performing a principal component analysis on measured data on a plurality of measuring objects in terms of two or more correlated measurement items, and the measuring objects being processed by the manufacturing apparatus whose adjustable conditions are changed while the manufacturing apparatus is in a normal state; an inspected measured-data acceptance unit 104 for accepting inspected measured data on the measuring objects processed by the manufacturing apparatus in terms of the measurement items corresponding to each term contained in the inspectional equation; a principal-component-score calculation unit 105 for calculating principal component scores using the inspected measured data with the inspectional equation; an inspecting unit 106 for inspecting the manufacturing apparatus using the calculated principal component scores; and an output unit 107 for outputting the inspecting results.
    • 检验方程式存储单元103,用于存储计算一个或多个主成分分数的检验方程,所述检验方程通过对两个或更多个相关测量项目的多个测量对象上的测量数据执行主成分分析而获得,以及 在制造装置处于正常状态时,由可调整条件改变的制造装置处理的测量对象; 检查测量数据接收单元104,用于根据与检查方程中包含的每个项相对应的测量项接受由制造设备处理的测量对象上的检查测量数据; 主成分分数计算单元105,用于使用检查方程用检验的测量数据计算主成分分数; 检查单元106,用于使用所计算的主成分分数来检查制造装置; 以及用于输出检查结果的输出单元107。