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    • 7. 发明授权
    • Method for manufacturing semiconductor device
    • 制造半导体器件的方法
    • US08551832B2
    • 2013-10-08
    • US12819708
    • 2010-06-21
    • Shinichi AkiyamaKazuya OkuboNobuyuki Ohtsuka
    • Shinichi AkiyamaKazuya OkuboNobuyuki Ohtsuka
    • H01L21/8238
    • H01L21/02109H01L21/02178H01L21/02181H01L21/02192H01L21/02194H01L21/022H01L21/02321H01L21/823857
    • A method for manufacturing a semiconductor device includes forming a first-conductivity-type well and a second-conductivity-type well in a silicon substrate; stacking a first high-dielectric-constant insulating film and a first cap dielectric film above the silicon substrate; removing at least the first cap dielectric film from above the second-conductivity-type well; conducting a first annealing at a first temperature to cause an element included in the first cap dielectric film to diffuse into the first high-dielectric-constant insulating film disposed above the first-conductivity-type well; after the first annealing, stacking a second high-dielectric-constant insulating film and a second cap dielectric film above the silicon substrate; removing the second cap dielectric film disposed above the first-conductivity-type well; and conducting a second annealing at a second temperature lower than the first temperature to cause an element included in the second cap dielectric film to diffuse into the second high-dielectric-constant insulating film disposed above the second-conductivity-type well.
    • 一种制造半导体器件的方法包括在硅衬底中形成第一导电型阱和第二导电型阱; 在硅衬底之上堆叠第一高介电常数绝缘膜和第一帽电介质膜; 从所述第二导电型阱的上方至少去除所述第一盖电介质膜; 在第一温度下进行第一退火,使包含在第一盖电介质膜中的元素扩散到位于第一导电型阱之上的第一高介电常数绝缘膜; 在第一退火之后,在硅衬底上层叠第二高介电常数绝缘膜和第二帽电介质膜; 去除设置在第一导电型阱之上的第二盖电介质膜; 以及在比所述第一温度低的第二温度下进行第二退火,以使包含在所述第二盖电介质膜中的元素扩散到位于所述第二导电型阱之上的所述第二高介电常数绝缘膜中。