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51. 发明授权

US07202464B2 Optical bench, slim optical pickup employing the same and method of manufacturing the optical bench 失效
标题翻译：光学工作台，采用相同的纤细光学拾取器以及制造光学平台的方法
公开(公告)号：US07202464B2
公开(公告)日：2007-04-10
申请号：US11049896
申请日：2005-02-04
申请人： Woong-lin Hwang , Hyung Choi , Jae-ho You , Yong-sung Kim
发明人： Woong-lin Hwang , Hyung Choi , Jae-ho You , Yong-sung Kim
IPC分类号： H01J40/14 , G02B27/64 , G02B27/40 , G02B7/04
CPC分类号： H01L31/14 , G11B7/123 , G11B7/131 , G11B7/1362 , G11B7/22 , H01L2224/48091 , H01L2224/73265 , H01L2924/00014
摘要： An optical bench is provided, as are a thin optical pickup that employs the optical bench, and a method of manufacturing the optical bench. The optical bench includes a light source for generating light for recording and reproducing information to and from an optical disc, a light source stand on which the light source is mounted, a mirror adjacent to the light source stand, and a bottom surface at a lower point than the light source stand and between the light source stand and the mirror surface. Sides of the light source stand besides the side facing the mirror are connected to the surface of the substrate by a flat sloped surface. Along the sloped surface, two electrodes for supplying power to the light source are connected to the light source stand. Since the metal wirings are formed along the sloped surface without trenches or windings between the light source stand and the silicon substrate, no disconnection of metal lines at a corner occurs.
摘要翻译：提供了一种光学台，以及使用光学台的薄型光学拾取器以及制造光学台的方法。光学台包括用于产生用于从光盘记录和再现信息的光的光源，安装有光源的光源支架，与光源支架相邻的反射镜，以及位于下部的底部表面点比光源支架和光源支架和镜面之间的点。除了面向镜的一侧之外，光源的侧面通过平坦的倾斜表面连接到基板的表面。沿着倾斜的表面，用于向光源供电的两个电极连接到光源支架。由于在光源支架和硅基板之间没有沟槽或绕组的倾斜表面形成金属布线，所以不会发生角落处的金属线断开。

52. 发明申请

US20060192267A1 Inductor fabricated with dry film resist and cavity and method of fabricating the inductor 有权
公开(公告)号：US20060192267A1
公开(公告)日：2006-08-31
申请号：US11291894
申请日：2005-12-02
申请人： Hae-seok Park , In-sang Song , Hyung Choi
发明人： Hae-seok Park , In-sang Song , Hyung Choi
IPC分类号： H01L29/00 , H01L21/8222
CPC分类号： H01L23/5227 , H01F17/0006 , H01F41/041 , H01F2017/0046 , H01L21/764 , H01L27/08 , H01L2924/0002 , H01L2924/00
摘要： An inductor fabricated with a dry film resist and a cavity and a method of fabricating the inductor. The cavity can be formed in a substrate to minimize a parasitic capacitance generated by structures of upper electrodes, an insulating layer, and a lower electrode and minimize energy loss caused by an eddy current generated through the substrate. Also, a process of forming and planarizing the cavity can be simplified so as to form the cavity to a sufficient depth. As a result, an inductor having a high quality factor and a high self resonant frequency can be fabricated. Also, a scheme for simply forming and planarizing a cavity is contemplated.

53. 发明申请

US20060003541A1 Method for forming device isolation film of semiconductor device 审中-公开
标题翻译：半导体器件隔离膜形成方法
公开(公告)号：US20060003541A1
公开(公告)日：2006-01-05
申请号：US10998806
申请日：2004-11-30
申请人： Hyung Choi , Bo Wi
发明人： Hyung Choi , Bo Wi
IPC分类号： H01L21/76
CPC分类号： H01L21/76229 , H01L27/1052
摘要： A method for forming device isolation film of semiconductor device is provided, the method including sequentially forming a pad oxide layer and a pad nitride layer on a semiconductor substrate having a cell region and a peripheral circuit region, etching a predetermined region of the pad nitride layer, the pad oxide layer, and the semiconductor substrate to form a trench, forming an sidewall oxide film on a surface of the trench, etching a predetermined thickness of the sidewall oxide film in the cell region, forming a liner nitride film and a liner oxide film on the semiconductor substrate including the trench and the pad nitride layer, depositing a HDP oxide film to fill up the trench, performing a planarization process to expose the pad nitride layer, and removing the pad nitride layer.
摘要翻译：提供了一种用于形成半导体器件的器件隔离膜的方法，该方法包括在具有单元区域和外围电路区域的半导体衬底上依次形成衬垫氧化物层和衬垫氮化物层，蚀刻衬垫氮化物层的预定区域，衬垫氧化物层和半导体衬底以形成沟槽，在沟槽的表面上形成侧壁氧化膜，蚀刻电池区域中的侧壁氧化物膜的预定厚度，形成衬里氮化物膜和衬里氧化物在包括沟槽和衬垫氮化物层的半导体衬底上形成膜，沉积HDP氧化物膜以填充沟槽，执行平坦化工艺以露出衬垫氮化物层，以及去除焊盘氮化物层。

54. 发明申请

US20050252293A1 Magnetic MEMS device and method of forming thereof 失效
标题翻译：磁性MEMS器件及其形成方法
公开(公告)号：US20050252293A1
公开(公告)日：2005-11-17
申请号：US11029006
申请日：2005-01-05
申请人： Jong-hwa Won , Hyung Choi , Kwon Kim , Oh-myoung Kwon
发明人： Jong-hwa Won , Hyung Choi , Kwon Kim , Oh-myoung Kwon
IPC分类号： G01P3/44 , B81B3/00 , B81B5/00 , B81B7/02 , F16C39/06 , G01B7/00 , G01B7/30 , G01C5/00 , G01C19/06 , G01C19/16 , G01C19/42 , G01C19/56 , G01D5/245 , G01D11/02 , G01L1/12 , G01P3/486 , G01P3/488 , G01P15/08 , G01P15/125 , G01V7/00 , H02N15/00 , H02K7/09 , H02N10/00
CPC分类号： G01P15/0802 , B81B3/0021 , B81B2201/0235 , B81B2201/0264 , B81B2201/0292 , G01P3/486 , G01P3/488 , G01P15/08 , G01P15/125
摘要： A microelectromechanical system (MEMS) sensor and method for measuring the motion of an intermediate member and a method for making the MEMS sensor. The MEMS sensor includes a substrate, a lower magnetic member disposed on the substrate, a layer disposed over the substrate, an upper magnetic member disposed at a side of the layer facing the lower magnetic member, an intermediate magnetic member magnetically levitated between the lower magnetic member and upper magnetic member; and a component measuring at least one of motion, forces acting on, and a displacement of the intermediate magnetic member.
摘要翻译：一种微机电系统（MEMS）传感器和用于测量中间构件的运动的方法和用于制造MEMS传感器的方法。 MEMS传感器包括基板，设置在基板上的下磁性部件，设置在基板上的层，设置在面向下磁性部件的一侧的上部磁性部件，磁性悬浮在下部磁性体构件和上磁性构件; 以及测量作用于中间磁性构件的运动，作用力和位移之中的至少一个的部件。

55. 发明授权

US06931171B2 Micromirror actuator and manufacturing method thereof 失效
标题翻译：微镜致动器及其制造方法
公开(公告)号：US06931171B2
公开(公告)日：2005-08-16
申请号：US10310134
申请日：2002-12-05
申请人： Yong-seop Yoon , Hyung Choi
发明人： Yong-seop Yoon , Hyung Choi
IPC分类号： B81B3/00 , B81C1/00 , G02B6/35 , G02B26/08 , G02B6/26
CPC分类号： G02B6/357 , G02B6/3512 , G02B6/3546 , G02B6/3584 , G02B6/3586 , G02B26/0841
摘要： An actuator which can be actively driven so as to precisely control a driving angle of a micromirror, and a manufacturing method thereof are provided. The micromirror actuator includes a substrate, a trench, a micromirror, and a driving angle control unit. The trench is formed in a predetermined position of the substrate and has at least one electrode. The micromirror rotates by an electrostatic force generated through an interaction with the at least one electrode so as to reflect incident light in a predetermined direction. The driving angle control unit supports the micromirror so as to control the position of an actuation shaft of the micromirror. Accordingly, the micromirror can stand erect at an accurate right angle without an additional actuator for correcting the error in the driving angle of the micromirror so as to reduce insertion loss.
摘要翻译：提供一种能够被主动驱动以致精确地控制微反射镜的驱动角的致动器及其制造方法。微反射镜致动器包括基板，沟槽，微镜和驱动角度控制单元。沟槽形成在基板的预定位置，并具有至少一个电极。微镜通过与至少一个电极的相互作用产生的静电力旋转，以便沿预定方向反射入射光。驱动角度控制单元支撑微镜，以便控制微镜的致动轴的位置。因此，微镜可以以精确的直角直立，而不需要额外的致动器来校正微镜的驱动角度的误差，从而减小插入损耗。

56. 发明申请

US20050173614A1 Optical bench, slim optical pickup employing the same and method of manufacturing the optical bench 失效
标题翻译：光学工作台，采用相同的纤细光学拾取器以及制造光学平台的方法
公开(公告)号：US20050173614A1
公开(公告)日：2005-08-11
申请号：US11049896
申请日：2005-02-04
申请人： Woong-Iin Hwang , Hyung Choi , Jae-ho You , Yong-sung Kim
发明人： Woong-Iin Hwang , Hyung Choi , Jae-ho You , Yong-sung Kim
IPC分类号： G11B7/125 , G02B27/40 , G11B7/12 , G11B7/13 , G11B7/135 , G11B7/22 , H01L31/12 , H01L31/14
CPC分类号： H01L31/14 , G11B7/123 , G11B7/131 , G11B7/1362 , G11B7/22 , H01L2224/48091 , H01L2224/73265 , H01L2924/00014
摘要： An optical bench is provided, as are a thin optical pickup that employs the optical bench, and a method of manufacturing the optical bench. The optical bench includes a light source for generating light for recording and reproducing information to and from an optical disc, a light source stand on which the light source is mounted, a mirror adjacent to the light source stand, and a bottom surface at a lower point than the light source stand and between the light source stand and the mirror surface. Sides of the light source stand besides the side facing the mirror are connected to the surface of the substrate by a flat sloped surface. Along the sloped surface, two electrodes for supplying power to the light source are connected to the light source stand. Since the metal wirings are formed along the sloped surface without trenches or windings between the light source stand and the silicon substrate, no disconnection of metal lines at a corner occurs.
摘要翻译：提供了一种光学台，以及使用光学台的薄型光学拾取器以及制造光学台的方法。光学台包括用于产生用于从光盘记录和再现信息的光的光源，安装有光源的光源支架，与光源支架相邻的反射镜，以及位于下部的底部表面点比光源支架和光源支架和镜面之间的点。除了面向镜的一侧之外，光源的侧面通过平坦的倾斜表面连接到基板的表面。沿着倾斜的表面，用于向光源供电的两个电极连接到光源支架。由于在光源支架和硅基板之间没有沟槽或绕组的倾斜表面形成金属布线，所以不会发生角落处的金属线断开。

57. 发明授权

US06819809B2 Optical switch using micro-electromechanical system 失效
标题翻译：光开关采用微机电系统
公开(公告)号：US06819809B2
公开(公告)日：2004-11-16
申请号：US10619503
申请日：2003-07-16
申请人： Yong-seop Yoon , Hyung Choi
发明人： Yong-seop Yoon , Hyung Choi
IPC分类号： G02F1295
CPC分类号： G02B6/3584 , G02B6/3512 , G02B6/3546 , G02B6/357
摘要： Provided is a 2×2 optical switch includes a substrate, a first input fiber and a first output fiber, a second input fiber and a second output fiber, a rotating mirror, torsion bars, and an electrostatic force generating part. The first input fiber and a first output fiber are arranged at a predetermined distance from a central point in a first optical path passing through the central point over the substrate. The second input fiber and a second output fiber are arranged at a predetermined distance from the central point in a second optical path that passes through the central point and is orthogonal to the first optical path. The rotating mirror is positioned at around the central point and turns on a turning shaft. The torsion bars support the rotating mirror and the electrostatic force generating part supplies a drive force to the rotating mirror.
摘要翻译：提供了一种2x2光开关，其包括基板，第一输入光纤和第一输出光纤，第二输入光纤和第二输出光纤，旋转镜，扭杆和静电力产生部。第一输入光纤和第一输出光纤被布置在距离通过基板上方的中心点的第一光路中的中心点预定的距离处。第二输入光纤和第二输出光纤布置在通过中心点并且与第一光路正交的第二光路中的中心点预定距离处。旋转镜位于中心点周围，并转动转轴。扭杆支撑旋转镜，静电力产生部分向旋转镜提供驱动力。

58. 发明授权

US09164278B2 Micro-optical switching device, image display apparatus including micro-optical switching device, and method of manufacturing micro-optical switching device 有权
标题翻译：微光开关装置，包括微光开关装置的图像显示装置和微光开关装置的制造方法
公开(公告)号：US09164278B2
公开(公告)日：2015-10-20
申请号：US13461387
申请日：2012-05-01
申请人： Dong-sik Shim , Jong-seok Kim , Yong-seop Yoon , Hyung Choi , Woon-bae Kim
发明人： Dong-sik Shim , Jong-seok Kim , Yong-seop Yoon , Hyung Choi , Woon-bae Kim
IPC分类号： G02B26/02 , G02B26/08
CPC分类号： G02B26/0841
摘要： A micro-optical switching device, an image display apparatus including the micro-optical switching device, and a method of manufacturing the micro-optical switching device are provided. The micro-optical switching device includes a substrate; a first electrode disposed on the substrate and including a first opening array, wherein the first opening array includes a plurality of openings; and a second electrode disposed spaced apart from the first electrode and including a second opening array including a plurality of openings, wherein the plurality of openings of the second opening array do not overlap with the plurality of openings of the first opening array.
摘要翻译：提供一种微型光开关装置，包括该微型光开关装置的图像显示装置以及该微型光开关装置的制造方法。微光开关装置包括：基板; 第一电极，其设置在所述基板上并且包括第一开口阵列，其中所述第一开口阵列包括多个开口; 以及第二电极，与第一电极间隔开并且包括包括多个开口的第二开口阵列，其中第二开口阵列的多个开口不与第一开口阵列的多个开口重叠。

59. 发明授权

US08216482B2 Method of manufacturing inkjet printhead 有权
标题翻译：制造喷墨打印头的方法
公开(公告)号：US08216482B2
公开(公告)日：2012-07-10
申请号：US12428808
申请日：2009-04-23
申请人： Jong-Seok Kim , Yong-Seop Yoon , Moon-Chul Lee , Yong-Won Jeong , Dong-Sik Shim , Hyung Choi
发明人： Jong-Seok Kim , Yong-Seop Yoon , Moon-Chul Lee , Yong-Won Jeong , Dong-Sik Shim , Hyung Choi
IPC分类号： G01D15/00 , G11B5/127 , C23F1/00 , H01L21/00 , H01L21/311
CPC分类号： B41J2/1603 , B41J2/1628 , B41J2/1631 , B41J2/1639
摘要： A method of manufacturing an inkjet printhead includes forming a chamber layer having multiple ink chambers on a substrate. A sacrificial layer is formed and is configured to fill a space associated with the ink chambers on the chamber layer. A nozzle layer is formed on the top surfaces of the chamber layer and the sacrificial layer and having multiple nozzles. An etching mask is prepared on the bottom surface of the substrate. The etching mask has at least one linear etching pattern configured to define a portion of the substrate in which an ink feed hole is to be formed. The substrate is etched through the linear etching pattern until the sacrificial layer is exposed and a through hole is formed. The through hole defines the portion of the substrate in which the ink feed hole is to be formed. The sacrificial layer and the portion of the substrate surrounded by the through hole are removed to form the ink feed hole.
摘要翻译：制造喷墨打印头的方法包括在基板上形成具有多个墨室的腔层。牺牲层被形成并被配置成填充与腔室层上的墨水室相关联的空间。喷嘴层形成在腔室层和牺牲层的顶表面上并且具有多个喷嘴。在基板的底表面上制备蚀刻掩模。蚀刻掩模具有至少一个线性蚀刻图案，其被配置为限定要在其中形成供墨孔的基板的一部分。通过线性蚀刻图案蚀刻衬底，直到牺牲层被暴露并形成通孔。通孔限定要在其中形成供墨孔的基板部分。牺牲层和由通孔包围的基板的部分被去除以形成供墨孔。

60. 发明授权

US07959265B2 Thermal inkjet printhead 有权
标题翻译：热喷墨打印头
公开(公告)号：US07959265B2
公开(公告)日：2011-06-14
申请号：US11483721
申请日：2006-07-11
申请人： Dong-sik Shim , Hyung Choi , Yong-seop Yoon , Chang-seung Lee
发明人： Dong-sik Shim , Hyung Choi , Yong-seop Yoon , Chang-seung Lee
IPC分类号： B41J2/045 , B41J2/015
CPC分类号： B41J2/14129 , B41J2/1408
摘要： Provided is a thermal inkjet printhead. The inkjet printhead includes a substrate; an insulating layer formed on the substrate; a heater formed on the insulating layer and an electrode to apply current to the heater; a chamber layer that is stacked on the insulating layer and includes an ink chamber; a nozzle layer that is stacked on the chamber layer and includes a nozzle; and at least a heat transfer layer that is formed inside the insulating layer and dissipates heat generated in by the heater toward the substrate.
摘要翻译：提供了热喷墨打印头。喷墨打印头包括基板; 形成在所述基板上的绝缘层; 形成在绝缘层上的加热器和用于向加热器施加电流的电极; 层叠在所述绝缘层上并且包括墨水室的室层; 喷嘴层，其层叠在所述室层上并且包括喷嘴; 以及形成在所述绝缘层内部的至少一层传热层，并且将由所述加热器产生的热量散发到所述基板。

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