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51. 发明申请

US20100018947A1 METHOD OF MANUFACTURING MAGNETIC RECORDING MEDIUM 有权
标题翻译：制造磁记录介质的方法
公开(公告)号：US20100018947A1
公开(公告)日：2010-01-28
申请号：US12509261
申请日：2009-07-24
申请人： Kaori Kimura , Yousuke Isowaki , Yoshiyuki Kamata , Masatoshi Sakurai
发明人： Kaori Kimura , Yousuke Isowaki , Yoshiyuki Kamata , Masatoshi Sakurai
IPC分类号： G11B5/84
CPC分类号： G11B5/855 , G11B5/72
摘要： According to one embodiment, a method of manufacturing a magnetic recording medium includes forming a magnetic recording layer, an oxidation inhibiting layer, a hard mask layer includes carbon on a substrate, coating the hard mask layer with a resist, transferring patterns of protrusions and recesses to the resist by imprinting to form resist patterns, sequentially performing etching of the hard mask layer using the resist patterns as masks, etching of the oxidation inhibiting layer, and etching and/or magnetism deactivation of the magnetic recording layer to form patterns of the magnetic recording layer, and sequentially performing stripping of the resist patterns, stripping of the hard mask layer and stripping of the oxidation inhibiting layer, in which ion beam etching is used for stripping the oxidation inhibiting layer.
摘要翻译：根据一个实施例，制造磁记录介质的方法包括形成磁记录层，氧化抑制层，硬掩模层包括在基板上的碳，用抗蚀剂涂覆硬掩模层，转移凸起和凹槽的图案通过压印形成抗蚀剂以形成抗蚀剂图案，使用抗蚀剂图案作为掩模，蚀刻氧化抑制层顺序地进行硬掩模层的蚀刻，以及磁记录层的蚀刻和/或磁性失活以形成磁性图案记录层，顺序地进行剥离抗蚀剂图案，汽提硬掩模层和剥离氧化抑制层，其中使用离子束蚀刻来剥离氧化抑制层。

52. 发明申请

US20100018946A1 METHOD OF MANUFACTURING MAGNETIC RECORDING MEDIUM 有权
标题翻译：制造磁记录介质的方法
公开(公告)号：US20100018946A1
公开(公告)日：2010-01-28
申请号：US12508269
申请日：2009-07-23
申请人： Yousuke Isowaki , Kaori Kimura , Yoshiyuki Kamata , Masatoshi Sakurai
发明人： Yousuke Isowaki , Kaori Kimura , Yoshiyuki Kamata , Masatoshi Sakurai
IPC分类号： G11B3/70
CPC分类号： G11B5/865 , B82Y10/00 , B82Y40/00 , G03F7/0002 , G11B5/743 , G11B5/82 , G11B5/855
摘要： According to one embodiment, a method of manufacturing a magnetic recording medium includes forming a hard mask and a resist on a magnetic recording layer, imprinting a stamper on the resist to transfer patterns of protrusions and recesses, removing resist residues left in the recesses of the patterned resist, etching the hard mask using the patterned resist as a mask to transfer the patterns of protrusions and recesses, stripping the resist, and performing ion beam etching to remove the remaining hard mask and to modify a surface of the magnetic recording layer uncovered with the remaining hard mask.
摘要翻译：根据一个实施例，一种制造磁记录介质的方法包括在磁记录层上形成硬掩模和抗蚀剂，在抗蚀剂上印刷压模以转移突起和凹槽的图案，去除留在凹槽中的抗蚀剂残留物使用图案化的抗蚀剂作为掩模蚀刻硬掩模，以转移突起和凹陷的图案，剥离抗蚀剂，并执行离子束蚀刻以去除剩余的硬掩模并修改未覆盖的磁记录层的表面剩下的硬面罩。

53. 发明申请

US20090232928A1 Method of Manufacturing Stamper, and Stamper 审中-公开
标题翻译：制造压模和压模的方法
公开(公告)号：US20090232928A1
公开(公告)日：2009-09-17
申请号：US12473071
申请日：2009-05-27
申请人： Shinobu Sugimura , Kaori Kimura , Takuya Shimada , Yoshiyuki Kamata , Masatoshi Sakurai
发明人： Shinobu Sugimura , Kaori Kimura , Takuya Shimada , Yoshiyuki Kamata , Masatoshi Sakurai
IPC分类号： B29C43/00 , G03F7/20
CPC分类号： G11B7/261 , B29C33/424 , B29C2033/426 , B82Y10/00 , B82Y40/00 , C25D1/10 , G03F7/0002 , G11B7/263 , H01F41/34
摘要： According to one embodiment, a method of manufacturing a stamper includes forming a conductive layer on a surface of a master having patterns of protrusions and recesses, forming an electroforming layer on the conductive layer, separating the electroforming layer and the conductive layer from the master to form a stamper to which the patterns of protrusions and recesses of the master are transferred, removing a resist left on the surface of the stamper, and etching the surface of the stamper with an acidic solution having a pH value of less than 3.
摘要翻译：根据一个实施例，制造压模的方法包括在具有突起和凹槽图案的母版表面上形成导电层，在导电层上形成电铸层，将电铸层和导电层与母模分离成形成压模，母模的突起和凹部的图案被转印到其上，去除压模表面上的抗蚀剂，并用pH值小于3的酸性溶液蚀刻压模的表面。

54. 发明授权

US08507116B2 Magnetic recording medium and manufacturing method thereof 有权
标题翻译：磁记录介质及其制造方法
公开(公告)号：US08507116B2
公开(公告)日：2013-08-13
申请号：US13175485
申请日：2011-07-01
申请人： Takeshi Iwasaki , Kaori Kimura , Yoshiyuki Kamata , Masatoshi Sakurai
发明人： Takeshi Iwasaki , Kaori Kimura , Yoshiyuki Kamata , Masatoshi Sakurai
IPC分类号： G11B5/127
CPC分类号： G11B5/8404 , G11B5/746 , G11B5/82 , G11B5/855 , Y10T428/11
摘要： According to one embodiment, a magnetic recording medium includes a substrate, a soft magnetic layer, an underlayer, a magnetic recording layer, and a protective layer, wherein the magnetic recording layer is provided with a pattern including recording portions and non-recording portions, the non-recording portions have a composition that is equal to a composition obtained by demagnetizing the recording portions, the non-recording portions contain at least one metal element selected from the group consisting of vanadium and zirconium and at least one element selected from the group consisting of nitrogen, carbon, boron and oxygen, and the at least one element selected from the group consisting of nitrogen, carbon, boron and oxygen is contained in the non-recording portions at a higher content than the content of the at least one element selected from the group consisting of nitrogen, carbon, boron and oxygen in the recording portions.
摘要翻译：根据一个实施例，磁记录介质包括衬底，软磁层，底层，磁记录层和保护层，其中磁记录层设置有包括记录部分和非记录部分的图案，非记录部分的组成等于通过使记录部分退磁获得的组合物，非记录部分含有至少一种选自钒和锆的金属元素和至少一种选自组中的元素由氮，碳，硼和氧组成，并且所述至少一种选自氮，碳，硼和氧的元素以比所述至少一种元素的含量更高的含量包含在非记录部分中在记录部分中选自氮，碳，硼和氧。

55. 发明申请

US20120082800A1 METHOD FOR MANUFACTURING MAGNETIC RECORDING MEDIUM 审中-公开
标题翻译：制造磁记录介质的方法
公开(公告)号：US20120082800A1
公开(公告)日：2012-04-05
申请号：US13216555
申请日：2011-08-24
申请人： Masatoshi SAKURAI , Kaori Kimura , Yoshiyuki Kamata , Takeshi Iwasaki
发明人： Masatoshi SAKURAI , Kaori Kimura , Yoshiyuki Kamata , Takeshi Iwasaki
IPC分类号： C23C14/04
CPC分类号： C23C14/0605 , C23C14/0635 , C23C14/0658 , C23C14/5893 , G11B5/855
摘要： According to one embodiment, there is provided a method for manufacturing a magnetic recording medium, the method including: depositing a magnetic recording layer on a substrate; forming a mask on a region of the magnetic recording layer corresponding to a recording area; irradiating another region of the magnetic recording layer where the mask is not formed with an ion beam using a C-containing gas as a source gas to deactivate the another region and to thereby form a non-recording area; and forming a protective film over an entire surface of the substrate.
摘要翻译：根据一个实施例，提供了一种用于制造磁记录介质的方法，所述方法包括：在基板上沉积磁记录层; 在对应于记录区域的磁记录层的区域上形成掩模; 使用含C气体作为源气体照射没有形成掩模的磁记录层的另一个区域，使离子束使其另一区域失活，从而形成非记录区域; 以及在所述基板的整个表面上形成保护膜。

56. 发明申请

US20110235212A1 METHOD OF MANUFACTURING MAGNETIC RECORDING MEDIUM 有权
标题翻译：制造磁记录介质的方法
公开(公告)号：US20110235212A1
公开(公告)日：2011-09-29
申请号：US13007395
申请日：2011-01-14
申请人： Masatoshi Sakurai , Kaori Kimura , Yousuke Isowaki , Akira Watanabe , Yoshiyuki Kamata
发明人： Masatoshi Sakurai , Kaori Kimura , Yousuke Isowaki , Akira Watanabe , Yoshiyuki Kamata
IPC分类号： G11B5/82 , C25F3/02
CPC分类号： G11B5/82 , B82Y10/00 , G11B5/743 , G11B5/855 , Y10T428/12465
摘要： According to one embodiment, a method of manufacturing a magnetic recording medium includes forming on a magnetic recording layer a first hard mask, a second hard mask, a third hard mask and a resist, imprinting the resist with a stamper, removing a residue left in the recesses of the patterned resist, etching the third hard mask by use of the patterned resist as a mask, etching the second hard mask by use of the third hard mask as a mask, etching the first hard mask by use of the second hard mask as a mask, forming a pattern of the magnetic recording layer with ion beam irradiation, and removing the first hard mask by use of a remover liquid with higher reactivity to the metal material of the first hard mask than to a constituent element of the magnetic recording layer.
摘要翻译：根据一个实施例，制造磁记录介质的方法包括在磁记录层上形成第一硬掩模，第二硬掩模，第三硬掩模和抗蚀剂，用压模压印抗蚀剂，除去留在图案化抗蚀剂的凹部，通过使用图案化的抗蚀剂作为掩模蚀刻第三硬掩模，通过使用第三硬掩模作为掩模蚀刻第二硬掩模，通过使用第二硬掩模蚀刻第一硬掩模作为掩模，通过离子束照射形成磁记录层的图案，并且通过使用对第一硬掩模的金属材料具有较高反应性的去除剂液体除去第一硬掩模，而不是磁记录的构成元件层。

57. 发明授权

US07993536B2 Method of manufacturing magnetic recording medium 有权
标题翻译：磁记录介质的制造方法
公开(公告)号：US07993536B2
公开(公告)日：2011-08-09
申请号：US12636610
申请日：2009-12-11
申请人： Yousuke Isowaki , Kaori Kimura , Yoshiyuki Kamata , Masatoshi Sakurai
发明人： Yousuke Isowaki , Kaori Kimura , Yoshiyuki Kamata , Masatoshi Sakurai
IPC分类号： B44C1/22
CPC分类号： G11B5/82 , B82Y10/00 , G11B5/743 , G11B5/746 , G11B5/855
摘要： According to one embodiment, a method of manufacturing a magnetic recording medium includes forming a first hard mask, a second hard mask and a resist film on a magnetic recording layer, imprinting a stamper on the resist film to transfer patterns of recesses and protrusions, removing residues remained in recess of the patterned resist film, etching the second hard mask using the patterned resist film as a mask to transfer patterns of recesses and protrusions, etching the first hard mask using the patterned second hard mask as a mask to transfer patterns of recesses and protrusions, and deactivating magnetism of the magnetic recording layer exposed in the recesses together with removing the second hard mask by ion-beam etching.
摘要翻译：根据一个实施例，制造磁记录介质的方法包括在磁记录层上形成第一硬掩模，第二硬掩模和抗蚀剂膜，在抗蚀剂膜上压印印模以转印凹凸图案，去除残留物保留在图案化抗蚀剂膜的凹部中，使用图案化的抗蚀剂膜作为掩模蚀刻第二硬掩模以转移凹凸和突起的图案，使用图案化的第二硬掩模作为掩模蚀刻第一硬掩模以转移凹槽的图案和突起，并且通过离子束蚀刻去除第二硬掩模，使暴露于凹部中的磁记录层的磁性失活。

58. 发明申请

US20120067844A1 METHOD OF MANUFACTURING RECORDING MEDIUM 审中-公开
标题翻译：制作记录媒体的方法
公开(公告)号：US20120067844A1
公开(公告)日：2012-03-22
申请号：US13185822
申请日：2011-07-19
申请人： Yoshiyuki Kamata , Kaori Kimura , Takeshi Iwasaki
发明人： Yoshiyuki Kamata , Kaori Kimura , Takeshi Iwasaki
IPC分类号： G11B5/84 , G11B5/851
CPC分类号： G11B5/855
摘要： According to one embodiment, in a method manufacturing a magnetic recording medium which is configured such that a ferromagnetic recording part is formed on a substrate in a desired track pattern or a desired bit pattern, a ferromagnetic film is formed on a substrate, and then a B thin film is formed on a region for isolating the ferromagnetic film between tracks or bits. Subsequently, ions are radiated on the B thin film, thereby increasing a B content of the region of the ferromagnetic film, on which the B thin film has been formed, and nonmagnetizing the region.
摘要翻译：根据一个实施例，在制造磁记录介质的方法中，磁记录介质被配置为使得铁磁记录部分以期望的轨道图案或期望的位图形式形成在基板上，在基板上形成铁磁性膜，然后 B薄膜形成在用于在轨道或位之间隔离铁磁膜的区域。随后，在B薄膜上照射离子，从而增加已经形成B薄膜的铁磁性膜的区域的B含量，并且使该区域不会磁化。

59. 发明授权

US08980451B2 Magnetic recording medium, method of manufacturing the same, and magnetic recording apparatus 有权
标题翻译：磁记录介质，其制造方法和磁记录装置
公开(公告)号：US08980451B2
公开(公告)日：2015-03-17
申请号：US13185880
申请日：2011-07-19
申请人： Yoshiyuki Kamata , Kaori Kimura , Takeshi Iwasaki
发明人： Yoshiyuki Kamata , Kaori Kimura , Takeshi Iwasaki
IPC分类号： G11B5/65 , G11B5/82 , G11B5/74 , B82Y10/00 , G11B5/855
CPC分类号： G11B5/82 , B82Y10/00 , G11B5/65 , G11B5/743 , G11B5/746 , G11B5/855
摘要： According to one embodiment, in a method of manufacturing a magnetic recording medium which is configured such that a ferromagnetic recording part is formed on a substrate in a desired track pattern or a desired bit pattern, a ferromagnetic film is formed on the substrate, and then a mask is formed on the ferromagnetic film, the mask having an opening above a region for isolating the ferromagnetic film between tracks or bits. Subsequently, a B-based gas is radiated on the region of the ferromagnetic film through the opening of the mask, thereby increasing a B content of the region to nonmagnetize the region.
摘要翻译：根据一个实施例，在制造磁记录介质的方法中，磁记录介质被构造为使得铁磁记录部分以期望的轨迹图案或期望的位图形式形成在基板上，在基板上形成铁磁性膜，然后在铁磁膜上形成掩模，该掩模在磁道或位之间隔离铁磁膜的区域之上具有开口。随后，通过打开掩模，在铁磁膜的区域上辐射B基气体，从而增加该区域的B含量以使该区域不磁化。

60. 发明申请

US20120069468A1 MAGNETIC RECORDING MEDIUM, METHOD OF MANUFACTURING THE SAME, AND MAGNETIC RECORDING APPARATUS 有权
标题翻译：磁记录介质，其制造方法和磁记录装置
公开(公告)号：US20120069468A1
公开(公告)日：2012-03-22
申请号：US13185880
申请日：2011-07-19
申请人： Yoshiyuki KAMATA , Kaori Kimura , Takeshi Iwasaki
发明人： Yoshiyuki KAMATA , Kaori Kimura , Takeshi Iwasaki
IPC分类号： G11B5/82 , G11B5/84 , B05D1/36 , B05D5/00 , G11B17/02 , B05D1/32
CPC分类号： G11B5/82 , B82Y10/00 , G11B5/65 , G11B5/743 , G11B5/746 , G11B5/855
摘要： According to one embodiment, in a method of manufacturing a magnetic recording medium which is configured such that a ferromagnetic recording part is formed on a substrate in a desired track pattern or a desired bit pattern, a ferromagnetic film is formed on the substrate, and then a mask is formed on the ferromagnetic film, the mask having an opening above a region for isolating the ferromagnetic film between tracks or bits. Subsequently, a B-based gas is radiated on the region of the ferromagnetic film through the opening of the mask, thereby increasing a B content of the region to nonmagnetize the region.
摘要翻译：根据一个实施例，在制造磁记录介质的方法中，磁记录介质被构造为使得铁磁记录部分以期望的轨迹图案或期望的位图形式形成在基板上，在基板上形成铁磁性膜，然后在铁磁膜上形成掩模，该掩模在磁道或位之间隔离铁磁膜的区域之上具有开口。随后，通过打开掩模，在铁磁膜的区域上辐射B基气体，从而增加该区域的B含量以使该区域不磁化。

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