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    • 54. 发明授权
    • Method of manufacturing storage electrode in semiconductor device
    • 在半导体器件中制造存储电极的方法
    • US06348377B2
    • 2002-02-19
    • US09867602
    • 2001-05-31
    • Cha Deok DongSeung Cheol LeeSang Wook ParkDong Jin Kim
    • Cha Deok DongSeung Cheol LeeSang Wook ParkDong Jin Kim
    • H01L218242
    • H01L28/91H01L21/76895H01L28/84
    • A cylindrical storage electrode in a semiconductor device is manufactured by forming a contact hole in a poly oxide film and by forming a first thin film on the film and in the hole. Next, a core oxide film and an anti-reflective coating film are formed on the first thin film to determine the height of the cylinder. A pattern is then formed by etching the anti-reflective coating film, core oxide film and the first thin film such that the poly oxide film is exposed. A second thin film is formed on the overall resultant structure, and a tungsten silicide layer is formed on the second thin film. Inner and outer walls of the cylinder are then formed by blanket-etching the tungsten silicide film and the second thin film such that the core oxide film is exposed. After the core oxide film is removed, a selective metastable polysilicon (SMPS) process is performed so that different grain growths are generated at the inner and outer walls of the cylinder. A storage electrode is then formed by annealing the cylinder. By depositing an amorphous silicon film on the inner wall of the cylinder-type capacitor and Si-rich tungsten silicide film on the outer wall, the surface area of the inner wall expands through normal SMPS and a rugged tungsten silicide film is formed on the outer wall. Spacing between cells is preserved, while generation of a bridge is prevented.
    • 半导体器件中的圆柱形存储电极通过在多氧化物膜中形成接触孔并在膜上和孔中形成第一薄膜来制造。 接下来,在第一薄膜上形成芯氧化膜和抗反射涂膜,以确定气缸的高度。 然后通过蚀刻抗反射涂膜,芯氧化物膜和第一薄膜使得暴露多晶氧化物膜形成图案。 在总体结构上形成第二薄膜,在第二薄膜上形成硅化钨层。 然后通过对硅化钨膜和第二薄膜进行毯式蚀刻来形成圆筒的内壁和外壁,使得芯氧化膜暴露。 在去除核心氧化物膜之后,进行选择性亚稳态多晶硅(SMPS)工艺,使得在圆筒的内壁和外壁处产生不同的晶粒生长。 然后通过使圆筒退火形成存储电极。 通过在圆筒型电容器的内壁和外壁上的富Si硅化钨膜上沉积非晶硅膜,内壁的表面积通过正常的SMPS膨胀,并且在外部形成坚固的硅化钨膜 壁。 保留了单元间的间隔,同时防止了桥的产生。
    • 55. 发明授权
    • Bluetooth device and method of searching for peripheral bluetooth device
    • 蓝牙设备和搜索外围蓝牙设备的方法
    • US08897703B2
    • 2014-11-25
    • US12546116
    • 2009-08-24
    • Sang Wook Park
    • Sang Wook Park
    • H04B7/00H04W8/00
    • H04W8/005
    • A Bluetooth device and a method of searching for a peripheral Bluetooth device using a previous search results are provided. The method of searching for a peripheral Bluetooth device includes: acquiring, if input instructing the start of an initial search is received, initial search address information and initial search device information about at least one peripheral Bluetooth device in a preset period; storing the acquired initial search address information and initial search device information in a storage unit; acquiring, if a request for searching for a peripheral device for performing Bluetooth communication is input, address information of a found peripheral Bluetooth device; determining whether address information corresponding to the acquired address information of the found peripheral Bluetooth device exists in the storage unit; and notifying a user, if address information corresponding to the acquired address information of the found peripheral Bluetooth device exists in the storage unit, of the stored initial search device information of the found peripheral device corresponding to the address information.
    • 提供了使用先前搜索结果来搜索外围蓝牙设备的蓝牙设备和方法。 搜索外围蓝牙装置的方法包括:如果接收到指示开始初始搜索的输入,则在预设时段内获取关于至少一个外围蓝牙装置的初始搜索地址信息和初始搜索装置信息; 将所获取的初始搜索地址信息和初始搜索设备信息存储在存储单元中; 如果输入了用于搜索用于执行蓝牙通信的外围设备的请求,则获取所找到的外围蓝牙设备的地址信息; 确定与所获取的所找到的外围蓝牙装置的地址信息相对应的地址信息是否存在于存储单元中; 并且如果在存储单元中存在与所获取的外围设备蓝牙装置的所获取的地址信息相对应的地址信息,则通知给用户对应于所述地址信息的所找到的外围设备的所存储的初始搜索设备信息。
    • 58. 发明申请
    • ROBOT CALIBRATION APPARATUS AND METHOD FOR SAME
    • 机器人校准装置及其方法
    • US20120078418A1
    • 2012-03-29
    • US13376878
    • 2010-06-03
    • Jin Hwan BormJung Min KimSang Wook Park
    • Jin Hwan BormJung Min KimSang Wook Park
    • B25J13/08
    • B25J9/1692G05B2219/39045Y02P80/40
    • A robot calibration apparatus and a robot calibration method. The robot calibration apparatus includes:a measurement jig including a plurality of reference points of which positions are pre-known, one or more reference lines of which linear equations are pre-known, and one or more reference planes of which plane equations are pre-known relative to a reference coordinate system of the measurement jig, wherein arbitrary points from among the plurality of reference points, the plurality of arbitrary points on the one or more reference line, and the plurality of arbitrary points on the one or more reference plane are set as measurement points;a sensor coupled to a robot and measuring positions of a plurality of measurement points selected from among the measurement points on the measurement jig;and a control unit controlling the calibrated robot after calibrating the robot based on a plurality of pieces of calibration data including position information of the plurality of measurement points measured by the sensor, wherein at least one measurement point from among the plurality of measurement points is arranged on the reference line or the reference plane. Accordingly, the robot can be calibrated by using information of measuring an arbitrary position on the reference line or reference plane on the measurement jig, and thus limitation to the measurement posture of the robot can be remarkably reduced while measuring the positions of the measurement points, the position information of the measurement point can be easily obtained, and the robot calibration apparatus can be easily applied to a production line.
    • 机器人校准装置和机器人校准方法。 机器人校准装置包括:测量夹具,其包括多个参考点,其中位置是预先知道的,一个或多个参考线,其线性方程式是预先知道的,以及一个或多个参考平面, 相对于测量夹具的参考坐标系而言,其中多个参考点中的任意点,一个或多个参考线上的多个任意点以及一个或多个参考平面上的多个任意点是 设置为测量点; 耦合到机器人的传感器,并且测量从测量夹具上的测量点中选出的多个测量点的位置; 以及控制单元,其基于包括由所述传感器测量的所述多个测量点的位置信息的多个校准数据来校准所述机器人后控制所述校准的机器人,其中,从所述多个测量点中的至少一个测量点被布置 在参考线或参考平面上。 因此,可以通过使用测量夹具上的参考线或参考平面上的任意位置的信息来校准机器人,从而可以在测量点的位置的同时显着地减小对机器人的测量姿势的限制, 可以容易地获得测量点的位置信息,并且机器人校准装置可以容易地应用于生产线。