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    • 51. 发明授权
    • Control system having optimality decision means
    • 具有最佳判定手段的控制系统
    • US5331565A
    • 1994-07-19
    • US133379
    • 1993-10-08
    • Satoshi HattoriShigeru UekiYutaka SaitoTetsuo ManchuYasunori KatayamaYasuo MorookaHiroshi MatsumotoMasaaki Nakajima
    • Satoshi HattoriShigeru UekiYutaka SaitoTetsuo ManchuYasunori KatayamaYasuo MorookaHiroshi MatsumotoMasaaki Nakajima
    • B21B37/32B21B37/42G05B13/02G06F15/00
    • G05B13/0285B21B37/32B21B37/42Y10S706/90Y10S706/906
    • A control system for controlling a plurality of control elements, which are effective to control of a given controlled system, is disclosed. In this control system, a characteristic value representing the characteristic of a given controlled system to be controlled is detected, and respective optimum manipulated variables of the plurality of control elements are derived on the basis of the detected characteristic value. The optimum manipulated variables are derived by setting a plurality of reference patterns representing different features of the characteristic value on the basis of a predicted value of the characteristic value, deriving degree of conviction that the detected characteristic value belongs to each of the reference patterns, presetting rules whereby a manipulated variable of each of the plurality of control elements is determined when the detected characteristic value belongs to each of the plurality of reference patterns, and deriving a manipulated variable of each control element on the basis of degree of conviction that the detected characteristic value belongs to each of the plurality of reference patterns and the manipulated variable determining rule preset with respect to each control element for each reference pattern.
    • 公开了一种用于控制多个控制元件的控制系统,其有效地控制给定的受控系统。 在该控制系统中,检测表示要控制的给定受控系统的特性的特征值,并且基于检测到的特征值导出多个控制元件的各个最佳操作变量。 通过基于特征值的预测值设置表示特征值的不同特征的多个参考图案,导出检测到的特征值属于每个参考图案的置信度来预测最佳操纵变量, 当检测到的特征值属于多个参考图案中的每一个时,确定多个控制元件中的每一个的操纵变量,并且基于所确定的程度确定每个控制元件的操纵变量, 值属于多个参考图案中的每一个,并且针对每个参考图案相对于每个控制元素预设的操纵变量确定规则。
    • 53. 发明授权
    • Thin film transistor having memory function and method for using thin
film transistor as memory element
    • 具有记忆功能的薄膜晶体管和使用薄膜晶体管作为存储元件的方法
    • US5196912A
    • 1993-03-23
    • US668741
    • 1991-03-13
    • Hiroshi MatsumotoHiroyasu YamadaNobuyuki YamamuraShinichi ShimomakiNaohiro KonyaKyuya Baba
    • Hiroshi MatsumotoHiroyasu YamadaNobuyuki YamamuraShinichi ShimomakiNaohiro KonyaKyuya Baba
    • H01L27/115H01L29/792
    • H01L27/115H01L29/792
    • A memory element is formed of a thin film transistor. The thin film transistor has a semiconductor layer, a source electrode electrically connected to the semiconductor layer, a drain electrode electrically connected to the semiconductor layer and formed separately from the source electrode, a gate electrode for controlling formation of a channel of the semiconductor layer, and a gate insulation film for isolating the gate electrode and the semiconductor layer from each other and causing a hysteresis in the relation between the drain current and the gate circuit. The insulation film is a silicon nitride film whose composition ratio of silicon to nitrogen is in a range of approx. 0.85 to 1.1. According to this invention, the relation between the gate voltage and the drain current can be set to have a hysteresis. Therefore, the thin film transistor can be used as a memory element. Further, according to this invention, data can be written, erased and read out by selectively applying an electric field to the gate insulation film. Therefore, the thin film transistor can be used as a memory element.
    • 存储元件由薄膜晶体管形成。 薄膜晶体管具有半导体层,与半导体层电连接的源电极,与半导体层电连接并与源极分开形成的漏电极,用于控制半导体层的沟道的形成的栅电极, 以及用于将栅极电极和半导体层彼此隔离并且在漏极电流和栅极电路之间的关系中产生滞后的栅极绝缘膜。 绝缘膜是硅与氮的组成比在大约的范围内的氮化硅膜。 0.85〜1.1。 根据本发明,可以将栅极电压和漏极电流之间的关系设定为滞后。 因此,薄膜晶体管可以用作存储元件。 此外,根据本发明,可以通过选择性地向栅极绝缘膜施加电场来写入,擦除和读出数据。 因此,薄膜晶体管可以用作存储元件。
    • 54. 发明授权
    • Movable table
    • 可移动表
    • US5163651A
    • 1992-11-17
    • US667893
    • 1991-03-12
    • Hiroshi Matsumoto
    • Hiroshi Matsumoto
    • B23Q1/38B23Q1/48
    • B23Q1/38B23Q1/4866Y10S248/913
    • A movable table has a movable platen, a flange member secured to the movable platen and a fixed platen sandwiched between the movable platen and the flange member. Thrust bearings are disposed between the fixed platen and the movable platen and between the fixed platen and the flange member. Drive units are coupled to the movable platen to move the movable platen along the thrust bearings. Instead of supporting the movable platen on the thrust bearings, it may be supported in a non-contact manner by blowing compressed air into clearances defined between the fixed platen and the movable platen and between the fixed platen and the flange member.
    • 可移动台具有可移动的压板,固定到可动压板的凸缘构件和夹在可动压板和凸缘构件之间的固定压板。 推力轴承设置在固定压板和可动压板之间以及固定压板和凸缘构件之间。 驱动单元联接到可动压板,以沿着推力轴承移动可动压板。 代替在推力轴承上支撑可动压板,可以通过将压缩空气吹送到限定在固定压板和可动压板之间以及固定压板和凸缘构件之间的间隙中而以非接触的方式支撑。
    • 60. 发明授权
    • Developer for positive type photoresists
    • 正型光刻胶的开发商
    • US5030550A
    • 1991-07-09
    • US333928
    • 1989-04-06
    • Yasumasa KawabeHiroshi MatsumotoTadayoshi Kokubo
    • Yasumasa KawabeHiroshi MatsumotoTadayoshi Kokubo
    • G03C1/72G03F7/32H01L21/027
    • G03F7/322
    • A positive photoresist developer containing a basic compound and from 10 to 10,000 ppm of a non-ionic surfactant represented by formula (I): ##STR1## wherein X represents an oxyethylene group; Y represents an oxypropylene group; R represents hydrogen, an alkyl group containing from 1 to 8 carbon atoms, R', or ##STR2## R' represents --O--(X).sub.m (Y).sub.n --H; R" represents R' of an alkyl group containing l carbon atoms; m and n each is an integer from 1 to 50, provided that m:n is from 20:80 to 80:20; p is 0 or 1, and q and s each is o or an integer from 1 to 4, provided that p+q+s=4; and l is an integer from 1 to 4; and r is an integer from 1 to 8, provided that l+r is an integer of 9 or more. The developer has superior art in forming properties, and prevents film residues, surface layer peeling, and film reduction.
    • 含有碱性化合物的正性光致抗蚀剂显影剂和10〜10,000ppm由式(I)表示的非离子型表面活性剂:其中X表示氧化乙烯基; Y表示氧丙烯基; R表示氢,含有1至8个碳原子的烷基,R'或R'表示-O-(X)m(Y)n -H; R“表示含有1个碳原子的烷基的R'; m和n各自为1至50的整数,条件是m:n为20:80至80:20; p为0或1,q和s各自为o或1至4的整数,条件是p + q + s = 4; l为1〜4的整数, 并且r为1〜8的整数,条件是l + r为9以上的整数。 显影剂具有优异的成型性能,并且防止膜残留,表面层剥离和膜还原。