专利快速检索-快速检索全球专利，免费商用专利数据库-IPRDB

51. 发明授权

US07682457B2 Frontside structure damage protected megasonics clean 失效
标题翻译：前端结构损坏保护了超声波清洁
公开(公告)号：US07682457B2
公开(公告)日：2010-03-23
申请号：US11973039
申请日：2007-10-04
申请人： Zhiyong Li , Jianshe Tang , Bo Xie , Wei Lu
发明人： Zhiyong Li , Jianshe Tang , Bo Xie , Wei Lu
IPC分类号： B08B3/12
CPC分类号： B08B3/12 , H01L21/67051 , Y10S134/902
摘要： An apparatus and method for removing contaminants from a workpiece is described. Embodiments of the invention describe placing a workpiece on a holding bracket within a process chamber to hold and rotate the workpiece to be cleaned. A first cleaning fluid is provided to the workpiece non-device side, while a degasified liquid is provided to the workpiece device side during megasonic cleaning. The degasified liquid inhibits cavitation from occurring on and damaging the device side of the workpiece during megasonic cleaning.
摘要翻译：描述了用于从工件去除污染物的设备和方法。本发明的实施例描述了将工件放置在处理室内的保持支架上以保持和旋转待清洁的工件。第一清洗流体被提供给工件非装置侧，而在兆声波清洗期间将脱气液体提供给工件装置侧。在超声波清洗过程中，脱气液体会抑制气蚀发生并破坏工件的装置侧。

52. 发明申请

US20090090381A1 Frontside structure damage protected megasonics clean 失效
标题翻译：前端结构损坏保护了超声波清洁
公开(公告)号：US20090090381A1
公开(公告)日：2009-04-09
申请号：US11973039
申请日：2007-10-04
申请人： Zhiyong Li , Jianshe Tang , Bo Xie , Wei Lu
发明人： Zhiyong Li , Jianshe Tang , Bo Xie , Wei Lu
IPC分类号： B08B3/10 , B08B13/00 , B08B3/12
CPC分类号： B08B3/12 , H01L21/67051 , Y10S134/902
摘要： An apparatus and method for removing contaminants from a workpiece is described. Embodiments of the invention describe placing a workpiece on a holding bracket within a process chamber to hold and rotate the workpiece to be cleaned. A first cleaning fluid is provided to the workpiece non-device side, while a degasified liquid is provided to the workpiece device side during megasonic cleaning. The degasified liquid inhibits cavitation from occurring on and damaging the device side of the workpiece during megasonic cleaning.
摘要翻译：描述了用于从工件去除污染物的设备和方法。本发明的实施例描述了将工件放置在处理室内的保持支架上以保持和旋转待清洁的工件。第一清洗流体被提供给工件非装置侧，而在兆声波清洗期间将脱气液体提供给工件装置侧。在超声波清洗过程中，脱气液体会抑制气蚀发生并破坏工件的装置侧。

53. 发明授权

US07474397B2 Raman and hyper-Raman excitation using superlensing 有权
标题翻译：拉曼和超拉曼激发使用超透镜
公开(公告)号：US07474397B2
公开(公告)日：2009-01-06
申请号：US11413377
申请日：2006-04-28
申请人： Shih-Yuan Wang , Zhiyong Li
发明人： Shih-Yuan Wang , Zhiyong Li
IPC分类号： G01J3/44
CPC分类号： G01J3/02 , G01J3/0208 , G01N21/658
摘要： Raman-enhancing structures include a layer of dielectric material, a superlens configured to focus electromagnetic radiation having a wavelength greater than about 100 nanometers to a two-dimensional focal area having linear dimensions less than about 100 nanometers on a surface of the layer of dielectric material, and at least two nanoparticles comprising a Raman-enhancing material disposed proximate the focal area. Additional Raman-enhancing structures include a layer of dielectric material, a layer of conductive material, and at least two nanoparticles comprising a Raman-enhancing material disposed on a second, opposite surface of the layer of dielectric material. The layer of conductive material has a plurality of apertures therethrough that are arranged in a two-dimensional array. Methods for conducting Raman spectroscopy are performed using such structures and systems.
摘要翻译：拉曼增强结构包括介电材料层，配置成将具有大于约100纳米的波长的电磁辐射聚焦到具有小于约100纳米的线性尺寸的二维聚焦区域的超薄膜在电介质材料层的表面上以及至少两个纳米颗粒，其包含靠近焦点区域设置的拉曼增强材料。附加的拉曼增强结构包括电介质材料层，导电材料层，以及至少两个包含拉曼增强材料的纳米颗粒，该拉曼增强材料设置在电介质材料层的第二相对表面上。导电材料层具有以二维阵列布置的穿过其中的多个孔。使用这种结构和系统进行拉曼光谱的方法。

54. 发明授权

US07405822B2 Systems and methods for detection of Raman scattered photons 有权
标题翻译：用于检测拉曼散射光子的系统和方法
公开(公告)号：US07405822B2
公开(公告)日：2008-07-29
申请号：US11584020
申请日：2006-10-20
申请人： Zhiyong Li , Wei Wu , Shih-Yuan Wang
发明人： Zhiyong Li , Wei Wu , Shih-Yuan Wang
IPC分类号： G01J3/44 , G01N21/65
CPC分类号： G01J3/44 , G01N21/658
摘要： Raman spectroscopy systems include an analyte, a radiation source configured to emit incident radiation having a wavelength, and a detector that is capable of detecting only radiation having wavelengths within a detectable range that includes at least one wavelength corresponding to hyper Raman scattered radiation scattered by the analyte. The wavelength of the incident radiation is outside the detectable range. In particular systems, all wavelengths of radiation that are scattered in the direction of the detector impinge on the detector. Raman spectroscopy methods include providing an analyte and irradiating the analyte with incident radiation having a wavelength, providing a detector capable of detecting only wavelengths of radiation within a detectable range that does not include the wavelength of the incident radiation, and detecting Raman scattered radiation scattered by the analyte. A continuous path free of radiation filters may be provided between the analyte and the detector.
摘要翻译：拉曼光谱系统包括分析物，被配置为发射具有波长的入射辐射的辐射源，以及检测器，其能够仅检测波长在可检测范围内的辐射，所述波长包括对应于由所述波长散射的超拉曼散射辐射的至少一个波长分析物。入射辐射的波长在可检测范围之外。在特定系统中，在检测器的方向上散射的所有辐射波长都照射在检测器上。拉曼光谱方法包括提供分析物并用具有波长的入射辐射照射分析物，提供检测器，该检测器仅能够检测不包括入射辐射波长的可检测范围内的辐射波长，并且检测散射的拉曼散射辐射分析物。可以在分析物和检测器之间提供不含辐射过滤器的连续路径。

55. 发明申请

US20080163891A1 METHOD AND APPARATUS OF MULTI STEPS ATOMIZATION FOR GENERATING SMALLER DIW DROPPLETS FOR WAFER CLEANING 审中-公开
标题翻译：用于生成用于清洁的小型二极管的多步骤原理的方法和装置
公开(公告)号：US20080163891A1
公开(公告)日：2008-07-10
申请号：US11621855
申请日：2007-01-10
申请人： JIANSHE TANG , Wei Lu , Bo Xie , Elias Martinez , Zhiyong Li , Kent Child , Richard Endo , Konstantin Smekalin
发明人： JIANSHE TANG , Wei Lu , Bo Xie , Elias Martinez , Zhiyong Li , Kent Child , Richard Endo , Konstantin Smekalin
IPC分类号： B08B3/00
CPC分类号： H01L21/02065 , H01L21/02057 , H01L21/67051
摘要： An apparatus for cleaning a wafer has a first chamber and a component coupled to the first chamber. The first chamber has a first input to form de-ionized water droplets. The component is coupled to the first chamber to further atomize and apply the atomized de-ionized water droplets on the wafer.
摘要翻译：用于清洁晶片的装置具有第一室和耦合到第一室的部件。第一室具有形成去离子水滴的第一输入。该组件耦合到第一室以进一步雾化并将雾化的去离子水滴施加在晶片上。

56. 发明授权

US07385691B2 Integrated modular system and method for enhanced Raman spectroscopy 有权
标题翻译：用于增强拉曼光谱的集成模块化系统和方法
公开(公告)号：US07385691B2
公开(公告)日：2008-06-10
申请号：US11044676
申请日：2005-01-27
申请人： M. Saif Islam , Shih-Yuan Wang , Wei Wu , Zhiyong Li , R. Stanley Williams
发明人： M. Saif Islam , Shih-Yuan Wang , Wei Wu , Zhiyong Li , R. Stanley Williams
IPC分类号： G01J3/44 , G01N21/65
CPC分类号： G01N21/658 , G01J3/44 , H01L31/02325 , H01L31/105
摘要： Devices, systems, and methods for enhancing Raman spectroscopy and hyper-Raman are disclosed. A molecular analysis device for performing Raman spectroscopy comprises a substrate and a laser source disposed on the substrate. The laser source may be configured for emanating a laser radiation, which may irradiate an analyte disposed on a Raman enhancement structure. The Raman enhancement structure may be disposed on the substrate or apart from the substrate. The molecular analysis device also include a radiation receiver disposed on the substrate and configured for receiving a Raman scattered radiation, which may be generated by the irradiation of the analyte and Raman enhancement structure.
摘要翻译：公开了用于增强拉曼光谱和超拉曼的装置，系统和方法。用于执行拉曼光谱的分子分析装置包括设置在基板上的基板和激光源。激光源可以被配置为发射激光辐射，其可照射设置在拉曼增强结构上的分析物。拉曼增强结构可以设置在基板上或者离开基板。分子分析装置还包括设置在基板上并被配置为用于接收可以通过分析物的照射和拉曼增强结构产生的拉曼散射辐射的辐射接收器。

57. 发明授权

US07307719B2 Wavelength-tunable excitation radiation amplifying structure and method 有权
标题翻译：波长可调激发辐射放大结构及方法
公开(公告)号：US07307719B2
公开(公告)日：2007-12-11
申请号：US10941714
申请日：2004-09-14
申请人： Shih-Yuan Wang , M. Saif Islam , Zhiyong Li
发明人： Shih-Yuan Wang , M. Saif Islam , Zhiyong Li
IPC分类号： G01J3/44 , G01J3/45
CPC分类号： G01N21/658 , G01J3/26
摘要： Wavelength-tunable radiation amplifying structures for Raman spectroscopy are disclosed that include resonant cavities having Raman signal-enhancing structures disposed therein. Systems that include the amplifying structures and methods of performing spectroscopic analysis using the structures and systems are also disclosed.
摘要翻译：公开了用于拉曼光谱的波长可调辐射放大结构，其包括其中布置有拉曼信号增强结构的谐振腔。还公开了包括放大结构的系统和使用该结构和系统进行光谱分析的方法。

58. 发明申请

US20070122313A1 Nanochannel apparatus and method of fabricating 审中-公开
标题翻译：纳米通道装置及其制造方法
公开(公告)号：US20070122313A1
公开(公告)日：2007-05-31
申请号：US11291019
申请日：2005-11-30
申请人： Zhiyong Li , M. Islam , Shih-Yuan Wang
发明人： Zhiyong Li , M. Islam , Shih-Yuan Wang
IPC分类号： B01L3/00
CPC分类号： B81C1/00071 , B01L3/5027 , B01L2300/0896
摘要： A nanochannel apparatus and method of fabrication provide an array of nanochannels with distal open or exposed ends formed in situ through a permanent support. A nanofluidic system includes the nanochannel apparatus, a fluidic interface, and a component interfaced to the nanochannel apparatus. The method includes encasing an array of nanowires in a support, and forming the array of nanochannels in situ in locations of the nanowires, such that distal ends of the nanochannels are exposed.
摘要翻译：纳米通道装置和制造方法提供具有通过永久支撑原位形成的远端开放或暴露端的纳米通道阵列。纳米流体系统包括纳米通道装置，流体界面和与纳米通道装置相连接的部件。该方法包括将纳米线阵列包围在支撑体中，并且在纳米线的位置上原位形成纳米通道阵列，使得纳米通道的远端被暴露。

59. 发明申请

US20060275778A1 Method and apparatus for molecular analysis using nanoelectronic circuits 有权
标题翻译：使用纳米电子电路进行分子分析的方法和装置
公开(公告)号：US20060275778A1
公开(公告)日：2006-12-07
申请号：US11144586
申请日：2005-06-03
申请人： Wei Wu , Zhiyong Li , Shih-Yuan Wang , Philip Kuekes
发明人： Wei Wu , Zhiyong Li , Shih-Yuan Wang , Philip Kuekes
IPC分类号： C12Q1/68 , C12M1/34
CPC分类号： G01N33/48721 , B82Y5/00 , B82Y10/00 , G01N27/414
摘要： Devices and methods for detecting the constituent parts of biological polymers are disclosed. A molecular analysis device comprises a molecule sensor and a molecule guide. The molecule sensor comprises a single electron transistor including a first terminal, a second terminal, and a nanogap or at least one quantum dot positioned between the first terminal and the second terminal. A nitrogenous material disposed on the at least one quantum dot is configured for an interaction with an identifiable configuration of a molecule. The molecule sensor develops an electronic effect responsive to the interaction. The molecule guide is configured for guiding at least a portion of the molecule substantially near the molecule sensor to enable the interaction.
摘要翻译：公开了用于检测生物聚合物的组成部分的装置和方法。分子分析装置包括分子传感器和分子引导件。分子传感器包括单电子晶体管，其包括位于第一端子和第二端子之间的第一端子，第二端子和纳米隙隙或至少一个量子点。设置在至少一个量子点上的含氮材料被配置用于与分子的可识别构型的相互作用。分子传感器产生响应于相互作用的电子效应。分子引导件被配置用于基本上在分子传感器附近引导分子的至少一部分，以实现相互作用。

60. 发明申请

US20060244568A1 Assembly for monitoring an environment 有权
标题翻译：监测环境的大会
公开(公告)号：US20060244568A1
公开(公告)日：2006-11-02
申请号：US11117976
申请日：2005-04-29
申请人： William Tong , Geoffrey Lyon , Philip Kuekes , Zhiyong Li , S. Wang , R. Williams
发明人： William Tong , Geoffrey Lyon , Philip Kuekes , Zhiyong Li , S. Wang , R. Williams
IPC分类号： H04Q5/22
CPC分类号： G01D21/00 , H04Q9/00
摘要： An assembly for monitoring an environment includes a RFID tag and a sensing unit. The sensing unit is configured to be activated by a RF signal received by the RFID tag and to sense information regarding an environment.
摘要翻译：用于监测环境的组件包括RFID标签和感测单元。感测单元被配置为由RFID标签接收的RF信号激活并且感测关于环境的信息。

你已经成功收藏专利！

检索式保存成功!

IPRDB

热门服务

关于我们

友情链接

联系方式