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    • 51. 发明授权
    • Shape measuring apparatus and method
    • 形状测量装置及方法
    • US6026583A
    • 2000-02-22
    • US988397
    • 1997-12-10
    • Keiichi YoshizumiHiroyuki TakeuchiKeishi KuboYukio ImadaKoji Handa
    • Keiichi YoshizumiHiroyuki TakeuchiKeishi KuboYukio ImadaKoji Handa
    • G01B11/00G01B11/24
    • G01B11/005G01B11/24
    • A shape measuring apparatus includes an object measuring device, a holding base, a reference plane measuring device, and a length measuring unit. The holding base holds an object-to-be-measured on its surface and has a reference plane provided on its back side so that a measured surface of the object and the reference plane can be simultaneously scanned by the object measuring device and the reference plane measuring device, respectively. Therefore, the object and the reference plane can sway integrally with each other, and the accuracy of measurement of the measured surface is not influenced by any moving straightness deviation of the holding base unless any change occurs in relative positions of the reference plane and the measured surface. Therefore, the shape of the measured surface can be measured with the flatness accuracy of the reference plane.
    • 一种形状测量装置,包括物体测量装置,保持基座,基准平面测量装置和长度测量单元。 保持基座在其表面上保持要测量的物体,并且具有设置在其背面的参考平面,使得物体和参考平面的测量表面可以被物体测量装置和参考平面同时扫描 测量装置。 因此,物体和参考平面可以彼此一体摆动,并且测量表面的测量精度不受保持基座的任何移动直线度偏差的影响,除非在参考平面的相对位置和测量的相对位置发生变化 表面。 因此,可以用参考平面的平坦度精度来测量被测表面的形状。
    • 54. 发明授权
    • Apparatus for measuring birefringence without employing rotating
mechanism
    • 不使用旋转机构测量双折射的装置
    • US5319194A
    • 1994-06-07
    • US28164
    • 1993-03-09
    • Keiichi YoshizumiKeishi Kubo
    • Keiichi YoshizumiKeishi Kubo
    • G01N21/23G02F1/01
    • G01N21/23
    • The birefringence of an object is measured by emitting first and second linearly polarized laser beams having optical frequencies f1 and f2 and transmitted in a same z-axis direction. The directions of polarization of the two laser beams are perpendicular to each other. After passing through the object, the laser beams are separated irrespective of the polarized directions thereof. A first analyzer transmits therethrough one of the laser beams that has been separated and polarized by about 45.degree. with respect to the x-axis. A second analyzer transmits therethrough the other of the laser beams separated and polarized in the x-direction or y-direction. Respective photodetectors are provided for detecting the outputs of the first and second analyzers. The birefringence amount of the object and the direction of a lag-phase axis or of an advanced-phase axis is detected based on the outputs of the photodetectors and a difference in the frequencies f1 and f2 of the first and second laser beams.
    • 通过发射具有光频f1和f2的第一和第二线偏振激光束并在相同的z轴方向上透射来测量物体的双折射。 两个激光束的极化方向彼此垂直。 在通过物体之后,激光束与其偏振方向无关。 第一分析仪通过其中已经相对于x轴分离和偏振约45°的激光束之一透射。 第二分析仪透过其中沿x方向或y方向分离和偏振的另一激光束。 提供了用于检测第一和第二分析器的输出的各个光电检测器。 基于光电检测器的输出和第一和第二激光束的频率f1和f2的差异来检测物体的双折射量和滞后相位轴或前进相位轴的方向。
    • 56. 发明授权
    • Configuration measuring apparatus
    • 配置测量仪
    • US5144150A
    • 1992-09-01
    • US665224
    • 1991-03-06
    • Keiichi YoshizumiKeishi Kubo
    • Keiichi YoshizumiKeishi Kubo
    • G01B11/24G01B11/00G01B11/245
    • G01B11/007B82Y35/00Y10S977/861Y10S977/869Y10S977/872Y10S977/932Y10S977/951
    • A configuration measuring apparatus includes a contacting member for contacting and tracing a surface of an object to be measured, a supporting member for supporting the contacting member and having a reflecting surface, an optical probe, a driving device, and an X-coordinate or XY-coordinate measuring device. The optical probe supports the contacting member through the supporting member and has an automatic focusing device for moving an objective lens in the Z-direction, which is an optical direction of the lens, so that a focusing point of the objective lens is positioned at the reflecting surface in spite of a possible dislocation of the reflecting surface, which is to be at a focusing position of the objective lens for condensing a laser beam and a device for measuring a Z-coordinate of the reflecting surface by allowing interference of the laser beam which has been reflected by the reflecting surface with a reference light. The driving device moves the optical probe in the X-direction or the XY-direction. The X-coordinate or XY-coordinate measuring device measures a position of the optical probe in the X-direction or the XY-direction. Then, the configuration of the surface of the object in XZ-coordinate or XYZ-coordinate is measured by the optical probe in cooperation with the contact member which traces the surface of the object.
    • 一种配置测量装置,包括用于接触和跟踪待测物体的表面的接触构件,用于支撑接触构件并具有反射面的支撑构件,光学探针,驱动装置和X坐标或XY 协调测量装置。 光探头通过支撑构件支撑接触构件,并且具有用于在作为透镜的光学方向的Z方向上移动物镜的自动聚焦装置,使得物镜的聚焦点位于 尽管反射表面可能位于反射表面的位置,该反射表面将位于用于聚焦激光束的物镜的聚焦位置和用于通过允许激光束的干涉来测量反射表面的Z坐标的装置 其被反射表面用参考光反射。 驱动装置将光学探头沿X方向或XY方向移动。 X坐标或XY坐标测量装置测量光学探针在X方向或XY方向上的位置。 然后,通过与跟踪物体表面的接触构件协同地由光学探头测量XZ坐标或XYZ坐标中的对象的表面的配置。