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    • 55. 发明申请
    • Semiconductor device with double barrier film
    • 具有双阻挡膜的半导体器件
    • US20060065913A1
    • 2006-03-30
    • US11001223
    • 2004-12-02
    • Makoto SakumaYasuhiko MatsunagaFumitaka AraiKikuko Sugimae
    • Makoto SakumaYasuhiko MatsunagaFumitaka AraiKikuko Sugimae
    • H01L21/82H01L29/76
    • H01L27/115H01L27/105H01L27/11526H01L27/11529
    • A semiconductor device comprising a first insulation layer, a second insulation layer, a first barrier film, a second barrier film, a diffusion layer. The device further comprises an upper contact hole, a lower contact hole, and a contact plug. The upper contact hole penetrates the second insulation layer and has a bottom in the second barrier film. The bottom has a width greater than a trench made in the first insulation layer, as measured in a direction crossing the widthwise direction of the trench. The lower contact hole penetrates the first insulation layer and first barrier film, communicates with the first contact hole via the trench and is provided on the diffusion layer. The upper portion of the lower contact hole has the same width as the trench. The contact plug is provided in the upper contact hole and lower contact hole.
    • 一种半导体器件,包括第一绝缘层,第二绝缘层,第一阻挡膜,第二阻挡膜,扩散层。 该装置还包括上接触孔,下接触孔和接触塞。 上接触孔穿透第二绝缘层,并且在第二阻挡膜中具有底部。 底部的宽度大于在与沟槽宽度方向交叉的方向上测量的在第一绝缘层中形成的沟槽。 下接触孔穿过第一绝缘层和第一阻挡膜,经由沟槽与第一接触孔连通并设置在扩散层上。 下接触孔的上部具有与沟槽相同的宽度。 接触塞设置在上接触孔和下接触孔中。
    • 60. 发明授权
    • Non-volatile semiconductor memory device
    • 非易失性半导体存储器件
    • US08817523B2
    • 2014-08-26
    • US13601826
    • 2012-08-31
    • Kikuko Sugimae
    • Kikuko Sugimae
    • G11C13/00
    • G11C13/0069G11C13/0011G11C13/0033G11C13/004G11C2213/71G11C2213/73
    • A non-volatile semiconductor memory device includes a memory cell array including a first wire, a second wire crossing the first wire, and a memory cell connected to both the wires at a crossing portion of the first wire and the second wire, the memory cell including a variable resistance element storing data in a non-volatile manner by a resistance value, and a control circuit setting the variable resistance element in first or second resistance state by application of first or second voltage to the memory cell and reading data from the memory cell by application of third voltage to the memory cell. The control circuit applies to the memory cell at predetermined timing weak write voltage causing the variable resistance element to be held in the first resistance state and the second resistance state.
    • 非易失性半导体存储器件包括存储单元阵列,该存储单元阵列包括第一线,与第一线交叉的第二线,以及与第一线和第二线的交叉部分处的两条线连接的存储单元,存储单元 包括通过电阻值以非易失性方式存储数据的可变电阻元件以及通过向存储器单元施加第一或第二电压并从存储器读取数据来将可变电阻元件设置在第一或第二电阻状态的控制电路 通过将第三电压施加到存储器单元。 控制电路以预定的定时将弱写入电压施加到存储单元,使可变电阻元件保持在第一电阻状态和第二电阻状态。