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    • 54. 发明申请
    • Window assembly masking bag
    • 窗组装掩蔽袋
    • US20060272273A1
    • 2006-12-07
    • US11418845
    • 2006-05-05
    • Klaus Hartig
    • Klaus Hartig
    • E04B1/00
    • E04G21/30B65D85/64B65D2585/649E06B7/28
    • The invention provides methods and equipment for storing and protecting window assemblies. In certain embodiments, there is provided a bag configured to hold a window assembly therein following the assembly's manufacture up until after the installation of the assembly. The bag is configured to be sealed and to be form-fitted to the window assembly. As such, the likelihood of the bag allowing contaminants therein or catching on something and tearing is reduced. Following the installation of the window assembly, a portion of the bag is configured for removal from the exposed surfaces of the window assembly. A portion of the bag not removed is subsequently utilized as a protective barrier for the non-exposed surfaces of the window assembly. In certain embodiments, there is provided a method for storing and protecting a window assembly using a bag of the described nature.
    • 本发明提供了用于存储和保护窗组件的方法和设备。 在某些实施例中,提供了一种构造成在组件的制造之后将窗户组件保持在其中直到安装组件之后的袋子。 该袋被配置为密封并与窗组件成形。 因此,袋子允许其中的污染物或捕获物质和撕裂的可能性降低。 在安装窗组件之后,袋的一部分被配置成从窗组件的暴露表面移除。 随后将未拆卸的袋的一部分用作窗组件的未暴露表面的保护屏障。 在某些实施例中,提供了一种使用所述性质的袋存储和保护窗户组件的方法。
    • 55. 发明申请
    • Deposition chamber desiccation systems and methods of use thereof
    • 沉积室干燥系统及其使用方法
    • US20060272174A1
    • 2006-12-07
    • US11437429
    • 2006-05-19
    • Klaus Hartig
    • Klaus Hartig
    • F26B21/08
    • F26B21/001C23C14/564C23C16/4401F26B21/08
    • The present invention provides a system and method for removing contaminating moisture from a deposition chamber prior to use. Dry air, preferably hot dry air, is blown into the deposition chamber where it absorbs and removes moisture. This is done by connecting a desiccation system including a blower and a dryer to the deposition chamber. The deposition chamber is also provided with a vacuum source; this may be connected to the deposition chamber using the same line as that used for the desiccation source, or may be connected through a separate line. The dry air may re-circulate through the chamber during this flushing method, or the dry air may flow through the deposition chamber continuously. A heat exchanger may also be provided to efficiently reuse hot air used to recharge the desiccation system. The desiccation system and method are particularly suited for decontaminating a magnetron sputtering deposition chamber.
    • 本发明提供一种用于在使用之前从沉积室去除污染水分的系统和方法。 干燥空气,优选热干燥空气,吹入沉积室,在其中吸收和去除水分。 这通过将包括鼓风机和干燥器的干燥系统连接到沉积室来完成。 沉积室还设有真空源; 这可以使用与用于干燥源的线相同的线连接到沉积室,或者可以通过单独的管线连接。 在这种冲洗过程中干燥的空气可以通过室再循环,或者干燥的空气可以连续地流过沉积室。 还可以提供热交换器以有效地再利用用于对干燥系统进行再充电的热空气。 干燥系统和方法特别适用于对磁控溅射沉积室进行净化。