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    • 10. 发明授权
    • Plasma-enhanced film deposition
    • 等离子体增强膜沉积
    • US07157123B2
    • 2007-01-02
    • US10739887
    • 2003-12-18
    • Klaus Hartig
    • Klaus Hartig
    • H05H1/04
    • H01J37/32862C23C16/4404C23C16/4405C23C16/509H01J37/34
    • Methods and equipment for depositing films. In certain embodiments, there is provided a deposition chamber having a substrate-coating region and an electrode-cleaning region. In these embodiments, an electrode is positioned in the deposition chamber and has an interior cavity in which first and second magnet systems are disposed. In certain embodiments, there is provided a method for depositing films onto substrates using a deposition chamber of the described nature. The invention also provides electrode assemblies for film-deposition equipment. In certain embodiments, the electrode assembly comprises a rotatable electrode (optionally having an outer coating of carbon or the like) having an interior cavity, with stationary first and second generally-opposed magnet systems being disposed in this interior cavity.
    • 沉积膜的方法和设备。 在某些实施例中,提供了一种具有基底涂覆区域和电极清洁区域的沉积室。 在这些实施例中,电极位于沉积室中,并且具有内部空腔,第一和第二磁体系统设置在该内部空腔中。 在某些实施方案中,提供了一种使用所述性质的沉积室将膜沉积到基板上的方法。 本发明还提供了用于成膜设备的电极组件。 在某些实施例中,电极组件包括具有内部空腔的可旋转电极(可选地具有碳外部涂层等),固定的第一和第二大致相对的磁体系统设置在该内腔中。