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51. 发明授权

US08318609B2 Method of depositing materials on a non-planar surface 失效
标题翻译：在非平面表面上沉积材料的方法
公开(公告)号：US08318609B2
公开(公告)日：2012-11-27
申请号：US12633589
申请日：2009-12-08
申请人： Dan Marohl , Timothy J. Franklin , Ratson Morad
发明人： Dan Marohl , Timothy J. Franklin , Ratson Morad
IPC分类号： H01L21/31
CPC分类号： H01L21/67706 , C23C14/505 , H01L21/6776
摘要： A carrier for effectuating semiconductor processing on a non-planar substrate is disclosed. The carrier is configured for holding at least one non-planar substrate throughout a semiconductor processing step and concurrently rotating non-planar substrates as they travel down a translational path of a processing chamber. As the non-planar substrates simultaneously rotate and translate down a processing chamber, the rotation exposes the whole or any desired portion of the surface area of the non-planar substrates to the deposition process, allowing for uniform deposition as desired. Alternatively, any predetermined pattern is able to be exposed on the surface of the non-planar substrates. Such a carrier effectuates manufacture of non-planar semiconductor devices, including, but not limited to, non-planar light emitting diodes, non-planar photovoltaic cells, and the like.
摘要翻译：公开了一种用于在非平面基板上实现半导体处理的载体。载体构造成用于在整个半导体处理步骤中保持至少一个非平面基底，并且当它们沿着处理室的平移路径行进时同时旋转非平面基底。随着非平面基板同时旋转并且向下平移处理室，旋转将非平面基板的表面积的整个或任何所需部分暴露于沉积工艺，从而允许根据需要均匀沉积。或者，任何预定图案能够暴露在非平面基板的表面上。这种载体实现非平面半导体器件的制造，包括但不限于非平面发光二极管，非平面光伏电池等。

52. 发明申请

US20110279918A1 CONCENTRATING SOLAR ENERGY COLLECTOR 失效
标题翻译：浓缩太阳能收集器
公开(公告)号：US20110279918A1
公开(公告)日：2011-11-17
申请号：US12781706
申请日：2010-05-17
申请人： Gilad ALMOGY , Ratson Morad , Amir Bar , Amir Arie Weiss , Ofer Ricklis , Andrey Bochkariov
发明人： Gilad ALMOGY , Ratson Morad , Amir Bar , Amir Arie Weiss , Ofer Ricklis , Andrey Bochkariov
IPC分类号： G02B7/198
CPC分类号： H01L31/0525 , F24S23/74 , F24S25/12 , F24S25/13 , F24S30/425 , G02B7/1822 , H01L31/0521 , H01L31/0547 , Y02E10/45 , Y02E10/47
摘要： Systems, methods, and apparatus by which solar energy may be collected to provide electricity or a combination of heat and electricity are disclosed herein.
摘要翻译：本文公开了可以收集太阳能以提供电力或热和电力的组合的系统，方法和装置。

53. 发明申请

US20110017267A1 RECEIVER FOR CONCENTRATING PHOTOVOLTAIC-THERMAL SYSTEM 审中-公开
标题翻译：用于浓缩光伏系统的接收器
公开(公告)号：US20110017267A1
公开(公告)日：2011-01-27
申请号：US12622416
申请日：2009-11-19
申请人： Joseph Isaac Lichy , Brian Edward Atchley , Ratson Morad , Gilad Almogy , Adam Brian Reich , John Lawler , Nathan Phillips Beckett
发明人： Joseph Isaac Lichy , Brian Edward Atchley , Ratson Morad , Gilad Almogy , Adam Brian Reich , John Lawler , Nathan Phillips Beckett
IPC分类号： H01L31/052 , H01L31/048 , H01L31/042
CPC分类号： H01L31/0521 , H01L31/02013 , H01L31/02021 , H01L31/048 , H01L31/0547 , H02S40/34 , Y02E10/52
摘要： Systems, methods, and apparatus by which solar energy may be collected to provide electricity or a combination of heat and electricity are disclosed herein. Examples of solar energy receivers are disclosed that may be used to collect concentrated solar radiation.
摘要翻译：本文公开了可以收集太阳能以提供电力或热和电力的组合的系统，方法和装置。公开了可用于收集集中的太阳辐射的太阳能接收器的示例。

54. 发明申请

US20110000534A1 Elongated photovoltaic cells in casings with a filling layer 失效
标题翻译：具有填充层的壳体中的细长的光伏电池
公开(公告)号：US20110000534A1
公开(公告)日：2011-01-06
申请号：US11821524
申请日：2007-06-22
申请人： Benyamin Buller , Chris M. Gronet , Ratson Morad , Markus E. Beck
发明人： Benyamin Buller , Chris M. Gronet , Ratson Morad , Markus E. Beck
IPC分类号： H01L31/0203 , H01L31/0352
CPC分类号： H01L31/035281 , Y02E10/50 , Y02E10/52 , Y02E10/541 , Y02P70/521
摘要： A solar cell unit comprising a cylindrical shaped solar cell and a transparent tubular casing is provided. The tubular shaped solar cell comprises a back-electrode, a semiconductor junction circumferentially disposed on the back-electrode and a transparent conductive layer disposed on the semiconductor junction. The transparent tubular casing is circumferentially sealed onto the transparent conductive layer of the cylindrical shaped solar cell. A solar cell unit comprising a cylindrical shaped solar cell, a filler layer, and a transparent tubular casing is provided. The cylindrical shaped solar cell comprises a cylindrical substrate, a back-electrode circumferentially disposed on the cylindrical substrate, a semiconductor junction circumferentially disposed on the back-electrode, and a transparent conductive layer disposed on the semiconductor junction. The filler layer is circumferentially disposed on the transparent conductive layer and the transparent tubular casing is circumferentially disposed onto the filler layer.
摘要翻译：提供了一种包括圆柱形太阳能电池和透明管状外壳的太阳能电池单元。管状太阳能电池包括背面电极，周向设置在背面电极上的半导体结和设置在半导体结上的透明导电层。透明管状壳体周向地密封在圆柱形太阳能电池的透明导电层上。提供了包括圆柱形太阳能电池，填充层和透明管状壳体的太阳能电池单元。圆筒形太阳能电池包括圆柱形基板，周向设置在圆柱形基板上的背面电极，周向设置在背面电极上的半导体结，以及设置在半导体结上的透明导电层。填充层周向地设置在透明导电层上，透明管状壳体周向地设置在填充层上。

55. 发明申请

US20090011573A1 Carrier used for deposition of materials on a non-planar surface 审中-公开
标题翻译：用于在非平面表面上沉积材料的载体
公开(公告)号：US20090011573A1
公开(公告)日：2009-01-08
申请号：US11983239
申请日：2007-11-07
申请人： Dan Marohl , Timothy J. Franklin , Ratson Morad
发明人： Dan Marohl , Timothy J. Franklin , Ratson Morad
IPC分类号： B05C13/00 , B23H7/26 , H01L21/36
CPC分类号： H01L21/67706 , C23C14/505 , H01L21/6776
摘要： A carrier for effectuating semiconductor processing on a non-planar substrate is disclosed. The carrier is configured for holding at least one non-planar substrate throughout a semiconductor processing step and concurrently rotating non-planar substrates as they travel down a translational path of a processing chamber. As the non-planar substrates simultaneously rotate and translate down a processing chamber, the rotation exposes the whole or any desired portion of the surface area of the non-planar substrates to the deposition process, allowing for uniform deposition as desired. Alternatively, any predetermined pattern is able to be exposed on the surface of the non-planar substrates. Such a carrier effectuates manufacture of non-planar semiconductor devices, including, but not limited to, non-planar light emitting diodes, non-planar photovoltaic cells, and the like.
摘要翻译：公开了一种用于在非平面基板上实现半导体处理的载体。载体构造成用于在整个半导体处理步骤中保持至少一个非平面基底，并且当它们沿着处理室的平移路径行进时同时旋转非平面基底。随着非平面基板同时旋转并且向下平移处理室，旋转将非平面基板的表面积的整个或任何所需部分暴露于沉积工艺，从而允许根据需要均匀沉积。或者，任何预定图案能够暴露在非平面基板的表面上。这种载体实现非平面半导体器件的制造，包括但不限于非平面发光二极管，非平面光伏电池等。

56. 发明授权

US07375023B2 Method and apparatus for chemical mechanical polishing of semiconductor substrates 失效
标题翻译：半导体衬底的化学机械抛光方法和装置
公开(公告)号：US07375023B2
公开(公告)日：2008-05-20
申请号：US11393999
申请日：2006-03-30
申请人： Stan D. Tsai , Liang-Yuh Chen , Lizhong Sun , Shijian Li , Feng Q. Liu , Rashid Mavliev , Ratson Morad , Daniel A. Carl
发明人： Stan D. Tsai , Liang-Yuh Chen , Lizhong Sun , Shijian Li , Feng Q. Liu , Rashid Mavliev , Ratson Morad , Daniel A. Carl
IPC分类号： H01L21/4763
CPC分类号： H01L21/7684 , B24B37/042 , B24B49/16 , H01L21/3212 , Y02P80/30
摘要： Methods and apparatus for processing substrates to improve polishing uniformity, improve planarization, remove residual material and minimize defect formation are provided. In one aspect, a method is provided for processing a substrate having a conductive material and a low dielectric constant material disposed thereon including polishing a substrate at a polishing pressures of about 2 psi or less and at platen rotational speeds of about 200 cps or greater. The polishing process may use an abrasive-containing polishing composition having up to about 1 wt. % of abrasives. The polishing process may be integrated into a multi-step polishing process.
摘要翻译：提供了用于处理基板以改善抛光均匀性，改善平面化，去除残留材料并最小化缺陷形成的方法和装置。在一个方面，提供了一种处理具有导电材料和设置在其上的低介电常数材料的衬底的方法，其包括在约2psi或更小的抛光压力和约200cps或更大的压板旋转速度下抛光衬底。抛光工艺可以使用含有至多约1重量％的磨料的抛光组合物。磨料的百分比。抛光工艺可以集成到多步抛光工艺中。

57. 发明申请

US20070215195A1 Elongated photovoltaic cells in tubular casings 审中-公开
标题翻译：管状肠衣中的细长的光伏电池
公开(公告)号：US20070215195A1
公开(公告)日：2007-09-20
申请号：US11378847
申请日：2006-03-18
申请人： Benyamin Buller , Chris Gronet , Ratson Morad , Markus Beck
发明人： Benyamin Buller , Chris Gronet , Ratson Morad , Markus Beck
IPC分类号： H02N6/00
CPC分类号： H01L31/035281 , Y02E10/50 , Y02E10/52 , Y02E10/541 , Y02P70/521
摘要： A solar cell unit comprising a cylindrical shaped solar cell and a transparent tubular casing is provided. The tubular shaped solar cell comprises a back-electrode, a semiconductor junction circumferentially disposed on the back-electrode and a transparent conductive layer disposed on the semiconductor junction. The transparent tubular casing is circumferentially sealed onto the transparent conductive layer of the cylindrical shaped solar cell. A solar cell unit comprising a cylindrical shaped solar cell, a filler layer, and a transparent tubular casing is provided. The cylindrical shaped solar cell comprises a cylindrical substrate, a back-electrode circumferentially disposed on the cylindrical substrate, a semiconductor junction circumferentially disposed on the back-electrode, and a transparent conductive layer disposed on the semiconductor junction. The filler layer is circumferentially disposed on the transparent conductive layer and the transparent tubular casing is circumferentially disposed onto the filler layer.
摘要翻译：提供了一种包括圆柱形太阳能电池和透明管状外壳的太阳能电池单元。管状太阳能电池包括背面电极，周向设置在背面电极上的半导体结和设置在半导体结上的透明导电层。透明管状壳体周向地密封在圆柱形太阳能电池的透明导电层上。提供了包括圆柱形太阳能电池，填充层和透明管状壳体的太阳能电池单元。圆筒形太阳能电池包括圆柱形基板，周向设置在圆柱形基板上的背面电极，周向设置在背面电极上的半导体结，以及设置在半导体结上的透明导电层。填充层周向地设置在透明导电层上，透明管状壳体周向地设置在填充层上。

58. 发明授权

US07104869B2 Barrier removal at low polish pressure 失效
公开(公告)号：US07104869B2
公开(公告)日：2006-09-12
申请号：US10187857
申请日：2002-06-27
申请人： Stan Tsai , Rashid Mavliev , Lizhong Sun , Feng Q. Liu , Liang-Yuh Chen , Ratson Morad
发明人： Stan Tsai , Rashid Mavliev , Lizhong Sun , Feng Q. Liu , Liang-Yuh Chen , Ratson Morad
IPC分类号： B24B1/00 , H01L21/47
CPC分类号： B24B37/0056 , B24B37/044 , B24B49/006 , B24B49/16 , C09G1/02 , H01L21/3212
摘要： The invention generally provides methods and compositions for planarizing a substrate surface having underlying dielectric materials. Aspects of the invention provide compositions and methods using a combination of low polishing pressures, polishing compositions, various polishing speeds, selective polishing pads, and selective polishing temperatures, for removing barrier materials by a chemical mechanical polishing technique with minimal residues and minimal seam damage. Aspects of the invention are achieved by employing a strategic multi-step process including sequential CMP at low polishing pressure to remove the deposited barrier materials.

59. 发明授权

US06896776B2 Method and apparatus for electro-chemical processing 失效
标题翻译：电化学处理方法和装置
公开(公告)号：US06896776B2
公开(公告)日：2005-05-24
申请号：US09739139
申请日：2000-12-18
申请人： Wei-Yung Hsu , Liang-Yuh Chen , Ratson Morad , Daniel A. Carl , Sasson Somekh
发明人： Wei-Yung Hsu , Liang-Yuh Chen , Ratson Morad , Daniel A. Carl , Sasson Somekh
IPC分类号： B24B37/00 , B24B37/04 , C25D5/00 , C25D5/22 , C25D7/12 , H01L21/288 , H01L21/304 , H01L21/321 , H01L21/768 , C25D1/00 , C25D17/00
CPC分类号： C25D7/123 , C25D5/06 , C25D5/22 , C25D17/001 , C25D17/008 , H01L21/288 , H01L21/2885 , H01L21/3212 , H01L21/7684 , H01L21/76877
摘要： A method and apparatus is provided for depositing and planarizing a material layer on a substrate. In one embodiment, an apparatus is provided which includes a partial enclosure, a permeable disc, a diffuser plate and optionally an anode. A substrate carrier is positionable above the partial enclosure and is adapted to move a substrate into and out of contact or close proximity with the permeable disc. The partial enclosure and the substrate carrier are rotatable to provide relative motion between a substrate and the permeable disc. In another aspect, a method is provided in which a substrate is positioned in a partial enclosure having an electrolyte therein at a fist distance from a permeable disc. A current is optionally applied to the surface of the substrate and a first thickness is deposited on the substrate. Next, the substrate is positioned closer to the permeable disc and a second thickness is deposited on the substrate. During the deposition, the partial enclosure and the substrate are rotated relative one another.
摘要翻译：提供了一种用于沉积和平坦化衬底上的材料层的方法和装置。在一个实施例中，提供了一种装置，其包括部分外壳，可渗透盘，漫射板和任选的阳极。衬底载体可定位在部分外壳上方，并且适于将衬底移动到与可渗透盘接触或接近的位置。部分外壳和基板载体可旋转以提供基板和可渗透盘之间的相对运动。在另一方面，提供了一种方法，其中将基板定位在其中具有电解质的部分封闭件中，其中离开可渗透盘的第一距离。任选地将电流施加到衬底的表面，并且在衬底上沉积第一厚度。接下来，将基板定位成更靠近可渗透盘，并且在基板上沉积第二厚度。在沉积期间，部分封闭物和基底相对彼此旋转。

60. 发明授权

US06841057B2 Method and apparatus for substrate polishing 失效
标题翻译：用于基板抛光的方法和装置
公开(公告)号：US06841057B2
公开(公告)日：2005-01-11
申请号：US10098796
申请日：2002-03-13
申请人： Ralph Wadensweiler , Alain Duboust , Liang-Yuh Chen , Manoocher Birang , Ratson Morad , Paul D. Butterfield
发明人： Ralph Wadensweiler , Alain Duboust , Liang-Yuh Chen , Manoocher Birang , Ratson Morad , Paul D. Butterfield
IPC分类号： B23H5/08 , C25F7/00 , C25F3/00 , C25C7/04 , C25D17/00
CPC分类号： B23H5/08 , C25F7/00
摘要： A method and apparatus are provided for polishing a substrate surface. In one aspect, an apparatus for polishing a substrate includes a conductive polishing pad and an electrode having a membrane disposed therebetween. The membrane is orientated relative the conductive pad in a manner that facilitates removal of entrained gas from electrolyte flowing towards the conductive pad. The apparatus may be part of an electro-chemical polishing station that may optionally be part of a system that includes chemical mechanical polishing stations.
摘要翻译：提供了一种用于抛光衬底表面的方法和装置。一方面，用于抛光衬底的装置包括导电抛光垫和在其间设置有膜的电极。膜以相对于导电垫的方向定向，以便于从电解液中流出的夹带气体去除导电垫。该设备可以是电化学抛光站的一部分，其可以可选地是包括化学机械抛光站的系统的一部分。

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