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    • 46. 发明授权
    • Method for forming contact hole
    • 形成接触孔的方法
    • US06531067B1
    • 2003-03-11
    • US09623026
    • 2000-08-25
    • Nagamasa ShiokawaAtsushi Yamamoto
    • Nagamasa ShiokawaAtsushi Yamamoto
    • H01B1300
    • H01L21/31116H01L21/76802
    • The subject of the present invention is to keep the wiring resistance low and reduce the variation of the wiring resistance in one identical lot in semiconductor devices of a multi level interconnect structure in which at least the lower wiring layer is an aluminum wiring layer. Contact holes (31, 51) are formed in dielectric interlayers (3, 5) of upper and lower wiring layers (1, 2, 4) by dry etching. In the method of forming the contact holes of the invention, the dry etching was applied in two steps divisionally. The first step of etching is applied with supplying CF4, CHF3, Ar and N2 into an etching chamber. The second step of etching is conducted with supplying CF4, CHF3 and Ar into the etching gas chamber.
    • 本发明的目的在于使至少下布线层为铝布线层的多层布线结构的半导体器件中的同一批次中的布线电阻变小,从而降低布线电阻的变化。接触孔 (31,51)通过干蚀刻形成在上下布线层(1,2,4)的介电层间(3,5)中。 在形成本发明的接触孔的方法中,分两次地进行干蚀刻。 施加蚀刻的第一步骤,将CF4,CHF3,Ar和N2供应到蚀刻室中。 蚀刻第二步骤是通过向蚀刻气体室中供应CF4,CHF3和Ar进行蚀刻。
    • 48. 发明授权
    • Method of making a support circuit for a semiconductor chip assembly
    • 制造用于半导体芯片组件的支撑电路的方法
    • US06402970B1
    • 2002-06-11
    • US09643213
    • 2000-08-22
    • Charles W. C. Lin
    • Charles W. C. Lin
    • H01B1300
    • H05K3/4007H01L21/4857H01L23/49811H01L23/4985H01L2924/0002H01L2924/09701H05K3/062Y10S205/92Y10T29/49128Y10T29/49156H01L2924/00
    • A method of manufacturing a support circuit includes providing a conductive layer with top and bottom surfaces, providing a top etch mask on the top surface that includes an opening that exposes a portion of the top surface, providing a bottom etch mask on the bottom surface that includes an opening that exposes a portion of the bottom surface, applying an etch to the exposed portion of the top surface through the opening in the top etch mask, thereby etching partially but not completely through the conductive layer and forming a recessed portion in the conductive layer below the top surface, forming an insulative base on the recessed portion without forming the insulative base on the top surface, and applying an etch to the exposed portion of the bottom surface through the opening in the bottom etch mask, thereby forming a through-hole in the recessed portion that extends to and is covered by the insulative base.
    • 制造支撑电路的方法包括:提供具有顶表面和底表面的导电层,在顶表面上提供顶部蚀刻掩模,该掩模包括暴露顶表面的一部分的开口,在底表面上提供底蚀刻掩模, 包括露出底表面的一部分的开口,通过顶部蚀刻掩模中的开口对顶表面的暴露部分施加蚀刻,从而通过导电层部分蚀刻但不完全蚀刻,并在导电层中形成凹陷部分 在顶表面下方形成绝缘基底,而不在顶表面上形成绝缘基底,并且通过底蚀刻掩模中的开口对底表面的暴露部分施加蚀刻,从而形成通孔, 在凹部中延伸并被绝缘基底覆盖的孔。
    • 49. 发明授权
    • High frequency ribbon cable for twist capsule cable applications
    • 用于扭转胶囊电缆应用的高频带状电缆
    • US06296725B1
    • 2001-10-02
    • US09398017
    • 1999-09-17
    • Glenn LawsonTyrone TrenorAnthony Lee Bowman
    • Glenn LawsonTyrone TrenorAnthony Lee Bowman
    • H01B1300
    • H01B13/22
    • Disclosed is a method for surrounding electrical cable, such as coax cable or twinax cable, with an elastomer to form a twist capsule cable. The cables are placed in a fixture and stretched to a desired tautness using rubber bands at opposite ends of each cable without allowing the cables to sag in the fixture. The cables are clamped into yokes at opposite ends of the fixture. An elastomer, such as silicone, is poured into the fixture and allowed to cure. The portion of the cables within the fixture are embedded into the elastomer after the elastomer cures. Additional length of twist capsule cable can be fabricated by performing a similar process on adjoining sections of cable. The elastomer is then coated with a polyxylylene or similar polymer such as Parylene™ to prevent the elastomer from rubbing on itself when coiled and when uncoiling. Advantageously, any number of cables can be embedded in the elastomer to form the twist capsule cable. Also advantageously, the present invention provides excellent attenuation at 1 GHz. Some channels operate between 10 MHz and 80 MHz. The cables are capable of carrying radio, Identify Friend and Foe (IFF), Ethernet and other signals.
    • 公开了一种用弹性体围绕诸如同轴电缆或双轴电缆的电缆的方法,以形成扭转胶囊电缆。 将电缆放置在固定装置中,并使用每根电缆两端的橡胶带将其拉伸至所需的张紧状态,而不允许电缆在固定装置中下垂。 电缆在夹具的相对端被夹紧到轭中。 将诸如硅氧烷的弹性体倒入夹具中并使其固化。 在弹性体固化之后,固定装置内的电缆部分被嵌入到弹性体中。 扭绞胶囊电缆的附加长度可以通过在电缆的相邻部分上执行类似的工艺来制造。 然后用聚亚苯基或类似聚合物如Parylene TM涂覆弹性体,以防止弹性体在卷绕时和当开卷时自身摩擦。 有利地,可以将任何数量的电缆嵌入到弹性体中以形成扭转胶囊电缆。 还有利地,本发明在1GHz提供了优异的衰减。 一些通道在10 MHz和80 MHz之间运行。 电缆能够携带无线电,识别朋友和敌人(IFF),以太网和其他信号。