专利快速检索-快速检索全球专利，免费商用专利数据库-IPRDB

41. 发明授权

US5357787A Cantilever for atomic force microscope and method of manufacturing the same 失效
标题翻译：悬臂式原子力显微镜及其制造方法
公开(公告)号：US5357787A
公开(公告)日：1994-10-25
申请号：US201087
申请日：1994-02-24
申请人： Hiroyuki Kado , Takao Tohda
发明人： Hiroyuki Kado , Takao Tohda
IPC分类号： G01Q70/10 , G01B5/28 , G01B7/34 , G01B21/30
CPC分类号： G01Q60/38 , B82Y15/00 , B82Y35/00 , G01Q70/12 , Y10S977/849 , Y10S977/851 , Y10S977/863 , Y10S977/873 , Y10S977/878 , Y10S977/879 , Y10S977/881
摘要： A cantilever for an atomic force microscope, has a probe formed by a structure at least partially including a linear needle crystal. A method of manufacturing the cantilever comprises the steps of applying adhesive to a distal end portion of a cantilever body and placing on the adhesive, in a state where the cantilever body is held substantially horizontally, a structure having the shape of at least four needle crystals combined with one another so as to bond the structure to the distal end portion of the cantilever body.
摘要翻译：用于原子力显微镜的悬臂具有由至少部分包括线性针状晶体的结构形成的探针。制造悬臂的方法包括以下步骤：将粘合剂施加到悬臂体的远端部分并且在悬臂体基本保持水平的状态下放置在粘合剂上，具有至少四个针状结晶形状的结构彼此组合以将结构粘合到悬臂体的远端部分。

42. 发明授权

US5345815A Atomic force microscope having cantilever with piezoresistive deflection sensor 失效
标题翻译：具有压阻偏转传感器的悬臂的原子力显微镜
公开(公告)号：US5345815A
公开(公告)日：1994-09-13
申请号：US954695
申请日：1992-09-30
申请人： Thomas Albrecht , Marco Tortonese , Robert Barrett
发明人： Thomas Albrecht , Marco Tortonese , Robert Barrett
IPC分类号： G01B7/16 , G01B20060101 , G01B7/34 , G01B21/30 , G01L20060101 , G01L1/18 , G01Q20/04 , G01Q60/38 , G01Q60/40 , G01Q70/02 , H01J37/28 , H01L21/34
CPC分类号： G01Q60/38 , B82Y35/00 , G01Q20/04 , Y10S977/851 , Y10S977/873
摘要： A microminiature cantilever structure is provided having a cantilever arm with a piezoresistive resistor embedded in at least the fixed end of the cantilever arm. Deflection of the free end of the cantilever arm produces stress in the base of the cantilever. That stress changes the piezoresistive resistor's resistance at the base of the cantilever in proportion to the cantilever arm's deflection. Resistance measuring apparatus is coupled to the piezoresistive resistor to measure its resistance and to generate a signal corresponding to the cantilever arm's deflection. The microminiature cantilever is formed on a semiconductor substrate. A portion of the free end of the cantilever arm is doped to form an electrically separate U-shaped piezoresistive resistor. The U-shaped resistor has two legs oriented parallel to an axis of the semiconductor substrate having a non-zero piezoresistive coefficient. A metal layer is deposited over the semiconductor's surface and patterned to form an electrical connection between the piezoresistive resistor and a resistance measuring circuit, enabling measurement of the piezoresistive resistor's resistance. Finally, the semiconductor substrate below the cantilever arm is substantially removed so as to form a cantilevered structure, and a tip is connected to the free end of the cantilever arm to facilitate the structure's use in an atomic force microscope.
摘要翻译：提供了一种微型悬臂结构，其具有悬臂，其具有嵌入到悬臂的至少固定端的压阻电阻器。悬臂的自由端的偏转在悬臂的底部产生应力。该应力与悬臂的偏转成比例地改变了压阻电阻器在悬臂底部的电阻。电阻测量装置耦合到压阻电阻器以测量其电阻并产生对应于悬臂的偏转的信号。微型悬臂形成在半导体衬底上。掺杂悬臂的自由端的一部分以形成电分离的U形压阻电阻器。 U形电阻器具有平行于具有非零压阻系数的半导体衬底的轴线定向的两个腿。金属层沉积在半导体表面上并被图案化以在压阻电阻器和电阻测量电路之间形成电连接，使得能够测量压阻电阻器的电阻。最后，基本上移除悬臂下面的半导体衬底以形成悬臂结构，并且尖端连接到悬臂的自由端，以便于结构在原子力显微镜中的使用。

43. 发明授权

US5329808A Atomic force microscope 失效
标题翻译：原子力显微镜
公开(公告)号：US5329808A
公开(公告)日：1994-07-19
申请号：US85053
申请日：1993-07-02
申请人： Virgil B. Elings , John A. Gurley
发明人： Virgil B. Elings , John A. Gurley
IPC分类号： G01B7/34 , G01B21/30 , G01Q20/00 , G01Q30/04 , G01Q60/00
CPC分类号： G01Q10/065 , B82Y35/00 , G01Q60/363 , Y10S977/851
摘要： This invention is an atomic force microscope having a digitally calculated feedback system which can perform force spectroscopy on a sample in order to map out the local stiffness of the sample in addition to providing the topography of the sample. It consists of a three-dimensional piezoelectric scanner, scanning either the sample of a force sensor. The force sensor is a contact type with a tip mounted on a cantilever and a sensor to detect the deflection of the lever at the tip. The signal from the sensor goes to an A-D convertor and is then processed by high-speed digital electronics to control the vertical motion of the sample or sensor. In operation, the digital electronics raise and lower the piezoelectric scanner during the scan to increase and decrease the force of the tip on the sample and to use the sensor signal to indicate the change in height of the tip to measure the which is the spring constant of the sample. This constant can be determined with nanometer spatial resolution. At the same time, the instrument can determine the topography of the sample with nanometer resolution. In an alternate embodiment, the lever is connected to a separate piezoelectric driver to vary the force on the tip. This improved AFM can also be used to periodically reset the force at which the tip contacts the sample and quickly replace the tip on the sample in the event that the tip loses contact with the surface.
摘要翻译：本发明是具有数字计算的反馈系统的原子力显微镜，其可以对样品进行力谱分析，以便除了提供样品的形貌外，还绘出样品的局部刚度。它由三维压电扫描仪组成，扫描力传感器的样本。力传感器是具有安装在悬臂上的尖端和用于检测杆在尖端处的偏转的传感器的接触型。来自传感器的信号进入A-D转换器，然后由高速数字电子设备进行处理，以控制样品或传感器的垂直运动。在操作中，数字电子装置在扫描过程中升高和降低压电扫描器，以增加和减小尖端在样品上的力，并使用传感器信号来指示尖端的高度变化，以测量弹簧常数的样品。该常数可以用纳米空间分辨率确定。同时，仪器可以用纳米分辨率确定样品的形貌。在替代实施例中，杠杆连接到单独的压电驱动器以改变尖端上的力。这种改进的AFM也可以用于周期性地重置尖端与样品接触的力，并且在尖端与表面接触的情况下快速更换样品上的尖端。

44. 发明授权

US5260572A Scanning probe microscope including height plus deflection method and apparatus to achieve both high resolution and high speed scanning 失效
标题翻译：扫描探针显微镜包括高度偏转方法和设备，以实现高分辨率和高速扫描
公开(公告)号：US5260572A
公开(公告)日：1993-11-09
申请号：US929676
申请日：1992-08-13
申请人： Daniel R. Marshall
发明人： Daniel R. Marshall
IPC分类号： G01Q30/06 , G01Q10/06 , G01Q60/00 , G01Q70/08 , H01J37/28
CPC分类号： G01Q30/06 , B82Y35/00 , G01Q10/06 , Y10S977/851
摘要： A scanning probe microscope achieves increased resolution and speed in profiling a surface of a sample by producing an error signal representing a difference between a probe signal and a desired value of the probe signal. The error signal is compensated for delay in response of a position translator. The position translator moves in response to the compensated error signal to produce a change in the probe signal dependent upon how closely the probe moves along the sample surface. A signal representing height of the sample surface is produced by filtering and scaling the probe signal and summing the resulting signal with the compensated error signal. Both high frequency components of the probe signal and low frequency components of the compensated error signal are included in the sample surface height-representing signal, resulting in very high image resolution without sacrificing scanning speed.
摘要翻译：扫描探针显微镜通过产生表示探针信号和探测信号的期望值之间的差异的误差信号来实现提高样品表面的分辨率和速度。误差信号由位置转换器的响应补偿延迟。位置转换器响应于补偿的误差信号而移动，以根据探头沿着样品表面移动的程度而产生探针信号的变化。表示样品表面的高度的信号是通过对探测信号进行滤波和缩放并将得到的信号与经补偿的误差信号相加来产生的。探头信号的高频分量和补偿误差信号的低频分量都包含在样品表面高度表示信号中，导致非常高的图像分辨率而不牺牲扫描速度。

45. 发明授权

US5229606A Jumping probe microscope 失效
公开(公告)号：US5229606A
公开(公告)日：1993-07-20
申请号：US361545
申请日：1989-06-05
申请人： Virgil B. Elings , John A. Gurley
发明人： Virgil B. Elings , John A. Gurley
IPC分类号： G01Q10/00 , G01Q20/02 , G01Q20/04 , G01Q60/10 , G01Q60/24 , G01Q60/34
CPC分类号： G01Q20/02 , B82Y35/00 , G01Q20/04 , G01Q60/34 , Y10S977/851
摘要： A microscope of the scanning probe variety. This device circumvents one of the serious problems of prior art scanning probe microscopes, i.e. that the probe is always near or on the surface of the object being scanned, creating the danger of damaging the probe on the surface especially on large scans or at high scan speeds. The microscope of this invention jumps the probe over the surface, causing the probe to be near or on the surface during only a very limited portion of the scan and therefore able to scan quickly over rough surfaces without undue damage to the probe or surface. Both scanning tunneling microscopes and atomic force microscopes employing the invention are disclosed. The scanning tunneling microscope is shown with both digital and analog control of the movement of the probe.

46. 发明授权

US4889988A Feedback control for scanning tunnel microscopes 失效
标题翻译：扫描隧道显微镜的反馈控制
公开(公告)号：US4889988A
公开(公告)日：1989-12-26
申请号：US215729
申请日：1988-07-06
申请人： Virgil B. Elings , John A. Gurley
发明人： Virgil B. Elings , John A. Gurley
IPC分类号： H01J37/28 , G01N37/00 , G01Q10/06 , G01Q20/00 , G01Q20/02 , G01Q20/04 , G01Q30/06 , G01Q60/10 , G05D3/00 , G05D3/12
CPC分类号： G01Q10/065 , B82Y35/00 , G01Q30/06 , Y10S977/851
摘要： A feedback control system for enhancing the feedback loop characteristics of a vertical axis control in a scanning tunneling microscope or the like, including a tip member for positioning relative to a surface for measuring the topography of the surface. A horizontal control coupled to the tip for providing a plurality of adjacent horizontal scans across the surface. A vertical control coupled to the tip for providing a vertical control of the tip during the plurality of adjacent horizontal scans. A local error signal produced in accordance with the vertical position of the tip relative to the surface in real time during the plurality of adjacent horizontal scans. A storage member responsive to the local error signal for storing the local error signal for producing a delayed error signal representing the vertical position of the tip relative to the surface at an earlier time, and a vertical tip control signal coupled to the vertical control and formed by combining the local error signal and the delayed error signal for enhancing the control of the vertical position of the tip.
摘要翻译：一种用于增强扫描隧道显微镜等中的垂直轴控制的反馈环路特性的反馈控制系统，包括用于相对于用于测量表面的形貌的表面定位的尖端构件。耦合到尖端的水平控制，用于跨越表面提供多个相邻的水平扫描。耦合到尖端的垂直控制，用于在多个相邻水平扫描期间提供尖端的垂直控制。在多个相邻水平扫描期间实时地根据尖端相对于表面的垂直位置产生的局部误差信号。响应于本地误差信号的存储构件，用于存储局部误差信号，用于产生表示尖端相对于表面在较早时间的垂直位置的延迟误差信号，以及耦合到垂直控制并形成的垂直尖端控制信号通过组合局部误差信号和延迟误差信号来增强对尖端的垂直位置的控制。

47. 发明授权

US08209766B2 Scanning probe microscope capable of measuring samples having overhang structure 有权
标题翻译：扫描探针显微镜能够测量具有突出结构的样品
公开(公告)号：US08209766B2
公开(公告)日：2012-06-26
申请号：US12705301
申请日：2010-02-12
申请人： Sang-il Park , Sang Han Chung , Byoung-Woon Ahn
发明人： Sang-il Park , Sang Han Chung , Byoung-Woon Ahn
IPC分类号： G01N13/16 , H01J37/20
CPC分类号： G01Q10/04 , Y10S977/851 , Y10S977/872
摘要： A scanning probe microscope tilts the scanning direction of a z-scanner by a precise amount and with high repeatability using a movable assembly that rotates the scanning direction of the z-scanner with respect to the sample plane. The movable assembly is moved along a curved guide by a rack-and-pinion drive system and has grooves that engage with corresponding ceramic balls formed on a stationary frame to precisely position the movable assembly at predefined locations along the curved guide. The grooves are urged against the ceramic balls via a spring force and, prior to movement of the movable assembly, a pneumatic force is applied to overcome the spring force and disengage the grooves from the ceramic balls.
摘要翻译：扫描探针显微镜使用使z扫描仪的扫描方向相对于样品平面旋转的可移动组件，将Z扫描仪的扫描方向倾斜精确量并具有高重复性。可移动组件通过齿条 - 小齿轮驱动系统沿着弯曲的引导件移动，并且具有与形成在固定框架上的相应陶瓷球接合的凹槽，以将移动组件精确地定位在沿着弯曲引导件的预定位置处。凹槽通过弹簧力推靠在陶瓷球上，并且在可移动组件移动之前，施加气动力以克服弹簧力并使凹槽与陶瓷球脱离。

48. 发明申请

US20120147722A1 Nanometer Scale Instrument for Biochemically, Chemically, or Catalytically Interacting with a Sample Material 审中-公开
标题翻译：用于与样品材料进行生物化学，化学或催化相互作用的纳米级仪器
公开(公告)号：US20120147722A1
公开(公告)日：2012-06-14
申请号：US13269481
申请日：2011-10-07
申请人： Victor B. Kley
发明人： Victor B. Kley
IPC分类号： G11B11/08 , G01N33/48 , G11B7/085
CPC分类号： G03F1/84 , G01B7/31 , G01Q80/00 , G03F7/70375 , G03F7/70483 , G11B5/232 , G11B5/3116 , G11B9/06 , G11B9/08 , G11B9/14 , G11B9/1409 , G11B9/1418 , G11B9/1427 , G11B9/1436 , G11B9/1445 , G11B9/1454 , G11B9/149 , G11B11/007 , G11B11/05 , G11B11/12 , G11B11/16 , G11B2005/0002 , G11B2005/0021 , H02N1/006 , Y10S977/851 , Y10S977/86 , Y10S977/875 , Y10S977/877
摘要： A data storage system that includes a positioning system for positioning the write/read mechanism and the storage medium of the data storage device with respect to each other in first and second predefined directions. In several embodiments, the read/write mechanism is used to mechanically write data to and electrically read data from the storage medium. In still another embodiment, the read/write mechanism is used to optically write data to and electrically read data from the storage medium. In yet another embodiment, the read/write mechanism is acoustically aided in electrically writing data to and reading data from the storage medium.
摘要翻译：一种数据存储系统，包括用于在第一和第二预定方向上相对于彼此定位数据存储装置的写/读机制和存储介质的定位系统。在几个实施例中，读/写机制用于机械地写入数据并从存储介质电读取数据。在另一个实施例中，读/写机构用于光学写入数据并从存储介质电读取数据。在另一个实施例中，读/写机构被声学辅助以将数据电气地写入和从存储介质读取数据。

49. 发明授权

US07862858B2 Scanning probe-based lithography method 有权
标题翻译：扫描探针型光刻法
公开(公告)号：US07862858B2
公开(公告)日：2011-01-04
申请号：US12336904
申请日：2008-12-17
申请人： Michel Despont , Urs T. Duerig , Jane E. Frommer , Bernd W. Gotsmann , James L. Hedrick , Craig Jon Hawker , Robert D. Miller
发明人： Michel Despont , Urs T. Duerig , Jane E. Frommer , Bernd W. Gotsmann , James L. Hedrick , Craig Jon Hawker , Robert D. Miller
IPC分类号： B05D3/06
CPC分类号： G03F7/0002 , G01Q80/00 , Y10S977/849 , Y10S977/85 , Y10S977/851 , Y10S977/855 , Y10S977/857
摘要： A resist medium in which features are lithographically produced by scanning a surface of the medium with an AFM probe positioned in contact therewith. The resist medium comprises a substrate; and a polymer resist layer within which features are produced by mechanical action of the probe. The polymer contains thermally reversible crosslinkages. Also disclosed are methods that generally includes scanning a surface of the polymer resist layer with an AFM probe positioned in contact with the resist layer, wherein heating the probe and a squashing-type mechanical action of the probe produces features in the layer by thermally reversing the crosslinkages.
摘要翻译：抗蚀剂介质，其特征是通过用与其接触的AFM探针扫描介质的表面来光刻制造。抗蚀剂介质包括基底; 以及聚合物抗蚀剂层，其中通过探针的机械作用产生特征。聚合物含有热可逆交联。还公开了通常包括用定位成与抗蚀剂层接触的AFM探针扫描聚合物抗蚀剂层的表面的方法，其中加热探针和探针的挤压型机械作用通过热反转来产生该层中的特征交联。

50. 发明授权

US07644447B2 Scanning probe microscope capable of measuring samples having overhang structure 有权
标题翻译：扫描探针显微镜能够测量具有突出结构的样品
公开(公告)号：US07644447B2
公开(公告)日：2010-01-05
申请号：US11601144
申请日：2006-11-17
申请人： Sang-il Park , Yong-Seok Kim , Jitae Kim , Sang Han Chung , Hyun-Seung Shin , Jung-Rok Lee , Euichul Hwang
发明人： Sang-il Park , Yong-Seok Kim , Jitae Kim , Sang Han Chung , Hyun-Seung Shin , Jung-Rok Lee , Euichul Hwang
IPC分类号： G01N23/00
CPC分类号： G01Q10/04 , Y10S977/85 , Y10S977/851 , Y10S977/872 , Y10S977/873 , Y10S977/874
摘要： Provided is a scanning probe microscope capable of precisely analyzing characteristics of samples having an overhang surface structure. The scanning probe microscope comprises a first probe, a first scanner changing a position of the first probe along a straight line, and a second scanner changing a position of a sample in a plane, wherein the straight line in which the position of the first probe is changed by using the first scanner is non-perpendicular to the plane in which the position of the sample is changed by using the second scanner.
摘要翻译：提供了能够精确地分析具有突出表面结构的样品的特性的扫描探针显微镜。扫描探针显微镜包括第一探针，沿着直线改变第一探针的位置的第一扫描器和改变样品在平面中的位置的第二扫描仪，其中，第一探针的位置的直线通过使用第二扫描器使用第一扫描器与垂直于样品位置改变的平面非垂直地改变。

你已经成功收藏专利！

检索式保存成功!

IPRDB

热门服务

关于我们

友情链接

联系方式