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41. 发明申请

US20020167986A1 Gas discharge ultraviolet laser with enclosed beam path with added oxidizer 有权
标题翻译：气体放电紫外线激光器带有附加氧化剂的封闭光路
公开(公告)号：US20020167986A1
公开(公告)日：2002-11-14
申请号：US10141201
申请日：2002-05-07
发明人： Xiaojiang Pan , Holger K. Glatzel , John T. Melchoir , Raymond Cybulski
IPC分类号： H01S003/22 , H01S003/223
CPC分类号： G03F7/70025 , G03F7/70575 , G03F7/70933 , H01S3/0057 , H01S3/02 , H01S3/036 , H01S3/038 , H01S3/0385 , H01S3/0401 , H01S3/041 , H01S3/08009 , H01S3/08036 , H01S3/097 , H01S3/0971 , H01S3/0975 , H01S3/1024 , H01S3/104 , H01S3/105 , H01S3/1055 , H01S3/1305 , H01S3/134 , H01S3/139 , H01S3/22 , H01S3/2207 , H01S3/223 , H01S3/225 , H01S3/2251 , H01S3/2256 , H01S3/2258
摘要： The present invention provides a gas discharge ultraviolet laser capable of producing a high quality pulsed ultraviolet laser beam at pulse rates greater than 2000 Hz at pulse energies at 5 mJ or greater and having an enclosed beam path at least a portion of which comprises an oxidation agent. In a preferred embodiment a portion of the beam path comprises a sealed chamber containing a gas comprising a small concentration of oxygen. In one preferred embodiment the sealed chamber is an etalon chamber and the contained gas is nitrogen with an oxygen concentration of between 1.6 and 2.4 percent. In another preferred embodiments a small concentration of oxygen is added to the purge gas of a special purge compartment containing optical components exposed to high intensity output laser beam.
摘要翻译：本发明提供一种气体放电紫外线激光器，其能够以5mJ以上的脉冲能量产生高于2000Hz的脉冲率的高质量脉冲紫外激光束，并且具有封闭的光束路径，其至少一部分包含氧化剂。在优选实施例中，光束路径的一部分包括含有包含少量氧气的气体的密封室。在一个优选实施例中，密封室是标准室，并且所含有的气体是氧浓度在1.6和2.4％之间的氮气。在另一个优选的实施方案中，将小浓度的氧气加入到包含暴露于高强度输出激光束的光学部件的特殊净化室的净化气体中。

42. 发明授权

US5265114C1 System and method for selectively laser processing a target structure of one or more materials of a multimaterial multilayer device 失效
标题翻译：用于选择性地激光处理多材料多层器件的一种或多种材料的目标结构的系统和方法
公开(公告)号：US5265114C1
公开(公告)日：2001-08-21
申请号：US94387592
申请日：1992-09-10
申请人： ELECTRO SCIENT IND INC
发明人： SUN YUNLONG , HUTCHENS CRAIG D
IPC分类号： H01L27/04 , B23K26/00 , B23K26/06 , B23K26/36 , H01L21/768 , H01L21/82 , H01L21/822 , H01S3/0915 , H01S3/13 , H01S3/16 , H01S3/09 , B23K26/12
CPC分类号： B23K26/06 , B23K26/0643 , B23K26/351 , B23K26/361 , B23K26/40 , B23K2201/34 , B23K2203/08 , B23K2203/10 , B23K2203/12 , B23K2203/14 , B23K2203/172 , B23K2203/26 , B23K2203/50 , H01L21/76894 , H01S3/025 , H01S3/0401 , H01S3/09415 , H01S3/11 , H01S3/1611 , H01S3/1653 , Y10S438/94
摘要： A laser system and processing method exploits the absorption contrast between the materials from which a link (12) and an underlying substrate (22) are made to effectively remove the link from the substrate. Laser output in a wavelength range of 1.2 to 3 mu m (30) optimizes the absorption contrast between many materials (e.g., metals, polysilicon, polycides, or disilicides) and integrated circuit substrates (e.g., silicon, gallium arsenide, or other semiconductors) and permits the use of laser output in a wider range of energy or power levels, pulse widths, and spot sizes without risking damage to the substrates or adjacent circuit structures. Existing link processing laser systems can be readily modified to operate in the 1.2 to 3 mu m range.

43. 发明申请

US20010004368A1 Laser oscillating apparatus 审中-公开
标题翻译：激光振荡装置
公开(公告)号：US20010004368A1
公开(公告)日：2001-06-21
申请号：US09739383
申请日：2000-12-19
发明人： Masayuki Akagi
IPC分类号： H01S003/04
CPC分类号： H01S3/025 , H01S3/0401 , H01S3/0407 , H01S3/042 , H01S3/061 , H01S3/0941
摘要： A retaining unit of a laser oscillator retains, in an integratedly coupled fashion, a chamber for accommodating and retaining a cylindrical YAG rod and excitation light supply units (excitation laser units), a mirror retainer for embracing and retaining a total reflection mirror, and a coupling unit interposed between the chamber and the mirror retainer in an intimately contacted fashion. Cooling water CW introduced from a cooling water inlet port (IN) of the coupling unit into the interior of the retaining unit flows through connection passages within the coupling unit, connection passages within the chamber, internal flow paths of the excitation laser units, connection passages at outside end of the chamber, a flow path within a tube, connection passages within the chamber, and connection passages within the coupling unit, into a cooling water outlet port (OUT) for discharge therefrom.
摘要翻译：激光振荡器的保持单元以整体耦合的方式保持用于容纳和保持圆柱形YAG棒和激发光供应单元（激发激光单元）的腔室，用于包围和保持全反射镜的镜保持器，以及联接单元以紧密接触的方式插入在腔室和镜子保持器之间。从连接单元的冷却水入口（IN）引入到保持单元内部的冷却水CW通过联接单元内的连接通道，腔室内的连接通道，激发激光单元的内部流路，连接通道在腔室的外端，管内的流路，腔室内的连接通道和联接单元内的连接通道，进入冷却水出口（OUT）以从中排出。

44. 发明授权

US06240113B1 Microlaser-based electro-optic system and associated fabrication method 失效
标题翻译：基于微激光器的电光系统及相关制造方法
公开(公告)号：US06240113B1
公开(公告)日：2001-05-29
申请号：US09365316
申请日：1999-07-30
申请人： Brian Lee Peterson
发明人： Brian Lee Peterson
IPC分类号： H01S304
CPC分类号： H01S3/025 , H01L2924/15312 , H01S3/005 , H01S3/0071 , H01S3/0401 , H01S3/0405 , H01S3/042 , H01S3/0604 , H01S3/0627 , H01S3/09415 , H01S3/1118 , H01S3/113 , H01S5/02212 , H01S5/024 , H01S5/02415 , H01S5/02438
摘要： The electro-optic apparatus includes a primary heat sink and at least one submount mounted to the heat sink. The electro-optic apparatus also includes a pump source, such as a laser diode, mounted to a sidewall of the at least one submount. A secondary heat sink is also mounted to the at least one submount with an active gain medium mounted, in turn, to the secondary heat sink. Typically, the active gain medium is part of a microlaser that also includes a passive Q-switch. The active gain medium is mounted to the secondary heat sink such that the active gain medium extends in a cantilevered fashion from the secondary heat so as to overlie the pump source such that the output of the pump source pumps the active gain medium. By adjusting the position of the secondary heat sink to the at least one submount, the spacing between the pump source and the active gain medium can be precisely controlled, thereby also controlling the characteristics, such as the frequency, of the output signals emitted by the electro-optic apparatus. Advantageously, the at least one submount includes first and second submounts, both of which are mounted to the primary heat sink in a spaced apart relationship. By mounting the pump source and the active gain medium to different submounts, the electro-optic apparatus can more efficiently dissipate the heat generated during operation since separate thermal paths are established for the heat generated by the pump source and the active gain medium.
摘要翻译：电光设备包括主散热器和安装到散热器的至少一个基座。电光设备还包括安装在至少一个子安装座的侧壁上的泵浦源，例如激光二极管。次级散热器也安装到至少一个基座，其中主动增益介质依次安装到二次散热器。通常，有源增益介质是还包括无源Q开关的微激光器的一部分。主动增益介质被安装到二次散热器，使得主动增益介质以二次热的方式从悬臂延伸，以便覆盖泵浦源，使得泵浦泵的输出泵送主动增益介质。通过将二次散热器的位置调整到至少一个基座，可以精确地控制泵浦源和有源增益介质之间的间隔，从而也可以控制由第二散热器发射的输出信号的特性，例如频率电光设备。有利地，所述至少一个基座包括第一和第二基座，它们都以间隔开的关系安装到主散热器。通过将泵浦源和有源增益介质安装到不同的底座上，电光装置可以更有效地消散在操作期间产生的热量，因为针对由泵浦源和主动增益介质产生的热量建立了单独的热路径。

45. 发明授权

US6125129A Frequency-doubled diode-pumped solid-state laser 失效
标题翻译：倍频二极管泵浦固态激光器
公开(公告)号：US6125129A
公开(公告)日：2000-09-26
申请号：US66407
申请日：1998-04-29
申请人： Martin Naegele , Egon Pfeifer , Krassimir Stankov
发明人： Martin Naegele , Egon Pfeifer , Krassimir Stankov
IPC分类号： G02F1/37 , H01S3/02 , H01S3/042 , H01S3/06 , H01S3/08 , H01S3/094 , H01S3/0941 , H01S3/098 , H01S3/109 , H01S3/10
CPC分类号： H01S3/109 , H01S3/025 , H01S3/0401 , H01S3/0405 , H01S3/042 , H01S3/0604 , H01S3/08045 , H01S3/0805 , H01S3/09415 , H01S3/1028
摘要： A frequency-doubled diode pumped solid state laser with intracavity frequency doubling comprises a lasing solid state medium with suitable reflecting coats which makes up a component part of a resonator cavity. The solid state laser further comprises at least one pumped light source constructed as a laser diode and a frequency doubling nonlinear optical element in the form of a nonlinear crystal with suitable reflective coatings which forms a further component part of the resonator cavity. This resonator cavity is formed between reflective coatings of the solid state medium and of the element. The pumped radiation is transmitted to the lasing solid state medium through optical means. At least one aperture of a material with good thermal conductivity is provided at the element and/or at the lasing solid state medium. The frequency doubling optical element is designed for phase matching at a higher temperature than the surrounding temperature.
摘要翻译： PCT No.PCT / EP97 / 05241 Sec。 371日期：1998年4月29日 102（e）日期1998年4月29日PCT 1997年10月29日PCT公布。第WO98 / 13911号公报日期1998年4月2日具有腔内倍频的倍频二极管泵浦固体激光器包括具有合适的反射涂层的激光固态介质，其构成谐振腔的组成部分。固体激光器还包括构造为激光二极管的至少一个泵浦光源和具有合适的反射涂层的非线性晶体形式的倍频非线性光学元件，该反射涂层形成谐振腔的另一部分。该谐振腔形成在固态介质和元件的反射涂层之间。泵浦的辐射通过光学装置传输到激光固态介质。在元件和/或激光固态介质处提供具有良好导热性的材料的至少一个孔。倍频光学元件设计用于在比周围温度更高的温度下进行相位匹配。

46. 发明授权

US5712723A Second harmonic generator 失效
标题翻译：二次谐波发生器
公开(公告)号：US5712723A
公开(公告)日：1998-01-27
申请号：US592450
申请日：1996-01-26
申请人： Jin-ho Lee
发明人： Jin-ho Lee
IPC分类号： G02F1/37 , H01S3/00 , H01S3/02 , H01S3/041 , H01S3/0941 , H01S3/109
CPC分类号： H01S3/109 , H01S3/0014 , H01S3/025 , H01S3/0401 , H01S3/0405 , H01S3/042 , H01S3/09415 , H01S5/02469
摘要： A second harmonic generator includes a laser diode mount, a laser diode on the mount for producing pumping light, a resonator for generating second harmonic light from the pumping light output from the laser diode, a lock connecting the resonator and the laser diode mount, a thermal controller including a thermoelectric cooling device for controlling the temperature of the resonator, a housing housing the resonator and coupled to the laser diode mount, a beam splitter for reflecting part of the second harmonic light emitted from the resonator, and a photodetector for detecting light reflected from the beam splitter. The thermoelectric cooling device is interposed between the housing and resonator so that the resonator and the housing are thermally connected. The second harmonic generator separates a thermally unrelated element from a thermal control path to reduce the heat control burden. Since the path of heat flow is only from the resonator to the housing, temperature control of the resonator is accomplished rapidly and precisely.
摘要翻译：二次谐波发生器包括激光二极管安装件，用于产生泵浦光的安装座上的激光二极管，用于从激光二极管输出的泵浦光产生二次谐波的谐振器，连接谐振器和激光二极管安装座的锁，热控制器，包括用于控制谐振器的温度的热电冷却装置，容纳谐振器并耦合到激光二极管安装座的壳体，用于反射从谐振器发射的二次谐波光的一部分的分束器和用于检测光的光电检测器从分束器反射。热电冷却装置插入在壳体和谐振器之间，使得谐振器和壳体被热连接。二次谐波发生器将热不相关元件与热控制路径分离，以减少热控负担。由于热流的路径仅从谐振器到壳体，所以谐振器的温度控制被快速且精确地实现。

47. 发明授权

US5703900A Laser-diode-pumped solid state laser and method of manufacturing the same 失效
标题翻译：激光二极管泵浦固体激光器及其制造方法
公开(公告)号：US5703900A
公开(公告)日：1997-12-30
申请号：US580183
申请日：1995-12-28
申请人： Nobuharu Nozaki , Shinji Mitsumoto , Kazumi Kubo , Fumio Kobayashi
发明人： Nobuharu Nozaki , Shinji Mitsumoto , Kazumi Kubo , Fumio Kobayashi
IPC分类号： H01S3/094 , H01S3/02 , H01S3/0941 , H01S3/109 , H01S3/16 , H01S3/08
CPC分类号： H01S3/025 , H01S3/0401 , H01S3/0405 , H01S3/042 , H01S3/09415
摘要： A laser-diode-pumped solid state laser includes a Fabry-Perot resonator having a pair of resonator mirrors. A holder provided with a pair of mirror mounting faces spaced from each other in the direction of the optical axis of the resonator is prepared and the resonator mirrors are mounted by bonding the end face thereof, which intersects the optical axis of the resonator, to the mirror mounting faces of the holder by an adhesive layer. The thickness of the adhesive layer is not larger than 5.mu..
摘要翻译：激光二极管泵浦固态激光器包括具有一对谐振镜的法布里 - 珀罗谐振器。准备了在谐振器的光轴方向上彼此间隔开的一对反射镜安装面的保持器，并且通过将与谐振器的光轴相交的端面与其结合而安装谐振镜，通过粘合剂层对支架的镜面安装面。粘合剂层的厚度不大于5微米。

48. 发明授权

US5651023A Monolithic laser 失效
标题翻译：单片激光
公开(公告)号：US5651023A
公开(公告)日：1997-07-22
申请号：US517330
申请日：1995-08-21
申请人： Neil MacKinnon
发明人： Neil MacKinnon
IPC分类号： H01S3/02 , H01S3/04 , H01S3/042 , H01S3/06 , H01S3/098 , H01S3/106 , H01S3/109 , H01S3/08
CPC分类号： H01S3/0627 , H01S3/109 , H01S3/0401 , H01S3/0405 , H01S3/042 , H01S3/0604 , H01S3/106
摘要： A laser comprising a laser cavity (13) having reflectors at each end of an optical path, a first layer of gain material (15) and a second layer of a second material (14, 16) disposed along the optical path, wherein the first and second layer are directly optically contacted to one another at associated faces. Also, a laser comprising a laser cavity having a layer of gain material (15), and second and third crystals (14,16) having anisotropic refractive indices disposed along an optical path, the laser being oscillatory in a preferred mode having a particular orientation of polarization, the second crystal (16) being oriented with respect to the path to cause no appreciable net depolarisation of the preferred mode, and the third crystal (14) being arranged such that the preferred mode is transmittable therethrough with minimal refraction.
摘要翻译：一种激光器，包括在光路的每一端具有反射器的激光腔（13），沿光路设置的第一增益材料层（15）和第二材料层（14,16）的第二层，其中第一并且第二层在相关联的面处彼此直接光学接触。此外，激光器包括具有增益材料层（15）的激光腔和具有沿着光路设置的各向异性折射率的第二和第三晶体（14,16），所述激光器以具有特定取向的优选模式振荡第二晶体（16）相对于路径取向，不会引起优选模式的明显的去极化，并且第三晶体（14）被布置成使得优选的模式以最小的折射透射通过。

49. 发明授权

US5583882A Laser apparatus and apparatus employing laser 失效
标题翻译：使用激光的激光设备和设备
公开(公告)号：US5583882A
公开(公告)日：1996-12-10
申请号：US395567
申请日：1995-03-01
申请人： Tsuyoshi Miyai , Satoshi Makio , Yasunori Furukawa , Masayoshi Sato
发明人： Tsuyoshi Miyai , Satoshi Makio , Yasunori Furukawa , Masayoshi Sato
IPC分类号： G11B7/125 , H01S3/04 , H01S3/042 , H01S3/0941 , H01S3/109 , H01S3/16 , H01S3/08
CPC分类号： G11B7/127 , H01S3/09415 , H01S3/109 , H01S3/025 , H01S3/0401 , H01S3/0405 , H01S3/042 , H01S3/1623 , H01S3/1648
摘要： A laser apparatus including a laser crystal composed of a fluoride which contains chromium (Cr), a resonator which includes the laser crystal, a means for exciting the laser crystal, a first laser beam produced from light which is emitted from the laser crystal and oscillated in the laser resonator, and at least one optical component which is inserted in said resonator; wherein an aperture in the resonator is substantially five or more times the diameter of the first laser beam. A small, low-power SHG laser light source is achieved.
摘要翻译：一种激光装置，包括由含有铬（Cr）的氟化物，包含激光晶体的谐振器，激光晶体激发装置，由从激光晶体发出的光产生的第一激光束振荡的激光晶体在激光谐振器中，以及至少一个插入所述谐振器中的光学部件; 其中所述谐振器中的孔基本上是所述第一激光束的直径的五倍或更多倍。实现了小型，低功率的SHG激光光源。

50. 发明授权

US5357539A Laser oscillating apparatus with mirror angle adjustment 失效
标题翻译：具有镜面角度调节的激光振荡装置
公开(公告)号：US5357539A
公开(公告)日：1994-10-18
申请号：US955060
申请日：1992-10-01
申请人： Akihiro Otani , Satoshi Nishida , Masaki Kuzumoto , Tetuya Endo
发明人： Akihiro Otani , Satoshi Nishida , Masaki Kuzumoto , Tetuya Endo
IPC分类号： H01S3/04 , H01S3/08 , H01S3/081 , H01S3/086 , G02B5/10
CPC分类号： H01S3/081 , H01S3/0401 , H01S3/086 , H01S3/025
摘要： A laser oscillator comprising a laser resonator having a plurality of mirrors for directing the laser energy from source to exit apertures, the mirrors being constructed and mounted adjustably for reducing parasitic oscillations. The mirrors are mounted in adjusting members that have channels therein for coolant and are provided with heat insulating members that minimize heat gradients and unwanted heat transfers that may result in the distortion of the reflecting surfaces. In addition, the mirrors are angled so that light paths are defined that present a Z-shaped turning pattern. Apertures proximate to the mirrors through which the light beams are directed are offset from a common plane so that a reflective surface is not within the aperture of the opposing reflective surface. One or more of the apertures can be so offset to reduce the possibility of parasitic oscillations. Further, the reflectors can be angled and the apertures sized so as to eliminate parasitic oscillations.
摘要翻译：一种激光振荡器，包括具有多个反射镜的激光谐振器，所述反射镜用于将激光能量从源极引导到出射孔，所述反射镜被可调节地构造和安装，以减少寄生振荡。反射镜安装在其中具有用于冷却剂的通道的调节构件中并且设置有绝热构件，其使热梯度和不期望的热传递最小化，这可能导致反射表面的变形。此外，镜子是成角度的，使得定义呈现Z形转动图案的光路。靠近光束的反射镜的孔径与公共平面偏移，使得反射表面不在相对的反射表面的孔内。一个或多个孔径可以如此抵消以减少寄生振荡的可能性。此外，反射器可以是成角度的，并且孔的尺寸被设计成消除寄生振荡。

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