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41. 发明授权

US09881824B2 Transfer apparatus and control method thereof 有权
公开(公告)号：US09881824B2
公开(公告)日：2018-01-30
申请号：US15109785
申请日：2014-10-29
申请人： Murata Machinery, Ltd.
发明人： Junichi Ito
IPC分类号： H01L21/677 , H01L21/687 , B66C13/18
CPC分类号： H01L21/67733 , B66C13/18 , H01L21/6773 , H01L21/68707
摘要： A transfer apparatus that includes a moving unit capable of moving with respect to a base and transferring an article with the moving unit protruding from the base. The transfer apparatus includes a movement regulation unit capable of switching between a first state in which the moving unit is restricted in a reference position and a second state in which the moving unit is allowed to move from the reference position to one of a first direction and a second direction opposite to the first direction and in which movement of the moving unit in the other direction is restricted.

42. 发明授权

US09815624B2 Inter-floor transport facility 有权
公开(公告)号：US09815624B2
公开(公告)日：2017-11-14
申请号：US14797433
申请日：2015-07-13
申请人： Daifuku Co., Ltd.
发明人： Hideo Yoshioka
IPC分类号： B65G1/06 , H01L21/677 , B66B9/00
CPC分类号： B65G1/06 , B66B9/003 , H01L21/67727 , H01L21/6773 , H01L21/67733 , H01L21/67736 , H01L21/67769
摘要： An inter-floor transport facility in which a raising and lowering transport device is provided for each of the raising and lowering paths that are adjacent to each other. Receiving platforms include a carry in article receiving platform for supporting an article that is being carried in to the floor, a carry out article receiving platform for supporting an article that is being carried out from the floor, and a storage-purpose receiving platform for storing a transported article. On each floor, the carry in article receiving platform and the carry out article receiving platform are so located that the article can be transferred between one transfer device and both of the carry in article receiving platform and the carry out article receiving platform, and the storage-purpose receiving platform is so located that all of the transfer devices can transfer the article to or from the storage-purpose receiving platform.

43. 发明申请

US20170285484A1 MASK PROTECTION DEVICE, EXPOSURE APPARATUS, AND METHOD FOR MANUFACTURING DEVICE 审中-公开
公开(公告)号：US20170285484A1
公开(公告)日：2017-10-05
申请号：US15626475
申请日：2017-06-19
申请人： NIKON CORPORATION
发明人： Kazuya OTA
IPC分类号： G02B27/00 , G03F1/66 , G03F7/20
CPC分类号： G03F7/70058 , G02B27/0006 , G03F1/66 , G03F7/70741 , G03F7/7075 , G03F7/70916 , H01L21/6773
摘要： A reticle protection device capable of keeping a reticle therein is provided with an inner pod capable of keeping the reticle therein; an outer pod capable of keeping the inner pod therein; an electroconductive movable contact portion provided on at least one of the inner pod and the outer pod and being capable of coining into contact with an electroconductive film of the reticle; and a leaf spring for achieving electric conduction of the contact portion to at least one of the inner pod and the outer pod. The reticle is kept in the inner pod and the inner pod is kept in the outer pod, thereby enabling stable grounding of the reticle.

44. 发明授权

US09698036B2 Stacked wafer cassette loading system 有权
公开(公告)号：US09698036B2
公开(公告)日：2017-07-04
申请号：US14933987
申请日：2015-11-05
申请人： Lam Research Corporation
发明人： Silvia R. Aguilar , Scott Wong , Derek J. Witkowicki , Richard H. Gould , Candi Kristoffersen , Brandon Senn
IPC分类号： H01L21/677
CPC分类号： H01L21/67769 , H01L21/6773 , H01L21/67733 , H01L21/67736 , H01L21/67775
摘要： A substrate cassette loading system for docking substrate cassettes to a substrate processing system is provided. A plurality of ports passes substrates into the substrate processing system, wherein a first port of the plurality of ports is vertically above a second port of the plurality of ports. A plurality of cassette loaders provides substrate cassettes to the plurality of ports.

45. 发明申请

US20170170037A1 AMBIDEXTROUS CASSETTE AND METHODS OF USING SAME 审中-公开
公开(公告)号：US20170170037A1
公开(公告)日：2017-06-15
申请号：US14985260
申请日：2015-12-30
申请人： SolarCity Corporation
发明人： Pablo Gonzalez
IPC分类号： H01L21/677 , H01L21/673
CPC分类号： H01L21/6773 , H01L21/67201 , H01L21/67303 , H01L21/67309 , H01L21/67313 , H01L21/67373 , H01L21/67379 , H01L21/67386 , H01L21/67393 , H01L21/67757 , H01L21/67766 , H01L21/67772 , H01L21/67778 , H01L21/68707
摘要： Devices and methods for transferring solar cells while maintaining a controlled environment are provided. Such devices include a solar cell carrying cassette adapted to support a stack of solar cells within a solar cell carrying pod that maintains a sealed micro-environment of inert gas and allows for automated transfer of solar cells between the pod and a fabrication line. The solar cell carrying cassette includes a pair of end plates and a plurality of rods extending therebetween that are configured to support a stack of solar cells. An identifier, such as an RFID chip, is included in each of the pair of end plates so as to allow for ready identification of the cassette from a single location relative the pod, while the cassette is coupled within the pod, regardless of the orientation of the cassette within the pod.

46. 发明申请

US20170140966A1 HIGH CAPACITY OVERHEAD TRANSPORT (OHT) RAIL SYSTEM WITH MULTIPLE LEVELS 审中-公开
公开(公告)号：US20170140966A1
公开(公告)日：2017-05-18
申请号：US14940467
申请日：2015-11-13
申请人： Taiwan Semiconductor Manufacturing Co., Ltd.
发明人： Fu-Hsien Li , Chi-Feng Tung , Hsiang Yin Shen
IPC分类号： H01L21/677 , B25J11/00 , B65G1/04 , B61B13/04
CPC分类号： H01L21/67766 , B25J11/0095 , B61B13/04 , B65G1/0464 , B65G2201/0297 , H01L21/6773 , H01L21/67733
摘要： An overhead transport (OHT) system with multiple levels of rails for the transport of semiconductor workpieces is provided. A first vehicle is configured to travel on, and move a semiconductor workpiece along, a first rail. A second vehicle is configured to travel on, and move the semiconductor workpiece along, a second rail overlying the first rail. A controller is configured to control the first and second vehicles to transfer the semiconductor workpiece along the first and second rails, between process or inspection tools. A method for transferring semiconductor workpieces across multiple levels of rails is also provided.

47. 发明授权

US09558978B2 Material handling with dedicated automated material handling system 有权
标题翻译：采用专用自动化材料处理系统进行材料处理
公开(公告)号：US09558978B2
公开(公告)日：2017-01-31
申请号：US13874764
申请日：2013-05-01
申请人： Amir Widmann , Michael Adel , Pati Sekula
发明人： Amir Widmann , Michael Adel , Pati Sekula
IPC分类号： H01L21/677
CPC分类号： H01L21/67733 , H01L21/67727 , H01L21/6773 , Y10T29/49826
摘要： An apparatus includes a dedicated material handling module having a dedicated automated material handling system (AMHS) defines a transport route between a first tool and a second tool selected from a plurality of tools in a fabrication facility. The dedicated AMHS is configured to transport wafer carriers between the first tool and the second tool or vice versa independent of a fabrication facility AMHS that is configured to transport wafer carriers among the plurality of tools.
摘要翻译：一种设备包括专用材料处理模块，其具有专用的自动材料处理系统（AMHS），其定义了在制造设备中从多个工具中选择的第一工具和第二工具之间的输送路径。专用AMHS被配置为在第一工具和第二工具之间运输晶片载体，或者反之亦然，而不管制造设备AMHS被配置为在多个工具之间传输晶片载体。

48. 发明授权

US09548230B2 Temporary storage device, transport system, and temporary storage method 有权
标题翻译：临时存储设备，运输系统和临时存储方式
公开(公告)号：US09548230B2
公开(公告)日：2017-01-17
申请号：US14859488
申请日：2015-09-21
申请人： MURATA MACHINERY, LTD.
发明人： Junji Iwasaki
IPC分类号： B65G1/00 , H01L21/677
CPC分类号： H01L21/6773 , H01L21/67727 , H01L21/67733 , H01L21/67736
摘要： A temporary storage device transfers an article in different positions to and from an overhead travelling vehicle system and a second transport system, and transfers an article to and from an article transfer position outside the temporary storage device. The temporary storage device includes a local carrier including a hoist, travel rails of the local carrier below a travel rail of the overhead travelling vehicle system, passing directly above an article transfer position, and a slide rack below the travel rails of the local carrier, slidable between a portion directly above the transfer position and a second position in which an article can be transferred to and from the second transport system, the second position being different from the portion directly above the transfer position in a direction perpendicular or substantially perpendicular to the travel rails of the local carrier in a horizontal plane.
摘要翻译：临时存储装置将物品从不同位置传送到桥式起重车辆系统和第二运输系统，并将物品从临时存储装置外部的物品转移位置传送到物品转移位置。临时存储装置包括本地承载件，包括提升机，本地承载件的行进轨道，位于架空行驶车辆系统的行进轨道下方，直接通过物品转移位置的上方，以及位于本地运输工具的行进轨道下方的滑架，可在传送位置正上方的部分和第二位置之间滑动，在第二位置，物品可以被传送到第二传送系统和从第二传送系统传送到第二位置，第二位置不同于直接在传送位置上方的部分，本地承运人在水平面上的行驶轨道。

49. 发明申请

US20160336209A1 Container Transport Device and Container Transport Facility 审中-公开
标题翻译：集装箱运输装置和集装箱运输设施
公开(公告)号：US20160336209A1
公开(公告)日：2016-11-17
申请号：US15151696
申请日：2016-05-11
申请人： Daifuku Co., Ltd.
发明人： Hideo Yoshioka , Takafumi Yamazaki
IPC分类号： H01L21/677 , B65G35/00
CPC分类号： B65G35/00 , H01L21/67379 , H01L21/67727 , H01L21/6773 , H01L21/67736 , H01L21/67775
摘要： A support member includes a first positioning portion for properly positioning a small container, and a second positioning portion for properly positioning a large container. The first positioning portion includes one or more first support members for supporting the small container, and first engaging members for engaging first engaged portions. The second positioning portion includes one or more second support members for supporting the large container at a height at which the bottom surface of the large container is located at a higher position than the upper ends of the first engaging members, a second engaging member provided outside the first supporting area for engaging a second engaged portion, and one or more contact members provided outside the first supporting area for contacting the large container from one or more sides.
摘要翻译：支撑构件包括用于适当地定位小容器的第一定位部分和用于适当地定位大容器的第二定位部分。第一定位部分包括用于支撑小容器的一个或多个第一支撑构件和用于接合第一接合部分的第一接合构件。第二定位部分包括一个或多个第二支撑构件，用于在大容器的底表面位于比第一接合构件的上端更高的位置的高度处支撑大容器，第二接合构件设置在外部用于接合第二接合部分的第一支撑区域和设置在第一支撑区域外侧的一个或多个接触构件，用于从一个或多个侧面接触大容器。

50. 发明申请

US20160079103A1 TRANSFER SYSTEM 有权
标题翻译：转移系统
公开(公告)号：US20160079103A1
公开(公告)日：2016-03-17
申请号：US14852802
申请日：2015-09-14
申请人： DENSO CORPORATION , MURATA MACHINERY, LTD.
发明人： Masaaki KUROYANAGI , Toshihiro OKUMURA , Keisuke YOSHIDA , Kenji OTA
IPC分类号： H01L21/677 , H01L21/67 , B25J11/00
CPC分类号： H01L21/67276 , G05B19/4189 , G05B2219/31002 , G05B2219/31014 , G05B2219/45031 , H01L21/6773 , Y02P90/08 , Y02P90/28 , Y02P90/285
摘要： In a transfer system, at least one of a plurality of process apparatuses is connected to a station as a connected process apparatus. A station control unit controls a transfer device provided in the station through a communication with a process apparatus control unit to load the processing object to the connected process apparatus from the station and to unload the processing object from the connected process apparatus to the station. The station control unit controls the transfer device to begin unloading of the processing object from the connected process apparatus to the station after receiving a signal indicative of a presence of the processing object to be unloaded from the process apparatus control unit.
摘要翻译：在传送系统中，作为连接的处理装置，将多个处理装置中的至少一个连接到站。站控制单元通过与处理装置控制单元的通信来控制站中提供的传送装置，以将处理对象从站载入连接的处理装置，并将处理对象从连接的处理装置卸载到站。站控制单元在从处理设备控制单元接收到指示要卸载的处理对象的信号的信号之后，控制传送设备开始将处理对象从连接的处理设备卸载到站。

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