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41. 发明申请

US20130149075A1 HIGH THROUGHPUT LOAD LOCK FOR SOLAR WAFERS 有权
标题翻译：用于太阳能轮的高阻力负载锁
公开(公告)号：US20130149075A1
公开(公告)日：2013-06-13
申请号：US13708751
申请日：2012-12-07
申请人： INTEVAC, INC.
发明人： Vinay Shah , William Runstadler, JR. , Kevin P. Fairbairn , Terry Bluck , Richard Henry Cooke
IPC分类号： H01L21/677
CPC分类号： H01L21/67736 , H01L21/67126 , H01L21/67201 , H01L21/67271 , H01L21/67288
摘要： A system for transporting substrates from an atmospheric pressure to high vacuum pressure and comprising: a rough vacuum chamber having an entry valve and an exit opening; a high vacuum chamber having an entry opening, the high vacuum chamber coupled to the rough vacuum chamber such that the exit opening and the entry opening are aligned; a valve situated between the exit opening and the entry opening; a first conveyor belt provided in the rough vacuum chamber; a second conveyor provided in the high vacuum chamber; a sensing element provided in the high vacuum chamber to enable detection of broken substrates on the second conveyor; and, a mechanism provided on the second conveyor belt enabling dumping of broken substrates onto the bottom of the high vacuum chamber.
摘要翻译：一种用于将基板从大气压输送到高真空压力的系统，包括：具有入口阀和出口的粗真空室; 具有进入开口的高真空室，所述高真空室联接到所述粗真空室，使得所述出口和入口开口对齐; 位于出口和入口之间的阀; 设置在粗糙真空室中的第一传送带; 设置在高真空室中的第二传送器; 设置在所述高真空室中以便能够检测所述第二输送机上的破裂的基板的感测元件; 以及设置在第二传送带上的机构，其能够将破碎的基板倾倒到高真空室的底部上。

42. 发明申请

US20130115764A1 SUBSTRATE PROCESSING SYSTEM AND METHOD 有权
标题翻译：基板加工系统及方法
公开(公告)号：US20130115764A1
公开(公告)日：2013-05-09
申请号：US13672652
申请日：2012-11-08
申请人： Intevac, Inc.
发明人： Terry Pederson , Henry Hieslmair , Moon Chun , Vinay Prabhakar , Babak Adibi , Terry Bluck
IPC分类号： H01L21/677 , H01L21/265
CPC分类号： H01L21/6833 , H01L21/26506 , H01L21/67745 , H01L21/6776 , H01L21/681 , H01L21/6831 , H01L31/1876 , H02N13/00 , Y02E10/50 , Y02P70/521
摘要： A system for processing substrates has a vacuum enclosure and a processing chamber situated to process wafers in a processing zone inside the vacuum enclosure. Two rail assemblies are provided, one on each side of the processing zone. Two chuck arrays ride, each on one of the rail assemblies, such that each is cantilevered on one rail assemblies and support a plurality of chucks. The rail assemblies are coupled to an elevation mechanism that places the rails in upper position for processing and at lower position for returning the chuck assemblies for loading new wafers. A pickup head assembly loads wafers from a conveyor onto the chuck assemblies. The pickup head has plurality of electrostatic chucks that pick up the wafers from the front side of the wafers. Cooling channels in the processing chucks are used to create air cushion to assist in aligning the wafers when delivered by the pickup head.
摘要翻译：用于处理衬底的系统具有真空外壳和位于处理真空外壳内的处理区中的晶片的处理室。提供两个轨道组件，一个在处理区域的每一侧。两个卡盘阵列，每个在一个导轨组件上，使得每个卡盘阵列悬挂在一个导轨组件上并支撑多个卡盘。轨道组件联接到升降机构，其将轨道放置在用于处理的上部位置，并且在较低位置处返回用于装载新晶片的卡盘组件。拾取头组件将晶片从传送器装载到卡盘组件上。拾取头具有从晶片的前侧拾取晶片的多个静电卡盘。处理卡盘中的冷却通道用于产生气垫，以在由拾取头传送时帮助对准晶片。

43. 发明授权

US08421012B2 Low energy portable low-light camera with wavelength cutoff 有权
标题翻译：具有波长截止功能的低能量便携式低光照相机
公开(公告)号：US08421012B2
公开(公告)日：2013-04-16
申请号：US12873225
申请日：2010-08-31
申请人： Verle W. Aebi
发明人： Verle W. Aebi
IPC分类号： H01L31/00
CPC分类号： H01L27/14643 , H01L27/1464 , H01L31/0304 , H01L31/03046 , H01L31/109 , Y02E10/544
摘要： A sensor for night vision applications is provided, wherein the sensor comprises a semiconductor absorption layer of composition that limits long wavelength response cutoff to between 1.25 to 1.4 μm wavelength. The selection of this cutoff frequency provides improved dark current performance, thereby requiring less cooling of the sensor. Consequently, energy consumption is reduced, as the sensor does not require active cooling, so that the sensor is particularly beneficial for mobile night vision applications where battery weight is of high importance.
摘要翻译：提供了一种用于夜视应用的传感器，其中传感器包括将长波长响应截止限制在1.25至1.4μm波长之间的组成半导体吸收层。该截止频率的选择提供了改进的暗电流性能，从而需要较少的传感器冷却。因此，由于传感器不需要主动冷却，所以能量消耗降低，因此传感器对于电池重量非常重要的移动夜视应用尤为有利。

44. 发明申请

US20120090992A1 SYSTEM AND METHOD FOR COMMERCIAL FABRICATION OF PATTERNED MEDIA 审中-公开
标题翻译：用于商业制图的制图和方法
公开(公告)号：US20120090992A1
公开(公告)日：2012-04-19
申请号：US13338182
申请日：2011-12-27
申请人： Kevin P. Fairbairn , Michael S. Barnes , Terry Bluck , Ren Xu , Charles Liu , Ralph Kerns
发明人： Kevin P. Fairbairn , Michael S. Barnes , Terry Bluck , Ren Xu , Charles Liu , Ralph Kerns
IPC分类号： C23C14/34
CPC分类号： G11B5/84 , G11B5/855 , H01J37/3438
摘要： A system is provided for etching patterned media disks for hard drive. The modular system may be tailored to perform specific processes sequences so that a patterned media disk is fabricated without removing the disk from vacuum environment. In some sequence the magnetic stack is etched while in other the etch is performed prior to forming the magnetic stack. In a further sequence ion implantation is used without etching steps. For etching a movable non-contact electrode is utilized to perform sputter etch. The cathode moves to near contact distance to, but not contacting, the substrate so as to couple RF energy to the disk. The substrate is held vertically in a carrier and both sides are etched serially. That is, one side is etched in one chamber and then in the next chamber the second side is etched.
摘要翻译：提供了用于蚀刻用于硬盘驱动器的图案化介质盘的系统。模块化系统可以被定制以执行特定的处理序列，使得图案化的介质盘被制造而不从真空环境中移除盘。在一些顺序中，磁性堆叠被蚀刻，而另一些蚀刻则在形成磁性堆叠之前进行。在另外的序列中，使用离子注入而没有蚀刻步骤。为了蚀刻可移动的非接触电极用于进行溅射蚀刻。阴极移动到与衬底接近但不接触的接近距离，以将RF能量耦合到盘。衬底垂直地保持在载体中，并且两侧被连续蚀刻。也就是说，在一个室中蚀刻一面，然后在下一个室中蚀刻第二面。

45. 发明授权

US08125637B2 Optical beam spectrometer with movable lens 有权
标题翻译：具有可移动镜头的光束光谱仪
公开(公告)号：US08125637B2
公开(公告)日：2012-02-28
申请号：US12268419
申请日：2008-11-10
申请人： Keith T. Carron , Mark Watson , Shane Buller
发明人： Keith T. Carron , Mark Watson , Shane Buller
IPC分类号： G01J3/06 , G01J3/44 , G01N21/65
CPC分类号： G01J3/02 , G01J3/0205 , G01J3/0208 , G01J3/0237 , G01J3/0272 , G01J3/44
摘要： A spectroscopic system is described that provides at least one of focus of an excitation beam onto a sample, automatic focus of an optical system of the spectroscopic system for collecting a spectroscopic signal, and/or averaging of excitation intensity over a surface area of the sample.
摘要翻译：描述了一种分光系统，其将激发光束的焦点中的至少一个提供到样本上，用于收集分光信号的光谱系统的光学系统的自动聚焦和/或样品的表面积上的激发强度的平均值。

46. 发明授权

US08114339B2 Method of and apparatus utilizing carbon cord for evaporation of metals 失效
标题翻译：碳纤维蒸发金属的方法和设备
公开(公告)号：US08114339B2
公开(公告)日：2012-02-14
申请号：US12712043
申请日：2010-02-24
申请人： Arthur C. Wall , Terry Bluck
发明人： Arthur C. Wall , Terry Bluck
IPC分类号： F27B14/10 , F27B14/14
CPC分类号： C23C14/26 , C30B23/00 , H05B3/145 , H05B3/26 , H05B3/54 , H05B3/64 , Y10T29/49396
摘要： A high temperature evaporator is made using an electrically insulating crucible and a heating element made of woven graphite fibers. The crucible is manufactured out of an electrically insulating block to the required shape, and channels are machined on the walls of the crucible. The woven graphite cord is threaded through the channels and is used as heating elements. Since the heating cords are made of woven graphite, they are very flexible and do not embrittle. They can be manufactured to various resistivity as needed, allowing for relatively inexpensive power supplies and low current power delivery. The cords are not fragile and do not break due to thermal shock or vibration.
摘要翻译：使用电绝缘坩埚和由编织石墨纤维制成的加热元件制成高温蒸发器。坩埚由电绝缘块制成所需的形状，并且在坩埚的壁上加工通道。编织石墨帘线穿过通道并用作加热元件。由于加热帘线由编织石墨制成，因此它们非常柔软并且不会脆化。它们可根据需要制造成各种电阻率，允许相对便宜的电源和低电流功率输送。电线不易碎，不会因热冲击或振动而断裂。

47. 发明授权

US08087380B2 Evaporative system for solar cell fabrication 失效
标题翻译：太阳能电池制造用蒸发系统
公开(公告)号：US08087380B2
公开(公告)日：2012-01-03
申请号：US12610187
申请日：2009-10-30
申请人： Terry Bluck , Michael S. Barnes , Kevin P. Fairbairn
发明人： Terry Bluck , Michael S. Barnes , Kevin P. Fairbairn
IPC分类号： C23C14/34
CPC分类号： H01L31/18 , H01L21/67167 , H01L21/67173 , H01L21/67196 , H01L21/67207 , H01L21/67742 , Y10S438/908
摘要： A plurality of chamber are arranged about a transport chamber. The linear transport chamber may include a linear track supporting robot arms. The robot arms transport substrates to and from the chambers. Each chamber includes a plurality of evaporators, each controlled independently. Each substrate positioned in the chamber is coated from a plurality of the evaporators, such that by controlling the operation of each evaporator independently the formation of the layers and the concentration gradient of each layer can be precisely controlled.
摘要翻译：多个室围绕传送室布置。线性传送室可以包括支撑机械臂的直线轨迹。机器人将基板运送到室和从室传送。每个室包括多个蒸发器，每个蒸发器独立地被控制。位于室中的每个基板由多个蒸发器涂覆，使得通过独立地控制每个蒸发器的操作，能够精确地控制各层的形成和各层的浓度梯度。

48. 发明申请

US20110158773A1 APPARATUS AND METHODS FOR TRANSPORTING AND PROCESSING SUBSTRATES 有权
标题翻译：用于运输和处理基板的装置和方法
公开(公告)号：US20110158773A1
公开(公告)日：2011-06-30
申请号：US13042407
申请日：2011-03-07
申请人： Terry BLUCK , Kevin P. Fairbairn , Michael S. Barnes , Christopher T. Lane
发明人： Terry BLUCK , Kevin P. Fairbairn , Michael S. Barnes , Christopher T. Lane
IPC分类号： H01L21/677
CPC分类号： H01L21/67184 , H01L21/67173 , H01L21/67196 , H01L21/67201 , H01L21/67745
摘要： There is described apparatus and methods for transporting and processing substrates including wafers as to efficiently produce at reasonable costs improved throughput as compared to systems in use today. A key element is the use of a transport chamber along the sides of processing chambers for feeding substrates into a controlled atmosphere through a load lock and then along a transport chamber as a way of reaching processing chambers and then out of the controlled atmosphere following processing in the processing chambers.
摘要翻译：描述了与目前使用的系统相比，用于运输和处理包括晶片的基板以便以合理的成本有效地生产提高的生产量的装置和方法。关键要素是沿着处理室的侧面使用传送室，用于通过装载锁定将基板输送到受控气氛中，然后沿着传送室作为到达处理室的方式，然后在受控气氛中进行处理处理室。

49. 发明申请

US20110104847A1 EVAPORATIVE SYSTEM FOR SOLAR CELL FABRICATION 失效
标题翻译：太阳能电池制造用蒸发系统
公开(公告)号：US20110104847A1
公开(公告)日：2011-05-05
申请号：US12610187
申请日：2009-10-30
申请人： Terry BLUCK , Michael S. Barnes , Kevin P. Fairbairn
发明人： Terry BLUCK , Michael S. Barnes , Kevin P. Fairbairn
IPC分类号： H01L31/18
CPC分类号： H01L31/18 , H01L21/67167 , H01L21/67173 , H01L21/67196 , H01L21/67207 , H01L21/67742 , Y10S438/908
摘要： A plurality of chamber are arranged about a transport chamber. The linear transport chamber may include a linear track supporting robot arms. The robot arms transport substrates to and from the chambers. Each chamber includes a plurality of evaporators, each controlled independently. Each substrate positioned in the chamber is coated from a plurality of the evaporators, such that by controlling the operation of each evaporator independently the formation of the layers and the concentration gradient of each layer can be precisely controlled.
摘要翻译：多个室围绕传送室布置。线性传送室可以包括支撑机械臂的直线轨迹。机器人将基板运送到室和从室传送。每个室包括多个蒸发器，每个蒸发器独立地被控制。位于室中的每个基板由多个蒸发器涂覆，使得通过独立地控制每个蒸发器的操作，能够精确地控制各层的形成和各层的浓度梯度。

50. 发明申请

US20100237042A1 PROCESS FOR OPTIMIZATION OF ISLAND TO TRENCH RATIO IN PATTERNED MEDIA 失效
标题翻译：优化岛屿以优化媒体比例的方法
公开(公告)号：US20100237042A1
公开(公告)日：2010-09-23
申请号：US12730147
申请日：2010-03-23
申请人： Houng T. Nguyen , Ren Xu , Michael S. Barnes
发明人： Houng T. Nguyen , Ren Xu , Michael S. Barnes
IPC分类号： G11B5/84
CPC分类号： G11B5/855
摘要： A sequence of process steps having balanced process times are implemented in sequence of etch chambers coupled linearly and isolated one from the other, resulting in the optimization of island to trench ratio for a patterned media. A biased chemical etching using active etching gas is used to descum and trim the resist patterns. An inert gas sputter etch is performed on the magnetic layers, resulting in the patterned magnetic layer on the disk. A final step of stripping is then performed to remove the residual capping resist and carbon hard mask on top of un-etched magnetic islands. The effective magnetic material remaining on the disk surface can be optimized by adjusting the conditions of chemical etch and sputter etch conditions. Relevant process conditions that may be adjusted include: pressure, bias, time, and the type of gas in each step.
摘要翻译：具有平衡处理时间的一系列工艺步骤以蚀刻室的顺序实现，该蚀刻室线性地并且彼此隔离，导致图案化介质的岛与沟槽比的优化。使用有源蚀刻气体的偏压化学蚀刻来除去和修整抗蚀剂图案。对磁性层进行惰性气体溅射蚀刻，得到盘上图案化的磁性层。然后进行剥离的最后一步，以除去未蚀刻的磁岛顶部上的残余覆盖抗蚀剂和碳硬掩模。可以通过调整化学蚀刻和溅射蚀刻条件的条件来优化残留在盘表面上的有效磁性材料。可能调整的相关工艺条件包括：压力，偏压，时间和每一步中的气体类型。

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