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    • 48. 发明申请
    • EPITAXIAL GROWTH APPARATUS AND EPITAXIAL GROWTH METHOD
    • 外来生长装置和外来生长方法
    • US20110114017A1
    • 2011-05-19
    • US12945299
    • 2010-11-12
    • Fumihiko KimuraKazuhisa IwanagaTakeshi Masuda
    • Fumihiko KimuraKazuhisa IwanagaTakeshi Masuda
    • C30B23/06C23C16/00
    • C30B29/06C30B25/02C30B25/12
    • An object of the present invention is to provide an epitaxial growth apparatus and an epitaxial growth method that can suppress variation in in-face temperature of a semiconductor wafer caused by deflection of a susceptor and manufacture an epitaxial wafers of high quality. Specifically, the present invention provides an epitaxial growth apparatus for forming an epitaxial film on a semiconductor wafer placed in a chamber having a supply port and an exhaust port for a treatment gas, the apparatus comprising: a susceptor for placing the semiconductor wafer thereon within the chamber; and a susceptor support shaft for supporting the susceptor at an underneath portion of the susceptor, wherein the susceptor support shaft has a support column located substantially coaxial with the center of the susceptor, and at least four support arms extending radially from the top end of the support column with equal intervals therebetween.
    • 本发明的目的是提供一种能够抑制由于感受器的偏转引起的半导体晶片的面内温度变化的外延生长装置和外延生长方法,并且制造高质量的外延晶片。 具体地说,本发明提供了一种用于在放置在具有用于处理气体的供给口和排气口的室中的半导体晶片上形成外延膜的外延生长装置,该设备包括:用于将半导体晶片放置在其内的基座 房间 以及用于将基座支撑在基座的下部的基座支撑轴,其中,所述基座支撑轴具有与所述基座的中心基本同轴的支撑柱,以及从所述基座的顶端径向延伸的至少四个支撑臂 支撑柱之间具有相等的间隔。
    • 50. 发明授权
    • Front illuminating device and a reflection-type liquid crystal display using such a device
    • 前照明装置和使用这种装置的反射型液晶显示器
    • US07714956B2
    • 2010-05-11
    • US11009788
    • 2004-12-10
    • Yutaka SawayamaYukihiro SumidaTakeshi MasudaTsuyoshi Ebi
    • Yutaka SawayamaYukihiro SumidaTakeshi MasudaTsuyoshi Ebi
    • G20F1/1335
    • G02B6/0025G02B6/002G02B6/0038G02B6/0043G02B6/005G02B6/0056G02B6/0065G02B6/0076G02F1/133504G02F1/133615G02F2001/133616G02F2001/133626
    • A front-illuminating device of the present invention, which is placed over the entire surface of an object to be illuminated such as a reflection-type liquid crystal display device when it is used, is provided with a light source and a light-directing body. The light-directing body has an incident surface on which light from the light source (light-source light) is made incident, a first light-releasing surface for releasing the light toward the object to be illuminated, and a second light-releasing surface which faces the first light-releasing surface and releases reflected light from the object to be illuminated. The second light-releasing surface is formed into a step shape in which slanting portions and flat portions are alternately placed. The light source light, released from the first light-releasing surface to the object to be illuminated, is reflected by the object to be illuminated and the reflected light is allowed to reach the observer from the first light-releasing surface through the flat portions. In this case, among the light-source light rays, the light components progressing in parallel with the flat portions are reflected by the slanting portions and directed to the object to be illuminated. Consequently, the present invention makes it possible to provide a brighter front-illuminating device in which the efficiency of use of the light-source light is improved.
    • 本发明的前照明装置设置有光源和导光体,该前照灯装置放置在被照射物体的整个表面上,例如反射型液晶显示装置, 。 导光体具有使来自光源的光(光源光)入射的入射面,用于将光朝向被照射物体释放的第一发光面和第二光释放面 其面向第一光释放表面并且释放来自被照明物体的反射光。 第二光释放表面形成为倾斜部分和平坦部分交替放置的台阶形状。 从第一光释放表面释放到被照射物体的光源光被被照射物体反射,并且允许反射光通过平坦部分从第一光释放表面到达观察者。 在这种情况下,在光源光线中,与平坦部分平行进行的光分量被倾斜部分反射并被引导到要照明的对象。 因此,本发明使得可以提供其中光源光的使用效率提高的更亮的前照明装置。