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    • 42. 发明申请
    • Semiconductor memory device
    • 半导体存储器件
    • US20060039230A1
    • 2006-02-23
    • US11180659
    • 2005-07-14
    • Hideaki KurataYoshihiro IkedaMasahiro ShimizuKenji KozakaiSatoshi Noda
    • Hideaki KurataYoshihiro IkedaMasahiro ShimizuKenji KozakaiSatoshi Noda
    • G11C8/02
    • G11C8/14
    • An object of the present invention is to provide a semiconductor memory device capable of preventing a defect caused by falling of a word line and deterioration in patterning precision due to disturbance of the pitch of word lines at an end of a memory block. Plural dummy word lines are disposed at an end of a memory block, a word driver is mounted for the dummy word line to control the threshold voltage of a dummy memory cell formed below the dummy word line. Also at the time of operating a memory area for storing data from the outside, a bias is applied to the dummy word line. The invention can prevent a defect caused by falling of a word line and deterioration in patterning precision due to disturbance of the pitches of word lines at an end of a memory block, and realize high yield and reliably operation.
    • 本发明的目的是提供一种半导体存储器件,其能够防止由于字线的下降引起的缺陷以及由于在存储器块的端部处的字线的间距的干扰而导致的图案精度的劣化。 多个虚拟字线设置在存储器块的末端,为虚拟字线安装字驱动器以控制形成在虚拟字线下面的虚拟存储器单元的阈值电压。 此外,在操作用于存储来自外部的数据的存储区域时,偏置被施加到虚拟字线。 本发明可以防止由于字线下降引起的缺陷和由于记忆块末端的字线的间距的干扰导致的图案精度的劣化,并且实现高产率和可靠的操作。