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    • 45. 发明授权
    • Substrate processing apparatus and method of displaying abnormal state of substrate processing apparatus
    • 基板处理装置及显示基板处理装置的异常状态的方法
    • US08483870B2
    • 2013-07-09
    • US12704910
    • 2010-02-12
    • Osamu Morita
    • Osamu Morita
    • G06F7/00
    • G05B19/4062G05B2219/42289H01L21/67288
    • Provided are a substrate processing apparatus and a method of displaying an abnormal state of the substrate processing apparatus. The substrate processing apparatus including: a manipulation unit including a manipulation screen displaying a state of at least one of a substrate carrying mechanism and a substrate processing mechanism; and a control unit including a carrying system controller controlling the substrate carrying mechanism. The manipulation unit comprises a setting screen through which detection conditions of sensors configured to detect states of the substrate carrying mechanism and the substrate processing mechanism, and information about a torque limitation including the enabling or disabling of the torque control and a torque control value are set for the substrate carrying mechanism. The carrying system controller assigns a motion of the substrate carrying mechanism to a carrying control module based on an instruction from the manipulation unit, and the carrying control module controls the substrate carrying mechanism according to the instruction and the information.
    • 提供了一种基板处理装置和显示基板处理装置的异常状态的方法。 基板处理装置包括:操作单元,其包括显示基板搬运机构和基板处理机构中的至少一个的状态的操作画面; 以及控制单元,其包括控制所述基板承载机构的承载系统控制器。 操作单元包括设定画面,通过该设定画面设定检测基板搬送机构的状态的传感器和基板处理机构的检测条件,以及关于包含使能或禁止转矩控制的转矩限制以及转矩控制值的信息 用于基板承载机构。 承载系统控制器基于来自操作单元的指令将基板承载机构的运动分配到承载控制模块,并且承载控制模块根据指示和信息来控制基板承载机构。