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41. 发明申请

US20050005994A1 Method for supplying gas while dividing to chamber from gas supply facility equipped with flow controller 有权
标题翻译：在配备有流量控制器的气体供给设备的同时向室供给气体的方法
公开(公告)号：US20050005994A1
公开(公告)日：2005-01-13
申请号：US10495641
申请日：2003-01-20
申请人： Kazuhiko Sugiyama , Nobukazu Ikeda , Kouji Nishino , Ryousuke Dohi , Toyomi Uenoyama
发明人： Kazuhiko Sugiyama , Nobukazu Ikeda , Kouji Nishino , Ryousuke Dohi , Toyomi Uenoyama
IPC分类号： H01L21/205 , G05D7/06 , B67C3/00
CPC分类号： G05D7/0664 , Y10T137/7759 , Y10T137/7761
摘要： A method for supplying a specified quantity Q of processing gas while dividing at a desired flow rate ratio Q1/Q2 accurately and quickly from a gas supply facility equipped with a flow controller into a chamber. When a specified quantity Q of gas is supplied while being divided at a desired flow rate ratio Q1/Q2 from a gas supply facility equipped with a flow controller into a reduced pressure chamber C through a plurality of branch supply lines and shower plates fixed to the ends thereof, pressure type division quantity controllers FV1 and FV2 are provided in the plurality of branch supply lines GL1 and GL2. Opening control of both division quantity controllers FV1 and FV2 is started by an initial flow rate set signal from a division quantity control board FRC for fully opening the control valve CV of the pressure type division quantity controller having a higher flow rate and pressures P3′ and P3″ on the downstream side of the control valve CV are regulated thus supplying a total quantity Q=Q1+Q2 of gas while dividing into the chamber C through orifice holes (3a, 4a) made in shower plates (3, 4) at desired division quantities Q1 and Q2 represented by formulas Q1=C1P3′ and Q2=C2P3″ (where, C1 and C2 are constants dependent on the cross-sectional area of the orifice hole or the gas temperature on the upstream side thereof).
摘要翻译：一种用于在从配备有流量控制器的气体供给设备进入腔室的情况下，以期望的流量比Q1 / Q2精确而快速地分配处理气体的规定量Q的方法。当通过多个分支供应管线和固定到所述流体控制器的淋浴板以期望的流量比Q1 / Q2从装备有流量控制器的气体供应设备分配到减压室C中时，供应指定量的气体在多个分支供给线GL1和GL2中设置有压力分离量控制器FV1和FV2。通过来自分割量控制板FRC的初始流量设定信号来开始分控数量控制器FV1和FV2的打开控制，以完全打开具有较高流量和压力P3'的压力型分配量控制器的控制阀CV，并且在控制阀CV的下游侧的P3“被调节，从而通过在淋浴板（3,4）上形成的喷孔（3a，4a）分隔成室C，从而提供气体的总量Q = Q1 + Q2，由公式Q1 = C1P3'和Q2 = C2P3“表示的期望分割量Q1和Q2（其中C1和C2是取决于孔口的横截面面积或其上游侧的气体温度的常数）。

42. 发明授权

US08496022B2 Device and method for supplying gas while dividing to chamber from gas supplying facility equipped with flow controller 有权
标题翻译：在配备有流量控制器的供气设备分配到室时供应气体的装置和方法
公开(公告)号：US08496022B2
公开(公告)日：2013-07-30
申请号：US10561514
申请日：2004-06-10
申请人： Kazuhiko Sugiyama , Nobukazu Ikeda , Kouji Nishino , Ryousuke Dohi , Toyomi Uenoyama
发明人： Kazuhiko Sugiyama , Nobukazu Ikeda , Kouji Nishino , Ryousuke Dohi , Toyomi Uenoyama
IPC分类号： G05D11/13
CPC分类号： G05D7/00 , G05D7/0623 , G05D7/0652 , G05D7/0658 , G05D7/0664 , G05D11/132 , Y10T137/0379 , Y10T137/0396 , Y10T137/2521 , Y10T137/2529 , Y10T137/2562 , Y10T137/263 , Y10T137/2663 , Y10T137/7761 , Y10T137/8175
摘要： The invention supplies a quantity Q of gas while dividing at flow rate ratio Q1/Q2 from a gas supply facility equipped with a flow controller. A total quantity Q=Q1+Q2 of gas is supplied into a chamber at flow rate Q1 and Q2 through shower plates fixed to ends of branch supply lines by providing open/close valves with a plurality of branch supply lines GL1 and GL2, respectively, to supply the specified quantity of gas from the gas supply facility, and by utilizing bypass line BL1 on the downstream side of the open/close valve OV1 and branched from GL1 ,bypass line BL2 on the downstream side of the open/close valve OV2 and branched from GL2 ,pressure type division quantity controller connected to the bypass line BL1 and the bypass line BL2 ,a sensor measuring pressure inside branch supply line GL1 ,and another sensor measuring pressure inside branch supply line GL2.
摘要翻译：本发明提供一种气体量Q，同时以具有流量控制器的气体供给设备的流量比Q1 / Q2分压。通过分别提供具有多个分支供应线GL1和GL2的开闭阀将气体的总量Q = Q1 + Q2以流量Q1和Q2供给到固定到分支供应管线的端部的喷淋板，从气体供给装置供给规定量的气体，通过在开/关阀OV1的下游侧利用旁路管线BL1，从开关阀OV2的下游侧的GL1分支的旁通管线BL2，从GL2分支，连接到旁路线BL1和旁路线BL2的压力分型量控制器，测量分支供给线GL1内的压力的传感器和测量分支供给线GL2内的压力的另一传感器。

43. 发明授权

US09233347B2 Mixed gas supply device 有权
标题翻译：混合供气装置
公开(公告)号：US09233347B2
公开(公告)日：2016-01-12
申请号：US13520824
申请日：2010-10-22
申请人： Masaaki Nagase , Ryousuke Dohi , Kouji Nishino , Nobukazu Ikeda
发明人： Masaaki Nagase , Ryousuke Dohi , Kouji Nishino , Nobukazu Ikeda
IPC分类号： F16K11/20 , B01J4/02 , G05D11/13 , H01L21/67
CPC分类号： B01J4/02 , G05D11/132 , H01L21/67017 , Y10T137/87249
摘要： A mixed gas supply device includes a plurality of gas supply lines arranged in parallel that include flow rate control devices and outlet side switching valves, wherein gas outlets of respective outlet side switching valves communicate with a manifold, and another gas supply line at a position close to a mixed gas outlet of the manifold supplies a low flow rate gas, wherein an outlet side of the flow rate control device and an inlet side of the outlet side switching valve are hermetically connected via an outlet side connecting fitting of the flow rate control device and a mounting table having a gas passage, wherein a small hole portion is provided at a part of a flow passage at the outlet side connecting fitting and/or a flow passage, which makes the outlet side switching valve and a mixed gas flow passage in the manifold communicate with one another.
摘要翻译：混合气体供给装置包括并列布置的多个气体供给管线，包括流量控制装置和出口侧切换阀，其中各个出口侧切换阀的气体出口与歧管连通，另一个气体供给管线位于关闭位置到歧管的混合气体出口供给低流量气体，其中流量控制装置的出口侧和出口侧切换阀的入口侧经由流量控制装置的出口侧连接配件气密地连接以及具有气体通道的安装台，其中在出口侧连接配件和/或流路的流路的一部分处设置有小孔部，其使出口侧切换阀和混合气体流路成为歧管彼此通信。

44. 发明申请

US20130319551A1 OPENING DEGREE DETECTION DEVICE FOR AUTOMATICALLY OPERATED VALVE 有权
标题翻译：用于自动操作阀的开启程度检测装置
公开(公告)号：US20130319551A1
公开(公告)日：2013-12-05
申请号：US13988836
申请日：2011-11-17
申请人： Ryousuke Dohi , Atsuo Tomita , Kouji Nishino , Yohei Sawada , Nobukazu Ikeda
发明人： Ryousuke Dohi , Atsuo Tomita , Kouji Nishino , Yohei Sawada , Nobukazu Ikeda
IPC分类号： F16K37/00
CPC分类号： F16K37/0041 , F16K31/1221 , F16K37/00 , F16K37/0083 , Y10T137/8158 , Y10T137/8242
摘要： To provide an opening degree detection device for an automatically operated valve which is easily assembled into an automatically operated valve, makes it easy to ensure detection accuracy at the time of assembling the opening degree detection device, and is easily applicable to an existing automatically operated valve. The opening degree detection device includes: a base plate 4 which is detachably mounted on an automatically operated valve 2; a displacement sensor 5; and a target 6 having an inclined detection surface 6a which is detected by the displacement sensor 5. The target 6 is fixed to the base plate 4. The displacement sensor 5 is supported on a valve stem 14 by way of a sensor support member 21, and the sensor support member 21 is supported on the base plate 4 by way of a guide means.
摘要翻译：为了提供易于组装成自动操作的阀的自动操作阀的开度检测装置，能够容易地确保组装开度检测装置时的检测精度，并且容易应用于现有的自动操作阀。开度检测装置包括：可拆卸地安装在自动操作的阀2上的基板4; 位移传感器5; 以及具有由位移传感器5检测出的倾斜检测面6a的目标6。目标6固定在基板4上。位移传感器5通过传感器支撑部件21支撑在阀杆14上，并且传感器支撑构件21通过引导装置支撑在基板4上。

45. 发明授权

US08587180B2 Pressure control valve driving circuit for pressure type flow rate control device with flow rate self-diagnosis function 有权
标题翻译：压力式流量控制装置的压力控制阀驱动电路具有流量自我诊断功能
公开(公告)号：US08587180B2
公开(公告)日：2013-11-19
申请号：US12989614
申请日：2009-02-18
申请人： Katsuyuki Sugita , Nobukazu Ikeda , Kouji Nishino , Ryousuke Dohi , Kaoru Hirata , Takatoshi Nakatani
发明人： Katsuyuki Sugita , Nobukazu Ikeda , Kouji Nishino , Ryousuke Dohi , Kaoru Hirata , Takatoshi Nakatani
IPC分类号： H01L41/09
CPC分类号： G05D7/0635 , Y10T137/7762
摘要： A pressure control valve piezoelectric element driving circuit is provided for a pressure type flow rate control device provided with a flow rate self-diagnosis function for comparing initial pressure drop characteristics data measured and with pressure drop characteristics data in a flow rate diagnosis which are measured under conditions that are the same for both measurements to detect malfunction in flow rate control from a difference between both characteristics data, wherein a first discharge circuit slowly discharges a piezoelectric element driving voltage applied to the piezoelectric element according to a step-down command signal from a CPU, through a step-down command circuit to step down the voltage, and a second discharge circuit that rapidly discharges a piezoelectric element driving voltage applied to the piezoelectric element according to a high-speed step-down command signal from the CPU, through a high-speed step-down command circuit to step down the voltage.
摘要翻译：为压力式流量控制装置设置压力式流量控制装置，该压力式流量控制装置具有用于比较测定的初始压降特性数据和流量诊断中的压降特性数据的流量自我诊断功能，两个测量结果相同的条件是根据两个特性数据之间的差异来检测流量控制的故障，其中第一放电电路根据来自一个压电元件的降压命令信号缓慢放电施加到压电元件的压电元件驱动电压 CPU通过降压指令电路降低电压，以及第二放电电路，其根据来自CPU的高速降压命令信号快速放电施加到压电元件的压电元件的驱动电压，通过高速降压指令电路降压。

46. 发明申请

US20120273061A1 Piezoelectrically Driven Valve and Piezoelectrically Driven Flow Rate Control Device 有权
标题翻译：压电驱动阀和压电驱动流量控制装置
公开(公告)号：US20120273061A1
公开(公告)日：2012-11-01
申请号：US13505620
申请日：2010-11-04
申请人： Atsushi Hidaka , Kaoru Hirata , Masaaki Nagase , Nobukazu Ikeda , Ryousuke Dohi , Kouji Nishino
发明人： Atsushi Hidaka , Kaoru Hirata , Masaaki Nagase , Nobukazu Ikeda , Ryousuke Dohi , Kouji Nishino
IPC分类号： F16K49/00 , F16K31/02
CPC分类号： F16K31/007 , F16K7/14 , F16K25/005 , G05D7/0629 , Y10T137/6416 , Y10T137/7759 , Y10T137/776 , Y10T137/7761
摘要： A piezoelectrically driven valve and a piezoelectrically driven fluid control device are provided that may control a fluid even if the temperature of the fluid is higher than an operating temperature range of a piezoelectric actuator. The piezoelectrically driven valve includes a valve element for opening and closing a fluid passage, a piezoelectric actuator for driving the valve element by utilizing extension of a piezoelectric element, and a radiation spacer that lifts and supports the piezoelectric actuator away from the fluid passage, and radiates heat that is transferred from fluid flowing in the fluid passage to the piezoelectric actuator, and preferably further includes a support cylinder that houses and supports both of the piezoelectric actuator and the radiation spacer, wherein the support cylinder is made of a material with the same thermal expansion coefficient as that of the radiation spacer, at least at a portion for housing the radiation spacer.
摘要翻译：提供了一种压电驱动阀和压电驱动的流体控制装置，其可以控制流体，即使流体的温度高于压电致动器的工作温度范围。压电驱动阀包括用于打开和关闭流体通道的阀元件，通过利用压电元件的延伸来驱动阀元件的压电致动器，以及将压电致动器提升和支撑远离流体通道的辐射间隔件，以及辐射从在流体通道中流动的流体转移到压电致动器的热量，并且优选地还包括容纳和支撑压电致动器和辐射间隔物的支撑筒，其中支撑筒由具有相同材料的材料制成至少在用于容纳辐射间隔物的部分处，与辐射间隔物的热膨胀系数相同。

47. 发明授权

US07654137B2 Corrosion-resistant metal made sensor for fluid and a fluid supply device for which the sensor is employed 失效
标题翻译：用于流体的耐腐蚀金属制传感器和使用传感器的流体供应装置
公开(公告)号：US07654137B2
公开(公告)日：2010-02-02
申请号：US10598290
申请日：2005-01-13
申请人： Kaoru Hirata , Nobukazu Ikeda , Kouji Nishino , Ryousuke Dohi
发明人： Kaoru Hirata , Nobukazu Ikeda , Kouji Nishino , Ryousuke Dohi
IPC分类号： G01F1/68
CPC分类号： G01L19/0023 , G01F1/6842 , G01F1/6845 , Y10T137/7761
摘要： The present invention provides a corrosion-resistant metal made sensor for fluid and a fluid supply device for which the sensor is employed.More specifically, the corrosion-resistant metal made sensor for fluid is equipped with a corrosion-resistant metal substrate, a mass flow rate sensor part comprising a corrosion resistant metal substrate, a thin film forming a temperature sensor and a heater mounted on the back face side of the fluid contacting surface of the corrosion-resistant metal substrate, and a pressure sensor part comprising a thin film forming a strain sensor element mounted on the back face side of the fluid contacting surface of the corrosion-resistant metal substrate, and the sensor is so constituted that the mass flow rate and pressure of the fluid are measured.
摘要翻译：本发明提供了用于流体的耐腐蚀金属制传感器和使用该传感器的流体供应装置。更具体地说，用于流体的耐腐蚀金属制传感器配备有耐腐蚀金属基板，包含耐腐蚀金属基板的质量流量传感器部件，形成温度传感器的薄膜和安装在背面上的加热器耐压金属基板的流体接触面的一侧，以及包含形成安装在耐腐蚀金属基板的流体接触面的背面侧的应变传感器元件的薄膜的压力传感器部，以及传感器如此构成，即测量流体的质量流量和压力。

48. 发明申请

US20100012026A1 EVAPORATION SUPPLY APPARATUS FOR RAW MATERIAL AND AUTOMATIC PRESSURE REGULATING DEVICE USED THEREWITH 有权
标题翻译：用于原材料和自动压力调节装置的蒸发供应装置
公开(公告)号：US20100012026A1
公开(公告)日：2010-01-21
申请号：US12306904
申请日：2007-06-13
申请人： Kaoru Hirata , Masaaki Nagase , Atsushi Hidaka , Atsushi Matsumoto , Ryousuke Dohi , Kouji Nishino , Nobukazu Ikeda
发明人： Kaoru Hirata , Masaaki Nagase , Atsushi Hidaka , Atsushi Matsumoto , Ryousuke Dohi , Kouji Nishino , Nobukazu Ikeda
IPC分类号： C23C16/52 , F16K17/38
CPC分类号： C23C16/4481 , C23C16/52 , G05D16/2013 , Y10T137/7737
摘要： An evaporation supply apparatus for raw material used in semiconductor manufacturing includes a source tank in which a raw material is pooled; a flow rate control device that supplies carrier gas at a regulated flow rate into the source tank; a primary piping path for feeding mixed gas G0, made up of raw material vapor G4 and carrier gas G1, an automatic pressure regulating device that regulates a control valve based on the detected values of the pressure and temperature of mixed gas G0 to regulate the cross-sectional area of the passage through which the mixed gas G0 is distributed so as to hold the pressure of the mixed gas G0 inside the source tank constant; and a constant-temperature heating unit for heating the source tank to a set temperature, in which mixed gas G0 is supplied to a process chamber while controlling the pressure inside the source tank.
摘要翻译：用于半导体制造的原料的蒸发供给装置包括：原料汇集在其中的源罐; 流量控制装置，其以规定的流量将载气供给到所述源罐; 用于供给由原料蒸气G4和载气G1组成的混合气体G0的主要管路，基于混合气体G0的压力和温度的检测值来调节控制阀的自动调压装置，以调节十字混合气体G0通过其分配的通道的截面积，以将混合气体G0的压力保持在源箱内部恒定; 以及用于将源罐加热到设定温度的恒温加热单元，其中将混合气体G0供给到处理室，同时控制源罐内的压力。

49. 发明授权

US08757197B2 Automatic pressure regulator for flow rate regulator 有权
标题翻译：用于流量调节器的自动压力调节器
公开(公告)号：US08757197B2
公开(公告)日：2014-06-24
申请号：US12996370
申请日：2009-04-06
申请人： Kaoru Hirata , Katsuyuki Sugita , Kouji Nishino , Ryousuke Dohi , Nobukazu Ikeda
发明人： Kaoru Hirata , Katsuyuki Sugita , Kouji Nishino , Ryousuke Dohi , Nobukazu Ikeda
IPC分类号： F16K31/02
CPC分类号： G05D7/0635 , Y10T137/7761
摘要： The invention prevents overshoot from occurring in flow rate on the output side of a flow rate regulator when output flow rate is changed or the gas type distributed is changed. Thus, an automatic pressure regulator is provided to supply gas pressure to a flow rate regulator that includes a piezoelectric element driving type pressure regulating valve, a control pressure detector provided on the output side of the pressure regulating valve, and a controller to which a detected value P2 of the control pressure detector and a set value Pst for control pressure are input, wherein the controller supplies a control signal to a piezoelectric element driving unit of the pressure regulating valve using a proportional control system to perform valve opening regulation in which the proportional control system of the controller is set to control to bring about a residual deviation in control pressure by disabling an integral action.
摘要翻译：本发明防止了当流量改变或气体分布改变时流量调节器的输出侧的流量发生过冲。因此，提供了一种自动压力调节器，用于向包括压电元件驱动型压力调节阀的流量调节器，设置在压力调节阀的输出侧的控制压力检测器和控制器提供气体压力，输入控制压力检测器的值P2和用于控制压力的设定值Pst，其中控制器使用比例控制系统向压力调节阀的压电元件驱动单元提供控制信号，以执行阀开度调节，其中比例控制器的控制系统设置为通过禁用积分作用来控制控制压力的残留偏差。

50. 发明授权

US08606412B2 Method for detecting malfunction of valve on the downstream side of throttle mechanism of pressure type flow control apparatus 有权
标题翻译：压力式流量控制装置节气门机构下游侧阀门故障检测方法
公开(公告)号：US08606412B2
公开(公告)日：2013-12-10
申请号：US12307554
申请日：2007-06-13
申请人： Masaaki Nagase , Ryousuke Dohi , Nobukazu Ikeda , Kouji Nishino , Kaoru Hirata , Katsuyuki Sugita , Atsushi Matsumoto
发明人： Masaaki Nagase , Ryousuke Dohi , Nobukazu Ikeda , Kouji Nishino , Kaoru Hirata , Katsuyuki Sugita , Atsushi Matsumoto
IPC分类号： G05D7/00
CPC分类号： G05D7/0635 , G01F1/36 , G01F15/005 , G01F15/022
摘要： With a pressure type flow control apparatus, a valve on the downstream side of a throttle mechanism is released and a flow rate setting value Qe inputted to the pressure type flow control apparatus is changed to detect the magnitude ΔV of change of a flow rate output signal Qo from the pressure type flow control apparatus while the flow rate setting value Qe is changed, so that normal functioning of the releasing operations of the valve on the downstream side of the throttle mechanism is confirmed when the magnitude ΔV of change of the flow rate output signal Qo is above the predetermined value. If the releasing operations are malfunctioning, the magnitude ΔV of changes is found to be below the predetermined value.
摘要翻译：利用压力式流量控制装置，释放节气门机构下游侧的阀，改变输入到压力式流量控制装置的流量设定值Qe，以检测流量输出信号的变化幅度DeltaV 当流量设定值Qe变化时，来自压力式流量控制装置的Qo，使得当流量输出的变化幅度DeltaV被确定时，在节气门机构的下游侧的阀的释放操作的正常功能被确认信号Qo高于预定值。如果释放操作发生故障，则发现变化幅度DeltaV低于预定值。

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