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41. 发明授权

US06614828B1 Wavelength selector for laser with adjustable angular dispersion 有权
公开(公告)号：US06614828B1
公开(公告)日：2003-09-02
申请号：US09920008
申请日：2001-07-31
申请人： Dirk Basting , Sergei V. Govorkov
发明人： Dirk Basting , Sergei V. Govorkov
IPC分类号： H01S310
CPC分类号： H01S3/08009 , H01S3/08004 , H01S3/106 , H01S3/1305 , H01S3/137 , H01S5/0687 , H01S5/141
摘要： A tunable laser is provided having a gain medium and a resonator for generating a laser beam, and an angular dispersion element. The laser further includes a beam expander with adjustable magnification for adjusting an angular dispersion provided by the dispersion element. The adjustable beam expander preferably includes one or two rotatable prisms. When two prisms are used, the prisms are preferably synchronously rotatable according to a preset ratio such that any changes in refraction angle due to the rotation of the first prism are automatically compensated by the rotation of the second prism. A single prism may serve both as a dispersion element and as a beam expansion element. A processor preferably monitors the linewidth and wavelength of the output beam and adjusts an orientation of the prism or prisms of the expansion unit, and the tilt of either a reflection grating or a highly reflective mirror of the resonator in a feedback loop.

42. 发明授权

US06487229B2 Beam delivery system for molecular fluorine (F2) laser 失效
公开(公告)号：US06487229B2
公开(公告)日：2002-11-26
申请号：US09965492
申请日：2001-09-26
申请人： Sergei V. Govorkov , Klaus Wolfgang Vogler , Frank Voss , Rainer Pätzel
发明人： Sergei V. Govorkov , Klaus Wolfgang Vogler , Frank Voss , Rainer Pätzel
IPC分类号： H01S322
CPC分类号： H01S3/225 , B23K26/12 , B23K26/128 , B23K26/705 , B23K2103/05 , G01J1/4257 , G03F7/70025 , G03F7/70558 , G03F7/70808 , H01S3/0014 , H01S3/134
摘要： A system is provided for delivering a laser beam of wavelength less than 200 nm from a laser, such as an F2 laser or ArF laser, through a sealed enclosure sealably connected to the laser, and preferably to another housing, leading ultimately to a workpiece. The enclosure is preferably evacuated and back-filled with an inert gas to adequately deplete any air, water, hydrocarbons or oxygen within the enclosure. Thereafter or alternatively, an inert gas flow is established and maintained within the enclosure during operation of the laser. The inert gas preferably has high purity, e.g., more than 99.5% and preferably more than 99.999%, wherein the inert is preferably nitrogen or a noble gas. The enclosure is preferably sealed by a window transparent to the sub-200 nm radiation for preventing contaminants generated in the enclosure from entering the housing and contaminating surfaces therein. The enclosure is preferably made of steel and/or copper, and the window is preferably made of CaF2.

43. 发明授权

US06463084B1 Device for on-line control of output power of vacuum-UV laser 失效
标题翻译：在线控制真空UV激光输出功率的装置
公开(公告)号：US06463084B1
公开(公告)日：2002-10-08
申请号：US09971796
申请日：2001-10-03
申请人： Sergei V. Govorkov , Gongxue Hua
发明人： Sergei V. Govorkov , Gongxue Hua
IPC分类号： H01S310
CPC分类号： H01S3/225 , B23K26/12 , B23K26/128 , B23K26/705 , B23K2103/04 , G01J1/4257 , G03F7/70025 , G03F7/70558 , G03F7/70808 , H01S3/0014 , H01S3/134
摘要： A beam delivery system for a laser emitting at a relevant wavelength of less than 200 nm is provided. The system includes a sealed enclosure connected to the laser and surrounding the path of the beam as it exits the laser resonator. The enclosure extends between the laser output coupler and a photodetector sensitive at the wavelength of the relevant laser emission. The interior of the enclosure, and thus the beam path between the output coupler and the detector, is substantially free of species that strongly photoabsorb radiation at the relevant laser emission wavelength. A beam splitting element diverts at least a portion of the beam for measurement by the detector. The beam splitting element preferably includes a beam splitting mirror, holographic beam sampler or diffraction grating. In addition, optics are preferably provided for filtering a visible portion of the diverted beam, so that substantially only a VUV portion of the diverted beam is received at the detector. The filtering optics preferably include a diffraction grating, holographic beam sampler or one or more dichroic mirrors.
摘要翻译：提供了用于在小于200nm的相关波长处发射的激光束的光束传送系统。该系统包括连接到激光器的密封外壳，并且当离开激光谐振器时围绕光束的路径。外壳在激光输出耦合器和在相关激光发射波长下敏感的光电探测器之间延伸。外壳的内部以及因此输出耦合器和检测器之间的光束路径基本上不含在相关的激光发射波长下强吸收辐射的物质。分束元件将至少一部分光束转移到检测器进行测量。分束元件优选地包括分束镜，全息光束采样器或衍射光栅。此外，优选地提供光学器件用于过滤转向光束的可见部分，使得在检测器处基本上只接收转向光束的VUV部分。滤光光学器件优选地包括衍射光栅，全息光束取样器或一个或多个二向色镜。

44. 发明授权

US6002697A Diode pumped laser with frequency conversion into UV and DUV range 失效
标题翻译：二极管泵浦激光器具有频率转换为UV和DUV范围
公开(公告)号：US6002697A
公开(公告)日：1999-12-14
申请号：US139214
申请日：1998-08-24
申请人： Sergei V. Govorkov , Uwe Stamm , Wolfgang V. Zschocka , Thomas Schroder
发明人： Sergei V. Govorkov , Uwe Stamm , Wolfgang V. Zschocka , Thomas Schroder
IPC分类号： G02F1/35 , G02F1/37 , H01S3/04
CPC分类号： G02F1/3501 , G02F1/37 , G02F2001/3505 , G02F2001/354 , G02F2001/3546 , H01S3/11 , H01S3/1603 , H01S3/1643
摘要： A solid state laser is provided including a rare earth-doped YAG, YLF, YVO, GSGG, YALO or GdVO oscillator crystal, at least one laser diode pumping source, a Q-switch short pulse generator, a frequency doubling stage and frequency quadrupling or quintupling stages. The frequency quadrupling or quintupling stages include a nonlinear optical crystal such as CLBO, BBO or LBO built into a housing. The housing is sealed off to prevent external moisture and other atmospheric impurities from accessing the crystal at its interior. The housing interior is configured for purging with one or more external inert gases or dry air through valve controls. The housing is equipped with a mechanism for controlling the temperature of the interior of the housing, and consequently for controlling the temperature of the crystal. The temperature controlling mechanism enables heating and cooling of the crystal, as well as maintaining the crystal at a constant selected temperature. The housing includes optical windows transparent for input and output radiation.
摘要翻译：提供固体激光器，其包括稀土掺杂YAG，YLF，YVO，GSGG，YALO或GdVO振荡晶体，至少一个激光二极管泵浦源，Q开关短脉冲发生器，倍频级和倍频四倍或五倍的阶段频率四倍或五倍级包括内置在外壳中的非线性光学晶体，例如CLBO，BBO或LBO。外壳被密封以防止外部水分和其他大气杂质进入其内部的水晶。外壳内部配置为通过一个或多个外部惰性气体或干燥空气通过阀门控制进行清洗。壳体配备有用于控制壳体内部的温度的机构，并且因此用于控制晶体的温度。温度控制机构能够对晶体进行加热和冷却，并且将晶体保持在恒定的选定温度。外壳包括透明的输入和输出辐射的光学窗口。

45. 发明授权

US07952602B2 Wide field diode-laser marker with swinging projection-optics 有权
标题翻译：宽场二极管激光标记与摆动投影光学
公开(公告)号：US07952602B2
公开(公告)日：2011-05-31
申请号：US12233026
申请日：2008-09-18
申请人： Sergei V. Govorkov , John H. Jerman
发明人： Sergei V. Govorkov , John H. Jerman
IPC分类号： B41J15/14 , B41J27/00
CPC分类号： B31D1/027
摘要： Apparatus for laser-marking on tape includes a laser arranged to emit a modulated beam of laser-radiation. Projection-optics are arranged to focus a beam to a spot on the tape. The tape is driven under the focal spot for scanning the beam in the length direction of the tape. The projection-optics are rotated reciprocally to scan the focal spot over the tape in a direction transverse to the length direction of the tape.
摘要翻译：用于在带上激光标记的装置包括布置成发射调制的激光辐射束的激光器。投影光学器件被布置成将光束聚焦到带上的斑点。磁带被驱动在焦点下方，以沿着磁带的长度方向扫描光束。投影光学器件被往复旋转以沿横向于带的长度方向的方向在胶带上扫描焦斑。

46. 发明申请

US20110064099A1 OPTICALLY-PUMPED EXTERNAL-CAVITY SURFACE-EMITTING SEMICONDUCTOR LASERS WITH FRONT-COOLED GAIN-STRUCTURES 有权
标题翻译：具有前冷却增益结构的光泵浦外壳表面发射半导体激光器
公开(公告)号：US20110064099A1
公开(公告)日：2011-03-17
申请号：US12558315
申请日：2009-09-11
申请人： Sergei V. Govorkov , R. Russel Austin
发明人： Sergei V. Govorkov , R. Russel Austin
IPC分类号： H01S3/04 , H01S3/091 , H01S3/083 , H01S5/00
CPC分类号： H01S5/183 , H01S3/07 , H01S3/08054 , H01S3/0816 , H01S3/083 , H01S3/1062 , H01S3/1066 , H01S5/0213 , H01S5/0217 , H01S5/02484 , H01S5/041 , H01S5/14
摘要： A semiconductor gain-structure functions as a gain-element in a laser-resonator. The gain-structure is bonded to a diamond heat-spreader that is peripherally cooled by a heat-sink configured to allow access to the gain-structure by laser-radiation circulating in the laser-resonator. In one example, the gain-structure is used as a transmissive gain-structure in a traveling-wave ring-resonator. In another example, the gain-structure surmounts a mirror-structure which functions as an end-mirror of a standing-wave laser-resonator.
摘要翻译：半导体增益结构在激光谐振器中用作增益元件。增益结构被结合到金刚石散热器，该金刚石散热器通过被配置为允许通过在激光谐振器中循环的激光辐射而进入增益结构的散热器周边地冷却。在一个示例中，增益结构用作行波环形谐振器中的透射增益结构。在另一示例中，增益结构克服了用作驻波激光谐振器的端镜的镜面结构。

47. 发明申请

US20100053299A1 WIDE FIELD DIODE-LASER MARKER WITH SWINGING PROJECTION-OPTICS 有权
标题翻译：具有闪烁投影光学的宽场二极管激光标记
公开(公告)号：US20100053299A1
公开(公告)日：2010-03-04
申请号：US12233026
申请日：2008-09-18
申请人： Sergei V. Govorkov , John H. Jerman
发明人： Sergei V. Govorkov , John H. Jerman
IPC分类号： B41J15/14
CPC分类号： B31D1/027
摘要： Apparatus for laser-marking on tape includes a laser arranged to emit a modulated beam of laser-radiation. Projection-optics are arranged to focus a beam to a spot on the tape. The tape is driven under the focal spot for scanning the beam in the length direction of the tape. The projection-optics are rotated reciprocally to scan the focal spot over the tape in a direction transverse to the length direction of the tape.
摘要翻译：用于在带上激光标记的装置包括布置成发射调制的激光辐射束的激光器。投影光学器件被布置成将光束聚焦到带上的斑点。磁带被驱动在焦点下方，以沿着磁带的长度方向扫描光束。投影光学器件被往复旋转以沿横向于带的长度方向的方向在胶带上扫描焦斑。

48. 发明授权

US07184216B2 Optical pulse duration extender 有权
标题翻译：光脉冲持续时间延长器
公开(公告)号：US07184216B2
公开(公告)日：2007-02-27
申请号：US11395737
申请日：2006-03-31
申请人： Sergei V. Govorkov , Luis A. Spinelli , William Eugene White , Murray Keith Reed
发明人： Sergei V. Govorkov , Luis A. Spinelli , William Eugene White , Murray Keith Reed
IPC分类号： G02B27/10 , H01S3/10 , H01S3/22 , G03B27/52
CPC分类号： G02B27/106 , G02B27/143 , H01S3/0057
摘要： An optical pulse extender includes a delay loop formed by a plurality of mirrors and a graded reflectivity beamsplitter. The mirrors and the beamsplitter are configured and aligned such that a pulse to be broadened makes a predetermined number of round trips in the delay loop and is incident on a different zone of the beamsplitter after each round trip. The different zones of the beamsplitter have different reflection values and different transmission values. These values are selected such that the pulse extender delivers a plurality of temporally and spatially separated replica pulses each thereof having about the same energy. The delivered replica pulses together provide an extended pulse having a longer duration than the input pulse. The replica pulses may be passed through a beam homogenizer to spatially homogenize the temporal characteristics of the extended pulse.
摘要翻译：光脉冲延长器包括由多个反射镜和渐变反射分束器形成的延迟环。反射镜和分束器被配置和对准，使得待扩展的脉冲在延迟环路中进行预定数量的往返，并且在每次往返之后入射到分束器的不同区域。分束器的不同区域具有不同的反射值和不同的透射值。这些值被选择为使得脉冲延长器递送多个时间上和空间上分离的复制脉冲，每个复制脉冲具有大约相同的能量。传送的副本脉冲一起提供具有比输入脉冲更长的持续时间的扩展脉冲。复制脉冲可以通过光束均化器以空间均匀扩展脉冲的时间特性。

49. 发明授权

US07035012B2 Optical pulse duration extender 有权
标题翻译：光脉冲持续时间延长器
公开(公告)号：US07035012B2
公开(公告)日：2006-04-25
申请号：US10790660
申请日：2004-03-01
申请人： Sergei V. Govorkov , Luis A. Spinelli , William Eugene White , Murray Keith Reed
发明人： Sergei V. Govorkov , Luis A. Spinelli , William Eugene White , Murray Keith Reed
IPC分类号： G02B27/10 , H01S3/10 , H01S3/22 , G03B27/52
CPC分类号： G02B27/106 , G02B27/143 , H01S3/0057
摘要： An optical pulse extender includes a delay loop formed by a plurality of mirrors and a graded reflectivity beamsplitter. The mirrors and the beamsplitter are configured and aligned such that a pulse to be broadened makes a predetermined number of round trips in the delay loop and is incident on a different zone of the beamsplitter after each round trip. The different zones of the beamsplitter have different reflection values and different transmission values. These values are selected such that the pulse extender delivers a plurality of temporally and spatially separated replica pulses each thereof having about the same energy. The delivered replica pulses together provide an extended pulse having a longer duration than the input pulse. The replica pulses may be passed through a beam homogenizer to spatially homogenize the temporal characteristics of the extended pulse.
摘要翻译：光脉冲延长器包括由多个反射镜和渐变反射分束器形成的延迟环。反射镜和分束器被配置和对准，使得待扩展的脉冲在延迟环路中进行预定数量的往返，并且在每次往返之后入射到分束器的不同区域。分束器的不同区域具有不同的反射值和不同的透射值。这些值被选择为使得脉冲延长器递送多个时间上和空间上分离的复制脉冲，每个复制脉冲具有大约相同的能量。传送的副本脉冲一起提供具有比输入脉冲更长的持续时间的扩展脉冲。复制脉冲可以通过光束均化器以空间均匀扩展脉冲的时间特性。

50. 发明授权

US06490306B2 Molecular fluorine laser with spectral linewidth of less than 1 pm 失效
公开(公告)号：US06490306B2
公开(公告)日：2002-12-03
申请号：US10114189
申请日：2002-04-01
申请人： Uwe Stamm , Sergei V. Govorkov
发明人： Uwe Stamm , Sergei V. Govorkov
IPC分类号： H01S322
CPC分类号： H01S3/106 , H01S3/0315 , H01S3/08004 , H01S3/08009 , H01S3/08031 , H01S3/0805 , H01S3/081 , H01S3/0812 , H01S3/1062 , H01S3/1305 , H01S3/137 , H01S3/225 , H01S3/2258
摘要： A narrow band molecular fluorine laser system includes an oscillator and an amplifier, wherein the oscillator produces a 157 nm beam having a linewidth less than 1 pm and the amplifier increases the power of the beam above a predetermined amount, such as more than one or several Watts. The oscillator includes a discharge chamber filled with a laser gas including molecular fluorine and a buffer gas, electrodes within the discharge chamber connected to a discharge circuit for energizing the molecular fluorine, and a resonator including the discharge chamber for generating a laser beam having a wavelength around 157 nm. Line-narrowing optics are included intra- and/or extra-resonator for reducing the linewidth of the laser beam to less than 1 pm. The amplifier may be the same or a different discharge chamber, and optical and/or electronic delays may be used for timing pulses from the oscillator to reach the amplifier at a maximum in the discharge current of the amplifier.

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