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1. 发明申请

US20080291962A1 BANDWIDTH-LIMITED AND LONG PULSE MASTER OSCILLATOR POWER OSCILLATOR LASER SYSTEMS 有权
标题翻译： BANDWIDTH有限公司和长脉冲主振荡器功率振荡器激光系统
公开(公告)号：US20080291962A1
公开(公告)日：2008-11-27
申请号：US12170249
申请日：2008-07-09
申请人： Sergei V. Govorkov , Alexander O.W. Weissner , Timur V. Misyuryaev , Alexander Jacobson , Gongxue Hua , Rainer Paetzel , Thomas Schroeder , Hans-Stephan Albrecht
发明人： Sergei V. Govorkov , Alexander O.W. Weissner , Timur V. Misyuryaev , Alexander Jacobson , Gongxue Hua , Rainer Paetzel , Thomas Schroeder , Hans-Stephan Albrecht
IPC分类号： H01S3/22
CPC分类号： H01S3/10092 , H01S3/08031 , H01S3/083 , H01S3/097 , H01S3/225 , H01S2301/02
摘要： Laser systems have a line-narrowed master oscillator and a power oscillator for amplifying the output of the master oscillator. The power oscillator includes optical arrangements for limiting the bandwidth of radiation that can be amplified. The limited amplification bandwidth of the power oscillator is relatively broad compared to that of the output of the master oscillator, but narrower than would be the case without the bandwidth limiting arrangements. The bandwidth narrowing arrangements of the power oscillator function primarily to restrict the bandwidth of amplified spontaneous emission generated by the power oscillator.
摘要翻译：激光系统具有线窄的主振荡器和用于放大主振荡器的输出的功率振荡器。功率振荡器包括用于限制可放大的辐射带宽的光学装置。与主振荡器的输出相比，功率振荡器的有限放大带宽相对较宽，但比没有带宽限制布置的情况更窄。功率振荡器的带宽窄化布置主要用于限制由功率振荡器产生的放大的自发发射的带宽。

2. 发明授权

US06690703B1 Molecular fluorine laser system 失效
标题翻译：分子氟激光系统
公开(公告)号：US06690703B1
公开(公告)日：2004-02-10
申请号：US10211971
申请日：2002-08-02
申请人： Klaus Wolfgang Vogler , Sergei V. Govorkov , Gongxue Hua , Frank Voss , Elko Bergmann
发明人： Klaus Wolfgang Vogler , Sergei V. Govorkov , Gongxue Hua , Frank Voss , Elko Bergmann
IPC分类号： H01S3225
CPC分类号： H01S3/225 , H01S3/08 , H01S3/2308 , H01S3/2366
摘要： A molecular fluorine laser includes a discharge chamber filled with a gas mixture including molecular fluorine and a buffer gas and not including a laser active rare gas, multiple electrodes within the discharge chamber defining a discharge region therebetween connected to a pulsed discharge circuit for applying discharge pulses to the electrodes for energizing the gas mixture, and a resonator including the discharge chamber for generating an oscillator laser beam at a wavelength around 157 nm and a bandwidth of less than 0.6 pm. The laser further includes a power amplifier for increasing the energy of the attenuated oscillator laser beam to a second predetermined energy for lithographic processing, a line-narrowing unit for reducing the bandwidth, a low intensity suppressor module to suppress the weaker lines of the F2-laser, and a synchronization unit to synchronize the oscillator and amplifier.
摘要翻译：分子氟激光器包括：填充有分子氟和缓冲气体并且不包括激光活性稀有气体的气体混合物的放电室，放电室内的多个电极限定其间连接到脉冲放电电路的放电区域，用于施加放电脉冲到用于激励气体混合物的电极，以及包括用于产生波长约157nm和带宽小于0.6μm的振荡器激光束的放电室的谐振器。激光器还包括用于将衰减振荡器激光束的能量增加到用于光刻处理的第二预定能量的功率放大器，用于减小带宽的线窄变换单元，用于抑制F2- 激光器和同步单元来同步振荡器和放大器。

3. 发明授权

US07418022B2 Bandwidth-limited and long pulse master oscillator power oscillator laser systems 有权
标题翻译：带宽限制和长脉冲主振荡器功率振荡器激光系统
公开(公告)号：US07418022B2
公开(公告)日：2008-08-26
申请号：US11142648
申请日：2005-06-01
申请人： Sergei V. Govorkov , Alexander O. W. Wiessner , Timur V. Misyuryaev , Alexander Jacobson , Gongxue Hua , Rainer Paetzel , Thomas Schroeder , Hans-Stephan Albrecht
发明人： Sergei V. Govorkov , Alexander O. W. Wiessner , Timur V. Misyuryaev , Alexander Jacobson , Gongxue Hua , Rainer Paetzel , Thomas Schroeder , Hans-Stephan Albrecht
IPC分类号： H01S3/22
CPC分类号： H01S3/10092 , H01S3/08031 , H01S3/083 , H01S3/097 , H01S3/225 , H01S2301/02
摘要： Laser systems have a line-narrowed master oscillator and a power oscillator for amplifying the output of the master oscillator. The power oscillator includes optical arrangements for limiting the bandwidth of radiation that can be amplified. The limited amplification bandwidth of the power oscillator is relatively broad compared to that of the output of the master oscillator, but narrower than would be the case without the bandwidth limiting arrangements. The bandwidth narrowing arrangements of the power oscillator function primarily to restrict the bandwidth of amplified spontaneous emission generated by the power oscillator.
摘要翻译：激光系统具有线窄的主振荡器和用于放大主振荡器的输出的功率振荡器。功率振荡器包括用于限制可放大的辐射带宽的光学装置。与主振荡器的输出相比，功率振荡器的有限放大带宽相对较宽，但比没有带宽限制布置的情况更窄。功率振荡器的带宽窄化布置主要用于限制由功率振荡器产生的放大的自发发射的带宽。

4. 发明授权

US06442182B1 Device for on-line control of output power of vacuum-UV laser 失效
公开(公告)号：US06442182B1
公开(公告)日：2002-08-27
申请号：US09598552
申请日：2000-06-21
申请人： Sergei V. Govorkov , Gongxue Hua
发明人： Sergei V. Govorkov , Gongxue Hua
IPC分类号： H01S313
CPC分类号： H01S3/225 , B23K26/12 , B23K26/128 , B23K26/705 , B23K2103/04 , G01J1/4257 , G03F7/70025 , G03F7/70558 , G03F7/70808 , H01S3/0014 , H01S3/134
摘要： A beam delivery system for a laser emitting at a relevant wavelength of less than 200 nm is provided. The system includes a sealed enclosure connected to the laser and surrounding the path of the beam as it exits the laser resonator. The enclosure extends between the laser output coupler and a photodetector sensitive at the wavelength of the relevant laser emission. The interior of the enclosure, and thus the beam path between the output coupler and the detector, is substantially free of species that strongly photoabsorb radiation at the relevant laser emission wavelength. A beam splitting element diverts at least a portion of the beam for measurement by the detector. The beam splitting element preferably includes a beam splitting mirror, holographic beam sampler or diffraction grating. In addition, optics are preferably provided for filtering a visible portion of the diverted beam, so that substantially only a VUV portion of the diverted beam is received at the detector. The filtering optics preferably include a diffraction grating, holographic beam sampler or one or more dichroic mirrors.

5. 发明授权

US07760788B2 Bandwidth-limited and long pulse master oscillator power oscillator laser systems 有权
标题翻译：带宽限制和长脉冲主振荡器功率振荡器激光系统
公开(公告)号：US07760788B2
公开(公告)日：2010-07-20
申请号：US12170249
申请日：2008-07-09
申请人： Sergei V. Govorkov , Alexander O. W. Wiessner , Timur V. Misyuryaev , Alexander Jacobson , Gongxue Hua , Rainer Paetzel , Thomas Schroeder , Hans-Stephan Albrecht
发明人： Sergei V. Govorkov , Alexander O. W. Wiessner , Timur V. Misyuryaev , Alexander Jacobson , Gongxue Hua , Rainer Paetzel , Thomas Schroeder , Hans-Stephan Albrecht
IPC分类号： H01S3/22
CPC分类号： H01S3/10092 , H01S3/08031 , H01S3/083 , H01S3/097 , H01S3/225 , H01S2301/02
摘要： Laser systems have a line-narrowed master oscillator and a power oscillator for amplifying the output of the master oscillator. The power oscillator includes optical arrangements for limiting the bandwidth of radiation that can be amplified. The limited amplification bandwidth of the power oscillator is relatively broad compared to that of the output of the master oscillator, but narrower than would be the case without the bandwidth limiting arrangements. The bandwidth narrowing arrangements of the power oscillator function primarily to restrict the bandwidth of amplified spontaneous emission generated by the power oscillator.
摘要翻译：激光系统具有线窄的主振荡器和用于放大主振荡器的输出的功率振荡器。功率振荡器包括用于限制可放大的辐射带宽的光学装置。与主振荡器的输出相比，功率振荡器的有限放大带宽相对较宽，但比没有带宽限制布置的情况更窄。功率振荡器的带宽窄化布置主要用于限制由功率振荡器产生的放大的自发发射的带宽。

6. 发明授权

US07245420B2 Master-oscillator power-amplifier (MOPA) excimer or molecular fluorine laser system with long optics lifetime 有权
公开(公告)号：US07245420B2
公开(公告)日：2007-07-17
申请号：US11654780
申请日：2007-01-18
申请人： Sergei V. Govorkov , Gongxue Hua , Timur Misuryaev , Alexander O. Wiessner , Thomas Schmidt , Rainer Paetzel
发明人： Sergei V. Govorkov , Gongxue Hua , Timur Misuryaev , Alexander O. Wiessner , Thomas Schmidt , Rainer Paetzel
IPC分类号： H01S3/00 , G02B27/14
CPC分类号： G03F7/7055 , H01S3/0057 , H01S3/0835 , H01S3/235
摘要： The lifetime of optical components used in deep-UV (DUV) excimer laser systems, including systems in a MOPA configuration, can be increased by reducing the intensity of pulses incident upon these components. In one approach, an output pulse can be “stretched” in order to reduce the peak power of the pulse. A pulse stretching component can be used, which can be mounted outside the laser enclosure with a horizontal beam path in order to provide a delay line with a minimum impact on the laser system footprint. The horizontal beam path also can minimize the number of optical components in the arm containing the high power beam. A beamsplitting prism can be used with the delay line to avoid the rapid degradation of coatings otherwise exposed to intense UV beams. The prism can expand the beam in the delay line in order to minimize beam intensity and losses due to reflection.

7. 发明授权

US06970492B2 DUV and VUV laser with on-line pulse energy monitor 有权
标题翻译： DUV和VUV激光器在线脉冲能量监测器
公开(公告)号：US06970492B2
公开(公告)日：2005-11-29
申请号：US10438240
申请日：2003-05-14
申请人： Sergei V. Govorkov , Gongxue Hua
发明人： Sergei V. Govorkov , Gongxue Hua
IPC分类号： H01S3/00 , H01S3/034 , H01S3/225 , H01S3/22 , H01S3/08
CPC分类号： H01S3/225 , H01S3/0014 , H01S3/034 , H01S3/2258
摘要： A beam parameter monitoring unit for coupling with an excimer or molecular fluorine (F2) laser resonator that produces an output beam having a wavelength below 200 nm includes an on-line laser pulse energy detector. This, in turn, allows output pulse energy stabilization to the same degree of accuracy, which is crucial for stability of exposure dose and other process parameters in microlithography and industrial applications.
摘要翻译：用于与产生具有低于200nm的波长的输出光束的准分子或分子氟（F 2 N 2）激光谐振器耦合的光束参数监测单元包括在线激光脉冲能量检测器。这反过来又允许输出脉冲能量稳定达到相同的准确度，这对于微光刻和工业应用中的曝光剂量和其它工艺参数的稳定性至关重要。

8. 发明授权

US06463084B1 Device for on-line control of output power of vacuum-UV laser 失效
标题翻译：在线控制真空UV激光输出功率的装置
公开(公告)号：US06463084B1
公开(公告)日：2002-10-08
申请号：US09971796
申请日：2001-10-03
申请人： Sergei V. Govorkov , Gongxue Hua
发明人： Sergei V. Govorkov , Gongxue Hua
IPC分类号： H01S310
CPC分类号： H01S3/225 , B23K26/12 , B23K26/128 , B23K26/705 , B23K2103/04 , G01J1/4257 , G03F7/70025 , G03F7/70558 , G03F7/70808 , H01S3/0014 , H01S3/134
摘要： A beam delivery system for a laser emitting at a relevant wavelength of less than 200 nm is provided. The system includes a sealed enclosure connected to the laser and surrounding the path of the beam as it exits the laser resonator. The enclosure extends between the laser output coupler and a photodetector sensitive at the wavelength of the relevant laser emission. The interior of the enclosure, and thus the beam path between the output coupler and the detector, is substantially free of species that strongly photoabsorb radiation at the relevant laser emission wavelength. A beam splitting element diverts at least a portion of the beam for measurement by the detector. The beam splitting element preferably includes a beam splitting mirror, holographic beam sampler or diffraction grating. In addition, optics are preferably provided for filtering a visible portion of the diverted beam, so that substantially only a VUV portion of the diverted beam is received at the detector. The filtering optics preferably include a diffraction grating, holographic beam sampler or one or more dichroic mirrors.
摘要翻译：提供了用于在小于200nm的相关波长处发射的激光束的光束传送系统。该系统包括连接到激光器的密封外壳，并且当离开激光谐振器时围绕光束的路径。外壳在激光输出耦合器和在相关激光发射波长下敏感的光电探测器之间延伸。外壳的内部以及因此输出耦合器和检测器之间的光束路径基本上不含在相关的激光发射波长下强吸收辐射的物质。分束元件将至少一部分光束转移到检测器进行测量。分束元件优选地包括分束镜，全息光束采样器或衍射光栅。此外，优选地提供光学器件用于过滤转向光束的可见部分，使得在检测器处基本上只接收转向光束的VUV部分。滤光光学器件优选地包括衍射光栅，全息光束取样器或一个或多个二向色镜。

9. 发明授权

US08265117B2 Bandwidth-limited and long pulse master oscillator power oscillator laser systems 有权
标题翻译：带宽限制和长脉冲主振荡器功率振荡器激光系统
公开(公告)号：US08265117B2
公开(公告)日：2012-09-11
申请号：US12814334
申请日：2010-06-11
申请人： Sergei V. Govorkov , Alexander O. W. Weissner , Timur V. Misyuryaev , Alexander Jacobson , Gongxue Hua , Rainer Paetzel , Thomas Schroeder , Hans-Stephen Albrecht
发明人： Sergei V. Govorkov , Alexander O. W. Weissner , Timur V. Misyuryaev , Alexander Jacobson , Gongxue Hua , Rainer Paetzel , Thomas Schroeder , Hans-Stephen Albrecht
IPC分类号： H01S3/22
CPC分类号： H01S3/10092 , H01S3/08031 , H01S3/083 , H01S3/097 , H01S3/225 , H01S2301/02
摘要： Laser systems have a line-narrowed master oscillator and a power oscillator for amplifying the output of the master oscillator. The power oscillator includes optical arrangements for limiting the bandwidth of radiation that can be amplified. The limited amplification bandwidth of the power oscillator is relatively broad compared to that of the output of the master oscillator, but narrower than would be the case without the bandwidth limiting arrangements. The bandwidth narrowing arrangements of the power oscillator function primarily to restrict the bandwidth of amplified spontaneous emission generated by the power oscillator.
摘要翻译：激光系统具有线窄的主振荡器和用于放大主振荡器的输出的功率振荡器。功率振荡器包括用于限制可放大的辐射带宽的光学装置。与主振荡器的输出相比，功率振荡器的有限放大带宽相对较宽，但比没有带宽限制布置的情况更窄。功率振荡器的带宽窄化布置主要用于限制由功率振荡器产生的放大的自发发射的带宽。

10. 发明授权

US07184204B2 Master-oscillator power-amplifier (MOPA) excimer or molecular fluorine laser system with long optics lifetime 有权
公开(公告)号：US07184204B2
公开(公告)日：2007-02-27
申请号：US10881103
申请日：2004-06-30
申请人： Sergei V. Govorkov , Gongxue Hua , Timur Misuryaev , Alexander O. Wiessner , Thomas Schmidt , Rainer Paetzel
发明人： Sergei V. Govorkov , Gongxue Hua , Timur Misuryaev , Alexander O. Wiessner , Thomas Schmidt , Rainer Paetzel
IPC分类号： H01S3/00 , H01S3/22
CPC分类号： G03F7/7055 , H01S3/0057 , H01S3/0835 , H01S3/235
摘要： The lifetime of optical components used in deep-UV (DUV) excimer laser systems, including systems in a MOPA configuration, can be increased by reducing the intensity of pulses incident upon these components. In one approach, an output pulse can be “stretched” in order to reduce the peak power of the pulse. A pulse stretching component can be used, which can be mounted outside the laser enclosure with a horizontal beam path in order to provide a delay line with a minimum impact on the laser system footprint. The horizontal beam path also can minimize the number of optical components in the arm containing the high power beam. A beamsplitting prism can be used with the delay line to avoid the rapid degradation of coatings otherwise exposed to intense UV beams. The prism can expand the beam in the delay line in order to minimize beam intensity and losses due to reflection.

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