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41. 发明授权

US5865938A Wafer chuck for inducing an electrical bias across wafer heterojunctions 失效
标题翻译：用于在晶片异质结上引起电偏置的晶片卡盘
公开(公告)号：US5865938A
公开(公告)日：1999-02-02
申请号：US670042
申请日：1996-06-25
申请人： Eric Peeters , Joel A. Kubby
发明人： Eric Peeters , Joel A. Kubby
IPC分类号： C23F4/00 , B81C1/00 , H01L21/302 , H01L21/3065 , H01L21/683 , H01L49/00 , C23F1/08 , C23F1/00
CPC分类号： B81C1/00531 , H01L21/6833
摘要： A dry etch apparatus for micromachining a substrate having a first and a second layer of dissimilar materials joined together at a heterojunction includes a chuck for holding the substrate. The chuck has a first electrical contact positionable to contact the first layer, and second electrical contact positionable to contact the second layer, with the first and second electrical contacts being electrically isolated from each other. A voltage source is connected to the first electrical contact of the chuck to apply a voltage potential across the heterojunction of the substrate. When a plasma containing chemically reactive ions is directed against the second layer, etching of non-masked regions continues unless it is substantially stopped at the voltage biased substrate heterojunction. The substrate can be cooled or periodically recoated with erodable protective material to limit sidewall damage to the substrate while still allowing downward etching into the substrate. This dry etch process is well suited for construction of dimensionally accurate microdevices and microelectromechanical systems.
摘要翻译：用于微加工具有异质结连接在一起的第一和第二不同材料层的衬底的干蚀刻装置包括用于保持衬底的卡盘。卡盘具有可定位成与第一层接触的第一电接触件和可定位成接触第二层的第二电接触件，第一和第二电接触件彼此电隔离。电压源连接到卡盘的第一电触点，以跨越衬底的异质结施加电压电位。当含有化学反应性离子的等离子体指向第二层时，非掩蔽区域的蚀刻继续进行，除非其基本上停在电压偏置衬底异质结上。可以用可侵蚀的保护材料冷却或周期性地重新涂覆衬底，以限制对衬底的侧壁损伤，同时仍然允许向下蚀刻到衬底中。这种干蚀刻工艺非常适用于尺寸精确的微型器件和微机电系统的构造。

42. 发明授权

US5835975A Paper property sensing system 失效
标题翻译：纸属性感知系统
公开(公告)号：US5835975A
公开(公告)日：1998-11-10
申请号：US666765
申请日：1996-06-19
申请人： Eric Peeters , Joel A. Kubby , Fred F. Hubble, III , Stanley J. Wallace , Alan J. Werner, Jr. , R. Enrique Viturro
发明人： Eric Peeters , Joel A. Kubby , Fred F. Hubble, III , Stanley J. Wallace , Alan J. Werner, Jr. , R. Enrique Viturro
IPC分类号： G01L5/00 , B81B3/00 , G01B7/06 , G01N19/02 , G01N33/34
CPC分类号： G01N19/02 , G01B7/06 , G01N33/346
摘要： A sensor system for measuring physical properties of paper. The paper property sensor system includes a surface and a diaphragm opposed to each other. The small diaphragm includes a first pair and a second pair p-type piezoresistors. Each piezoresistor of the first pair has a longitudinal axis and is located perpendicular to and very close to one of the long edges of the diaphragm. Each piezoresistor of the second pair has a longitudinal axis and is located between and parallel to first pair of piezoresistors, and away from the short edges of the diaphragm. Coupling the first pair of piezoresistors with the second pair via a Wheatstone bridge produces a voltage representative of the shear force exerted by a sheet.
摘要翻译：用于测量纸张物理性能的传感器系统。纸张性质传感器系统包括彼此相对的表面和隔膜。小隔膜包括第一对和第二对p型压电电阻。第一对的每个压敏电阻器具有纵向轴线并且垂直于并且非常接近隔膜的一个长边缘定位。第二对的每个压敏电阻具有纵向轴线并且位于第一对压敏电阻器之间并且平行于第一对压敏电阻器并且远离隔膜的短边缘。通过惠斯通电桥将第一对压敏电阻与第二对耦合产生代表由片施加的剪切力的电压。

43. 发明授权

US07116855B2 Optical shuttle system and method used in an optical switch 失效
标题翻译：用于光开关的光梭系统和方法
公开(公告)号：US07116855B2
公开(公告)日：2006-10-03
申请号：US10879094
申请日：2004-06-30
申请人： Fuqian Yang , Joel A. Kubby , Alex T. Tran , Jun Ma
发明人： Fuqian Yang , Joel A. Kubby , Alex T. Tran , Jun Ma
IPC分类号： G02B6/35
CPC分类号： G02B6/3508 , G02B6/3546 , G02B6/3548 , G02B6/3576 , G02B6/358 , G02B6/3584 , G02B6/3596
摘要： An optical shuttle system for routing signals in a communications system that includes a terminal connected to a power source, a shuttle that includes waveguides used for routing the signals, and a beam connected to the terminal and the shuttle so that the beam suspends the shuttle. When power from the power source is applied to the terminal, the beam drives a movement of the shuttle. Furthermore, a method of using an optical shuttle system for routing signals in a communications system, the method includes connecting a terminal to a power source, connecting a shuttle to a beam to suspend the shuttle, and applying power from the power source to the terminal so that the beam drives a movement of the shuttle in a direction substantially perpendicular to a direction of the beam.
摘要翻译：一种用于在通信系统中路由信号的光梭系统，其包括连接到电源的终端，包括用于路由信号的波导的梭，以及连接到终端和梭的梁，使得梁悬挂在梭上。当来自电源的电力施加到端子时，梁驱动梭子的运动。此外，一种使用光梭系统在通信系统中路由信号的方法，所述方法包括将终端连接到电源，将梭子连接到波束以暂停梭子，以及将来自电源的功率施加到终端使得光束在基本上垂直于光束的方向的方向上驱动梭子的运动。

44. 发明授权

US07106441B2 Structure and method for a microelectromechanic cylindrical reflective diffraction grating spectrophotometer 有权
$Structure and method for a microelectromechanic cylindrical reflective diffraction grating spectrophotometer$
标题翻译：微机电圆柱反射衍射光栅分光光度计的结构与方法
公开(公告)号：US07106441B2
公开(公告)日：2006-09-12
申请号：US10672207
申请日：2003-09-26
申请人： Decai Sun , Joel A. Kubby , Jingkuang Chen , Alex T. Tran , Patrick Y. Maeda
发明人： Decai Sun , Joel A. Kubby , Jingkuang Chen , Alex T. Tran , Patrick Y. Maeda
IPC分类号： G01J3/20
CPC分类号： G01J3/06 , G01J3/02 , G01J3/0256 , G01J3/20
摘要： A tunable microelectromechanical (MEMS) spectrophotometer with a rotating cylindrical reflective diffraction grating is integrated with a photodetector and an optical fiber light source on a Rowland circle on a monolithic silicon substrate.
摘要翻译：具有旋转圆柱反射衍射光栅的可调谐微机电（MEMS）分光光度计与单片硅衬底上的Rowland圆上的光电检测器和光纤光源集成。

45. 再颁专利

USRE39261E1 Method and apparatus for an integrated laser beam scanner 有权
标题翻译：集成激光束扫描仪的方法和装置
公开(公告)号：USRE39261E1
公开(公告)日：2006-09-05
申请号：US10014563
申请日：2001-12-14
申请人： Philip D. Floyd , Decai Sun , Joel A. Kubby
发明人： Philip D. Floyd , Decai Sun , Joel A. Kubby
IPC分类号： G02B26/08
CPC分类号： G02B26/10 , G02B26/0833 , G02B26/0841 , G02B26/085
摘要： A solid state laser beam scanning system having a single crystal silicon deflection and scanning mirror integrated with a laser diode. By combining the techniques of deep reactive ion etching of silicon with solder bump bonding techniques, completed and tested laser diodes are integrated with silicon substrates supporting micro-electro-mechanical systems layers.
摘要翻译：具有与激光二极管集成的单晶硅偏转和扫描反射镜的固态激光束扫描系统。通过将硅的深反应离子蚀刻技术与焊料凸块接合技术相结合，完成和测试的激光二极管与支持微电子机械系统层的硅衬底集成。

46. 再颁专利

USRE38437E1 Method and apparatus for an integrated laser beam scanner using a carrier substrate 有权
标题翻译：使用载体衬底的集成激光束扫描器的方法和装置
公开(公告)号：USRE38437E1
公开(公告)日：2004-02-24
申请号：US10022917
申请日：2001-12-20
申请人： Philip D. Floyd , Decai Sun , Joel A. Kubby
发明人： Philip D. Floyd , Decai Sun , Joel A. Kubby
IPC分类号： G02B2608
CPC分类号： G02B26/085 , G02B26/0833 , G02B26/0841 , G02B26/105 , G06K7/10653 , H01L2224/16225
摘要： An solid state scanning system having a single crystal silicon deflection mirror and scanning mirror is integrated with a light source. Separation of the micro-electro-mechanical systems and light emitters on separate substrates allows the use of flip-chip and solder bump bonding techniques for mounting of the light sources. The separate substrates are subsequently full wafer bonded together to create an integrated solid state scanning system.

47. 发明授权

US06662448B2 Method of fabricating a micro-electro-mechanical fluid ejector 失效
标题翻译：微机电液体喷射器的制造方法
公开(公告)号：US06662448B2
公开(公告)日：2003-12-16
申请号：US09863637
申请日：2001-05-23
申请人： Joel A. Kubby , Jingkuang Chen , Feixia Pan
发明人： Joel A. Kubby , Jingkuang Chen , Feixia Pan
IPC分类号： B21D5376
CPC分类号： H04R17/00 , B41J2/14314 , B41J2/16 , B41J2/1628 , B41J2/1629 , B41J2/1631 , B41J2/1639 , B41J2/1642 , B41J2002/041 , Y10T29/42 , Y10T29/49128 , Y10T29/49156 , Y10T29/49401
摘要： A micro-electromechanical fluid ejector that is easily fabricated in a standard polysilicon surface micromachining process is disclosed, which can be batch fabricated at low cost using existing external foundry capabilities. In addition, the surface micromachining process has proven to be compatible with integrated microelectronics, allowing for the monolithic integration of the actuator with addressing electronics. A voltage drive mode and a charge drive mode for the power source actuating a deformable membrane is also disclosed.
摘要翻译：公开了容易在标准多晶硅表面微加工工艺中制造的微机电流体喷射器，其可以使用现有的外部铸造能力以低成本批量制造。此外，表面微加工工艺已被证明与集成的微电子学兼容，允许致动器与寻址电子器件的单片集成。还公开了用于致动可变形膜的电源的电压驱动模式和充电驱动模式。

48. 发明授权

US06567448B1 Scanning III-V compound light emitters integrated with Si-based actuators 有权
标题翻译：扫描III-V复合发光体与Si基致动器集成
公开(公告)号：US06567448B1
公开(公告)日：2003-05-20
申请号：US09210315
申请日：1998-12-11
申请人： Decai Sun , Ross D. Bringans , Christopher L. Chua , Philip D. Floyd , Eric Peeters , Joel A. Kubby , Alex T. Tran
发明人： Decai Sun , Ross D. Bringans , Christopher L. Chua , Philip D. Floyd , Eric Peeters , Joel A. Kubby , Alex T. Tran
IPC分类号： H01S500
CPC分类号： H01S5/18308 , H01S5/021 , H01S5/02252 , H01S5/02288 , H01S5/4087 , H01S5/423 , H01S5/426
摘要： A III-V compound light emitter is integrated with Si-based actuators. The proposed devices take advantage of the superior optical properties of III-V compounds and the superior mechanical properties of Si, as well as mature fabrication technologies of Si-Micro-Electro-Mechanical Systems (MEMS). The emitter can be a light emitting diode (LED), a vertical cavity surface emitting laser (VCSEL) or an edge emitting laser. Electro or magnetic based actuation from Si-based actuators provides
摘要翻译： III-V复合光发射器与Si基致动器集成。所提出的器件利用了III-V化合物的优异光学性能和Si的优异机械性能，以及Si-Micro-Electro-Mechanical Systems（MEMS）的成熟制造技术。发射极可以是发光二极管（LED），垂直腔表面发射激光器（VCSEL）或边缘发射激光器。基于Si的致动器的基于电或磁的致动器提供

49. 发明授权

US06523928B2 Method of treating a substrate employing a ballistic aerosol marking apparatus 有权
标题翻译：使用弹道气溶胶标记装置处理基材的方法
公开(公告)号：US06523928B2
公开(公告)日：2003-02-25
申请号：US09163808
申请日：1998-09-30
申请人： Eric Peeters , Jaan Noolandi , Raj B. Apte , Philip D. Floyd , Jonathan A. Small , Gregory J. Kovacs , Meng H. Lean , Armin R. Volkel , Steven B. Bolte , An-Chang Shi , Frederick J. Endicott , Gregory B. Anderson , Dan A. Hays , Joel A. Kubby , Warren B. Jackson , Karen A. Moffat , T. Brian McAneney , Richard P. N. Veregin , Maria N. V. McDougall , Danielle C. Boils , Paul D. Szabo
发明人： Eric Peeters , Jaan Noolandi , Raj B. Apte , Philip D. Floyd , Jonathan A. Small , Gregory J. Kovacs , Meng H. Lean , Armin R. Volkel , Steven B. Bolte , An-Chang Shi , Frederick J. Endicott , Gregory B. Anderson , Dan A. Hays , Joel A. Kubby , Warren B. Jackson , Karen A. Moffat , T. Brian McAneney , Richard P. N. Veregin , Maria N. V. McDougall , Danielle C. Boils , Paul D. Szabo
IPC分类号： B41J215
CPC分类号： B41J2/14 , B41J2/211 , B41J2202/02
摘要： A method for treating a substrate is disclosed in which a propellant stream is passed through a channel and directed toward a substrate. Substrate pre-marking or post-marking treatment material is controllably introduced into the propellant stream and imparted with sufficient kinetic energy thereby to be made incident upon a substrate. A multiplicity of channels for directing the propellant and treatment material allow for high throughput, high resolution in-situ treatment. Marking materials and treatment materials may be introduced into the channel and mixed therein prior to being made incident on the substrate, or mixed or superimposed on the substrate without registration. One example is a single-pass, full-color printer.
摘要翻译：公开了一种用于处理基底的方法，其中推进剂流通过通道并指向基底。将基板预标记或后标记处理材料可控地引入推进剂流中并赋予足够的动能，从而使其入射到基底上。用于引导推进剂和处理材料的多个通道允许高产量，高分辨率原位处理。可以将标记材料和处理材料引入通道并在其入射到基板之前混合，或者混合或叠加在基板上而不进行配准。一个例子是单程全彩色打印机。

50. 发明授权

US06357865B1 Micro-electro-mechanical fluid ejector and method of operating same 有权
标题翻译：微机电液体喷射器及其运行方法
公开(公告)号：US06357865B1
公开(公告)日：2002-03-19
申请号：US09416329
申请日：1999-10-12
申请人： Joel A. Kubby , Jingkuang Chen , Feixia Pan
发明人： Joel A. Kubby , Jingkuang Chen , Feixia Pan
IPC分类号： B41J2045
CPC分类号： B41J2/14314 , B41J2/14 , B41J2/16 , B41J2/1628 , B41J2/1629 , B41J2/1631 , B41J2/1639 , B41J2/1642 , B41J2002/041
摘要： A micro-electromechanical fluid ejector that is easily fabricated in a standard polysilicon surface micromachining process is disclosed, which can be batch fabricated at low cost using existing external foundry capabilities. In addition, the surface micromachining process has proven to be compatible with integrated microelectronics, allowing for the monolithic integration of the actuator with addressing electronics. A voltage drive mode and a charge drive mode for the power source actuating a deformable membrane is also disclosed.
摘要翻译：公开了容易在标准多晶硅表面微加工工艺中制造的微机电流体喷射器，其可以使用现有的外部铸造能力以低成本批量制造。此外，表面微加工工艺已被证明与集成的微电子学兼容，允许致动器与寻址电子器件的单片集成。还公开了用于致动可变形膜的电源的电压驱动模式和充电驱动模式。

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