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    • 49. 发明授权
    • Methods for removing silicon nitride and other materials during fabrication of contacts
    • 在触点制造过程中去除氮化硅和其他材料的方法
    • US07977249B1
    • 2011-07-12
    • US12074912
    • 2008-03-07
    • Xinye LiuYu YangChiukin Steven Lai
    • Xinye LiuYu YangChiukin Steven Lai
    • H01L21/302H01L21/461
    • H01L21/31116H01L21/31111H01L21/76814H01L21/76825H01L21/76826H01L21/76834
    • Methods for removing silicon nitride and elemental silicon during contact preclean process involve converting these materials to materials that are more readily etched by fluoride-based etching methods, and subsequently removing the converted materials by a fluoride-based etch. Specifically, silicon nitride and elemental silicon may be treated with an oxidizing agent, e.g., with an oxygen-containing gas in a plasma, or with O2 or O3 in the absence of plasma to produce a material that is more rich in Si—O bonds and is more easily etched with a fluoride-based etch. Alternatively, silicon nitride or elemental silicon may be doped with a number of doping elements, e.g., hydrogen, to form materials which are more easily etched by fluoride based etches. The methods are particularly useful for pre-cleaning contact vias residing in a layer of silicon oxide based material because they minimize the unwanted increase of critical dimension of contact vias.
    • 在接触预清洗过程中去除氮化硅和元素硅的方法包括将这些材料转化为通过基于氟化物的蚀刻方法更容易蚀刻的材料,并且随后通过基于氟化物的蚀刻除去转化的材料。 具体地说,氮化硅和元素硅可以用氧化剂处理,例如在等离子体中含有氧的气体,或者在没有等离子体的情况下用O 2或O 3处理,以产生更富含Si-O键的材料 并且更容易用基于氟化物的蚀刻蚀刻。 或者,氮化硅或元素硅可以掺杂多个掺杂元素,例如氢,以形成更容易被基于氟化物的蚀刻蚀刻的材料。 这些方法对于预清洁驻留在氧化硅基材料层中的接触通孔特别有用,因为它们使接触通孔的临界尺寸的不期望的增加最小化。
    • 50. 发明授权
    • Triple-tap password entry
    • 三重密码输入
    • US07788498B2
    • 2010-08-31
    • US11187090
    • 2005-07-22
    • Yu YangHui Wan
    • Yu YangHui Wan
    • H04K1/00H04L9/00
    • H04N21/41407G06F21/83H04N7/17345H04N21/42204H04N21/812
    • Triple-tap password entry is described. In an embodiment, a password is received as a sequence of characters that are each entered as one or more keypad inputs, such as with a television remote control. The keypad inputs for each of the characters are displayed as the sequence of characters are received, and a character of the password is obscured after the character has been received such that the characters are consecutively obscured to conceal the password. A character of the password can be obscured when a subsequent character is received, or when a time duration of the character display meets and/or exceeds a time limit.
    • 描述三重密码输入。 在一个实施例中,密码作为一系列的字符被接收,每个字符序列被输入为一个或多个键盘输入,例如用电视遥控器。 每个字符的键盘输入被显示为接收到字符序列,并且在接收到该字符之后密码的字符被遮蔽,使得这些字符被连续遮蔽以隐藏该密码。 当接收到后续字符时,或者当字符显示的持续时间满足和/或超过时间限制时,密码的字符可能被遮蔽。