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    • 44. 发明授权
    • Polishing apparatus
    • 抛光设备
    • US08100743B2
    • 2012-01-24
    • US12285941
    • 2008-10-16
    • Osamu NabeyaTetsuji TogawaHozumi YasudaKoji SaitoMakoto Fukushima
    • Osamu NabeyaTetsuji TogawaHozumi YasudaKoji SaitoMakoto Fukushima
    • B24B5/00
    • B24B37/32
    • A polishing apparatus is used for polishing a substrate such as a semiconductor wafer to a flat mirror finish. The polishing apparatus includes a polishing table having a polishing surface, a top ring body configured to hold and press a substrate against the polishing surface, a retainer ring provided at an outer peripheral portion of the top ring body and configured to press the polishing surface, and a retainer ring guide fixed to the top ring body and configured to be brought into sliding contact with a ring member of the retainer ring to guide a movement of said ring member. Either one of sliding contact surfaces of the ring member and the retainer ring guide which are brought into sliding contact with each other comprises a low friction material.
    • 抛光装置用于将半导体晶片等基板研磨成平面镜面。 抛光装置包括具有研磨面的研磨台,配置为将基板保持并压靠在研磨面上的顶环体,设置在顶环体的外周部并构造成按压抛光面的保持环, 以及保持环导向件,其固定到所述顶环主体并且被构造成与所述保持环的环形构件滑动接触以引导所述环构件的运动。 彼此滑动接触的环构件和保持器环导向件的滑动接触表面中的任一个包括低摩擦材料。
    • 50. 发明申请
    • Loader work apparatus
    • 装载机工作装置
    • US20070243052A1
    • 2007-10-18
    • US11726377
    • 2007-03-21
    • Hiroki FukudomeMasataka TakagiKoji SaitoEiji MiyazakiShuichi Takeshita
    • Hiroki FukudomeMasataka TakagiKoji SaitoEiji MiyazakiShuichi Takeshita
    • B66C23/00
    • E02F3/382E02F3/627
    • A work apparatus to be mounted to a work vehicle includes: a pair of cylindrical masts 35 disposed erect on right and left sides of a vehicle body having a control valve; a boom 91 pivotally supported to the masts; an implement pivotally supported to the boom; a boom cylinder 60 for pivoting the boom; an implement cylinder 61 for operating the implement; a boom piping system communicating the control valve with the boom cylinder; and an implement piping system communicating the control valve with the implement cylinder; wherein a channel constituting member 84 constituting the boom piping system extends vertically within each mast; one end of the channel constituting member 84 extends to the outside at a lower portion of the mast to be connected with the control valve; and the other end of the channel constituting member 84 extends to the outside at an upper portion of the mast 35 to be connected with boom cylinder 60.
    • 要安装到作业车辆上的作业装置包括:一对直立在具有控制阀的车身的右侧和左侧的圆柱形桅杆35; 枢轴支撑在桅杆上的吊杆91; 可枢转地支撑在起重臂上的工具; 用于枢转吊杆的动臂缸60; 用于操作工具的工具缸61; 将控制阀与动臂缸连通的吊杆管道系统; 以及将控制阀与工具缸连通的工具管道系统; 其中构成动臂管道系统的通道构成构件84在每个桅杆内垂直延伸; 通道构成构件84的一端在与控制阀连接的桅杆的下部延伸到外部; 并且通道构成构件84的另一端在桅杆35的上部延伸到外部,以与动臂缸60连接。