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    • 43. 发明授权
    • Transistor with controllable compensation regions
    • 具有可控补偿区域的晶体管
    • US08803205B2
    • 2014-08-12
    • US13484490
    • 2012-05-31
    • Armin WillmerothFranz HirlerHans WeberMichael Treu
    • Armin WillmerothFranz HirlerHans WeberMichael Treu
    • H01L29/66
    • H01L29/7813H01L27/088H01L27/098H01L29/0634H01L29/407H01L29/41766H01L29/42356H01L29/7803H01L29/7831
    • A semiconductor device includes a gate terminal, at least one control terminal and first and second load terminals and at least one device cell. The at least one device cell includes a MOSFET device having a load path and a control terminal, the control terminal coupled to the gate terminal and a JFET device having a load path and a control terminal, the load path connected in series with the load path of the MOSFET device between the load terminals. The at least one device cell further includes a first coupling transistor having a load path and a control terminal, the load path coupled between the control terminal of the JFET device and one of the source terminal and the gate terminal, and the control terminal coupled to the at least one control terminal of the transistor device.
    • 半导体器件包括栅极端子,至少一个控制端子以及第一和第二负载端子以及至少一个器件单元。 所述至少一个器件单元包括具有负载路径和控制端子的MOSFET器件,所述控制端子耦合到所述栅极端子以及具有负载路径和控制端子的JFET器件,所述负载路径与所述负载路径串联连接 的MOSFET器件在负载端子之间。 所述至少一个器件单元还包括具有负载路径和控制端子的第一耦合晶体管,所述负载路径耦合在所述JFET器件的控制端子与所述源极端子和所述栅极端子之一之间,并且所述控制端子耦合到 晶体管器件的至少一个控制端子。
    • 46. 发明授权
    • Semiconductor device with self-charging field electrodes and compensation regions
    • 具有自充电场电极和补偿区的半导体器件
    • US08637940B2
    • 2014-01-28
    • US13331843
    • 2011-12-20
    • Hans Weber
    • Hans Weber
    • H01L29/66
    • H01L29/872H01L29/0623H01L29/0634H01L29/0653H01L29/1095H01L29/407H01L29/7802H01L29/7813H01L29/861
    • A semiconductor device includes a drift region of a first doping type, a junction between the drift region and a device region, a compensation region of a second doping type, and at least one field electrode structure arranged between the drift region and the compensation region. The at least one field electrode includes a field electrode and a field electrode dielectric adjoining the field electrode. The field electrode dielectric is arranged between the field electrode and the drift region and between the field electrode and the compensation. The field electrode dielectric includes a first opening through which the field electrode is coupled to drift region and a second opening through which the field electrode is coupled to the compensation region.
    • 半导体器件包括第一掺杂类型的漂移区域,漂移区域和器件区域之间的结,第二掺杂类型的补偿区域以及布置在漂移区域和补偿区域之间的至少一个场电极结构。 所述至少一个场电极包括场电极和邻接所述场电极的场电极电介质。 场电极介质布置在场电极和漂移区之间以及场电极和补偿之间。 场电极电介质包括第一开口,场电极通过该第一开口耦合到漂移区,第二开口通过该场电极耦合到补偿区。
    • 47. 发明申请
    • Charge Compensation Semiconductor Device
    • 充电补偿半导体器件
    • US20140008717A1
    • 2014-01-09
    • US13541884
    • 2012-07-05
    • Hans WeberFranz Hirler
    • Hans WeberFranz Hirler
    • H01L29/78H01L21/336
    • H01L29/7802H01L29/0634H01L29/0696H01L29/0878H01L29/1095H01L29/407H01L29/408H01L29/41766H01L29/66727H01L29/7816
    • A semiconductor device is provided. The semiconductor device includes a semiconductor body and a source metallization which is arranged on the semiconductor body. The semiconductor body includes in a cross-section a drift region of a first conductivity type, a first body region of a second conductivity type which adjoins the drift region, a first compensation region of the second conductivity type which adjoins the first body region, has a lower maximum doping concentration than the first body region and forms a first pn-junction with the drift region, and a first charge trap. The first charge trap adjoins the first compensation region and includes a field plate and an insulating region which adjoins the drift region and partly surrounds the field plate. The source metallization is arranged in resistive electric connection with the first body region. Further, a method for producing a semiconductor device is provided.
    • 提供半导体器件。 半导体器件包括半导体本体和布置在半导体本体上的源极金属化。 半导体本体包括第一导电类型的漂移区域,邻接漂移区域的第二导电类型的第一体区域,邻接第一体区域的第二导电类型的第一补偿区域具有 比第一体区低的最大掺杂浓度,并与漂移区形成第一pn结,以及第一电荷阱。 第一电荷陷波器与第一补偿区域相邻并且包括场板和与漂移区域相邻并部分地围绕场板的绝缘区域。 源极金属化被布置成与第一体区电阻电连接。 此外,提供了一种用于制造半导体器件的方法。
    • 49. 发明申请
    • SEMICONDUCTOR DEVICE WITH VOLTAGE COMPENSATION STRUCTURE
    • 具有电压补偿结构的半导体器件
    • US20130001674A1
    • 2013-01-03
    • US13174319
    • 2011-06-30
    • Hans-Joachim SchulzeHans Weber
    • Hans-Joachim SchulzeHans Weber
    • H01L29/78H01L29/06H01L21/22
    • H01L29/7827H01L29/0634H01L29/0653H01L29/1054H01L29/165H01L29/167H01L29/36H01L29/66712H01L29/73H01L29/7395H01L29/7802H01L29/808H01L29/872
    • A semiconductor device with a high voltage compensation component is manufactured by etching a trench into an epitaxial semiconductor material doped with n-type dopant atoms and p-type dopant atoms and disposing a first semiconductor or insulating material along one or more sidewalls of the trench. The first semiconductor or insulating material has a dopant diffusion constant which is at least 2× different for the n-type dopant atoms than the p-type dopant atoms. A second semiconductor material is disposed in the trench along the first semiconductor or insulating material. The second semiconductor material has a different dopant diffusion constant than the first semiconductor or insulating material. More n-type dopant atoms or p-type dopant atoms are diffused from the epitaxial semiconductor material through the first semiconductor or insulating material into the second semiconductor material than the other type of dopant atoms so that a lateral charge separation occurs between the second semiconductor material and the epitaxial semiconductor material.
    • 通过将沟槽蚀刻成掺杂有n型掺杂剂原子和p型掺杂剂原子的外延半导体材料并且沿沟槽的一个或多个侧壁设置第一半导体或绝缘材料来制造具有高电压补偿分量的半导体器件。 第一半导体或绝缘材料具有与p型掺杂剂原子相比对于n型掺杂剂原子至少为2×不同的掺杂剂扩散常数。 第二半导体材料沿着第一半导体或绝缘材料设置在沟槽中。 第二半导体材料具有与第一半导体或绝缘材料不同的掺杂剂扩散常数。 比其他类型的掺杂剂原子,更多的n型掺杂剂原子或p型掺杂剂原子从外延半导体材料通过第一半导体或绝缘材料扩散到第二半导体材料中,使得在第二半导体材料 和外延半导体材料。
    • 50. 发明授权
    • Method for producing a gate electrode structure
    • 栅电极结构的制造方法
    • US08288230B2
    • 2012-10-16
    • US12894141
    • 2010-09-30
    • Hans WeberStefan GamerithRoman KnoeflerKurt SorschagAnton Mauder
    • Hans WeberStefan GamerithRoman KnoeflerKurt SorschagAnton Mauder
    • H01L21/336
    • H01L29/7813H01L29/0653H01L29/1095H01L29/407H01L29/4236H01L29/4238H01L29/66734H01L29/7803
    • A transistor with a gate electrode structure is produced by providing a semiconductor body with a first surface, and with a first sacrificial layer extending in a vertical direction of the semiconductor body from the first surface. A first trench extending from the first surface into the semiconductor body is formed by removing the sacrificial layer in a section adjacent the first surface. A second trench is formed by isotropically etching the semiconductor body in the first trench. A third trench is formed below the second trench by removing at least a part of the first sacrificial layer below the second trench. A dielectric layer is formed which at least covers sidewalls of the third trench and which only covers sidewalls of the second trench. A gate electrode is formed on the dielectric layer in the second trench. The gate electrode and dielectric layer in the second trench form the gate electrode structure.
    • 具有栅电极结构的晶体管通过提供具有第一表面的半导体本体和从第一表面沿半导体本体的垂直方向延伸的第一牺牲层来制造。 通过在与第一表面相邻的部分中去除牺牲层来形成从第一表面延伸到半导体本体的第一沟槽。 通过在第一沟槽中各向同性蚀刻半导体本体来形成第二沟槽。 通过去除第二沟槽下方的第一牺牲层的至少一部分,在第二沟槽下方形成第三沟槽。 形成介电层,其至少覆盖第三沟槽的侧壁并仅覆盖第二沟槽的侧壁。 栅电极形成在第二沟槽中的电介质层上。 第二沟槽中的栅电极和电介质层形成栅电极结构。