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41. 发明授权

US06423174B1 Apparatus and insertless method for forming cavity substrates using coated membrane 失效
标题翻译：使用涂覆膜形成腔体衬底的装置和无插入方法
公开(公告)号：US06423174B1
公开(公告)日：2002-07-23
申请号：US08668291
申请日：1996-06-21
申请人： Jon A. Casey , Govindarajan Natarajan , Robert W. Pasco , Vincent P. Peterson
发明人： Jon A. Casey , Govindarajan Natarajan , Robert W. Pasco , Vincent P. Peterson
IPC分类号： B32B3120
CPC分类号： B32B18/00 , B32B37/0023 , B32B2038/042 , B32B2309/12 , B32B2315/02 , C04B35/10 , C04B35/581 , C04B35/6455 , C04B2235/658 , C04B2237/343 , C04B2237/366 , C04B2237/62 , C04B2237/64 , H01L21/4807
摘要： The present invention relates generally to a new apparatus and method for forming cavities in semiconductor substrates without the necessity of using an insert. More particularly, the invention encompasses an apparatus and a method for fabricating cavities in semiconductor substrates wherein a coated membrane sheet is placed over the cavity prior to lamination and caused to conform to the contour of the cavity, thus preventing collapse of, or damage to, the cavity shelves during the lamination process. After the lamination process, the coated membrane is conveniently removed without causing damage to the cavity shelves or paste pull-outs.
摘要翻译：本发明一般涉及一种用于在半导体衬底中形成空腔的新装置和方法，而不需要使用插入件。更具体地，本发明包括一种用于在半导体衬底中制造空腔的装置和方法，其中在层压之前将涂覆的膜片放置在空腔上方并使其符合空腔的轮廓，从而防止凹陷或损坏，层压过程中的腔架。在层压处理之后，方便地去除涂覆的膜，而不会损坏腔架或糊状物拉出。

42. 发明授权

US5788808A Apparatus for forming cavity substrates using compressive pads 失效
标题翻译：用于使用压缩垫形成腔体衬底的装置
公开(公告)号：US5788808A
公开(公告)日：1998-08-04
申请号：US834304
申请日：1997-04-15
申请人： Govindarajan Natarajan , Robert W. Pasco , Charles H. Perry , Vincent P. Peterson
发明人： Govindarajan Natarajan , Robert W. Pasco , Charles H. Perry , Vincent P. Peterson
IPC分类号： H01L21/48 , B32B31/20
CPC分类号： B32B37/0023 , B32B37/26 , H01L21/4807 , B32B2315/02 , H01L2924/15787
摘要： The present invention relates generally to a new apparatus and method for forming cavities in semiconductor substrates without the necessity of using an insert. More particularly, the invention encompasses an apparatus and a method for fabricating cavities in semiconductor substrates wherein a cured thick compressible elastic pad is placed over the cavity prior to lamination and caused to conform to the contour of the cavity, thus preventing collapse of, or damage to, the cavity shelves or corners during the lamination process. After the lamination process, the cured thick compressible elastic pad is conveniently removed from the cavity area without causing any damage to the cavity shelves or corners or having any paste pull-outs. This pad can be reused multiple number of times to form these MLC cavity substrates.
摘要翻译：本发明一般涉及一种用于在半导体衬底中形成空腔的新装置和方法，而不需要使用插入件。更具体地说，本发明包括一种用于在半导体衬底中制造空腔的装置和方法，其中在层压之前将固化的厚的可压缩弹性垫放置在空腔上方并使其符合空腔的轮廓，从而防止破坏或损坏到层压过程中的腔架或角落。在层压处理之后，固化的厚的可压缩弹性垫可以方便地从空腔区域移除，而不会对腔架或角落造成任何损坏或具有任何糊状物抽出。该垫可以重复使用多次以形成这些MLC空腔衬底。

43. 发明授权

US08916017B2 Glass sheet laminating system 有权
标题翻译：玻璃板层压系统
公开(公告)号：US08916017B2
公开(公告)日：2014-12-23
申请号：US13456516
申请日：2012-04-26
申请人： Govindarajan Natarajan , Nathaniel David Wetmore
发明人： Govindarajan Natarajan , Nathaniel David Wetmore
IPC分类号： B29C65/00 , B32B37/00 , B32B17/00 , B32B17/10 , C03C27/00 , G02C7/00 , B60J1/00 , E06B3/00 , E06B5/00 , E06B7/00 , E06B3/24
CPC分类号： B32B17/10018 , B32B17/10889 , B32B17/10954 , B32B37/12 , B32B38/1841 , B32B38/1858 , B32B38/1866 , B32B2315/08 , B32B2457/20
摘要： A contoured glass sheet laminating system may include a glass-side vacuum bed, a laminate-side vacuum bed and a lamination actuator. The glass-side vacuum bed may include a vacuum backside and a mold-receiving side and may have sufficient permeability to permit a vacuum system to pull a vacuum across a thickness of the glass-side vacuum bed between the vacuum backside and the mold-receiving side of the glass-side vacuum bed. The laminate-side vacuum bed may include a vacuum backside and a thin-film loading side and may have sufficient permeability to permit a vacuum system to pull a vacuum across a thickness of the laminate-side vacuum bed between the vacuum backside and the thin-film loading side of the of the laminate-side vacuum bed.
摘要翻译：成型玻璃板层压系统可以包括玻璃侧真空床，层压板真空床和层压致动器。玻璃侧真空床可以包括真空背面和模具接收侧，并且可以具有足够的渗透性，以允许真空系统在真空背面和模具接收之间拉动真空穿过玻璃侧真空床的厚度侧玻璃侧真空床。层压体侧真空床可以包括真空背面和薄膜装载侧，并且可以具有足够的渗透性，以允许真空系统在真空背面和薄膜真空床之间拉动层压体侧真空床的厚度，层压板真空床的膜装载侧。

44. 发明授权

US07908906B2 Fluidic test apparatus and method 有权
标题翻译：流体测试装置和方法
公开(公告)号：US07908906B2
公开(公告)日：2011-03-22
申请号：US11468089
申请日：2006-08-29
申请人： Govindarajan Natarajan , Emmanuel Delamarche , Eric A Eckberg , James N Humenik , Kathleen A McGroddy-Goetz , Scott Partington , Christopher F Perrera , Marco G Trivella , Timothy M Wiwel
发明人： Govindarajan Natarajan , Emmanuel Delamarche , Eric A Eckberg , James N Humenik , Kathleen A McGroddy-Goetz , Scott Partington , Christopher F Perrera , Marco G Trivella , Timothy M Wiwel
IPC分类号： G01N13/04
CPC分类号： G01N13/04 , A61B2010/0067
摘要： An apparatus, system and method for determining the osmolarity of a fluid. The system includes an apparatus having: a chip with a substantially planar top surface; a first circuit portion and a second circuit portion, each having a plurality of redundant electrically conductive lines disposed on the top surface; and a gap disposed between the first circuit portion and the second circuit portion, wherein a circuit is created when a fluid sample bridges the gap and connects the first circuit portion and the second circuit portion.
摘要翻译：用于测定流体渗透压的装置，系统和方法。该系统包括具有：具有基本平坦的顶表面的芯片的装置; 第一电路部分和第二电路部分，每个具有设置在顶表面上的多个冗余导电线; 以及设置在第一电路部分和第二电路部分之间的间隙，其中当流体样品桥接间隙并连接第一电路部分和第二电路部分时产生电路。

45. 发明申请

US20090040864A1 MICROFLUID MIXER, METHODS OF USE AND METHODS OF MANUFACTURE THEREOF 失效
标题翻译：微流控混合器，其使用方法及其制造方法
公开(公告)号：US20090040864A1
公开(公告)日：2009-02-12
申请号：US11834973
申请日：2007-08-07
申请人： Govindarajan Natarajan
发明人： Govindarajan Natarajan
IPC分类号： B01F15/06 , C04B33/32
CPC分类号： C04B41/91 , B01F11/0045 , B01F13/0059 , B01F15/065 , B01F2015/062 , C04B37/001 , C04B37/042 , C04B2237/34 , C04B2237/341 , C04B2237/343 , C04B2237/346 , C04B2237/348 , C04B2237/366 , C04B2237/62 , C04B2237/704
摘要： Disclosed herein is a mixer comprising a base plate; a top plate in intimate contact with a surface of the base plate; the intimate contact preventing a fluid loss from the bottom plate; the top plate comprising a plurality of first ports for the entry of a first fluid and a second fluid; a mixing chamber in fluid communication with the plurality of first ports; a first heating element; and an exit channel for removing an intimate mixture of the first fluid and the second fluid; and a reciprocatory device in physical contact with the mixing chamber; the reciprocatory device being operative to agitate the first fluid and the second fluid.
摘要翻译：本文公开了一种包括基板的混合器; 顶板与基板的表面紧密接触; 紧密接触防止底板流体流失; 所述顶板包括用于进入第一流体和第二流体的多个第一端口; 与所述多个第一端口流体连通的混合室; 第一加热元件; 以及用于去除第一流体和第二流体的紧密混合物的出口通道; 以及与所述混合室物理接触的往复装置; 往复运动装置可操作以搅拌第一流体和第二流体。

46. 发明申请

US20080190545A1 METHOD FOR PROVIDING UNIAXIAL LOAD DISTRIBUTION FOR LAMINATE LAYERS OF MULTILAYER CERAMIC CHIP CARRIERS 有权
标题翻译：用于提供多层陶瓷芯片运输机层压板单相负载分配的方法
公开(公告)号：US20080190545A1
公开(公告)日：2008-08-14
申请号：US12105622
申请日：2008-04-18
申请人： Jay A. Bunt , Donald W. Diangelo , Cristian Docu , Thomas Foley , Melvin R. Gottschalk , Lisa A. Hamilton , Thomas A. Kline , Mark J. LaPlante , Hsichang Liu , Sebastian Loscerbo , Govindarajan Natarajan , Olga A. Otieno , Renee L. Weisman
发明人： Jay A. Bunt , Donald W. Diangelo , Cristian Docu , Thomas Foley , Melvin R. Gottschalk , Lisa A. Hamilton , Thomas A. Kline , Mark J. LaPlante , Hsichang Liu , Sebastian Loscerbo , Govindarajan Natarajan , Olga A. Otieno , Renee L. Weisman
IPC分类号： B32B37/26 , B32B37/10
CPC分类号： B32B37/0007 , B32B37/26 , B32B2315/02 , H05K1/0306 , H05K3/0052 , H05K3/4611 , H05K3/4629 , H05K2201/09781 , H05K2203/0169 , H05K2203/068 , Y10T156/1052 , Y10T156/108
摘要： An apparatus for providing uniform axial load distribution for laminate layers of multilayer ceramic chip carriers includes a base plate configured to support a plurality of green sheet layers thereon, the base plate having at least one resiliently mounted load support bar disposed adjacent outer edges of the base plate. The load support bar is mounted on one or more biasing members such that the top surface of the support bar extends above the top surface of the base plate by a selected distance.
摘要翻译：一种用于为多层陶瓷芯片载体层压层提供均匀的轴向载荷分布的装置，包括：底板，其被配置为在其上支撑多个生片层，所述底板具有至少一个弹性安装的负载支撑杆，其邻近所述底座的外边缘设置盘子。负载支撑杆安装在一个或多个偏压构件上，使得支撑杆的顶表面在基板的顶表面上延伸选定的距离。

47. 发明申请

US20070065647A1 Hot pressing ceramic distortion control 失效
标题翻译：热压陶瓷失真控制
公开(公告)号：US20070065647A1
公开(公告)日：2007-03-22
申请号：US10595550
申请日：2003-12-05
申请人： Govindarajan Natarajan , Raschid Bezama
发明人： Govindarajan Natarajan , Raschid Bezama
IPC分类号： B32B18/00 , C03B29/00
CPC分类号： B32B18/00 , C04B35/645 , C04B2237/32 , C04B2237/343 , C04B2237/366 , C04B2237/561 , C04B2237/562 , C04B2237/565 , C04B2237/567 , C04B2237/62 , C04B2237/64 , C04B2237/66 , C04B2237/702 , H01L21/4857 , H05K1/0306 , H05K3/4611 , H05K3/4629 , H05K2201/09781 , Y10T156/108 , Y10T428/24926
摘要： A method to control the post sinter distortion of hot pressing sintered multilayer ceramic laminate by placing a non-densifying structure in the green ceramic laminate prior to sintering. One or more non-densifying structures are placed on one or more ceramic greensheets which are then stacked and laminated to form a green ceramic laminate. The laminate is then sintered and the non-densifying structure will control the dimensions of the hot pressed multilayer ceramic substrate. The method can be used to control post sinter dimensions in MLC substrates manufactured as either single or multi-up substrates by placing the non-densifying structure in the kerf area between the individual product ups prior to sintering.
摘要翻译：一种通过在烧结之前在生坯陶瓷层压板中放置非致密化结构来控制热压烧结多层陶瓷层压体的烧结后变形的方法。将一个或多个非致密结构放置在一个或多个陶瓷刮板上，然后将其堆叠并层压以形成生坯陶瓷层压板。然后将层压体烧结，并且非致密化结构将控制热压多层陶瓷基板的尺寸。该方法可用于控制通过在烧结之前将非致密化结构放置在各个产品之间的切口区域中，将MLC衬底中的烧结后尺寸制作为单层或多层衬底。

48. 发明申请

US20050287044A1 TEST APPARATUS AND METHOD 审中-公开
标题翻译：测试装置和方法
公开(公告)号：US20050287044A1
公开(公告)日：2005-12-29
申请号：US10710183
申请日：2004-06-24
申请人： Govindarajan Natarajan
发明人： Govindarajan Natarajan
IPC分类号： B01L3/00
CPC分类号： B01L3/50273 , B01L3/5025 , B01L3/502707 , B01L2400/0406 , B01L2400/0688
摘要： An apparatus and method is described for testing interactions between multiple reagents or components by means of a flow distribution body configured to have a three-dimensional network of conduits including feed holes for dispensing fluid, connected to a capillary channel bounded on at least one surface by a receiving surface, which in turn is connected to capillary flow promotion chimneys. The receiving surface may be a surface of a detachable receiving plate. Each feed hole is configured to terminate at a capillary flow control means at the intersection of the capillary channel to the feed hole. A uniform layer of reagent is formed or deposited on the receiving surface along the capillary channel. The feed hole, capillary channel and capillary flow promotion chimneys are configured so that when fluid is dispensed into the feed hole, capillary forces promote continuous flow of fluid along the capillary channel from the feed hole to the flow promotion chimneys until the trailing meniscus of the fluid in the feed hole stops at the capillary flow control means.
摘要翻译：描述了一种用于测试多个试剂或组分之间的相互作用的装置和方法，所述流动分布主体被配置成具有三维网络的导管，所述导管的三维网络包括用于分配流体的进料孔，其连接到通过限定在至少一个表面上的毛细管通道接收表面又连接到毛细管流动促进烟囱。接收表面可以是可拆卸接收板的表面。每个进料孔构造成在毛细管通道与进料孔交叉处的毛细管流动控制装置处终止。沿着毛细通道在接收表面上形成或沉积均匀的试剂层。进料孔，毛细管通道和毛细管流动促进烟囱被构造成使得当流体被分配到进料孔中时，毛细管力促使流体沿着毛细管通道从进料孔到流动促进烟囱的连续流动，直到尾部弯液面进料孔中的流体在毛细管流动控制装置处停止。

49. 发明授权

US06261927B1 Method of forming defect-free ceramic structures using thermally depolymerizable surface layer 失效
标题翻译：使用可热解聚表面层形成无缺陷陶瓷结构的方法
公开(公告)号：US06261927B1
公开(公告)日：2001-07-17
申请号：US09302943
申请日：1999-04-30
申请人： Govindarajan Natarajan , Richard F. Indyk , Vincent P. Peterson , Krishna G. Sachdev
发明人： Govindarajan Natarajan , Richard F. Indyk , Vincent P. Peterson , Krishna G. Sachdev
IPC分类号： H01L2130
CPC分类号： H01L21/481 , H01L23/49894 , H01L2924/0002 , H01L2924/09701 , H01L2924/12044 , Y10S438/976 , H01L2924/00
摘要： This invention relates generally to a new method of forming semiconductor substrates with defect-free surface metallurgical features. In particular, the invention related to a method for providing surface protected ceramic green sheet laminates using at least one thermally depolymerizable surface layer. More particularly, the invention encompasses a method for fabricating semiconductor substrates wherein a thermally depolymerizable/decomposable surface film is placed over a ceramic green sheet stack or assembly prior to lamination and caused to conform to the surface topography of the green sheet during lamination. The invention also encompasses a method for fabricating surface protected green sheet laminates which can be sized or diced without causing process related defects on the ceramic surface. After lamination the thermally depolymerizable/decomposable film is conveniently and cleanly removed due to thermal depolymerization and burn-off of volatile species during the sintering process, thus providing surface defect-free ceramic substrates.
摘要翻译：本发明一般涉及一种形成具有无缺陷表面冶金特征的半导体衬底的新方法。特别地，本发明涉及使用至少一个可热解聚表面层来提供表面保护的陶瓷生片层叠体的方法。更具体地说，本发明包括一种制造半导体衬底的方法，其中在层压之前将热可解聚/可分解的表面薄膜放置在陶瓷生片层或组件上方并使其在叠层过程中符合生片的表面形貌。本发明还包括用于制造表面保护的生片层压板的方法，其可以在陶瓷表面上不引起工艺相关缺陷的尺寸或切割。在层压之后，由于在烧结过程中挥发物质的热解聚和燃烧，因此可方便且清洁地除去热可分解/可分解的膜，从而提供无表面缺陷的陶瓷基材。

50. 发明授权

US5707480A Apparatus for forming multiple cavity products 失效
标题翻译：用于形成多个腔体产品的装置
公开(公告)号：US5707480A
公开(公告)日：1998-01-13
申请号：US530500
申请日：1995-09-19
申请人： Raschid Jose Bezama , John Ulrich Knickerbocker , Govindarajan Natarajan , Joseph Gang Zhou
发明人： Raschid Jose Bezama , John Ulrich Knickerbocker , Govindarajan Natarajan , Joseph Gang Zhou
IPC分类号： H01L21/48 , B32B31/04 , B32B31/20
CPC分类号： H01L21/486 , B32B37/0023 , B32B37/26 , H01L21/4857 , B32B2315/02
摘要： The present invention relates generally to a new apparatus and method for simultaneously laminating a plurality of substrates having at least one cavity. More particularly, the invention encompasses apparatus and method for fabricating cavities in MLC (multi-layer ceramic). A membrane with or without an opening is placed on the top surface of the unlaminated green sheet having at least one cavity and then standard pressure is applied to laminate the green sheets, while simultaneously a counter pressure is applied in the cavity to prevent the cavity from deforming or collapsing. This is done to simultaneously form a plurality of cavity substrates.
摘要翻译：本发明一般涉及用于同时层压具有至少一个空腔的多个基板的新装置和方法。更具体地说，本发明涵盖用于在MLC（多层陶瓷）中制造空腔的装置和方法。具有或不具有开口的膜被放置在具有至少一个空腔的未层压生片的顶表面上，然后施加标准压力以层压生片，同时在空腔中施加反压力以防止空腔变形或塌陷。这样做同时形成多个空腔基板。

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