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    • 49. 发明授权
    • Semiconductor device and method of manufacturing the same
    • 半导体装置及其制造方法
    • US07190017B2
    • 2007-03-13
    • US11022773
    • 2004-12-28
    • Yoshitaka SasagoTakashi Kobayashi
    • Yoshitaka SasagoTakashi Kobayashi
    • H01L29/76
    • H01L27/11526G11C16/0491H01L27/115H01L27/11521H01L27/11531
    • Reliability of a semiconductor device having a nonvolatile memory comprising first through third gate electrodes is enhanced. With a flash memory having first gate electrodes (floating gate electrodes), second gate electrodes (control gate electrodes) and third gate electrodes, isolation parts are formed in a self-aligned manner against patterns of a conductor film for forming the third gate electrodes by filling up the respective isolation grooves and a gate insulator film for select nMISes in a peripheral circuit region is formed prior to the formation of the isolation parts. By so doing, deficiency with the gate insulator film for the select nMISes, caused by stress occurring to the isolation parts, can be reduced. Further, with the semiconductor device including the case of stacked memory cells, the patterns of the conductor film for forming the third gate electrodes, serving as a mask for forming the isolation parts in the self-aligned manner, can be formed without misalignment against channels.
    • 具有包括第一至第三栅电极的非易失性存储器的半导体器件的可靠性得到增强。 利用具有第一栅电极(浮栅电极),第二栅电极(控制栅电极)和第三栅电极的闪速存储器,隔离部分以自对准的方式形成,以抵抗用于形成第三栅电极的导体膜的图案 填充相应的隔离沟槽,并且在形成隔离部件之前形成用于在外围电路区域中选择的nMIS的栅极绝缘膜。 通过这样做,可以减少由隔离部分发生的应力引起的用于选择性nMIS的栅极绝缘膜的缺陷。 此外,通过包括堆叠的存储单元的情况的半导体器件,可以形成用作形成隔离部件的自对准方式的掩模的用于形成第三栅电极的导体膜的图案,而不对准通道 。